200843836 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種有機廢氣之淨化裝置與方法，特別 是關於一種南效能濃縮器搭配壓變式吸附技術處理有機廢 氣之淨化裝置與方法。 【先前技術】 進來，國際間對於環保議題及工業安全衛生日益重 Ο 、 ， 視’考量工業廢氣對環境及勞工以至於一般大眾身體產生 之危害，對於工業廢氣排放標準日趨嚴格，國内外法規都 制定出濃度及臭味的排放標準。工業廢氣中對於揮發性有 " 機氣體的處理，在高濃度時多採用冷凝法收集，而在低濃 二 度且大風量時則以物理吸附方式濃縮處理後，再送往小型 ^ 焚化爐燃燒或以冷凝裝置回收較為經濟有效。以半導體業 晶圓廠產生的有機廢氣成分為例，常含有如二甲基亞颯 q (Dimethyl Sulfoxide)、N_ 甲基 σ比嘻酮（N-Methyl Pyrolidone)、乙醇铵（2-Aminoethanol)、二曱基二硫醇 (Dithiolethylene Glycol)、二甲基硫(Dimethyl Sulfide)、異 丙醇(IsopropylAlcohol)、丙酮(Acetone)等化合物。 目前對於這些有機廢氣較常使用之淨化控制技術為 「沸石吸附轉輪」、「活性碳流體化床」，沸石吸附轉輪通常 , 可將有機廢氣濃縮5至20倍，而活性碳流體化床更可濃縮 達1000至10000。此外，一般常會再搭配下游終處理設備， 例如沸石吸附轉輪搭配焚化爐，即以沸石吸附轉輪吸附濃 4 200843836 縮廢氣後，再以焚化爐於攝氏600〜900度以上之溫度燃 燒，分解這些揮發性有機物質以及臭氣和毒氣；或者，活 性後流體化床搭配冷凝器回收，即以活性碳吸附劑流體化 床吸附濃縮廢氣後，再以冷凝器冷凝後回收或焚化處理， 目前這些技術已在半導體及光電業界廣為採用。 然而’因半導體及光電業等高科技發展迅速，許多新 的製程所排放之有機廢氣越趨複雜與多量化，並非所有排 放之有機廢氣皆適合上述之處理方式。在沸石吸附轉輪搭 f 配焚化爐方面，例如CD製造業之製程會排放含氟化醇之 有機廢氣，若與氧反應會產生腐蝕性之氫氟酸，·故並不適 合以燃燒法作為終處理。TFT-LCD面板光電製造業之面板 - 製程中’去光阻程序（stripping process)之去光阻劑中所 一 含的二甲基亞砜雖然是一種高沸點水溶性而且揮發性低的 液體’但其廢氣在處理過程中，極容易形成惡臭的二甲基 硫(dimethyl sulfide，DMS)和二甲基二硫（dimethyl disulfide， (,DMDS)的氣態污染物，或者產生二氧化硫等酸性腐蝕性氣 體’仍然不適於以燃燒法作為終處理。 此外’在活性碳流體化床搭配冷凝器回收方面，例如 在晶圓廠及TFT-LCD面板業所排放之有機廢氣中含有異 丙醇（IPA)，其在被吸附後以高溫脫付過程中，會受熱分 解成丙烯及丙酮，因丙烯沸點極低（_48°C)，無法以冷凝 • 為回收作為終處理。或者是，所排放之有機廢氣中含有聚 : 合物，會使活性碳之微孔堵塞，導致活性碳吸附能力下降， 終致活性碳流體化床有機廢氣處理效率隨之下降。 200843836 因此，希望藉由本發明之高效能濃縮器搭配壓變式吸 附技術處理有機廢氣之淨化裝置來處理有機廢氣，以有效 提升廢氣之處理效率，解決傳統有機廢氣處理裝置不能或 不適處理之有機廢氣的問題，以及採用非破壞式之終處理 方式回收有機溶劑再利用，同時可抑制溫室氣體之二氧化 碳排放，減緩全球之溫室效應，符合聯合國「氣候變化綱 要公約」之期盼。 【發明内容】 為了改善上述習知技術所面臨的問題，本發明提供一 種高效能濃縮器搭配壓變式吸附技術處理有機廢氣之淨化 裝置。本發明之裝置可有效處理傳統有機廢氣處理裝置不 能或不適處理之有機廢氣，提高終處理單元效能，並可使 終處理單元容量大幅降低，具有節能及減緩全球溫室效應 之效果。 詳而言之，本發明之目的為提供一種高效能濃縮器搭 配壓變式吸附技術處理有機廢氣之淨化裝置，其至少包含 一廢氣濃縮部及一壓變式吸脫附處理部， 該廢氣濃縮部至少包含： 一吸附處理單元及一脫附處理單元，且經由其甲之吸 附劑吸附及脫附而將廢氣中之有機物質濃縮； 一加熱單元，設置於該脫附處理單元之上游端或周 圍，其可供應該脫附處理單元之熱源； 一第一風機，其可抽送欲處理之廢氣至該吸附處理單 200843836 元 該壓變式吸脫附處理部包含： 二個壓變式吸脫附處理單元，发 -真空抽氣單元，其與各壓變;复； 接，可將特定壓變式吸脫附處理單-寸灸理單元相連 態； ％軋至負壤至真空狀 一第一冷凝單元，其設置於真空抽有如一 本發明之高效能濃縮器搭配壓變弋，單兀之T游端。 廢氣之淨化裝置中，該廢氣濃縮部=二吸附技街處理有機 單元中吸附有機物質。之後，吸附有=吸=劑柃吸附處理 脫附處理單元中將有機物質脫附，以幸、物貝之吸附劑再於 目的。其中，該吸附劑並無特別限制達到=縮有機物質之 活性碳或活性氧化鋁。此外，該5、*輪么可為分子篩、 限制，例如，其可以轉輪式、轉環：/辰，部之型式並無別 床方式運作，較佳可為蜂巢狀 隹積床式或流體化 碳流體化床。 輪或轉塔或活性 在使用活性碳流體化床之愔 吸附面積之考量，較佳使用球狀活性礙根::動=外表 碳之脫附再生採用直接或間接 由於活性 再生，因此脫附濃縮後氣體水分含 = Γ收之'活性有機物質發生反應，亦可減少廢水= 惟’為避免減㈣成危險，t 生 !f元可_氣體進行脫附處理::=::ϊ ^操作皆在低氧含量之狀態下進行。 有回 200843836 广本發明之高效能濃縮器搭配壓變式吸附技術處理有機 笟氣之净化裝置中，對於該加熱單元並無特別限制，其可 為熱回收交換器、瓦斯加熱器 加熱 等任何加熱裝置型式。 — |發明之高效能濃縮 器搭配配壓變式吸附挂种干命$田古 機廢氣之淨化裝置中，於該廢氣濃騎錢變式 理^之間可進一步包含一第二冷凝單元。此外，該第一冷 疑單元及/或第二冷凝單元可依據處理之廢氣氣體成分設 計為：段式或二段式冷凝，其中以二段式冷凝為較佳 將大部分有機物冷凝回收。該冷凝單元之冷卻介質並盔限 制’可為液態氮、冰水或滷水。 本毛月之南效月b辰縮态搭配壓變式吸附技術處理有機 廢氣之淨化裝置中，該壓變式吸脫附處理部之入口有機蒸 氣進料含量為100,000 ppm以下。 c 本I明之南效月b〉辰細器搭配壓變式吸附技術處理有機 廢氣之淨化裝置中，該壓變式吸脫附處理部之複數壓變式 吸脫附處理單元可分別同時、先後或交互更替進行線上吸 附反應及/或脫附反應。具體而言，根據本發明裝置中複數 之管線及閥的設置（詳如第一圖），在一或多個壓變式吸脫 附處理單元進行吸附反應時，藉由真空抽氣單元及相關閥 之開啟及/或關閉，可於其他一或多個壓變式吸脫附處理單 元中產生負壓至真空狀態，而可進行脫附反應。該壓變式 吸脫附處理單元脫附完成後，可再開啟或關閉相關之閥而 進行吸附反應。因此，透過本發明所設置之管路及閥，複 200843836 數壓變式吸脫附處理單元可分別同時、先後或交互更替進 行線上吸附或脫附反應，無需將吸附完成之吸附劑另行以 其他裝置處理。 本發明之高效能濃縮器搭配壓變式吸附技術處理有機 廢氣之淨化裝置中，該吸脫附處理單元中充填有蜂巢式或 顆粒狀之吸附劑。而該吸附劑並無限制，可為奈米矽、奈 米碳、活性複、分子篩或活性氧化I呂。 本發明之另一目的為提供一種高效能濃縮器搭配壓變 ^ 式吸附技術處理有機廢氣之淨化方法，其至少包含下列步 驟： (1)提供一種如上所述之高效能濃縮器搭配壓變式 : 吸附技術處理有機廢氣之淨化裝置； / (2)經由第一風機抽送欲處理之廢氣通過該廢氣濃 * 縮部以濃縮有機廢氣； (3)將濃縮後之有機廢氣導入該壓變式吸脫附處理 I 部，開啟及/或關閉相關閥組，使一充填吸附劑 之吸脫附處理單元[32]進行吸附反應，排出經吸 附後之乾淨氣流；另一吸脫附處理單元[31]以真 空抽氣單元抽至負壓至真空狀態，將其中先前已 吸附飽和之吸附劑進行脫附反應，並將脫附後濃 縮有機氣體冷凝回收； . (4)開啟及/或關閉相關閥組，使該脫附完畢之吸脫 附處理單元[31]及相關連之管路以該乾淨氣流 沖洗；而該吸脫附處理單元[32]仍進行步驟（3) π 200843836 之吸附反應； (5) 開啟及/或關閉相關閥組，將該吸脫附處理單元 [31]停止沖洗，並將吸脫附處理單元[32]進行回 壓； (6) 如步驟（3)，將已吸附飽和之吸脫附處理單元[32] 進行脫附反應，已脫附完畢之吸脫附處理單元 [31]進行吸附反應； (7) 如步驟（4)，將吸脫附處理單元[32]及相關連之 管路以該乾淨氣流沖洗；而該吸脫附處理單元 [31]仍進行步驟（6)之吸附反應； (8) 如步驟（5)，將該吸脫附處理單元[32]停止沖 洗，並將吸脫附處理單元[31]進行回壓； (9) 重複步驟（3)至（8)，該壓變式吸脫附處理部 可連續處理經廢氣濃縮部濃縮之有機廢氣。 本發明之高效能濃縮器搭配壓變式吸附技術處理有機 廢氣之淨化方法中，其步驟（2)中該廢氣濃縮部係以吸附 劑於吸附處理單元中吸附有機物質。之後，吸附有機物質 之吸附劑再於脫附處理單元中將有機物質脫附，以達到濃 縮有機物質之目的。其中，該吸附劑並無特別限制，較佳 可為沸石或活性碳。此外，該廢氣濃縮部之型式並無別限 制，例如，其可以轉輪式、轉環式、堆積床式或流體化床 方式運作，較佳可為沸石吸附轉輪或活性碳流體化床。 本發明之高效能濃縮器搭配高級氧化技術處理有機廢 氣之淨化方法中，在步驟（2)與（3)間進一步包含一步 12 200843836 驟（2a)，於該廢氣濃縮部與壓變式吸脫附處理部之間可進 一步增設一第二冷凝單元，將經廢氣濃縮部濃縮之有機廢 氣先導入第二冷凝單元，初步將有機氣體冷凝回收。此外， 該第一冷凝單元及/或第二冷凝單元可依據處理之廢氣氣 體成分設計為一段式或二段式冷凝，其中以二段式冷凝為 較佳。該冷凝單元之冷卻介質並無限制，可為液態氮、冰 水或滷水。此外，經由第二冷凝單元冷凝回收後，其下游 端之有機蒸氣含量可降至1〇,〇〇〇 ppm以下。 ( 本發明之高效能濃縮器搭配壓變式吸附技術處理有機 廢氣之淨化方法中，透過本發明所設置之管路及閥，該壓 變式吸脫附處理部之複數壓變式吸脫附處理單元可分別同 時、先後或交互更替進行線上吸附反應及/或脫附反應，無 / 需將吸附完成之吸附劑另行以其他裝置處理。 ~ 本發明之高效能濃縮器搭配壓變式吸附技術處理有機 廢氣之淨化方法中，其步驟（3)中該吸脫附處理單元中充 I 填有蜂巢式或顆粒狀之吸附劑。而該吸附劑並無限制，可 為奈米石夕、奈米碳、活性後、分子篩或活性氧化銘。 本發明之另一目的為提供一種壓變式吸附技術處理有 機廢氣之淨化裝置，其至少包含： 二個壓變式吸脫附處理單元，其相互並聯設置； 一真空抽氣單元，其與各壓變式吸脫附處理單元相連 ^ 接，可將特定壓變式吸脫附處理單元抽氣至負壓至真空狀 態； 一第一冷凝單元，其設置於真空抽氣單元之下游端。 13 200843836 本發明之壓變式吸附技術處理有機廢氣之淨化裝置 中，該冷凝單元可依據處理之廢氣氣體成分設計為一段式 或二段式冷凝，其中以二段式冷凝為較佳。該冷凝單元之 冷卻介質並無限制，可為液態氮、冰水或滷水。此外，經 由第一冷凝單元冷凝回收後，其下游端之有機蒸氣含量可 降至10,000 ppm以下。 本發明之壓變式吸附技術處理有機廢氣之淨化裝置 中，該壓變式吸脫附處理部之入口有機蒸氣進料含量為 ( 100,000 ppm 以下。 本發明之壓變式吸附技術處理有機廢氣之淨化裝置 中，該壓變式吸脫附處理部之複數壓變式吸脫附處理單元 " 可分別同時、先後或交互更替進行線上吸附反應及/或脫附 / 反應。