CN104548866A - Swivel type adsorption and desorption device and gas purification treatment system comprising same - Google Patents
Swivel type adsorption and desorption device and gas purification treatment system comprising same Download PDFInfo
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- CN104548866A CN104548866A CN201310485406.9A CN201310485406A CN104548866A CN 104548866 A CN104548866 A CN 104548866A CN 201310485406 A CN201310485406 A CN 201310485406A CN 104548866 A CN104548866 A CN 104548866A
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- 238000003795 desorption Methods 0.000 title claims abstract description 75
- 238000001179 sorption measurement Methods 0.000 title claims abstract description 51
- 238000000746 purification Methods 0.000 title claims description 18
- 238000002336 sorption--desorption measurement Methods 0.000 claims description 67
- 238000010521 absorption reaction Methods 0.000 claims description 35
- 238000007664 blowing Methods 0.000 claims description 26
- 230000004308 accommodation Effects 0.000 claims description 25
- 239000006096 absorbing agent Substances 0.000 claims description 17
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- 238000001816 cooling Methods 0.000 description 2
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- VLXBWPOEOIIREY-UHFFFAOYSA-N dimethyl diselenide Natural products C[Se][Se]C VLXBWPOEOIIREY-UHFFFAOYSA-N 0.000 description 2
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- 229910052757 nitrogen Inorganic materials 0.000 description 2
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Landscapes
- Separation Of Gases By Adsorption (AREA)
- Treating Waste Gases (AREA)
Abstract
The invention discloses a swivel type adsorption and desorption device. The swivel type adsorption and desorption device comprises a case, a support frame, an isolation box, a swivel type adsorber and a driving unit, wherein the case comprises an accommodating space and a bottom opening, the support frame is arranged outside the case, and the driving unit is arranged on the support frame outside the case and connected with the swivel type adsorber through the bottom opening, so that when the driving unit runs to drive the swivel type adsorber, problems that organic waste gas inside the case can be possibly ignited by heat energy and sparks produced by running of a motor and the like can be solved, the overall safety of equipment is improved, besides, a maintenance worker is not required to enter the swivel type adsorption and desorption device and is prevented from being exposed to the environment with high organic matter content when maintaining, repairing and adjusting electronic parts and mechanical structures in the driving unit, and the equipment is more convenient and simpler to maintain and operate.
Description
Technical field
The present invention relates to a kind of revolving ring type adsorption desorption device and gas purification treatment system thereof, it is mainly through the organic substance in a revolving ring type absorber absorption wish process waste gas, and making the organic matter content in the waste gas after process be reduced to waste gas emission standard, the present invention is applied in the processing procedures such as semiconductor, photoelectricity, chemical industry Chemical Industries the environment produced containing organic mass emissions waste gas.
Background technology
IC industry, opto-electronics, many waste liquids containing organic substance are produced in the processing procedure of the semiconductor related industries such as panel, waste water, waste gas etc., such as semiconductor factory comprises cleaning at gold-tinted processing procedure, linging, photoresistance covers, soft roasting, exposure, baking, development, in the step such as hard roasting, use various cleaning fluid, the organic solvents such as photoresistance liquid, volatile organic matter (VOCs can have been produced, Volatile OrganicCompounds), wherein most volatile organic matter belongs to air pollutants (the Hazardous Air Pollutants of harmfulness, HAPs), human body may cause the reactions such as poisoning and carcinogenic tumours under being exposed to the environment containing high concentration volatile organic matter for a long time, further, the volatile organic matter deposited in an atmosphere can produce photochemical reaction, causes ozone concentration to improve and produces high oxidative pollutant.Accordingly, these volatile organic matters produced not only are detrimental to health and more cause environmental pollution, therefore must pass through suitable process, after making the volatile organic matter content in the waste gas of plant emissions be reduced to codes and standards, just can be disposed to the external world.
In prior art, it is a kind of that to be applied in process containing the device of waste gas of organic substance be adsorption desorption swivel device, it mainly comprises a case body, one shielded box, one runner and a driver element, wherein this case body has an accommodation space, this runner is mounted with adsorption material, for adsorbing the organic substance in the waste gas flowing through this case body accommodation space, and this shielded box, this runner and this driver element are arranged in the accommodation space of this case body, this shielded box has separated adsorption zone, desorption district and blowing district, this runner is placed in this shielded box rotationally, and rotatably make adsorption material wherein constantly be circulated in this adsorption zone, this desorption district and this blowing district, and the adsorption material in this runner is adsorbed by the organic substance in the waste gas of this adsorption zone at adsorption zone, turn to the desorption being made organic substance in this desorption district by desorption air-flow again, then turn to this blowing district make by blowing down air-flow desorption material dry and cool, to reach fully after regeneration activating, repeated rotation carries out adsorption treatment to this adsorption zone to waste gas again, so, by the rotational run of runner, adsorption material is made constantly to repeat absorption, desorption, the step of blowing down, after making organic substance contained in the waste gas after by adsorption desorption swivel device reduce to discharge standard, just can be expelled in air.
