JP2010032178A - Organic solvent containing gas treatment system - Google Patents
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本発明は、工場や事業所から排出される揮発性有機溶剤を含む有機溶剤含有ガス中の有機溶剤を、活性炭やゼオライト等の吸着材を用いて吸着濃縮処理し、濃縮された有機溶剤含有ガスを直接燃焼装置で酸化分解処理する有機溶剤含有ガス処理システムに関するものである。 The present invention relates to an organic solvent-containing gas obtained by subjecting an organic solvent in a gas containing an organic solvent containing a volatile organic solvent discharged from a factory or business site to adsorption / concentration using an adsorbent such as activated carbon or zeolite. The present invention relates to an organic solvent-containing gas processing system that directly oxidizes and decomposes the gas with a combustion apparatus.
半導体工場、液晶工場、塗装工場、印刷工場、フィルムのラミネート工場などでは、トルエン、イソプロピルアルコール、キシレン、メチルエチルケトン、酢酸エチルなどの揮発性有機溶剤を使用しており、蒸発した上記有機溶剤が工場内の空間に拡散し、浮遊すると人体に悪影響を与える。また、有機溶剤含有ガスが処理されることなく大気に放出されると、環境を汚染することになる。 Semiconductor factories, liquid crystal factories, painting factories, printing factories, film laminating factories, etc. use volatile organic solvents such as toluene, isopropyl alcohol, xylene, methyl ethyl ketone, and ethyl acetate. If the substance diffuses and floats in the space, it will adversely affect the human body. Moreover, if the organic solvent-containing gas is released into the atmosphere without being treated, it will pollute the environment.
そこで、大気汚染防止の観点から、規制対象となる工場や事業所では有機溶剤の排出基準が設けられ、その排出基準を守ることが義務付けされている。 Therefore, from the viewpoint of preventing air pollution, regulated standards for factories and business establishments have organic solvent emission standards, which are obliged to observe the emission standards.
有機溶剤含有ガスを分解または除去するガス浄化方法としては、例えば有機溶剤含有ガスを直接、バーナーで予熱して燃焼させる直接燃焼方式、触媒により酸化分解する触媒燃焼方式、蓄熱材で予熱して燃焼させる蓄熱式燃焼方式などが知られているが、特に濃度の低い揮発性有機溶剤（ＶＯＣ）含有ガスを処理する際には、燃焼時に発生するエネルギー使用量をより低減するために低濃度ガスを濃縮処理する吸着濃縮装置が設置されている（例えば、特許文献１参照）。 Gas purification methods for decomposing or removing organic solvent-containing gases include, for example, a direct combustion method in which organic solvent-containing gas is directly preheated and burned with a burner, a catalytic combustion method in which oxidative decomposition is performed with a catalyst, and a preheated and burned material with a heat storage Thermal storage combustion systems are known, but when processing low-concentration volatile organic solvent (VOC) -containing gas, low-concentration gas is used to reduce the amount of energy generated during combustion. An adsorption concentrator for concentration treatment is installed (see, for example, Patent Document 1).
図３は、一般的な吸着濃縮装置を示したものである。 FIG. 3 shows a general adsorption concentrator.
この吸着濃縮装置６０は、例えば１０００Ｎｍ３／ｍｉｎの有機溶剤含有ガスを吸着材により吸着除去し、清浄空気を排出する一方で、例えば２００Ｎｍ３／ｍｉｎの１８０℃加熱空気にて吸着材より有機溶剤を脱着して、小風量で高濃度の濃縮ガスを得る装置である。 The preconcentration unit 60, for example an organic solvent-containing gas 1000 Nm 3 / min was adsorbed and removed by the adsorbent, the organic solvent from the adsorbent while discharging the clean air, for example at 180 ° C. hot air of 200 Nm 3 / min Is a device to obtain a concentrated gas with a small air volume and a high concentration.
図４は、一般的な吸着濃縮装置を用いた有機溶剤含有ガス処理システムを示したものである。 FIG. 4 shows an organic solvent-containing gas processing system using a general adsorption concentrator.
