TWI382871B - Method and apparatus for purification and recovery of organic exhaust gas - Google Patents

Description

Method and device for purifying and recovering organic waste gas

The invention discloses a method and a device for purifying and recovering organic waste gas, and more particularly to a method and a device for purifying organic waste gas recovery solvent combined with a porous honeycomb honeycomb adsorption concentration wheel and a solvent recovery device.

In today's industrial or high-tech industries, when volatile organic waste gas is treated, the volatile organic waste gas is collected by condensation at high concentration, and concentrated at a low concentration and high air volume by physical adsorption. It is more economical to burn to a small incinerator or to recover it with a condensing unit.

When the volatile organic waste gas is treated by the adsorption method, the volatile organic compounds (VOCs) or the odor contained in the exhaust gas are physically or chemically adsorbed by using the porous material containing the adsorbent to purify the volatile organic waste gas. The purpose of volatile organic waste gas. When the adsorbent is saturated, the adsorbed material must be removed by a desorption procedure before it can be reused.

For example, in the process of PU synthetic skin, a large number of such as methyl ethyl ketone (MEK) and toluene (Toluene) and isopropyl alcohol (IPA) and dimethylformamide (DMF) are used. The solvent, and the ratio of the solvents in the solution is about 60 to 80%. After coating, it must be dried before evaporating all the solvents. In the process of its production, an average of one yard of synthetic leather must be used with 350 grams of solvent, that is, one yard of synthetic leather must be discharged with 350 grams of solvent. In the atmosphere, a large amount of VOCs are polluted. Based on the output of 90 million yards of Taiwan, 30,000 tons of organic solvents are emitted into the atmosphere every year, causing considerable environmental pollution. If such exhaust gases are discharged before discharge Without adequate and effective purification treatment, it will seriously pollute the surrounding environment, and will consume more resources to eliminate such pollution in the future.

Furthermore, in order to effectively treat the organic waste gas generated in its related processes, the electronics industry uses a zeolite concentration runner and an incinerator to treat its organic waste gas. This method requires a large amount of incineration fuel and energy. The most economical and practical method for removing organic waste gas.

Taking the organic waste gas component produced by the semiconductor fab as an example, the exhaust gas discharged from the semiconductor industry often contains, for example, Dimethyl Sulfoxide, N-Methyl Pyrolidone, and Ethylethanolate (2- Aminoethanol), Dithiolethylene Glycol, Dimethyl Sulfide, Isopropyl Alcohol, Acetone, etc., after adsorption of concentrated exhaust gas by zeolite runner, It is most effective in decomposing these volatile organic substances, odors and poisonous gases by incinerators burning at temperatures above 600-900 °C. At present, the exhaust gas treatment of volatile organic gases is carried out by means of adsorption-concentrated zeolite wheel treatment and combustion incineration, which has been widely used in the semiconductor and photovoltaic industries.

According to the widely used organic solvents in life and production, they are easily volatilized into gases at room temperature, so they are also called volatile organic gases (VOCs). Most VOCs are toxic to human body and must be recycled. The organic solvents used in the industrial field are also different, such as polyurethane (PU) production, technology manufacturing, and lithium battery manufacturing industries. The various organic solvents are mainly used, and the related properties are listed. The nature of the next page (Table 1); wherein the VOCs emitted by the PU production process are mainly derived from the organic solvents used to reduce the viscosity to facilitate the processing, including toluene, methyl ethyl ketone (MEK). ), dimethylformamide (DMF), etc.; in addition, in the manufacturing process of semiconductor fabs and TFT-LCD panels, monoethanolamine (MEA), dimethyl hydrazine (DMSO), propylene glycol Organic solvents such as methyl ether ethyl ester (PGMEA) and cyclohexanone (ANONE) are used in applications such as photoresist stripping liquids; for coating machines made of lithium batteries, nitrogen-methyltetrahydropyrrolidone (NMP) must be used. ) Waste gas recovery.