But, existing adsorption desorption swivel device is installed in the accommodation space of case body by the driver element providing runner to rotate, the waste gas of organic substance and/or grit may be included and cause blast by mechanical friction or the electrical discharge accommodation space that produces spark and the shell that ignites when the support member of the motor in this driver element, gear train, metal and electronic component running, and having danger; Further, the organic substance in the accommodation space of shell and/or grit content high, it easily causes, and the machine components of the metal such as gear train, support member are dirty, corrosion, so cause damage and maintenance cost increase; Moreover, when maintenance personal needs machine components or the electronic component changing, safeguard and maintain driver element, the inside of adsorption desorption swivel device must be entered, not only inconvenient and expend time in, under more making personnel be exposed to organic substance and/or the high hazardous environment of grit content, and dangerous anxiety.
Accordingly, existing adsorption desorption swivel device have that security is low, the easy aged deterioration of machine components and the shortcoming such as maintenance is inconvenient.
Summary of the invention
For solving the disappearance of above-mentioned prior art, the present invention discloses a kind of revolving ring type adsorption desorption device, it is by being arranged at the outside of this housing and improving the security of Whole Equipment by driver element, and, maintenance personal's maintenance, when keeping in repair and adjust electronic component in this driver element and frame for movement, inner and avoid being exposed in organic substance and/or the high environment of grit content without the need to entering this revolving ring type adsorption desorption device, and make the maintenance of equipment and more convenient to operate and simple.
For reaching above-mentioned purpose and other object, the invention provides a kind of revolving ring type adsorption desorption device, comprise a housing, a bracing frame, a shielded box, a revolving ring type absorber and a driver element, this housing has an accommodation space and is communicated with a bottom opening of this accommodation space, an air inlet and an exhaust outlet; This bracing frame is arranged at the outside of this housing; This shielded box is arranged in the accommodation space of this housing, and this shielded box has an absorption compartment, a desorption compartment and a passage, and this passage is to should bottom opening and be communicated with this absorption compartment and this desorption compartment; This revolving ring type absorber to be arranged at rotationally in the accommodation space of this housing and to have a runner and a rotating disk, this runner to be fixed on this rotating disk and to be placed in this passage, this rotating disk is to should bottom opening, and this rotating disk is surrounded with one first seal, this first seal presses on the gap between this rotating disk and this housing and reaches airtight; This driver element to be arranged on this bracing frame and to be connected with this rotating disk by this bottom opening, this driver element comprises a column, a bearing, multiple supporting rollern, a gear train and a motor, this column is fixed to this bracing frame, this bearing is connected between this column and this gear train, this gear train connects this rotating disk and this motor, this revolving ring type absorber is driven to rotate centered by this column to make motor, and make this runner rotate through this absorption compartment and this desorption compartment, these supporting rollerns be fixed to this bracing frame and Structure deformation support this rotating disk.
Above-mentioned revolving ring type adsorption desorption device, wherein this runner has a framework and multiple adsorption box block, this framework has multiple sidewall to be formed with the multiple accommodating compartment of annular arrangement, for these adsorption box blocks accommodating, and respectively the side of this sidewall is respectively arranged with one second seal, this absorption compartment of this shielded box and the junction of this desorption compartment have a dividing wall, respectively the length of this dividing wall is more than or equal to the spacing of corresponding adjacent two sidewalls, respectively this second seal is used for pressing on this dividing wall, with make this absorption compartment and this desorption compartment mutually isolated.
Above-mentioned revolving ring type adsorption desorption device, wherein this shielded box includes a blowing compartment further, this blowing compartment to be arranged between this desorption compartment and this absorption compartment and with this channel connection, sequentially by absorption compartment, desorption compartment and blow down compartment when this runner rotates.
Above-mentioned revolving ring type adsorption desorption device, wherein this runner has a framework and multiple adsorption box block, this framework has multiple sidewall to be formed with the multiple accommodating compartment of annular arrangement, for these adsorption box blocks accommodating, and respectively the side of this sidewall is respectively arranged with one second seal, this absorption compartment of this shielded box, the place of crossing one another of this desorption compartment and this blowing compartment has a dividing wall, respectively the length of this dividing wall is more than or equal to the spacing of corresponding adjacent two sidewalls, respectively this second seal is used for pressing on this dividing wall, to make this absorption compartment, mutually isolated between this desorption compartment and this blowing compartment.