具體而言，根據本發明裝置中複數之管線及閥的設 ^ 置，在一或多個壓變式吸脫附處理單元進行吸附反應時， 藉由真空抽氣單元及相關閥之開啟或關閉，可於其他一或 多個壓變式吸脫附處理單元中產生負壓至真空狀態，而可 進行脫附反應。該壓變式吸脫附處理單元脫附完成後，可 再開啟或關閉相關之閥而進行吸附反應。因此，透過本發 明所設置之管路及閥，複數壓變式吸脫附處理單元可分別 同時、先後或交互更替進行線上吸附或脫附反應，無需將 吸附完成之吸附劑另行以其他裝置處理。 _ 本發明之壓變式吸附技術處理有機廢氣之淨化裝置 中，該吸脫附處理單元中充填有蜂巢式或顆粒狀之吸附 劑。而該吸附劑並無限制，可為奈米石夕、奈米碳、活性破、 14 200843836 分子篩或活性氧化鋁。 下列實驗設計係為說明，不應限制本發明之範疇，合 理的變化，諸如對於熟習此項技藝者顯而易見為合理者， 可於不脫離本發明之範疇下進行。 【實施方式】 實施例1 第一圖為本發明之高效能濃縮器搭配壓變式吸附技術 處理有機廢氣之淨化裝置較佳具體例的示意圖。該淨化裝 置包含一沸石吸附轉輪11，其包含一吸附處理單元111， 一脫附處理單元112，一驅動單元113，一第一風機13，其 可抽送欲處理之廢氣至該沸石吸附轉輪11，一加熱單元 14，設置於該沸石吸附轉輪脫附處理單元112之上游端， 其可供應該脫附處理單元112之熱源；一第二風機21，設 置於該脫附處理單元112與壓變式吸脫附處理部30之間； 一壓變式吸脫附處理部30，其包含二個並聯設置之壓變式 吸脫附處理單元31及32，一真空抽氣單元33，其與各壓 變式吸脫附處理單元相連接，及一第一冷凝單元34，其設 置於真空抽氣單元33之下游端。 首先，啟動第一風機13及第二風機21，該有機廢氣 經由第一風機13抽送，由入口 A導入該沸石吸附轉輪之 吸附處理單元111，沸石吸附轉輪11上所塗覆的吸附劑會 吸附該有機廢氣，則經吸附後之乾淨氣流可經由第一風機 13抽送導入煙自41排放。該沸石吸附轉輪11以驅動單元 15 200843836 113驅動，連續且慢速轉動進入該脫附處理單元112時，以 第二風機21抽送經加熱單元14所加熱至脫附溫度的氣流 通過該脫附處理單元112，因此被吸附的有機物質受熱脫 附到氣流中。 之後，該濃縮氣流經由第二風機21再被導引至壓變式 吸脫附處理部30，其進行步驟如下： (1)開啟閥 323、321 及 314,關閉閥 324、322、3H、 312及313。此時，壓變式吸脫附處理單元32進 € 行吸附反應，可將有機蒸氣含量降至可排放濃 度，經由煙1¾ 42而排放之大氣中。另一方面， 藉由真空抽氣單元33將壓變式吸脫附處理單元 ， 31抽至負壓至真空狀態，可同時進行先前已達 / 飽和之壓變式吸脫附處理單元31的脫附反應。 ' (2)開啟閥 323、321、314 及 312，關閉閥 324、322、 311及313。此時，可利用經吸脫附處理單元32 I 脫附後之乾淨氣流沖洗吸脫附處理單元31。 (3) 開啟閥 323、324、321 及 312,關閉閥 313、314、 311及322。此時，可將吸脫附處理單元32回壓。 (4) 開啟閥 313、324 及 311，關閉閥 323、314、321、 312及322。此時，壓變式吸脫附處理單元31進 行吸附反應，可將有機蒸氣含量降至可排放濃 ， 度，經由煙囪42而排放之大氣中。另一方面， > 藉由真空抽氣單元33將壓變式吸脫附處理單元 32抽至負壓至真空狀態，可同時進行先前已達 16 200843836 飽和之壓變式吸朗處理單_的脫附反應。 (5) 開啟閥 313、324、311 及 322,關閉閥 323、314、 321及312。此時，可利用經吸脫附處理單元η 脫附後之乾淨氣流沖洗吸脫附處理單元％。 (6) 開啟閥 313、314、311及 322，關閉闕 323、324、 ^ 321及312。此時，可將吸脫附處理單元31回壓。 忒壓變式吸脫附處理部之操作模式可參照下表丨。經 脫附後濃社氣料㈣第二冷凝單元Μ冷凝回收至分 液槽35，將液化有機物與水分離後回_有機物。此外， 重複上述步驟（丨）至（6)，可將吸脫附處理單元Μ及％ 交替進行吸附、脫附處理。 表1200843836 IX. Description of the Invention: [Technical Field] The present invention relates to an apparatus and method for purifying organic waste gas, and more particularly to a purification apparatus and method for treating organic waste gas with a south-efficiency concentrator and a pressure-variable adsorption technique. [Previous technology] In the international arena, environmental issues and industrial safety and health are becoming more and more important. Depending on the environmental hazards caused by industrial waste gases and the general public, the industrial exhaust emission standards are becoming stricter. Develop emission standards for concentration and odor. In industrial waste gas, the treatment of volatile organic gas is collected by condensation method at high concentration, and concentrated by physical adsorption at low concentration and high air volume, and then sent to small ^ incinerator. It is more economical to burn or recycle with a condensing unit. For example, an organic waste gas component produced by a semiconductor fab often contains, for example, Dimethyl Sulfoxide, N-Methyl Pyrolidone, 2-Aminoethanol, Compounds such as Dithiolethylene Glycol, Dimethyl Sulfide, Isopropyl Alcohol, Acetone. At present, the purification control technology commonly used for these organic waste gases is "zeolite adsorption runner" and "activated carbon fluidized bed". The zeolite adsorption runner usually concentrates organic waste gas by 5 to 20 times, and the activated carbon fluidized bed. It can be concentrated to 1000 to 10,000. In addition, it is often combined with downstream final processing equipment, such as zeolite adsorption runners combined with incinerators, that is, the zeolite adsorption wheel is used to adsorb the concentrated exhaust gas, and then burned at a temperature of 600 to 900 degrees Celsius in an incinerator. These volatile organic substances, as well as odors and toxic gases; or, after the active fluidized bed is recovered with a condenser, that is, the concentrated exhaust gas is adsorbed by the activated carbon adsorbent fluidized bed, and then condensed by the condenser, recovered or incinerated, and currently these Technology has been widely adopted in the semiconductor and optoelectronic industries. However, due to the rapid development of high-tech technologies such as semiconductors and optoelectronics, the organic waste gases emitted by many new processes are becoming more complex and more quantifiable. Not all organic waste gases are suitable for the above treatment. In the case of the zeolite adsorption converter, the process of the CD manufacturing industry, for example, emits organic waste gas containing fluorine-containing alcohol, and if it reacts with oxygen, it produces corrosive hydrofluoric acid, so it is not suitable for the combustion method. deal with. TFT-LCD panel optoelectronic manufacturing panel - dimethyl sulfoxide contained in the photoresist of the 'tripping process' is a high-boiling water-soluble and low-volatility liquid. However, during the treatment of the exhaust gas, it is easy to form malodorous dimethyl sulfide (DMS) and dimethyl disulfide (DMDS) gaseous pollutants, or generate acidic corrosive gases such as sulfur dioxide. 