Sub-press, the physicochemical properties of organic solvents, organic solvents with low boiling point and high saturated vapor pressure are easy to volatilize, but not easy to condense; conversely, organic solvents with high boiling point and low saturated vapor pressure are not easy to volatilize, but are easy to condense; From the organic solvent property table (Table 1), it can be seen that DMF and MEA, NMP and DMSO among the listed organic solvents are medium to high boiling point, low saturated vapor pressure and fully soluble in water.

According to the press, the relevant manufacturers are recycling the VOCs by using a local condensing absorber for recycling; such a condensing recovery system requires medium design and operation for medium-high boiling point and fully soluble organic substances. High recovery efficiency can be achieved, and the VOCs absorbed by the condensation can be recovered and purified, because the concentration of VOCs in the middle and high boiling point has been greatly reduced, which can reduce the load of the downstream end treatment equipment and the condensation of medium and high boiling organic matter or The formation of tar (Tar) causes smoldering or blockage of the incinerator or poisoning of the catalyst, which effectively improves the overall processing efficiency, reliability and safety.

However, the principle of recovering VOCs by the conventional conventional condensation method is to use a freezing device to first cool the temperature of the VOCs-containing exhaust gas to below the dew point temperature (saturation temperature) of the organic substance, thereby achieving the effect of saturated condensation; VOCs condensing system mainly includes two basic equipments: dehumidifier and VOCs condenser. The purpose of installing dehumidifier is to remove excess water in the air to avoid the temperature in the condensation zone of VOCs falling below 0 °C (273K). The icing effect is not conducive to condensation; in addition, two important factors that determine the effectiveness of the condenser to remove VOCs are: (1) the condensing system needs to reach a sufficient low temperature (-40 ° C), and (2) the exhaust gas contains a higher VOCs concentration (> 10,000 ppmv); in addition, the treatment efficiency of the condenser is inversely proportional to the increase in the exhaust gas velocity, so prolonging the residence time of the exhaust gas will improve the removal efficiency.

Therefore, due to the conventional condensing recovery method, it is necessary to control the operating temperature to a relatively low temperature and a long enough residence time by using a freezing device to remove VOCs by a condensing mechanism and to ensure that the VOCs concentration value of the exhaust gas after treatment is minimized; however, Such a conventional condensing recovery method, if applied to an industry with a relatively large amount of emissions and a concentration of VOCs of only tens to hundreds of PPMv (<1,000 ppmv), must be lowered to a very low temperature (at least below zero) in order to achieve high condensation efficiency. At 20 ° C), the energy consumption and equipment maintenance costs required will be quite high; therefore, many operators often face the problem of poor recovery efficiency of condensing equipment based on the limitations of traditional condensing system design and the consideration of operating cost savings.

Press again, if the oxidative destruction method is used for the combustion of exhaust gas, secondary pollutants will be generated (for example, nitrogen molecules in DMF and MEA and NMP are oxidized to nitrogen oxides and/or oxygen molecules in DMSO are oxidized to sulfur oxides). As well as increasing the production of carbon dioxide, it will not meet the sustainable development trend of energy saving and carbon reduction.

In view of the above-mentioned shortcomings in the treatment of organic waste gas, the inventor felt that it had not perfected it, exhausted its mental research and overcoming, and based on its accumulated experience in the industry for many years, developed an organic waste gas purification and recycling. The method and the device are capable of effectively purifying organic waste gas, and simultaneously recovering or burning and oxidizing water-soluble (especially at least one solvent containing sulfur, nitrogen, chlorine or fluorine) and a water-insoluble solvent, and removing energy In addition to effectively purifying the organic waste gas, the solvent which is easy to generate secondary pollution can be further recovered, and further utilized or used for heat energy supply, the organic waste gas is completely purified and the purpose of energy saving and carbon reduction is completed.

In order to achieve the above object, the present invention provides a method for purifying and recovering organic waste gas, the steps of which are:

(1) Firstly adsorbing and concentrating and treating organic waste gas by a porous honeycomb honeycomb adsorption concentration wheel;

(2) using a first solvent recovery unit to recover a water-soluble organic waste gas;

(3) The second solvent is used to finally treat the purification unit to purify other water-insoluble and small amount of water-soluble organic waste gas.

