TWI324673B - - Google Patents

Description

1324673 IX. Description of the Invention: [Technical Field] The present invention relates to a clean room indoor circulating air purification device for effectively removing micro-polluting substances in a gas in a production environment, and is suitable for a clean room such as an IC of an electronic manufacturing industry. TFT, a clean room for semiconductor manufacturing or a similar site. [Prior Art] With the continuous advancement of semiconductor technology, the ic process diameter has been continuously reduced. The latest semiconductor technology has entered 45nm, and will further step into 22 and 32nm process technologies in the future, and the ic line diameter will continue to shrink. Therefore, the outside air contains micro-contamination (Airb〇rne M〇lecular

Contamination, AMC) substances such as sulfur-containing substances: s〇x, HS, DMSO (Dimethyl Sulfoxide '(CHASO), MS (Dimethyl Sulfide, (CH3)2S), nitrogen-containing substances: , MEACMonoethanol Amine, NfedOH), etc. , containing low; Volatile Organic Compound (VOCs) substance, ipA (Isopropyl)

Alcohol, GHOH) 'Acetone and the like, and organic compound (VOCs) containing high boiling point compounds, etc., have an effect on the yield of the process. In order to improve the process yield, the semiconductor factory has relatively improved the purification specifications of the production environment.

The semiconductor manufacturer's requirements for the dust-free (four) cycle gas are - to the New York, and the Airborne Molecular Contamination (AMC) material cannot be removed by the filter such as HEpA or ULpA. However, the chemical network (for some gas dyes, such as DMSO, DMS 4 IPA, etc., low molecular weight removal efficiency is not ideal, and the use of chemical filters after the use of garbage pollution. In view of this, the present invention can provide A clean room indoor circulating air purification equipment, with only 5 concentrations of these concentrations, or even a thief-level micro-contamination, for the various industries of the 0 system 'is painstaking research, design guide to provide static and fine, The present invention is directed to providing a clean room for removing micro-contaminants contained in a clean room process equipment area and preventing the process from being affected. Simple ring air purification equipment. - The second purpose of the present invention is to provide a dust-free to internal circulation air purification device that can be reused and reused. Ming is mainly connected to the outside air inlet - external air-conditioning box (inspection klto, _, the outlet of the external air-conditioning box is direct guide - clean room process equipment area, the clean room to equipment _ set - a micro-purification device and a special surface, the micro-staining purification device stores at least an adsorption mechanism, and the simple mechanism is coated with an adsorption layer, and the _ clean room _ ring air _ contains micro-stain Secret, the micro (four) purification equipment is connected with the special equipment of the clean room process ship, and the dust-free money ship is connected with the process exhaust gas treatment equipment. The process Wei Xin set _ for the wire (four) process The gas inside is poured into the atmosphere after being treated; thereby, the circulatory air is set to purify the clean room process. The other lions and specific embodiments of the present invention can be used alone. [Embodiment] Please refer to paragraphs 1 to 3 of the present invention. The invention is connected to the external gas σ i Q and the external air-conditioning box 3 〇 into the port 1324673, and the outlet of the external air-conditioning box is directly Introduce a clean room to the equipment area 4〇, and in order to make the indoor space of the clean room process equipment area 4 Purification, so there is a micro-pollution purification device 21 and a special process area 41 in the clean room process equipment area 4, and the micro-pollution purification device 21 is connected with the special process area 4 i, the micro-pollution purification device 2 Is further provided with a windmill 43' which is connected with the micro-polluting purification device 21 to facilitate gas entering the micro-π dyeing and purifying device 21, and the windmill 43 is disposed in front of the micro-polluting and purifying device 2 1 Or the rear of the special processing area 41 can further be provided with at least one fan filter unit (Fan Filter Unit, FFU), the fan filter unit 42 is connected with the clean room, and the area is further prepared. The micro-pollution purification device 21 is connected to introduce the gas into the special process area 41 from the micro-pollution purification device 21, wherein the micro-pollution purification device 21 is provided with at least one adsorption mechanism, and the adsorption mechanism is a honeycomb ( H〇neyc〇mb) structure of the wheel 2 2, and the wheel 2 2 shape can be a rotating tower (Rotary Cylinder 〇Γ R〇tay T〇wer) or a rotating disk (Rotary Disk), and made of inorganic fiber paper Or made of inorganic oxide, and the runner 2 2 has an adsorption a region 2 21, a regenerative desorption region 2 2 2 and an isolated cooling region 2 2 3, and an additional adsorption layer 2 is coated with an adsorption layer, which is an adsorbent or a catalyst to adsorb the clean room process The micro-contaminants contained in the gas in the equipment zone 40 are adsorbed by the adsorption zone 2 2 1 of the runner 2, and then passed through the regeneration desorption zone 2 2 2 to desorb and condense the gas into pollutant waste gas, wherein The desorption method of the regenerative desorption region 2 2 2 is to desorb the polluted exhaust gas by any means such as electric heating, combustion heat, plasma, waste heat recovery, and strong oxidant, and the runner 2 desorbs the polluted exhaust gas. After that, it is transferred to the isolated cooling zone 2 2 3 to cool down, so that the runner 2 2 recovers to have the adsorption function, and the polluted exhaust gas is further introduced by thermal energy (electric heat, combustion heat or waste heat recovery...), and introduces strong oxidant (such as: 7 ^ 24673 ozone Or plasma (Plasma) or any combination of the foregoing technology and catalyst combination to remove pollutants, forming a non-polluting gas, and the clean room process equipment area 4 and the process exhaust gas treatment equipment 5 0 connection, the process exhaust gas treatment equipment 5 The gas discharged from the clean room process equipment area 40, and depending on the characteristics of the exhaust gas, the process exhaust gas treatment device 50 can be divided into various treatment methods such as water washing (treatment of corrosive gas), oxidation Type (exhaust gas, toxic gas), adsorption type (exhaust gas corresponding to the type of adsorbent material treatment) and dissociation φ type (all types of exhaust gas can be treated) · _. It has its advantages and disadvantages and its scope of application, and finally the treated gas is discharged to the atmosphere. Eyes 1 to 4®, so that (4), when the external air population i Q begins to draw the air of the department, the outside air contains micro-polluting substances (Airb〇rne M〇lecular (4) Wall State Plus, Li), such as sulfur Substance: SOx, paste, DMSOCDimethyl Sulfoxide, (CH3)2SO), «(Diethyl Sulfide > (CH3)2S)f > : NO.NHa>MEA(Monoethanol