吸着濃縮装置６０により得られた脱着ガスを、燃焼装置６１にて酸化分解処理して、清浄空気として排出するシステムである。吸着濃縮処理を行なうことで燃焼時に使用される燃料使用量を低減でき、経済的に有機溶剤含有ガスを処理できるシステムとなる。 In this system, the desorption gas obtained by the adsorption concentrating device 60 is subjected to oxidative decomposition treatment by a combustion device 61 and discharged as clean air. By performing the adsorption concentration process, the amount of fuel used at the time of combustion can be reduced, and the system can economically process the gas containing the organic solvent.
上記低濃度の有機溶剤含有ガスを濃縮して処理する吸着濃縮装置において、固定型やシリンダー式濃縮装置を使用した場合や、ディスク式濃縮装置でもリブ等の補強により脱着風速の変動がある場合には、脱着ガスの濃度に例えば図５のような変動が見られる。 In the adsorption and concentrating device that concentrates and processes the low-concentration organic solvent-containing gas, when a fixed type or cylinder type concentrating device is used, or when the desorption wind speed fluctuates due to reinforcement of ribs etc. even in the disk type concentrating device For example, the concentration of the desorption gas varies as shown in FIG.
脱着ガスの濃度の変動により、例えば燃焼装置等の後処理装置において、有機溶剤を酸化分解するのに必要な燃焼温度の制御が安定せず、温度が低く振れる場合には、不完全燃焼を起こして高濃度のＣＯを発生させる問題があり、温度が高く振れる場合には燃焼装置の炉の耐久性が低下する問題があった。 Due to fluctuations in the concentration of desorbed gas, for example, in a post-treatment device such as a combustion device, the control of the combustion temperature necessary for oxidative decomposition of the organic solvent is not stable, and if the temperature fluctuates low, incomplete combustion occurs. Therefore, there is a problem that high concentration of CO is generated. When the temperature fluctuates high, there is a problem that durability of the furnace of the combustion apparatus is lowered.
本発明は、上記課題を解決することを目的に、脱着ガスが濃度変動を起こしても、後処理装置の直接燃焼装置で安定した処理が可能な方法に関して鋭意検討した。その結果、直接燃焼装置の滞留室にセラミック等の蓄熱体を設置することで、脱着ガスの濃度変動に対しても問題なく、安定して酸化分解処理できることを見出した。 In order to solve the above-mentioned problems, the present invention has been intensively studied on a method that enables stable treatment with a direct combustion device of an aftertreatment device even when the concentration of desorbed gas varies. As a result, it has been found that by installing a heat storage body such as ceramic directly in the residence chamber of the combustion apparatus, it is possible to stably perform oxidative decomposition treatment without problems even with respect to fluctuations in the concentration of the desorption gas.
即ち、本発明は、以下の通りである。
１．下記（１）〜（３）を備えた有機溶剤含有ガス処理システム。
（１）吸着材を含有した吸着素子が設置され、吸着操作時に低濃度の揮発性有機溶剤を含むガス中の有機溶剤を吸着させ、脱着操作時に有機溶剤を吸着した吸着素子に脱着用加熱空気を吹き付けることにより濃縮された脱着ガスを排出する濃縮装置。
（２）濃縮装置より排出された脱着ガスを導入し、有機溶剤を加熱により酸化分解させる直接燃焼装置。
（３）直接燃焼装置の滞留室内に設置する蓄熱体。
２．吸着濃縮装置が、垂直軸まわりに回転可能な円筒形の吸着材を有し、有機溶剤含有ガスは吸着材の外周側からその中心に向けて導入され、浄化された清浄空気は吸着材内側の空間から取り出され、有機溶剤を吸着した吸着材に対し、脱着用加熱空気はその吸着材を挟むようにして配置された一方のダクトである脱着用空気供給管から吸着材に吹き付けられ、有機溶剤を含有している脱着ガスは他方のダクトである脱着出口部から排出されるシリンダー式濃縮装置である上記１に記載の有機溶剤含有ガス処理システム。
３．直接燃焼装置の燃焼によって生じた排ガスを脱着用空気と熱交換することにより脱着用空気を加熱する熱交換器が備えられている上記１または２に記載の有機溶剤含有ガス処理システム。
４．直接燃焼装置の脱着ガス燃焼温度が６５０〜８５０℃であり、脱着ガス滞留時間が０．５〜１．７秒である上記１〜３のいずれかに記載の有機溶剤含有ガス処理システム。
５．蓄熱体が、セラミックまたは金属の蓄熱体である上記１〜３のいずれかに記載の有機溶剤含有ガス処理システム。
That is, the present invention is as follows.