In the organic waste gas purification and recovery method as described above, in the step (2), the first solvent recovery unit treats the water-soluble organic waste gas contained in the air by a condensation absorption method.

In the organic waste gas purification and recovery method as described above, the water-soluble organic waste gas is further at least one type of organic waste gas containing sulfur, nitrogen, chlorine or fluorine.

The organic waste gas purification and recovery method as described above, the condensation absorption method further comprising the following steps:

(a) controlling the wind speed of the organic waste gas entering the first solvent recovery unit under laminar flow conditions, that is, a wind speed of less than 2.0 m/s.

(b) the temperature of the first solvent recovery unit is 1 to 35 ° C;

(c) Defogging is performed by a demisting section, and the wind speed of the organic exhaust gas is controlled under turbulent flow conditions, that is, the wind speed is greater than 2.0 m/s.

In the organic waste gas purification and recovery method as described above, the temperature of the first solvent recovery unit in the step (b) is preferably 5 to 25 °C.

In the organic waste gas purification and recovery method as described above, the second solvent final treatment purification unit in the step (3) purifies the remaining organic waste gas by an oxidative destruction method.

In the organic waste gas purification and recovery method as described above, the second solvent final treatment purification unit in the step (3) can recover the combustion heat energy as the desorption heat or other heat source of the adsorption concentration runner.

The invention also provides an apparatus for purifying and recovering organic waste gas, which is used for performing the method as described above, comprising: a porous honeycomb honeycomb adsorption concentration wheel for adsorbing the organic waste gas, and comprising an adsorption zone And a regeneration desorption zone; a first fan that pumps organic waste gas through the adsorption zone of the concentration runner; at least one heat exchanger that supplies hot gas to desorb the organic from the regeneration desorption zone of the concentration runner Exhaust gas; a first solvent recovery unit for recovering water-soluble organic compounds by a condensation absorption method; and a second fan for pumping hot gas from the first heat exchanger for desorption from the desorption region of the concentration runner The organic waste gas flows through the first solvent recovery unit; a second solvent final treatment purification unit, which further purifies the unpurified water-insoluble and small amount of water-soluble organic waste gas by an oxidation destruction method.

The organic waste gas purification and recovery device as described above, wherein the first solvent recovery unit further comprises a cooling portion and a defogging portion.

The organic waste gas purification and recovery device as described above, wherein the organic waste gas purification and recovery device has two heat exchangers when the second solvent final treatment purification unit is an incinerator.

The organic waste gas purification and recovery device as described above, wherein the second solvent final treatment purification unit may be a constant combustion incinerator, a regenerative incinerator or a catalytic incinerator.

The organic waste gas purification and recovery device as described above, wherein the water-soluble organic waste gas is further at least one or more organic waste gases containing sulfur, nitrogen, chlorine or fluorine.

Therefore, the method and the device for purifying and recovering the organic waste gas of the present invention can effectively purify the organic waste gas, and simultaneously recover or burn and oxidize the water-soluble and water-insoluble solvent, in addition to effectively purifying the organic waste gas. The solvent which is easy to generate secondary pollution can be further recovered and further utilized or used for heat energy supply, so that the organic waste gas is completely purified and the purpose of energy saving and carbon reduction is completed.

In order to fully understand the object, features and advantages of the present invention, the present invention will be described in detail by the following specific embodiments and the accompanying drawings. The method of recycling, the steps of the method are:

(1) Firstly adsorbing and concentrating and treating organic waste gas by a porous honeycomb honeycomb adsorption concentration wheel;

(2) using a first solvent recovery unit to recover a water-soluble organic waste gas;

(3) The second solvent is used to finally treat the purification unit to purify other water-insoluble and small amount of water-soluble organic waste gas.