'It is still not suitable for the final treatment by combustion. In addition, 'in the activated carbon fluidized bed with condenser recovery, for example, the organic waste gas discharged from the fab and TFT-LCD panel industry contains isopropyl alcohol (IPA), It is decomposed into propylene and acetone by heat during the high-temperature desorption process after being adsorbed. Since the boiling point of propylene is extremely low (_48 ° C), it cannot be treated by condensation or recycling. Or, the organic waste gas discharged The inclusion of a poly-compound will block the pores of the activated carbon, resulting in a decrease in the adsorption capacity of the activated carbon, and the efficiency of the treatment of the organic waste gas in the activated carbon fluidized bed will be reduced. The high-efficiency concentrator of the present invention is combined with the pressure-variable adsorption technology to treat the organic waste gas purification device to treat the organic waste gas, thereby effectively improving the treatment efficiency of the exhaust gas, solving the problem of the organic waste gas that the conventional organic waste gas treatment device cannot or does not handle, and The use of non-destructive final treatment to recover organic solvents and reuse, while suppressing carbon dioxide emissions from greenhouse gases and mitigating the global greenhouse effect, is in line with the expectations of the UN Framework Convention on Climate Change. [Invention] In order to improve the above-mentioned practices The invention provides a high-efficiency concentrator and a pressure-variable adsorption technology for treating an organic waste gas purification device. The device of the invention can effectively treat organic waste gas which cannot be or is untreated by a conventional organic waste gas treatment device, and improves the final treatment. Unit efficiency, and can greatly reduce the capacity of the final processing unit, and has the effect of energy saving and slowing down the global greenhouse effect. In detail, the object of the present invention is to provide a high-efficiency concentrator with pressure-variable adsorption technology for the purification of organic waste gas. Device At least one exhaust gas enrichment unit and a pressure-variable absorption and desorption treatment unit, the exhaust gas enrichment unit at least comprising: an adsorption treatment unit and a desorption treatment unit, and the exhaust gas is adsorbed and desorbed via the adsorbent of the nail The organic material is concentrated; a heating unit is disposed at or around the upstream end of the desorption processing unit, and is available for the heat source to be desorbed from the processing unit; a first fan that can pump the exhaust gas to be treated to the adsorption processing unit 200843836 yuan The pressure-variable suction and desorption processing unit comprises: two pressure-variable suction and desorption processing units, a hair-vacuum pumping unit, which is connected with each pressure change; The single-inch moxibustion unit is connected to the state; the % is rolled to the negative soil to the vacuum-like first condensation unit, which is arranged in a vacuum pumping with a high-performance concentrator of the invention and a pressure-changing crucible. In the exhaust gas purification device, the exhaust gas enrichment unit = the second adsorption technology street processes the organic substance adsorbed in the organic unit. After that, the adsorbed = suction = agent 柃 adsorption treatment The desorption processing unit desorbs the organic substance, and fortunately, the adsorbent of the object is reused. Among them, the adsorbent is not particularly limited to the activated carbon or activated alumina which reaches the organic compound. In addition, the 5, * wheel can be a molecular sieve, a limitation, for example, it can be a rotary wheel type, a rotating ring: / □, the type of the part does not operate in a bed mode, preferably a honeycomb-shaped hoarding bed type or fluid Carbonized fluidized bed. For the consideration of the adsorption area of the wheel or turret or the activity of the fluidized bed using activated carbon, it is preferred to use spheroidal active roots:: kinetics = desorption regeneration of external carbon is directly or indirectly due to active regeneration, so desorption and concentration After the gas moisture contains = Γ 之 ' 'active organic matter reacts, can also reduce the waste water = only 'to avoid reducing (four) into a danger, t raw! f yuan can be _ gas desorption treatment: :=:: ϊ ^ operation It is carried out under a low oxygen content. There