Above-mentioned revolving ring type adsorption desorption device, wherein this desorption compartment has one first intake section and one first exhaust portion, this blowing compartment has one second intake section and one second exhaust portion, this first intake section and this second intake section are arranged at the inner side of this runner and are fixed on this column, and this first exhaust portion and this second exhaust portion are arranged at the outside of this runner.
Above-mentioned revolving ring type adsorption desorption device, wherein this gear train comprises one first gear and one second gear, this first gear to be arranged on this bearing and to be fixed to bottom this rotating disk, this second gear connects this first gear, this motor is combined with this second gear, and this motor drives this second gear and drives this first gear.
Above-mentioned revolving ring type adsorption desorption device, wherein the quantity of these supporting rollerns is three, its with this column for the center of circle and be the arrangements of 120 degree of central angles.
Above-mentioned revolving ring type adsorption desorption device, wherein comprises a forecooler further, and it to be placed in the accommodation space of this housing and to be arranged between this air inlet and this revolving ring type absorber.
Above-mentioned revolving ring type adsorption desorption device, wherein comprises an air cleaner further, and it to be placed in the accommodation space of this housing and to be arranged between this air inlet and this forecooler.
For reaching above-mentioned purpose and other object, the present invention separately provides a kind of gas purification treatment system, comprises revolving ring type adsorption desorption device described above and a combustion furnace, and the desorption compartment of this revolving ring type adsorption desorption device is connected with this combustion furnace by a gas piping.
For reaching above-mentioned purpose and other object, the present invention reoffers a kind of gas purification treatment system, comprises revolving ring type adsorption desorption device described above and a condenser, and the desorption compartment of this revolving ring type adsorption desorption device is connected with this condenser by a gas piping.
Therefore, the revolving ring type adsorption desorption device that the invention described above provides, by this driver element being arranged at the outside of this housing and improving the security of Whole Equipment, the doubts such as the heat energy even organic exhaust gas of spark and this enclosure interior of igniting are produced when it can avoid this driver element to operate, the electronic component in this driver element and material structure also can be avoided owing to touching organic exhaust gas, grit and moisture and easily dirty, the shortcoming of getting rusty and corroding, make the cost of service equipment can reduce and increase service life, and, maintenance personal directly can directly maintain in this revolving ring type adsorption desorption device outside, the electronic component keeped in repair and adjust in this driver element and frame for movement, inner without the need to entering this revolving ring type adsorption desorption device, can avoid being exposed in the high environment of organic matter content, and make the maintenance of equipment and more convenient to operate and simple.In addition, the present invention also provides the application such as the gas purge system comprising this revolving ring type adsorption desorption device, and it has the advantages such as high security, low cost of equipment maintenance, part maintenance convenience.
Accompanying drawing explanation
Fig. 1 is the schematic side view of the revolving ring type adsorption desorption device of first embodiment of the invention.
Fig. 2 is the schematic top plan view of the revolving ring type adsorption desorption device of first embodiment of the invention.
Fig. 3 is the schematic diagram of housing in the revolving ring type adsorption desorption device of first embodiment of the invention, shielded box.
Fig. 4 is the schematic diagram of the revolving ring type absorber in the revolving ring type adsorption desorption device of first embodiment of the invention.
Fig. 5 is the schematic diagram of revolving ring type absorber in the revolving ring type adsorption desorption device of first embodiment of the invention and shielded box.
Fig. 6 is the enlarged diagram of part A in Fig. 1.
Fig. 7 is the schematic side view that the revolving ring type adsorption desorption device of first embodiment of the invention comprises forecooler and air cleaner further.
Fig. 8 is the schematic diagram of the gas purification treatment system of second embodiment of the invention.
Fig. 9 is the schematic diagram of the gas purification treatment system of third embodiment of the invention.
[primary clustering symbol description]
1,2 gas purification treatment systems
10 revolving ring type adsorption desorption devices
20 combustion furnaces
30 condensers
100 housings
110 accommodation spaces
120 bottom openings
130 air inlets
140 exhaust outlets
200 bracing frames
300 shielded boxs
310 absorption compartments
320 desorption compartments
321 first intake sections
322 first exhaust portion
330 blow down compartment
331 second intake sections
332 second exhaust portion
340 passages
350a, 350b dividing wall
360 fixed supports
400 revolving ring type absorbers
410 runners
411 frameworks
412 adsorption box blocks
413 sidewalls
414 accommodating compartments
415a, 415b second seal
420 rotating disks
421 first seals
500 driver elements
510 columns
520 bearings
530 supporting rollerns
540 gear trains
541 first gears
542 second gears
550 motors
600 forecoolers
700 air cleaners
Detailed description of the invention
For fully understanding object of the present invention, feature and effect, existing by following specific embodiment, and coordinate accompanying drawing, the present invention is described in detail, illustrates as rear:
Please refer to Fig. 1 to Fig. 6, it is the structural representation of the revolving ring type adsorption desorption device of first embodiment of the invention.The revolving ring type adsorption desorption device 10 of first embodiment of the invention mainly comprises housing 100, bracing frame 200, shielded box 300, revolving ring type absorber 400 and a driver element 500, for the treatment of organic exhaust gas.