And the first solvent recovery unit in the step (2) processes the water-soluble organic waste gas contained in the air by a condensation absorption method, and the condensation absorption method further comprises the following steps:

(a) controlling the wind speed of the organic waste gas entering the first solvent recovery unit under laminar flow conditions, that is, a wind speed of less than 2.0 m/s.

(b) the temperature of the first solvent recovery unit is 1 to 35 ° C;

(c) Defogging is performed by a demisting section, and the wind speed of the organic exhaust gas is controlled under turbulent flow conditions, that is, the wind speed is greater than 2.0 m/s.

The condensation method used in the method is particularly suitable for VOCs with high water solubility, especially for VOCs with medium and high boiling points; generally, for hygroscopic or water-absorbing condensation nuclei, when the relative humidity is less than 100% RH, Particles that can condense water vapor require much less supersaturation than non-hygroscopic cores or water-absorbent nuclei, and the larger the scale of condensation nuclei, the smaller the supersaturation required for coagulation; It can be a medium-high boiling VOCs sub-micron particle with high water solubility. The scale of tuberculosis ranges from 5 nm to 5 microns.

The first figure is a schematic diagram of a conventional volatile organic waste gas purification device. As shown in the figure, the method for generally treating volatile organic waste gas is as follows. When the volatile organic waste gas is pumped through a first blower 10, it flows through an adsorption zone 31 of a porous honeycomb honeycomb adsorption concentration wheel 30. The organic matter in the introduced volatile organic waste gas flows through the adsorption zone 31 to adsorb the adsorbent in the porous channel honeycomb adsorption concentration reel 30, and the adsorption zone 31 of the concentrated adsorption runner 30 via the porous channel is adsorbed. The adsorbed purified purified gas is discharged through the first blower 10, and the adsorbent adsorbing the volatile organic exhaust gas is transported to the porous passage honeycomb adsorption according to the rotation of the porous honeycomb honeycomb adsorption and concentration runner 30. The regeneration desorption zone 32 of the concentrating runner 30 is pumped through the second fan 15 to the gas stream heated from the first heat exchanger 21 to the regeneration temperature through the regeneration desorption zone 32. At this time, the adsorbed organic matter is heated. Desorbed into the gas stream, the gas stream is further guided to a second heat exchanger 22 for preheating, and then introduced into an incinerator 40 to heat and burn the water and carbon dioxide-based substances, and then through the second heat exchanger 22 And the After the first heat exchanger 21, it is discharged to the outside.

The second embodiment is a schematic diagram of a device for performing the purification and recovery of the organic exhaust gas according to the present invention, wherein the volatile organic exhaust gas is also pumped through a first fan 10 through a porous An adsorption zone 31 of the honeycomb honeycomb adsorption concentration wheel 30, wherein the organic matter in the introduced volatile organic waste gas flows through the adsorption zone 31 to adsorb the adsorbent in the honeycomb adsorption adsorption concentration wheel 30 of the porous channel. The purified gas adsorbed and purified by the adsorption zone 31 of the honeycomb adsorption and concentration wheel 30 through the porous channel flows through the first fan 10 and is discharged; (At this point, the purification of the honeycomb adsorption and concentration wheel 30 via the porous channel is performed. Concentration can greatly reduce the amount of air and increase the concentration of organic substances in the gas stream; and the adsorbent adsorbing the organic temperament is transported to the regeneration desorption zone 32 along with the rotation of the porous channel honeycomb adsorption concentration wheel 30, which is The gas stream heated by the first heat exchanger 21 to the regeneration temperature passes through the regeneration desorption zone 32. At this time, the adsorbed organic matter is desorbed into the gas stream by heat, and then pumped through another fan 15 to flow through the a solvent recovery unit 50, the first solvent recovery unit 50 includes a cooling unit 51, which reduces the temperature of the region to 1 to 35 ° C (preferably 5 to 25 ° C) via an external cooling medium at a dew point temperature. The following supersaturated environment causes the water vapor or/and VOCs contained in the concentrated organic waste gas to produce a cooling nuclear coagulation effect, and the submicron fine mist or grain is grown into a larger micron-sized mist or grain, and collides Condensed into a micro-mist droplet or liquid film during the merging process, and the condensed micro-mist droplets or/and liquid film are used to absorb a large amount of soluble particles of water-soluble VOCs and other substances from the organic waste gas, and then reflow. The demisting portion 52 of the first solvent recovery unit 50 controls the wind speed of the organic exhaust gas to be deflated under the condition of the turbulent flow (the preferred wind speed is about 2.0 m/s or more). The micro-mist droplets and the exhaust gas droplets of the VOCs are recovered in the first solvent recovery unit 50, and the remaining organic waste gas is guided to a second heat exchanger 22 for preheating, and then introduced into a second solvent final treatment. a purification unit 60, which is an incinerator, is oxidatively destroyed Purifying the remaining organic waste gas, which is heated to burn the remaining organic waste gas into water and carbon dioxide, and then flows through the second heat exchanger 22 and the first heat exchanger 21, and is discharged to the outside, and is discharged to the second solvent. In the treatment purification unit 60, the oxidative heat of the oxidized organic matter can be recovered and used as the desorption heat or other heat source of the porous honeycomb honeycomb adsorption concentration wheel 30.