is no special limitation to the heating unit in the high-efficiency concentrator of the invention of the present invention, which is combined with the pressure-variable adsorption technology for treating the organic helium gas, and can be any heating such as heat recovery exchanger, gas heater heating, etc. Device type. — The high-efficiency concentrator of the invention is combined with the pressure-variable adsorption adsorption type dry-cleaning apparatus. In the purification apparatus of the waste gas of the Tiangu machine, a second condensation unit may be further included between the exhaust gas and the lean-type fuel. In addition, the first suspect unit and/or the second condensing unit may be designed according to the exhaust gas composition of the process as: segmental or two-stage condensation, wherein two-stage condensation is preferred to condense and recover most of the organic matter. The cooling medium of the condensing unit is limited to a liquid nitrogen, ice water or brine. In the purification device for treating organic waste gas, the pressure-type adsorption and desorption treatment unit has an organic vapor feed content of 100,000 ppm or less. c In the purification device of the organic waste gas treated with the pressure-sensitive adsorption technology of the first effect of the present invention, the plurality of pressure-variable suction and desorption processing units of the pressure-variable suction and desorption treatment unit can be simultaneously and sequentially Or an alternate reaction to perform an on-line adsorption reaction and/or a desorption reaction. Specifically, according to the arrangement of the plurality of pipelines and valves in the apparatus of the present invention (as detailed in the first figure), when one or more pressure-sensitive adsorption and desorption processing units perform adsorption reaction, the vacuum pumping unit and the related The opening and/or closing of the valve can generate a negative pressure to a vacuum state in the other one or more pressure-variable suction and desorption processing units, and the desorption reaction can be performed. After the pressure-dependent suction and desorption treatment unit is desorbed, the relevant valve can be opened or closed to perform the adsorption reaction. Therefore, through the pipeline and valve provided by the present invention, the 200843836 digital pressure variable suction and desorption processing unit can perform the adsorption or desorption reaction on the line simultaneously, sequentially or alternately, without separately adsorbing the adsorbent which is completed by adsorption. Device processing. The high-performance concentrator of the present invention is combined with a pressure-variable adsorption technique for treating an organic waste gas purification device, and the adsorption-desorption treatment unit is filled with a honeycomb or granular adsorbent. The adsorbent is not limited and may be nanoquinone, nanocarbon, active complex, molecular sieve or active oxidation. Another object of the present invention is to provide a high-performance concentrator with a pressure-variable adsorption technique for treating organic waste gas, which comprises at least the following steps: (1) providing a high-performance concentrator as described above with a pressure-variant type : The adsorption technology treats the organic waste gas purification device; / (2) the exhaust gas to be treated is pumped through the first fan to concentrate the organic waste gas; (3) the concentrated organic waste gas is introduced into the pressure-variable suction Desorption treatment I, open and/or close the relevant valve group, so that a suction and desorption treatment unit [32] filled with adsorbent performs adsorption reaction, and discharges the cleaned airflow after adsorption; another suction and desorption processing unit [31] Taking a vacuum pumping unit to a vacuum to a vacuum state, desorbing the adsorbent which has been previously saturated, and condensing and recovering the concentrated organic gas after desorption; (4) opening and/or closing the relevant valve a group, the desorption and desorption processing unit [31] and the associated pipeline are flushed with the clean air stream; and the adsorption and desorption processing unit [32] still performs the adsorption reaction of the step (3) π 200843836; ( 5) Open and/or close the relevant valve group, stop the suction and desorption processing unit [31], and press back the suction and desorption processing unit [32]; (6) As in step (3), it will be adsorbed The saturated adsorption and desorption processing unit [32] performs the desorption reaction, and the desorbed desorption processing unit [31] performs the adsorption reaction; (7) as in step (4), the adsorption and desorption processing unit [32] And the associated