As shown in Figure 1 to Figure 3, this housing 100 has an accommodation space 110 and is communicated with a bottom opening 120 (Fig. 3) of this accommodation space, air inlet 130 and an exhaust outlet 140, this bracing frame 200 is arranged at the outside of this housing 100, and in the present embodiment, this bracing frame 200 is arranged at the bottom surface of this housing 100, for supporting this revolving ring type adsorption desorption device 10 in ground, this shielded box 300 is arranged in the accommodation space 110 of this housing 100, as shown in Figures 2 and 3, this shielded box 300 has absorption compartment 310, desorption compartment 320 and a passage 340, and this passage 340 is to should bottom opening and be communicated with this absorption compartment 310 and this desorption compartment 320, this revolving ring type absorber 400 to be arranged at rotationally in the accommodation space 110 of this housing 100 and to have runner 410 and a rotating disk 420, this runner 410 is fixed on this rotating disk 420 and is also placed in this passage 340 rotationally, this rotating disk 420 is to should bottom opening 120, and this rotating disk 420 is surrounded with one first seal 421, this first seal 421 presses on the gap between this rotating disk 420 and this housing 100 and reaches airtight, this driver element 500 to be arranged on this bracing frame 200 and to be connected with this rotating disk 420 by this bottom opening 120, this driver element 500 comprises a column 510, one bearing 520, multiple supporting rollern 530, one gear train 540 and a motor 550, this column 510 is fixed to this bracing frame 200, this bearing 520 is connected between this column 510 and this gear train 540, this gear train 540 connects this rotating disk 420 and this motor 550, this revolving ring type absorber 400 is driven to rotate centered by this column 510 to make motor 550, and make this runner 410 rotate through this absorption compartment 310 and this desorption compartment 320, these supporting rollerns 530 be fixed to this bracing frame 200 and Structure deformation support this rotating disk 420.
In the revolving ring type adsorption desorption device 10 of the invention described above first embodiment, as shown in Figure 1, this column 510 is fixed to this bracing frame 200 and supports this bearing 520, this assembly such as gear train 540 and motor 550, this motor 550 driven gear group 540 operates, and drive this rotating disk 420 to be rotated relative to this column 510 by this bearing 520, coordinate shown in Fig. 2 and Fig. 3, this runner 410 rotates and passes through this absorption compartment 310 and this desorption compartment 320 in this passage 340.
Please refer to Fig. 1, can through the absorption compartment 310 of this runner 410 after pending organic exhaust gas is entered by this air inlet 130, when organic exhaust gas passes through the absorption compartment 310 of this runner 410, there is multiple adsorption box block 412 for adsorbing the organic substance (containing organic solvent) in organic exhaust gas in this runner 410, and then reduce or remove the organic matter content in organic exhaust gas, the clean gas after purification is discharged by this exhaust outlet 140 again; And after the adsorption material of adsorption box block 412 in this runner 410 adsorbed organic substance, this runner 410 rotates to this desorption compartment 320, the desorption air-flow produced by a desorption source of the gas 40 (Fig. 8) is by desorption in the adsorption material of organic substance in these adsorption box blocks 412, and making the adsorption material regeneration activating in this adsorption box block 412, the adsorption box block 412 after regeneration activating rotates to this absorption compartment 310 again and carries out the process of organic exhaust gas.
In the present embodiment, this shielded box 300 is better has a blowing compartment 330, this blowing compartment 330 to be arranged between this desorption compartment 320 with this absorption compartment 310 and to be communicated with this passage 340, sequentially by this absorption compartment 310, desorption compartment 320 and blow down compartment 330 when this runner 410 rotates.Accordingly, adsorption box block 412 in this runner 410 rotates in this blowing compartment 330 after leaving this desorption compartment 320, the blow-out gas provided by blowing source of the gas 50 (Fig. 8) flows through these adsorption box blocks 412, adsorption material in these adsorption box blocks 412 is made to accelerate the removal of aqueous vapor and the reduction of temperature in it, and complete the regeneration activating of adsorption material in these adsorption box blocks 412 fast, adsorption box block 412 after regeneration activating rotates to this absorption compartment 310 again and carries out the process of organic exhaust gas, whereby, in the present embodiment, this runner 410 rotational run and make these adsorption box blocks 412 sequentially pass through this absorption compartment 310, this desorption compartment 320 is with this blowing compartment 330 and circulate and operate, to adsorb the organic substance in pending organic exhaust gas in this absorption compartment 310, organic substance in this desorption compartment 320 in desorption adsorption box block 412, and this adsorption box block 412 is blown down in this blowing compartment 330.