The third embodiment is a schematic diagram of another embodiment of the present invention for performing the method for purifying and recovering organic waste gas according to the present invention, wherein the volatile organic waste gas is also pumped through a first fan 10 through a porous An adsorption zone 31 of the honeycomb honeycomb adsorption concentration wheel 30, wherein the organic matter in the introduced volatile organic waste gas flows through the adsorption zone 31 to adsorb the adsorbent in the honeycomb adsorption adsorption concentration wheel 30 of the porous channel. The purified gas adsorbed and purified by the adsorption zone 31 of the honeycomb adsorption and concentration wheel 30 through the porous channel flows through the first fan 10 and is discharged; (At this point, the purification of the honeycomb adsorption and concentration wheel 30 via the porous channel is performed. Concentration can greatly reduce the amount of air and increase the concentration of organic substances in the gas stream; and the adsorbent adsorbing the organic temperament is transported to the regeneration desorption zone 32 along with the rotation of the porous channel honeycomb adsorption concentration wheel 30, which is The gas stream heated by the first heat exchanger 21 to the regeneration temperature passes through the regeneration desorption zone 32. At this time, the adsorbed organic matter is desorbed into the gas stream by heat, and then pumped through another fan 15 to flow through the first The solvent recovery unit 50 includes a cooling unit 51 for reducing the temperature of the region to 1 to 35 ° C (preferably 5 to 25 ° C) via an external cooling medium, below the dew point temperature. The supersaturated environment causes the water vapor or/and VOCs contained in the concentrated organic waste gas to produce a cooling nuclear coagulation effect, and the submicron fine mist or grain is grown into a larger micron-sized mist or grain, and is collided with The combination process condenses into a micro-droplet or liquid film, and utilizes the condensed micro-droplet or/and liquid film to absorb a large amount of soluble particles of VOCs and other substances which are easily dissolved in water from the organic waste gas, and then flows through The demisting portion 52 of the first solvent recovery unit 50 controls the wind speed of the organic exhaust gas to be deflated under the condition of the turbulent flow (the preferred wind speed is about 2.0 m/s or more). The micro-mist droplets and the exhaust gas droplets of the VOCs are recovered in the first solvent recovery unit 50, and the remaining organic waste gas is led to a second solvent-finish purification unit 70, which may be a regenerative incinerator or One-touch incinerator, also oxidized and destroyed The organic waste gas can only utilize the heat storage effect of the regenerative incinerator, effectively save energy and fully heat and burn the remaining organic waste gas into water and carbon dioxide, and then flow through the first heat exchanger 21 to be discharged externally. In the second solvent final treatment purification unit 70, the oxidation heat of the oxidized organic substance can be recovered and used as the desorption heat or other heat source of the porous channel honeycomb adsorption concentration wheel 30.