pipeline is flushed with the clean air stream; and the adsorption and desorption processing unit [31] still performs the adsorption reaction of step (6); (8) as in step (5), the suction and desorption processing unit [32] Stop the flushing and press back the suction and desorption processing unit [31]; (9) Repeat steps (3) to (8), and the pressure-variable suction and desorption treatment unit can continuously process the organic concentrated by the exhaust gas enrichment unit. Exhaust gas. In the high-efficiency concentrator of the present invention, in combination with the pressure-variable adsorption technology for treating the organic waste gas, in the step (2), the exhaust gas-concentrating portion adsorbs the organic substance in the adsorption treatment unit with the adsorbent. Thereafter, the adsorbent adsorbing the organic substance desorbs the organic substance in the desorption processing unit to achieve the purpose of enriching the organic substance. Among them, the adsorbent is not particularly limited, and is preferably zeolite or activated carbon. Further, the type of the exhaust gas enrichment portion is not limited, and for example, it may be operated in a rotary type, a rotary ring type, a packed bed type or a fluidized bed mode, preferably a zeolite adsorption rotor or an activated carbon fluidized bed. In the high-efficiency concentrator of the present invention, the method for purifying the organic waste gas by the advanced oxidation technology further comprises a step 12 200843836 (2a) between the steps (2) and (3), in the exhaust gas concentrating part and the pressure-variable suction A second condensing unit may be further added between the processing units, and the organic waste gas concentrated by the exhaust gas enriching unit is first introduced into the second condensing unit to initially condense and recover the organic gas. In addition, the first condensing unit and/or the second condensing unit may be designed to be one-stage or two-stage condensing depending on the exhaust gas composition of the treatment, wherein two-stage condensation is preferred. The cooling medium of the condensing unit is not limited and may be liquid nitrogen, ice water or brine. In addition, after condensing and recovering via the second condensing unit, the organic vapor content at the downstream end can be reduced to 1 〇, 〇〇〇 ppm or less. (In the high-performance concentrator of the present invention, in combination with the pressure-variable adsorption technology for treating the organic waste gas, the plurality of pressure-variable suction and desorption of the pressure-variable suction-desorption treatment portion is transmitted through the pipeline and the valve provided by the present invention. The processing unit can perform on-line adsorption reaction and/or desorption reaction simultaneously, sequentially or alternately, and the adsorbent which is not required to be adsorbed is separately processed by other devices. ~ The high-performance concentrator of the invention is combined with pressure-variable adsorption technology In the method for purifying the organic waste gas, in the step (3), the adsorption and desorption treatment unit is filled with a honeycomb or granular adsorbent, and the adsorbent is not limited, and may be a nano-stone, a nai. Rice carbon, active, molecular sieve or active oxidation. Another object of the present invention is to provide a pressure-variable adsorption technology for treating organic waste gas purification apparatus, which comprises at least: two pressure-variable suction and desorption processing units, which are mutually Parallel setting; a vacuum pumping unit connected to each pressure-variable suction and desorption processing unit to pump a specific pressure-variable suction and desorption processing unit to a negative pressure to a vacuum state; The first condensing unit is disposed at the downstream end of the vacuum pumping unit. 13 200843836 The pressure variability adsorption technology of the present invention processes the organic waste gas purification device, and the condensing unit can be designed as one or two according to the exhaust gas composition of the treated gas. Segmental condensation, wherein two-stage condensation is preferred. The cooling medium of the condensing unit is not limited, and may be liquid nitrogen, ice water or brine. Further, after being condensed and recovered via the first condensing unit, the downstream end is organic. The vapor content can be reduced to 10,000 ppm or less. In the pressure-variable adsorption technology of the present invention, in the apparatus for treating organic waste gas, the inlet organic vapor feed content of the pressure-variable adsorption and desorption treatment unit is (100,000 ppm or less. The present invention In the purification device for treating organic waste