The desorption air-flow that above-mentioned desorption source of the gas 40 provides can be steam, nitrogen, hot-air or its air-flow mixed; The blowing air-flow that above-mentioned blowing source of the gas 50 provides can be the air-flow of nitrogen or air.
In the revolving ring type adsorption desorption device 10 of first embodiment of the invention, this driver element 500 is arranged at the outside of this housing 100, therefore the motor 550 and gear train 540 etc. in this driver element 500 produces heat energy in the running, and even spark and the doubt such as organic exhaust gas of this housing 100 inside of igniting can be avoided, and then improve security, and, maintenance personal is in maintenance, when the electronic component keeped in repair and adjust in this driver element 500 and frame for movement, without the need to entering in this housing 100, make the maintenance of equipment and more convenient to operate and simple, also the necessity be exposed in the high environment of organic matter content is eliminated, in addition, the revolving ring type adsorption desorption device 10 of first embodiment of the invention is arranged at outside this housing 100 because of this driver element 500, and the electronic component in this driver element 500 and material structure can be avoided owing to touching the shortcoming of easily getting rusty containing the waste gas of organic substance and moisture and corroding, part is eliminated change that number of times reduces, maintenance cost reduces and increases service life.
Please refer to Fig. 1 and coordinate shown in Fig. 6, this rotating disk 420 is surrounded with this first seal 421, and this first seal 421 presses on the gap between this rotating disk 420 and this bottom opening 120 edge and reaches airtight.Example as shown in Figure 6, this first seal 421 is fixed to the edge of this rotating disk 420 by the such as component such as holder and screw, bottom opening 120 edge of this housing 100 can have flange, namely this flange is close to the gap between this rotating disk 420 and this bottom opening 120 edge, and make the first seal 421 be pressed on this flange and the gap closed between this rotating disk 420 and this bottom opening 120 edge by this holder, and when this revolving ring type absorber 400 rotates, first seal 421 continues to press between this rotating disk 420 and this bottom opening 120 edge, and then reach airtight in VOCs treatment process.
Please refer to Fig. 3 to Fig. 5, in the runner 400 of the revolving ring type adsorption desorption device 10 of first embodiment of the invention, as shown in Figure 3, this absorption compartment 310 of this shielded box 300, this desorption compartment 320 has a dividing wall 350a with the place of crossing one another of this blowing compartment 330, 350b, in the present embodiment, this dividing wall 350a corresponds to the outer peripheral edge of this runner 410, and this dividing wall 350a length (arc length) is slightly larger than the outside spacing of adjacent two sidewalls 413 of correspondence, this dividing wall 350b corresponds to the inner peripheral of this runner 410, and this dividing wall 350b length (arc length) is slightly larger than the inner side spacing of adjacent two sidewalls 413 of correspondence, as shown in Figure 4, this runner 410 has a framework 411 and multiple adsorption box block 412, this framework 411 has multiple sidewall 413 to be formed with the multiple accommodating compartment 414 of annular arrangement, for these adsorption box blocks 412 accommodating, and respectively the side of this sidewall 413 is respectively arranged with one second seal 415a, 415b, in the present embodiment, respectively this second seal 415a be arranged at respectively this sidewall 413 to should on the outer peripheral edge of runner 410, respectively this second seal 415b be arranged at respectively this sidewall 413 to should on the inner peripheral of runner 410, respectively the width of this second seal 415a is slightly larger than the distance outside each this sidewall 413 and respectively between this dividing wall 350a, respectively the width of this second seal 415b is slightly larger than the distance inside each this sidewall 413 and respectively between this dividing wall 350b, to reach effectively airtight effect.
As shown in Figure 5, respectively the length of this dividing wall 350a is more than or equal to the spacing outside corresponding adjacent two sidewalls 413, respectively the length of this dividing wall 350b is more than or equal to the spacing inside corresponding adjacent two sidewalls 413, respectively this second seal 415a is used for pressing on this dividing wall 350a, respectively this second seal 415b is used for pressing on this dividing wall 350b, to make this absorption compartment 310, mutually isolated between this desorption compartment 320 and this blowing compartment 330, to avoid pending organic exhaust gas, clean gas after process, desorption air-flow and blow-out gas transpiration are fallen apart and mixing.
Load the adsorption material being used for adsorb organic compound matter in above-mentioned adsorption box block 412, wherein adsorption material can be zeolite, activated carbon, silica gel, activated alumina, porous resin or its mixture according to different organic substances.