1. The organic solvent containing gas processing system provided with following (1)-(3).
(1) An adsorbing element containing an adsorbent is installed, adsorbs an organic solvent in a gas containing a low-concentration volatile organic solvent during an adsorption operation, and desorbs heated air to the adsorbing element that adsorbs the organic solvent during the desorption operation. A concentrator that discharges the desorbed gas concentrated by spraying.
(2) A direct combustion apparatus that introduces the desorption gas discharged from the concentrator and oxidatively decomposes the organic solvent by heating.
(3) A heat storage body installed directly in the retention chamber of the combustion apparatus.
2. The adsorption concentrator has a cylindrical adsorbent that can rotate about a vertical axis, the organic solvent-containing gas is introduced from the outer periphery of the adsorbent toward the center, and the purified clean air is disposed inside the adsorbent. For the adsorbent that has been taken out of the space and adsorbed the organic solvent, the desorption heated air is blown to the adsorbent from the desorption air supply pipe, which is one of the ducts arranged so as to sandwich the adsorbent, and contains the organic solvent 2. The organic solvent-containing gas treatment system according to 1 above, wherein the desorbed gas is a cylinder-type concentrator that is discharged from a desorption outlet that is the other duct.
3. 3. The organic solvent-containing gas treatment system according to 1 or 2 above, further comprising a heat exchanger that heats the desorption air by exchanging heat with exhaust gas generated by the combustion of the direct combustion apparatus.
4). 4. The organic solvent-containing gas treatment system according to any one of 1 to 3 above, wherein the desorption gas combustion temperature of the direct combustion apparatus is 650 to 850 ° C., and the desorption gas residence time is 0.5 to 1.7 seconds.
5). 4. The organic solvent-containing gas treatment system according to any one of 1 to 3, wherein the heat storage body is a ceramic or metal heat storage body.
脱着ガスが濃度変動を起こしても、後処理装置の直接燃焼装置の滞留室にセラミック等の蓄熱体を設置することで、脱着ガスの濃度変動に対しても問題なく、安定して酸化分解処理できる有機溶剤含有ガス処理システムを提供できる。 Even if the desorbed gas fluctuates in concentration, by installing a heat storage material such as ceramic in the residence chamber of the direct combustion device of the post-processing device, there is no problem with the concentration fluctuation of the desorbed gas, and stable oxidative decomposition treatment An organic solvent-containing gas treatment system can be provided.
本発明における吸着濃縮装置の原理を図６に示す。大風量・低濃度の有機溶剤含有ガス中の有機溶剤を吸着するための吸着濃縮装置１は、中心軸２まわりに回転可能な円筒形のケース３を有しており、このケース３内に有機溶剤を吸着するためのハニカム構造（連通路を中心軸方向に向けている）からなる吸着材４が収納されて全体として円柱状吸着体を構成している。 The principle of the adsorption concentration apparatus in the present invention is shown in FIG. An adsorption concentrating apparatus 1 for adsorbing an organic solvent in a gas containing a large amount of air and a low concentration has a cylindrical case 3 that can rotate around a central axis 2. An adsorbent 4 having a honeycomb structure for adsorbing a solvent (with the communication path directed in the central axis direction) is accommodated to constitute a cylindrical adsorbent as a whole.
円柱状吸着体が回転する移動経路上には吸着部１ａと脱着部１ｂが区画されており、吸着材４がそれら吸着部１ａと脱着部１ｂとを交互に通過するようになっている。 An adsorbing portion 1a and a desorbing portion 1b are partitioned on the moving path along which the columnar adsorbing body rotates, and the adsorbent 4 passes through the adsorbing portion 1a and the desorbing portion 1b alternately.
吸着部１ａには、例えば工場内で発生した有機溶剤含有ガスを導入するための有機溶剤含有ガス供給管５と、吸着濃縮装置１の吸着材４によって浄化された清浄空気を送り出すための浄化空気送出管６が設けられている。 For example, an organic solvent-containing gas supply pipe 5 for introducing an organic solvent-containing gas generated in the factory and purified air for sending out purified air purified by the adsorbent 4 of the adsorption concentrating device 1 are supplied to the adsorption unit 1a. A delivery tube 6 is provided.