gas by pressure-variable adsorption technology, the plurality of pressure-variable adsorption and desorption processing units of the pressure-variable adsorption and desorption treatment unit can perform on-line adsorption reaction and/or off simultaneously, sequentially or alternately. Attachment/Reaction. In particular, according to the arrangement of a plurality of pipelines and valves in the apparatus of the present invention, one or more pressure-variable suction and desorption processing units When the adsorption reaction is performed, the vacuum pumping unit and the associated valve are opened or closed to generate a negative pressure to a vacuum state in the other one or more pressure-variable suction and desorption processing units, and the desorption reaction can be performed. After the desorption of the pressure-change suction and desorption processing unit is completed, the relevant valve can be opened or closed to perform the adsorption reaction. Therefore, through the pipeline and the valve provided by the present invention, the plurality of pressure-variable suction and desorption processing units can be respectively Simultaneously, sequentially or interactively, the on-line adsorption or desorption reaction is carried out, and the adsorbent which has not been adsorbed is not required to be separately treated by other devices. _ The pressure-dependent adsorption technology of the present invention processes the organic waste gas purification device, the adsorption and desorption processing unit The honeycomb is filled with a honeycomb or granular adsorbent, and the adsorbent is not limited, and may be nanocrystalline, nanocarbon, active broken, 14 200843836 molecular sieve or activated alumina. The following experimental design is intended to be illustrative, and is not intended to limit the scope of the invention, and it is obvious that such modifications may be made without departing from the scope of the invention. [Embodiment] Embodiment 1 FIG. 1 is a schematic view showing a preferred embodiment of a high-performance concentrator and a pressure-variable adsorption technique for treating an organic waste gas. The purification device comprises a zeolite adsorption rotor 11 comprising an adsorption treatment unit 111, a desorption processing unit 112, a driving unit 113, and a first fan 13 for pumping the exhaust gas to be treated to the zeolite adsorption revolver 11. A heating unit 14 disposed at an upstream end of the zeolite adsorption rotor desorption processing unit 112, which is provided with a heat source that should be desorbed from the processing unit 112; a second fan 21 disposed at the desorption processing unit 112 and Between the pressure-variable suction and desorption processing unit 30; a pressure-variable suction and desorption processing unit 30 comprising two pressure-variable suction and desorption processing units 31 and 32 arranged in parallel, a vacuum pumping unit 33, It is connected to each pressure-change suction and discharge processing unit, and a first condensing unit 34 is disposed at the downstream end of the vacuum pumping unit 33. First, the first fan 13 and the second fan 21 are activated, and the organic exhaust gas is pumped through the first fan 13 and introduced into the adsorption processing unit 111 of the zeolite adsorption wheel from the inlet A, and the adsorbent coated on the zeolite adsorption wheel 11 The organic exhaust gas is adsorbed, and the cleaned airflow after the adsorption can be pumped through the first fan 13 to introduce the smoke from the 41. The zeolite adsorption rotor 11 is driven by the drive unit 15 200843836 113, and continuously and slowly rotates into the desorption processing unit 112, and the second fan 21 pumps the airflow heated by the heating unit 14 to the desorption temperature through the desorption. The unit 112 is treated so that the adsorbed organic matter is thermally desorbed into the gas stream. Thereafter, the concentrated gas stream is further guided to the pressure-variable suction and desorption processing unit 30 via the second fan 21, and the steps are as follows: (1) The valves 323, 321 and 314 are opened, and the valves 324, 322, 3H, 312 are closed. And 313. At this time, the pressure-variable suction and desorption processing unit 32 performs an adsorption reaction to reduce the organic vapor content to a dischargeable concentration, which is discharged into the atmosphere via the smoke. On the other hand, the pressure-variable suction-desorption processing unit 31 is pumped to the vacuum state by the vacuum pumping unit 33, and the previously-variable/saturated pressure-variable suction-desorption processing unit 31 can be simultaneously removed. Attached to the reaction. ' (2) The valves 323, 321, 314 and 312 are opened to close the valves 324, 322, 311 and 313. At this time, the