Example 1

In the simulated PU synthetic skin process, a large amount of solvents such as MEK (butanone) 5% (50 ppmv), toluene 35% (350 ppmv), and dimethylformamide (DMF) 60% (600 ppmv) are used as The washing solvent of the PU synthetic leather process, in this embodiment, the same proportion and the total concentration of 1000ppm, the gas volume of 500NCMM (Nm ³ /min) gas, as the source of organic waste gas, respectively concentrated in the first figure The runner was tested with the specific embodiment of the second figure of the present invention, and the results are shown in Table 2 below.

As can be seen from the results of the above table, the purification of organic waste gas by the conventional concentrated rotating wheel, although the purification efficiency of the total VOCs can reach more than 90%, however, the water-soluble organic solvent in the organic waste gas cannot be recovered and is not recovered. In the case of the water-soluble organic solvent in the organic waste gas, the combustion of the remaining organic waste gas is directly performed to generate a large amount of NOx products, resulting in secondary pollution due to the treatment of the organic waste gas; and in Table 2, the specific embodiment of the present invention The purification of the organic waste gas can also achieve a purification efficiency of more than 90% for the VOCs in the organic waste gas. However, the apparatus of the present invention can more effectively recover the solvent in the organic waste gas, wherein the DMF can recover more than 90%, and the MEK also It can recover more than 50%, and reduce the emission of NOx products during the final treatment and purification, which can effectively reduce the possibility of secondary pollution.

Example 2

In the analog optoelectronic TFT-LCD process, a large number of solvents are used, such as: PGMEA: 25%, PGME: 15%, IPA: 20%, Acetone: 15%, MEA: 10%, DMSO: 5%, and other VOCs: 10%. As a washing solvent for the TFT-LCD process in the photovoltaic industry, in the present embodiment, the same ratio and concentration: 200 ppmv in total, and a gas volume of 1500 NCMM (Nm ³ /min) are used as the source of the organic exhaust gas, respectively. The conventional concentrated reel is tested with the specific embodiment of the third embodiment of the present invention, and the results are shown in Table 3 below.

Table 3: Comparison of Organic Waste Gas Purification and Recovery from Photovoltaic TFT-LCD Process

It can be seen from the results of the above table that the purification of organic waste gas by the conventional concentrated rotating wheel, although the purification efficiency of the total VOCs can reach more than 90%, however, the water-soluble organic solvents MEA and DMSO in the organic waste gas are directly organic. The combustion of the exhaust gas, in turn, generates a large amount of SOx, NOx products, resulting in secondary pollution of the treated organic waste gas; and in Table 3, the purification of the organic waste gas by the specific embodiment of the present invention, the purification of VOCs in the organic waste gas The efficiency can also be more than 90%. However, the device of the invention can effectively recover the solvent in the organic waste gas, wherein DMSO can recover more than 90%, and the MEA can also recover more than 90%, and reduce it in the final treatment and purification. The discharge of SOx and NOx products can effectively reduce the possibility of secondary pollution.

It can be seen from the above embodiments 1 and 2 that the method and device for purifying and recovering organic waste gas of the present invention can effectively treat the purified organic waste gas, and the first solvent of the present invention can be effectively purified, in addition to effectively purifying the VOCs of the organic waste gas. The recovery unit utilizes the effect of condensation absorption to effectively recover the water-soluble solvent (especially at least one solvent containing sulfur, nitrogen, chlorine or fluorine) in the organic waste gas, and then through the second solvent final treatment purification unit, The remaining water-insoluble solvent is completely purified, so that the purification of the organic waste gas is more complete, and the second solvent final treatment purification unit in the invention can recycle the heat source generated in the purification treatment, thereby effectively saving cost and achieving Energy-saving and carbon-saving environmental protection purposes.

The invention has been described above in terms of the preferred embodiments, and it should be understood by those skilled in the art that the present invention is not intended to limit the scope of the invention. It should be noted that variations and permutations equivalent to those of the embodiments are intended to be included within the scope of the present invention. Therefore, the scope of the invention is defined by the scope of the following claims.