また、脱着部１ｂには、有機溶剤を吸着した吸着材４に対し、例えば１８０℃の高温乾燥空気、すなわち脱着用加熱空気を吹き付けるための脱着用空気供給管７が設けられており、脱着用加熱空気の風量が有機溶剤含有ガスの風量の１／２〜１／３０程度に設定されていることにより脱着されるガスが濃縮されるようになっている。 Moreover, the desorption part 1b is provided with a desorption air supply pipe 7 for blowing high-temperature dry air, for example, 180 ° C., that is, desorption heating air, onto the adsorbent 4 that has adsorbed the organic solvent. The gas to be desorbed is concentrated by setting the air volume of the heated air to about 1/2 to 1/30 of the air volume of the organic solvent-containing gas.
吸着濃縮装置としては、図７に示すディスク式濃縮装置、図２に示すシリンダー式濃縮装置等があり、これらについて説明する。 As the adsorption concentrator, there are a disc type concentrator shown in FIG. 7, a cylinder type concentrator shown in FIG. 2, and the like will be described.
まず、ディスク式濃縮装置について説明する。
図７に示すディスク式濃縮装置１０は、ハニカム構造の円柱状吸着体１１を回転軸１２のまわりに回転させるように構成されており、有機溶剤含有ガスが円柱状吸着体１１の一方から導入され、他方から浄化された清浄空気が取り出される。
First, the disk type concentrator will be described.
The disc type concentrator 10 shown in FIG. 7 is configured to rotate a honeycomb-shaped columnar adsorbent 11 around a rotation shaft 12, and an organic solvent-containing gas is introduced from one of the columnar adsorbents 11. The purified air purified from the other side is taken out.
円柱状吸着体１１の両側にはダクト１３および１４が対向するようにして配置されており、脱着用加熱空気はダクト１３からその円柱状吸着体１１に吹き付けられ、脱着ガスは他方のダクト１４から排出されるようになっている。 Ducts 13 and 14 are arranged on both sides of the columnar adsorbent 11 so as to face each other, and desorption heated air is blown from the duct 13 to the columnar adsorbent 11, and desorption gas is discharged from the other duct 14. It is supposed to be discharged.
なお、図中矢印Ａは円柱状吸着体１１の回転方向を示している。 In the figure, an arrow A indicates the rotation direction of the columnar adsorbent 11.
次に、シリンダー式濃縮装置について説明する。
図２はシリンダー式濃縮装置２０の構成を示したものである。
シリンダー式濃縮装置２０は、垂直軸Ｖ．Ａまわりに回転可能な円筒状吸着体２１を有し、有機溶剤含有ガスは吸着体２１の外周側からその中心に向けて導入され、浄化された清浄空気は吸着体２１内側の空間から取り出される。
Next, a cylinder type concentrating device will be described.
FIG. 2 shows the configuration of the cylinder type concentrator 20.
The cylinder type concentrator 20 has a vertical axis V.V. A cylindrical adsorbent 21 that can rotate around A is provided, the organic solvent-containing gas is introduced from the outer peripheral side of the adsorbent 21 toward the center thereof, and the purified air that has been purified is taken out from the space inside the adsorbent 21. .
有機溶剤を吸着した吸着体２１に対し、脱着用加熱空気はその吸着体２１を挟むようにして配置された一方のダクトである脱着用空気供給管２２から吸着体２１に吹き付けられ、有機溶剤を含有している脱着ガスは他方のダクトである脱着出口部２３から排出されるようになっている。 With respect to the adsorbent 21 that has adsorbed the organic solvent, the desorption heated air is blown to the adsorbent 21 from the desorption air supply pipe 22 that is one duct arranged so as to sandwich the adsorbent 21 and contains the organic solvent. The desorbed gas is discharged from the desorption outlet 23 which is the other duct.