The first above-mentioned seal 421 and the second seal 415a, 415b can be the elastic strip body of rubber, silica gel or Teflon, in addition, and respectively this first seal 421 and respectively this second seal 415a, 415b can have hollow structure further, completely cuts off the different temperature difference in both sides to utilize air layer; Further, it is preferred that the first seal 421 and the second seal 415a, 415b high temperature resistantly can reach more than 100 DEG C, more preferably more than 250 DEG C can high temperature resistantly be reached.
Please refer to Fig. 1, Fig. 2, Fig. 3 and Fig. 5, in the shielded box 300 of the revolving ring type adsorption desorption device 10 of first embodiment of the invention, this desorption compartment 320 has one first intake section 321 and one first exhaust portion 322, this first intake section 321 has a desorption gas air inlet, this first exhaust portion 322 has a desorption air flow exhaust mouth, by this runner 410 being arranged in the adsorption box block 412 of this desorption compartment 320 after desorption air-flow is entered by this desorption gas air inlet, by the organic substance desorption in adsorption material in these adsorption box blocks 412, and concentrated air-flow after forming the desorption containing organic substance, after described desorption, concentrated air-flow is discharged by this desorption air flow exhaust mouth, this blowing compartment 330 has one second intake section 331 and one second exhaust portion 332, this second intake section 331 has a blow-out gas air inlet, this second exhaust portion 332 has a blow-out gas exhaust outlet, blow down air-flow to be entered by this blow-out gas air inlet, and by the adsorption box block 412 on this runner 410, then discharged by this blow-out gas exhaust outlet, example as shown in Figures 1 and 3, this first intake section 321 and this second intake section 331 are arranged at the inner side of this runner and are fixed on this column 510 by a fixed support 360, and this first exhaust portion 322 and this second exhaust portion 332 are arranged at the outside of this runner 410.
Please refer to Fig. 1, in the driver element 500 of the revolving ring type adsorption desorption device 10 of first embodiment of the invention, this gear train 540 comprises one first gear 541 and one second gear 542, this first gear 541 to be arranged on this bearing 520 and to be fixed to bottom this rotating disk 420, this second gear 542 connects this first gear 541, this motor 550 is combined with this second gear 542, and this motor 550 drives this second gear 542 and drives this first gear 541, and then this rotating disk 420 is rotated.Wherein, this motor 550 can be a step-by-step movement or continous way gear motor, and this bearing 520 can be a thrust bearing.
Please refer to Fig. 1 and Fig. 2, the driver element 500 of the revolving ring type adsorption desorption device 10 of first embodiment of the invention supports this rotating disk 420 by these supporting rollerns 530, in the present embodiment, the quantity of these supporting rollerns 530 is three, its with this column 510 for the center of circle and be the arrangements of 120 degree of central angles, to provide the support that this rotating disk 420 is firm in the process of rotating.Certainly, the quantity of these supporting rollerns 530 is not limited thereto, and it can be more than two and symmetric arrays to support this rotating disk 420.
Please refer to Fig. 7, the revolving ring type adsorption desorption device 10 of first embodiment of the invention can comprise a forecooler 600 further, and this forecooler 600 to be placed in the accommodation space 110 of this housing 100 and to be arranged between this air inlet 130 and this revolving ring type absorber 400.This forecooler 600 can be such as cooling coil, and it sends into this revolving ring type absorber 400 again for first being cooled by pending organic exhaust gas.In addition, the revolving ring type adsorption desorption device 10 of first embodiment of the invention also can comprise an air cleaner 700, this air cleaner 700 to be placed in the accommodation space 110 of this housing 100 and to be arranged between this air inlet 130 and this forecooler 600, for filtering the pending organic exhaust gas entered by this air inlet 130.
Please refer to Fig. 8, it is the schematic diagram of the gas purification treatment system of second embodiment of the invention, this gas purification treatment system 1 comprises revolving ring type adsorption desorption device 10 and a combustion furnace 20 of above-mentioned first embodiment, the desorption compartment 320 of this revolving ring type adsorption desorption device 10 is connected with this combustion furnace 20 by a gas piping, specifically, this gas piping is connected to this combustion furnace 20 by the desorption air flow exhaust mouth of the first exhaust portion 322 of this desorption compartment 320, burns with the temperature of more than 600 to 900 DEG C for air-flow concentrated after desorption is sent into this combustion furnace 20.
Please refer to Fig. 9, it is the schematic diagram of the gas purification treatment system of third embodiment of the invention, this gas purification treatment system 2 comprises revolving ring type adsorption desorption device 10 and a condenser 30 of above-mentioned first embodiment, the desorption compartment 320 of this revolving ring type adsorption desorption device 10 is connected with this condenser 30 by a gas piping, specifically, this gas piping is connected to this condenser 30 by the desorption air flow exhaust mouth of the first exhaust portion 322 of this desorption compartment 320, this condenser 30 is sent into for by air-flow concentrated after desorption, organic substance is wherein condensed because of cooling, and through liquid phase separation process with the liquid of the gas and organic substance that obtain purification, the liquid of described organic substance recycles again, the gas of described purification can meet exhausting waste gas standard and be discharged by chimney (not shown).