10. . . First fan

15. . . Second fan

twenty one. . . First heat exchanger

twenty two. . . Second heat exchanger

30. . . Honeycomb honeycomb adsorption concentration wheel

31. . . Adsorption zone

32. . . Regeneration desorption zone

40. . . Incinerator

50. . . First solvent recovery unit

51. . . Cooling section

52‧‧‧Defogging Department

60‧‧‧Second solvent final treatment purification unit

70‧‧‧Second solvent final treatment purification unit

The first figure is a schematic diagram of a conventional volatile organic waste gas purification device.

The second figure is a schematic diagram of an organic waste gas purification and recovery device of the present invention.

The third figure is a schematic view of another organic waste gas purification and recovery device of the present invention.

10. . . First fan

15. . . Second fan

twenty one. . . First heat exchanger

twenty two. . . Second heat exchanger

30. . . Honeycomb honeycomb adsorption concentration wheel

31. . . Adsorption zone

32. . . Regeneration desorption zone

50. . . First solvent recovery unit

51. . . Cooling section

52. . . Defogging

60. . . Second solvent final treatment purification unit

Claims (9)

The invention relates to a method for purifying and recovering organic waste gas, the steps of the method are as follows: (1) using a honeycomb-shaped honeycomb adsorption adsorption concentrated wheel to firstly adsorb and purify and concentrate the organic waste gas; (2) using the first solvent recovery unit to recover the water-soluble organic solvent; Exhaust gas, and the first solvent recovery unit processes the water-soluble organic waste gas contained in the air by a condensation absorption method, and the condensation absorption method further comprises the following steps: (a) controlling the wind speed of the organic waste gas entering the first solvent recovery unit Under laminar flow conditions, that is, the wind speed is less than 2.0 m/s; (b) the temperature of the first solvent recovery unit is 1 to 35 ° C; (c) defogging with a defogging portion, and the wind speed of the organic exhaust gas Controlled under turbulent conditions, ie, the wind speed is greater than 2.0 m/s; (3) The second solvent is used to finally purify the purification unit to purify other water-insoluble and small amount of water-soluble organic waste gas. The method of claim 1, wherein the water-soluble organic waste gas is further at least one or more organic waste gases containing sulfur, nitrogen, chlorine or fluorine. The temperature of the first solvent recovery unit in the step (b) is preferably 5 to 25 ° C, as in the method of claim 1. The method according to any one of claims 1 to 3, wherein the second solvent recovery unit in the step (3) purifies the remaining organic waste gas by an oxidative destruction method. The method of claim 4, the second solution in the step (3) The final treatment purification unit recovers its combustion heat energy as a desorption heat or other heat source for the adsorption concentration wheel. An apparatus for purifying and recovering organic waste gas, which is used for carrying out the method of the first to fifth aspects of the patent application, comprising: a porous honeycomb honeycomb adsorption adsorption wheel for adsorbing the organic waste gas, And comprising a adsorption zone and a regeneration desorption zone; a first fan is configured to pump organic waste gas through the adsorption zone of the concentration runner; at least one heat exchanger provides hot gas for regeneration and desorption from the concentration runner The first solvent recovery unit recovers the water-soluble organic compound by a condensation absorption method, and the first solvent recovery unit further comprises a cooling portion and a defogging portion; Extracting hot gas from the first heat exchanger to desorb the organic waste gas from the desorption zone of the concentration runner, and flowing through the first solvent recovery unit; and a second solvent final treatment purification unit to oxidize destruction method The unpurified water-insoluble and small amount of water-soluble organic waste gas is re-purified. The apparatus of claim 6, wherein the organic waste gas purification and recovery device has two heat exchangers when the second solvent final treatment purification unit is an incinerator. The apparatus of claim 6, wherein the second solvent finishing treatment unit may be a constant-burning incinerator, a regenerative incinerator or a catalytic incinerator. The apparatus according to claim 6, wherein the water-soluble organic waste gas is further at least one or more organic waste gases containing sulfur, nitrogen, gas or fluorine.