suction and detachment processing unit 31 can be flushed by the clean airflow desorbed by the suction and desorption processing unit 32 I. (3) The valves 323, 324, 321, and 312 are opened to close the valves 313, 314, 311, and 322. At this time, the suction and detachment processing unit 32 can be pressed back. (4) The valves 313, 324, and 311 are opened to close the valves 323, 314, 321, 312, and 322. At this time, the pressure swing type adsorption and desorption processing unit 31 performs an adsorption reaction, and the organic vapor content can be lowered into the atmosphere which can be discharged through the chimney 42 by the concentration of the organic vapor. On the other hand, > pumping the pressure-variable suction and desorption processing unit 32 to the vacuum state by the vacuum pumping unit 33, and simultaneously performing the pressure-variable processing method of the previous 16 200843836 saturation Desorption reaction. (5) The valves 313, 324, 311, and 322 are opened to close the valves 323, 314, 321, and 312. At this time, the suction and desorption processing unit % can be flushed by the clean air flow desorbed by the suction and desorption processing unit η. (6) Open valves 313, 314, 311 and 322 to close 阙 323, 324, ^ 321 and 312. At this time, the suction/desorption processing unit 31 can be pressed back. Refer to the following table for the operation mode of the pressure change suction and desorption treatment unit. After desorption, the concentrated gas material (4) is condensed and recovered into the liquid separation tank 35, and the liquefied organic matter is separated from the water and returned to the organic matter. Further, by repeating the above steps (丨) to (6), the adsorption and desorption processing unit Μ and % can be alternately subjected to adsorption and desorption treatment. Table 1
L: 17 200843836 實施例2 〉辰％器搭配壓 勺人、氣化t置&佳具體例的示意圖。該淨化裝置 ::性碳流體化床12’其包含一吸附處理單元121， 廢氣至該吸附處理單元二：風，广其可抽送欲處心 Γ 附處理單元122之周圍，_;力2單元14,設置_ 熱源，—办> n4ik /、了供應该脫附處理單元122 $ …吸二物生蝴 脫附處理單元122之下游端，：：冷凝單元22，設置於該 於該冷凝單元22之上、山—第—旁通回路23，其跨接 3〇,其包含二個她:置 = 之二;-屢 32，一真空抽氣單元33，吸脫附處理單元3!及 連接，-第二冷凝單元4各麼變式吸脫附處理單元相 下游端，及-第二旁 下游端與堡變式吸脫附處 Μ接於第-旁通回路23 首先，啟動第—風機13二下游端之間。 可終由第-風機13抽送導 H風機16’該有機廢氣 121 ° , 12 ^各下’藉由重力及氣流之作;顆粒由吸附處理部m頂 ^方形成2〜3公分之流體化轉Γ活性碳顆粒可在隔 同谓附廢氣中之有機物質，运’―層層逐_落下並 吸附處理部121上::吸附後之乾淨氣流可經由 和之球狀活性 、二由，舌性妷分佈器126 18 200843836 及125抽送至脫附處理部122之項端並逐步落至脫附處理 y m底部’該脫附處理冑122可經由設置於周圍之加熱 早几14加熱至贿溫度，故落下之活性㈣粒於脫附處理 部122内部可進行無氧再生程序。亦即，入口 B處可以風 機y提供例如氮氣之惰性氣體，使脫附處理部 122内部進 行播氧脫附，而將有機物曾：詹化 成初貝，辰.。脫附後落於脫附處理部 22底部之球狀活性麵粒可以空氣風機祕由活性石炭分L: 17 200843836 Example 2 〉 Chen% device with a scoop man, gasification t set & a good example of a specific example. The purification device: the carbonized fluidized bed 12' includes an adsorption treatment unit 121, and the exhaust gas to the adsorption treatment unit 2: the wind, which can be pumped to the periphery of the treatment unit 122, _; force 2 unit 14, the setting _ heat source, - the operation of the n4ik /, the supply of the detachment processing unit 122 ... ... the downstream end of the absorbing detachment processing unit 122, the: condensing unit 22, disposed in the condensing unit Above 22, the mountain-first-bypass circuit 23, which spans 3 turns, contains two hers: set = two; - repeat 32, a vacuum pumping unit 33, suction and desorption processing unit 3! , the second condensing unit 4 each of the variable suction and desorption processing unit phase downstream end, and the second second downstream end and the bucking type suction and detachment are connected to the first-bypass circuit 23 first, start the first fan 13 between the downstream end. Finally, the first fan 13 can be used to pump the H-type fan 16'. The organic exhaust gas is 121 °, 12 ^ each under the action of gravity and air flow; the particles are formed by the adsorption treatment part m to form a fluidized turn of 2 to 3 cm. The Γ activated carbon granules may be separated from the organic matter in the exhaust gas, and the layer is layered and adsorbed on the treatment portion 121: the clean gas stream after adsorption can be spheroidally active, and the spheroidality The 妷 distributor 126 18 200843836 and 125 are pumped to the end of the detachment treatment portion 122 and gradually fall to the bottom of the detachment treatment ym. The detachment treatment 胄 122 can be heated to the bribe temperature by the heating 14 provided in the surroundings. The falling activity (iv) particles can be subjected to an anaerobic regeneration process inside the desorption processing unit 122. That is, at the inlet B, the inert gas such as nitrogen can be supplied from the wind turbine y, and the inside of the desorption processing portion 122 is subjected to oxygenation desorption, and the organic matter is once turned into a first shell. After the desorption, the spherical active surface particles falling on the bottom of the desorption treatment portion 22 can be separated from the active charcoal by the air blower.