The gas purification treatment system 2 of third embodiment of the invention is applicable to organic substance and may be formed during the course in the application of odorous gas or corrosive chemical, for example, in the processing procedure of TFT-LCD panel, dimethyl sulfoxide (DMSO) (DMSO) contained in the resist of delustering of removing photoresistance program (stripping process) is for a kind of higher boiling is water-soluble and volatility is low and be easily condensed into the organic matter of corrosive liquids, its waste gas easy reduction reaction and form stench and the low inflammable dimethyl disulfide of autoignition temperature (dimethylsulfide in processing procedure, and DMDS (dimethyl disulfide DMS), DMDS) gaseous contaminant, or complete oxidation produces the acidic corrosive gases such as sulfur dioxide or contacts with moisture and produces radical corrosion liquid, therefore better with revolving ring type adsorption desorption device adsorption cleaning of the present invention again desorption concentrate concentrated air-flow after the mode process desorption of rear collocation condensation.
In sum, the revolving ring type adsorption desorption device that first embodiment of the invention provides, by this driver element being arranged at the outside of this housing and improving the security of Whole Equipment, the doubts such as the heat energy even organic exhaust gas of spark and this enclosure interior of igniting are produced when it can avoid this driver element to operate, the electronic component in this driver element and material structure also can be avoided owing to touching organic exhaust gas and moisture and the shortcoming of easily being got rusty and corroding, make the cost of service equipment can reduce and increase service life, and, maintenance personal directly can directly maintain in this revolving ring type adsorption desorption device outside, the electronic component keeped in repair and adjust in this driver element and frame for movement, inner without the need to entering this revolving ring type adsorption desorption device, can avoid being exposed in the high environment of organic matter content, and make the maintenance of equipment and more convenient to operate and simple.In addition, second embodiment of the invention and the 3rd embodiment also provide the application such as the gas purge system comprising the revolving ring type adsorption desorption device that the first embodiment provides, and it has the advantages such as high security, low cost of equipment maintenance, part maintenance convenience.
The present invention is open with preferred embodiment hereinbefore, but those skilled in the art will appreciate that this embodiment only for describing the present invention, and should not be read as and limit the scope of the invention.It should be noted, such as with change and the displacement of this embodiment equivalence, all should be set to and be covered by category of the present invention.Therefore, protection scope of the present invention is when being as the criterion with the claim person of defining.
Claims (11)
1. a revolving ring type adsorption desorption device, is characterized in that, comprises:
One housing, has an accommodation space and is communicated with a bottom opening of this accommodation space, an air inlet and an exhaust outlet;
One bracing frame, is arranged at the outside of this housing;
One shielded box, is arranged in the accommodation space of this housing, and this shielded box has an absorption compartment, a desorption compartment and a passage, and this passage is to should bottom opening and be communicated with this absorption compartment and this desorption compartment;
One revolving ring type absorber, to be arranged at rotationally in the accommodation space of this housing and there is a runner and a rotating disk, this runner to be fixed on this rotating disk and to be placed in this passage, this rotating disk is to should bottom opening, and this rotating disk is surrounded with one first seal, this first seal presses on the gap between this rotating disk and this housing and reaches airtight; And
One driver element, to be arranged on this bracing frame and to be connected with this rotating disk by this bottom opening, this driver element comprises a column, a bearing, multiple supporting rollern, a gear train and a motor, this column is fixed to this bracing frame, this bearing is connected between this column and this gear train, this gear train connects this rotating disk and this motor, this revolving ring type absorber is driven to rotate centered by this column to make motor, and make this runner rotate through this absorption compartment and this desorption compartment, these supporting rollerns be fixed to this bracing frame and Structure deformation support this rotating disk.
2. revolving ring type adsorption desorption device as claimed in claim 1, it is characterized in that, this runner has a framework and multiple adsorption box block, this framework has multiple sidewall to be formed with the multiple accommodating compartment of annular arrangement, for these adsorption box blocks accommodating, and respectively the side of this sidewall is respectively arranged with one second seal, this absorption compartment of this shielded box and the junction of this desorption compartment have a dividing wall, the length of this dividing wall is more than or equal to the spacing of corresponding adjacent two sidewalls, respectively this second seal is used for pressing on this dividing wall, with make this absorption compartment and this desorption compartment mutually isolated.