吸着濃縮装置は特に限定されるものではないが、より好ましくは円筒状吸着体を使用するシリンダー型濃縮装置である。円柱状吸着体を使用するディスク式濃縮装置は、その構造上、脱着ガス濃度の振れが少ないが、特に円筒状吸着体を使用するシリンダー型濃縮装置は、脱着ゾーンに送られた際の吸着材の個数が変化するため、一定間隔で脱着ガス濃度の変動が必ず見られるため、本発明の効果が顕著に現れるからである。 The adsorption concentrator is not particularly limited, but is more preferably a cylinder type concentrator using a cylindrical adsorbent. The disk-type concentrator that uses a cylindrical adsorber has little fluctuation in the desorption gas concentration due to its structure, but the cylinder-type concentrator that uses a cylindrical adsorbent is an adsorbent when it is sent to the desorption zone. This is because the effect of the present invention is remarkably exhibited because the change in the desorption gas concentration is always observed at regular intervals.
脱着操作時に有機溶剤を吸着した吸着体に吹きつける加熱流体は、８０〜２３０℃の加熱空気であることが好ましい。８０℃未満では、脱着効率が著しく低下して吸着濃縮装置の性能を充分に発揮することができず、２３０℃を超えると、吸着体の熱による変形や活性炭等の吸着材を使用した場合には、燃焼の危険性があるからである。 The heating fluid sprayed onto the adsorbent that has adsorbed the organic solvent during the desorption operation is preferably heated air at 80 to 230 ° C. If it is less than 80 ° C., the desorption efficiency is remarkably lowered and the performance of the adsorption concentrator cannot be fully exhibited. If it exceeds 230 ° C., when the adsorbent is deformed by heat or an adsorbent such as activated carbon is used. This is because there is a risk of combustion.
脱着ガスを処理する直接燃焼装置は、可燃性ガスを直接火炎に接触させ、６５０〜８５０℃の高温雰囲気に所定時間滞留させて酸化分解させるものであり、その滞留室内に蓄熱体を導入する必要がある。この蓄熱体により、燃焼温度がより下流側でも高温下に保たれると共に、蓄熱体の設置により処理ガスをミキシングする効果があり、良好な温度分布と均一な流動による均一反応を行なわせることができるからである。これにより濃度変動した脱着ガスでも安定した酸化分解処理が可能となる。 A direct combustion apparatus for treating desorbed gas is one in which a combustible gas is brought into direct contact with a flame and is retained in a high-temperature atmosphere at 650 to 850 ° C. for a predetermined period of time for oxidative decomposition. There is. With this heat storage body, the combustion temperature is maintained at a high temperature even on the downstream side, and there is an effect of mixing the processing gas by the installation of the heat storage body, and a uniform reaction with a good temperature distribution and uniform flow can be performed. Because it can. This makes it possible to perform stable oxidative decomposition treatment even with a desorption gas whose concentration has changed.
直接燃焼装置の燃焼によって生じた排ガスを脱着用空気と熱交換することにより脱着用空気を加熱する熱交換器が備えられていることも好ましいい。熱回収することで使用エネルギーを大幅に削減できるからである。 It is also preferable that a heat exchanger is provided that heats the desorption air by exchanging heat with exhaust gas generated by the combustion of the direct combustion device. This is because the energy used can be greatly reduced by heat recovery.
直接燃焼装置の脱着ガス燃焼温度は、特に限定される物ではないが６５０〜８５０℃程度が好ましい。より最適な燃焼温度は、７００〜８００℃である。これは燃焼温度が６５０℃未満になると酸化分解が充分にできず、分解性能が低下し、８５０℃を超えると直接燃焼装置の炉の耐久性が低下することや、加熱に必要な使用エネルギーが増大して経済的でなくなるからである。 The desorption gas combustion temperature of the direct combustion apparatus is not particularly limited, but is preferably about 650 to 850 ° C. A more optimal combustion temperature is 700 to 800 ° C. This is because when the combustion temperature is lower than 650 ° C., the oxidative decomposition cannot be sufficiently performed and the decomposition performance is deteriorated. When the combustion temperature exceeds 850 ° C., the durability of the furnace of the direct combustion apparatus is reduced and the energy required for heating is reduced. It will increase and become less economical.