C =24* 123抽送至吸附處理部⑵頂端，依次循環進 仃有機廢氣之吸脫附作用。 流再被導引至第二冷凝單元22,其以液態 兮：為，1 ,，可將大部分有機蒸氣冷凝回收， 该弟二冷凝單元22之下游 1〇,000 ppm)。 ㊈的有機蒸氣濃度已降低（< I1返後，有機条氣流可經由營 部％，5線進人壓變式吸脫附處理 ”進仃步驟如貫施例1之步驟⑴至⑷。 後濃縮之氣流再經㈣_冷凝單元％冷凝回 此外:：Γ:Γ化有機物與水分離後回收該有機物。 匕外，重複上述步驟（υ 31 ^ ^ ^ ^ 王C 6) ’可將吸脫附處理單元 及32父替進行吸附、脫附處理。 本發明在上文中已以較私奋 術者應理解的是，物“上a例揭露，然熟習本項技 讀為限制本發明之範圍。雇會:發明’而不應解 致之變化與雜，均應設f凡麟實施例等 本發明之保護範圍當以下文明之_内。因此， 人之甲凊專利範圍所界定者為 200843836 準。 產業可利用性 本發明之高效能濃縮器搭配壓變式吸附技術處理有機 廢氣之淨化裝置可處理各種有機廢氣，可解決傳統有機廢 氣處理裝置不能或不適處理某些有機廢氣的問題，提高終 處理單元效能，可使終處理單元容量大幅降低及具有溶劑 回收效能，具有節能之效果，以及抑制溫室氣體之二氧化 碳排放，減緩全球之溫室效應，為相當符合環保及能源需 求之優良技術，值得應用於高風量中低濃度排放之高科技 晶圓製造、光電面板製造業、塗裝印刷業及相關化工業。 【圖式簡單說明】 第一圖為本發明之高效能濃縮器搭配壓變式吸附技術 處理有機廢氣之淨化裝置較佳具體例的示意圖。 第二圖為本發明之高效能濃縮器搭配壓變式吸附技術 處理有機廢氣之淨化裝置較佳具體例的示意圖。 【主要元件符號說明】 11 沸石吸附轉輪 12 活性碳流體化床 111 吸附處理單元 121 吸附處理單元 112 脫附處理單元 20 200843836 122 113 123 124 125 126 13 14 ( 16 17 21 22 / 221 ' 222 231 23 ί 30 31 32 311 312 313 314 321 脫附處理單元 驅動單元 活性碳分佈器 活性碳分佈器 活性破分佈器 活性碳分佈器 第一風機 加熱單元 空氣風機 風機 第二風機 第二冷凝單元 閥 閥 閥 第一旁通回路 壓變式吸脫附處理部 壓變式吸脫附處理單元 壓變式吸脫附處理單元 閥 閥 閥 閥 閥 21 200843836 322 閥 323 閥 324 閥 341 閥 33 真空抽氣單元 34 第一冷凝單元 35 分液槽 36 第二旁通回路 41 煙囪 42 煙囪 A 廢氣入口 Β 氮氣入口 ί 22C = 24* 123 is pumped to the top of the adsorption treatment unit (2), and the adsorption and desorption of the organic waste gas is sequentially circulated. The stream is then directed to a second condensing unit 22 which, in liquid form: 1, can condense and recover most of the organic vapor, 1 〇,000 ppm downstream of the condensing unit 22. The organic vapor concentration of Nine has been reduced (<I1 is returned, the organic stripe gas flow can be passed through the battalion%, 5-line into the human pressure-variable suction and desorption treatment). The steps are as follows (Steps (1) to (4) of Example 1. The concentrated gas stream is further condensed by (4) condensing unit%. In addition:: Γ: The organic matter is separated from the water and recovered. The above steps are repeated (υ 31 ^ ^ ^ ^ Wang C 6) The treatment unit and the 32 parent are used for adsorption and desorption treatment. The present invention has been understood by those skilled in the above, and the object is disclosed in the above example. However, it is understood that the scope of the invention is limited. Employing: Inventing 'There should be no change and miscellaneous, and should be set to f. The embodiment of the invention is protected by the following civilization. Therefore, the scope defined by the human patent is 200843836. Industrial Applicability The high-performance concentrator of the present invention is combined with a pressure-variable adsorption technology to treat an organic waste gas purification device, which can treat various organic waste gases, and can solve the problem that the conventional organic waste gas treatment device cannot or does not handle certain organic waste gas, and improve the problem. Final processing unit Energy, which can greatly reduce the capacity of the final treatment unit and have solvent recovery efficiency, have the effect of energy saving, inhibit the carbon dioxide emission of greenhouse gases, and slow down the global greenhouse effect. It is an excellent technology that is quite in line with environmental protection and energy demand, and is worthy of application. High-tech wafer fabrication, photovoltaic panel manufacturing, painting and printing industry and related industries with low and medium-volume emissions. The first picture shows the high-performance concentrator of the present invention combined with pressure-variable adsorption technology. A schematic diagram of a preferred embodiment of the apparatus for purifying organic waste gas. The second diagram is a schematic diagram of a preferred embodiment of a high-efficiency concentrator with a pressure-variable adsorption technique for treating an organic waste gas purification apparatus according to the present invention. Adsorption runner 12 Activated carbon fluidized bed 111 Adsorption processing unit 121 Adsorption processing unit 112 Desorption processing unit 20 200843836 122 113 123 124 125 126 13 14 ( 16 17 21 22 / 221 ' 222 231 23 ί 30 31 32 311 312 313 314 321 desorption processing unit drive unit activated carbon distributor activated carbon distributor active Cloth activated carbon distributor first fan heating unit air fan fan second fan second condensing unit valve valve first bypass circuit pressure change suction and desorption treatment part pressure change suction and desorption processing unit pressure change suction With processing unit valve valve valve valve 21 200843836 322 valve 323 valve 324 valve 341 valve 33 vacuum pumping unit 34 first condensing unit 35 dispensing tank 36 second bypass circuit 41 chimney 42 chimney A exhaust gas inlet 氮气 nitrogen inlet ί 22