3. revolving ring type adsorption desorption device as claimed in claim 1, it is characterized in that, this shielded box includes a blowing compartment further, this blowing compartment to be arranged between this desorption compartment and this absorption compartment and with this channel connection, sequentially by absorption compartment, desorption compartment and blow down compartment when this runner rotates.
4. revolving ring type adsorption desorption device as claimed in claim 3, it is characterized in that, this runner has a framework and multiple adsorption box block, this framework has multiple sidewall to be formed with the multiple accommodating compartment of annular arrangement, for these adsorption box blocks accommodating, and respectively the side of this sidewall is respectively arranged with one second seal, this absorption compartment of this shielded box, the place of crossing one another of this desorption compartment and this blowing compartment has a dividing wall, respectively the length of this dividing wall is more than or equal to the spacing of corresponding adjacent two sidewalls, respectively this second seal is used for pressing on this dividing wall, to make this absorption compartment, mutually isolated between this desorption compartment and this blowing compartment.
5. revolving ring type adsorption desorption device as claimed in claim 4, it is characterized in that, this desorption compartment has one first intake section and one first exhaust portion, this blowing compartment has one second intake section and one second exhaust portion, this first intake section and this second intake section are arranged at the inner side of this runner and are fixed on this column, and this first exhaust portion and this second exhaust portion are arranged at the outside of this runner.
6. the revolving ring type adsorption desorption device according to any one of claim 1 to 5, it is characterized in that, this gear train comprises one first gear and one second gear, this first gear to be arranged on this bearing and to be fixed to bottom this rotating disk, this second gear connects this first gear, this motor is combined with this second gear, and this motor drives this second gear and drives this first gear.
7. the revolving ring type adsorption desorption device according to any one of claim 1 to 5, is characterized in that, the quantity of these supporting rollerns is three, its with this column for the center of circle and be the arrangements of 120 degree of central angles.
8. the revolving ring type adsorption desorption device according to any one of claim 1 to 5, is characterized in that, comprise a forecooler further, and it to be placed in the accommodation space of this housing and to be arranged between this air inlet and this revolving ring type absorber.
9. revolving ring type adsorption desorption device as claimed in claim 8, is characterized in that, comprise an air cleaner further, and it to be placed in the accommodation space of this housing and to be arranged between this air inlet and this forecooler.
10. a gas purification treatment system, is characterized in that, comprises revolving ring type adsorption desorption device as claimed in any one of claims 1-9 wherein and a combustion furnace, and the desorption compartment of this revolving ring type adsorption desorption device is connected with this combustion furnace by a gas piping.
11. 1 kinds of gas purification treatment systems, is characterized in that, comprise revolving ring type adsorption desorption device as claimed in any one of claims 1-9 wherein and a condenser, and the desorption compartment of this revolving ring type adsorption desorption device is connected with this condenser by a gas piping.
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| CN201310485406.9A CN104548866B (en) | 2013-10-16 | 2013-10-16 | Revolving ring type adsorption desorption device and gas purification processing system thereof |
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| CN201310485406.9A CN104548866B (en) | 2013-10-16 | 2013-10-16 | Revolving ring type adsorption desorption device and gas purification processing system thereof |
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| TW201238653A (en) * | 2011-03-25 | 2012-10-01 | Jg Environmental Tech Co Ltd | Improved on-line regeneration device and method for zeolite rotor concentrator |
| CN202087198U (en) * | 2011-04-12 | 2011-12-28 | 杰智环境科技股份有限公司 | On-line regenerating device for modified zeolite concentration rotating wheel |
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Effective date of registration: 20181031 Address after: No. 8, Gaoping section, Zhong Feng Road, Longtan District, Taoyuan City, Taiwan, China Co-patentee after: Zhang Fengtang Patentee after: JG ENVIRONMENTAL TECHNOLOGY Co.,Ltd. Co-patentee after: Jie Zhi Environmental Technology (Shanghai) Co.,Ltd. Address before: China Taiwan Taoyuan County Co-patentee before: Zhang Fengtang Patentee before: JG ENVIRONMENTAL TECHNOLOGY Co.,Ltd. |
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Effective date of registration: 20221118 Address after: No. 8, Gaoping section, Zhong Feng Road, Longtan District, Taoyuan City, Taiwan, China Patentee after: JG ENVIRONMENTAL TECHNOLOGY Co.,Ltd. Patentee after: Jie Zhi Environmental Technology (Shanghai) Co.,Ltd. Address before: No. 8, Gaoping section, Zhong Feng Road, Longtan District, Taoyuan City, Taiwan, China Patentee before: JG ENVIRONMENTAL TECHNOLOGY Co.,Ltd. Patentee before: Zhang Fengtang Patentee before: Jie Zhi Environmental Technology (Shanghai) Co.,Ltd. |
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