直接燃焼装置の脱着ガス滞留時間は、特に限定されるものではないが、０．５〜１．７秒であることが好ましい。滞留時間が０．５秒未満であると酸化分解が充分にできず、分解性能が低下し、１．７秒を超えると直接燃焼装置のサイズが大きくなってしまい経済的でなくなるからである。 The desorption gas residence time of the direct combustion apparatus is not particularly limited, but is preferably 0.5 to 1.7 seconds. This is because if the residence time is less than 0.5 seconds, the oxidative decomposition cannot be sufficiently performed and the decomposition performance is deteriorated, and if it exceeds 1.7 seconds, the size of the direct combustion apparatus becomes large and it is not economical.
直接燃焼装置の滞留室に設置される蓄熱体は、特に限定される物ではないが、できるだけ圧損が低く、熱伝導率の良好な物を選択すればよく、セラミックまたは金属のサドル型やハニカムの蓄熱体であることが好ましい。 The heat storage body installed in the residence chamber of the direct combustion apparatus is not particularly limited. However, it is sufficient to select a heat storage element having a low pressure loss and a good thermal conductivity. It is preferable that it is a heat storage body.
以下の実施例に基づいて本発明の有機溶剤含有ガス処理システムについて説明する。
図８に示す有機溶剤含有ガス処理システムにて、プロピレングリコールモノメチルエーテルアセテート（ＰＧＭＥＡ）を２００ｐｐｍの濃度で含有したガスを、４００ｍ３／ｍｉｎの風量で吸着材として疎水性ゼオライトを使用したシリンダー式濃縮装置６０により、吸着処理して１８０℃の加熱空気で脱着して濃縮し、２０ｍ３／ｍｉｎの風量にて平均４０００ｐｐｍ、濃度変動が１０００〜７０００ｐｐｍの平均温度６５℃の濃縮ガスを得た。
The organic solvent-containing gas treatment system of the present invention will be described based on the following examples.
In the organic solvent-containing gas treatment system shown in FIG. 8, a cylinder-type concentration using a gas containing propylene glycol monomethyl ether acetate (PGMEA) at a concentration of 200 ppm and using hydrophobic zeolite as an adsorbent at an air volume of 400 m 3 / min. The device 60 was adsorbed, desorbed with heated air at 180 ° C. and concentrated to obtain a concentrated gas having an average temperature of 65 ° C. with an average air flow of 20 m 3 / min and a concentration fluctuation of 1000 to 7000 ppm.
次に、シリンダー式濃縮装置の脱着ガス出口ライン６３より直接燃焼装置６１へ濃縮ガスを導入した。この直接燃焼装置の燃焼室にセラミック蓄熱体を１０ｋｇ設置した。この蓄熱材の設置した場合と無い場合の燃焼温度の振れと除去率、および発生ＣＯ濃度を比較した。 Next, the concentrated gas was directly introduced into the combustion device 61 from the desorption gas outlet line 63 of the cylinder type concentrator. 10 kg of a ceramic heat storage body was installed in the combustion chamber of this direct combustion apparatus. The fluctuation and removal rate of the combustion temperature with and without this heat storage material were compared, and the generated CO concentration was compared.
特にＣＯ濃度については、直接燃焼装置の制御温度を７７０〜８００℃まで変化させてデータを得た。蓄熱体を設置することで、燃焼出口温度は平均７７０℃で、温度振れが７５０〜７９０℃であったものを、平均７７０℃で、濃度振れが７６５〜７７５℃と抑制でき、その結果、除去率が９９．２％から９９．９％まで向上し、直接燃焼装置は安定した状態で酸化分解処理することが可能となった。また、ＣＯ濃度についても図９に示すように蓄熱体を導入することで不完全燃焼が抑制でき、発生ＣＯ濃度を低減できるという効果を得た。 In particular, the CO concentration was obtained by changing the control temperature of the direct combustion apparatus from 770 to 800 ° C. By installing the heat accumulator, the average temperature at the combustion outlet is 770 ° C. and the temperature fluctuation is 750 to 790 ° C. The average fluctuation is 770 ° C. and the concentration fluctuation is 765 to 775 ° C. The rate was increased from 99.2% to 99.9%, and the direct combustion apparatus could be subjected to oxidative decomposition treatment in a stable state. Further, with respect to the CO concentration, by introducing a heat accumulator as shown in FIG. 9, it was possible to suppress incomplete combustion and to reduce the generated CO concentration.
工場や事業所から排出される揮発性有機溶剤を含む有機溶剤含有ガス中の有機溶剤を、活性炭やゼオライト等の吸着材を用いて吸着濃縮処理し、濃縮された有機溶剤含有ガス（脱着ガス）を直接燃焼装置で酸化分解処理する有機溶剤含有ガス処理システムにおいて、脱着ガスが濃度変動を起こしても、後処理装置の直接燃焼装置の滞留室にセラミック等の蓄熱体を設置することで、脱着ガスの濃度変動に対しても問題なく、安定して酸化分解処理できる有機溶剤含有ガス処理システムを提供でき、産業界に寄与するところ大である。 Organic solvent-containing gas (desorbed gas) that has been concentrated by adsorbing and concentrating organic solvent in gas containing organic solvent including volatile organic solvent discharged from factories and offices using adsorbents such as activated carbon and zeolite. In an organic solvent-containing gas processing system that directly oxidizes and decomposes with a combustion device, even if the desorption gas fluctuates in concentration, it can be desorbed by installing a heat storage material such as ceramic in the residence chamber of the direct combustion device of the post-processing device. It is possible to provide an organic solvent-containing gas treatment system that can stably perform oxidative decomposition treatment without any problem with respect to fluctuations in gas concentration, and contributes greatly to the industry.
１ 吸着濃縮装置
１ａ 吸着部
１ｂ 脱着部
２ 中心軸
３ ケース
４ 吸着材
５ 有機溶剤含有ガス供給管
６ 浄化空気送出管
７ 脱着用空気供給管
１０ ディスク式濃縮装置
１１ 円柱状吸着体
１２ 回転軸
１３ ダクト
１４ ダクト
２０ シリンダー式濃縮装置
２１ 円筒状吸着体
２２ 脱着用空気供給管
２３ 脱着出口部
６０ 吸着濃縮装置
６１ 直接燃焼装置
６２ 吸着体
６３ 脱着ガス出口ライン
７０ 直接燃焼装置
７１ 蓄熱体
７２ 滞留室
７３ バーナー
７４ 脱着ガス
７５ 処理ガス
７６ 熱交換器
７７ 混合機構
DESCRIPTION OF SYMBOLS 1 Adsorption concentrator 1a Adsorption part 1b Desorption part 2 Central axis 3 Case 4 Adsorbent 5 Organic solvent containing gas supply pipe 6 Purified air delivery pipe 7 Desorption air supply pipe 10 Disc type concentrator 11 Columnar adsorber 12 Rotating shaft 13 Duct 14 Duct 20 Cylinder type concentrator 21 Cylindrical adsorber 22 Desorption air supply pipe 23 Desorption outlet
DESCRIPTION OF SYMBOLS 60 Adsorption concentrator 61 Direct combustion apparatus 62 Adsorbent 63 Desorption gas exit line 70 Direct combustion apparatus 71 Heat storage body 72 Residence chamber 73 Burner 74 Desorption gas 75 Process gas 76 Heat exchanger 77 Mixing mechanism
Claims (5)
（１）吸着材を含有した吸着素子が設置され、吸着操作時に低濃度の揮発性有機溶剤を含むガス中の有機溶剤を吸着させ、脱着操作時に有機溶剤を吸着した吸着素子に脱着用加熱空気を吹き付けることにより濃縮された脱着ガスを排出する吸着濃縮装置。
（２）吸着濃縮装置より排出された脱着ガスを導入し、有機溶剤を加熱により酸化分解させる直接燃焼装置。
（３）直接燃焼装置の滞留室内に設置する蓄熱体。 The organic solvent containing gas processing system provided with following (1)-(3).
(1) An adsorbing element containing an adsorbent is installed, adsorbs an organic solvent in a gas containing a low-concentration volatile organic solvent during an adsorption operation, and desorbs heated air to the adsorbing element that adsorbs the organic solvent during the desorption operation. Adsorbing and concentrating device for discharging the desorbed gas concentrated by spraying.
(2) A direct combustion apparatus that introduces the desorption gas discharged from the adsorption concentrator and oxidatively decomposes the organic solvent by heating.
(3) A heat storage body installed directly in the retention chamber of the combustion apparatus.
The organic solvent-containing gas treatment system according to any one of claims 1 to 3, wherein the heat storage body is a ceramic or metal heat storage body.
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