Amine, 赃_), etc., containing low-boiling volatile organic compounds (v〇latiie 〇_ic φ C〇mP〇Und 'V〇Cs) Substance: IPA (Is〇Pr〇Pyl Alcohol, C3_), acetone, etc. And 3 bureaus/fools of volatile organic compounds (Volatile咐 catching C〇mp〇uncj, v〇cs), etc., when the external air passes through the external gas population 1 into the external air-conditioning box 30, The external air-conditioning box 3 is smashed into the initial H body wealth to remove the external odor pollutants, and then the gas-free person clean room process equipment area 4 ,, and in the clean room process equipment area 4 Q t gas system Then, the windmill 4 3 is introduced into the micro π dyeing and purifying equipment 2 1 t for micro-contamination (4) removal treatment, and the cleaned air after removal is removed through the micro-staining device 2 1 and then enters the special cage 4 i, the wire special process Zone 41 is additionally equipped with a fan over the unit 4 2 'can accelerate the gas to be sent through the micro-pollution purification equipment 2 8 殊 制 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 Re-injecting the micro-polluting and purifying equipment into the process, or introducing the process exhaust gas treatment equipment 50, and discharging it to the large through the process exhaust gas treatment equipment 5 Q The gas in the process is treated with exhaust gas, so that it meets the discharge standard and then discharged to the atmosphere U. Please refer to Figure 4, the present invention can also be used in the external gas D 1 (4). There is another micro-pollution purification device 2 Q, the micro-fourth purification device 20 is provided with a windmill 4 3 ', and the micro-pollution purification device 2 Q is provided with at least _ adsorption mechanism, and the adsorption mechanism is coated The cloth has an adsorption layer to adsorb the micro-contaminants contained in the external air, so that the external air enters from the external gas inlet, and then the micro-pollution purification device 2 Q performs the first-time micro-contamination removal treatment. 'And the micro-stained secrets are removed after treatment and then into the air-conditioning box 3 Q, the micro-contamination of the cake gas is better handled _ to get a cleaner gas into the clean room process equipment area 4 〇 。. Please refer to FIG. 5 to FIG. 7 again, which is a second embodiment of the present invention. The external air inlet system is connected to the external air-conditioning box 30, and the external air-empty contact 3 (4) is provided with a dust-free recording set. And the clean room process ship 4 Q is connected to the process pure processing device 5 Q, wherein the clean room process is set to 4 (10) gas through the wind 4 3 is followed by a tee into the micro-pollution purification device 21' and the micro-pollution purification device 2 is provided with a second adsorption mechanism, which is an adsorption material 23, and the adsorption material 2 3 In the subtractive mode, the adsorbing material 23 of the adsorption mechanism is coated with a-suction, which is a suction or a catalyst, and the adsorbent 23 is made of an inorganic material (such as inorganic fiber paper or inorganic). The oxide is made into a plurality of honeycomb bodies or a low pressure drop hole/same twin structure, and a diverter switch 1 2 is disposed at a branch of the far dipole tube 1 , and the other ends of the adsorbent material 23 meet It is then connected to the special process area 4 i, and the clean room process equipment area 4 is connected to a process exhaust gas treatment device 5 467 at 4673. When in use, when the production environment in the clean room process equipment area 4 needs to be replenished with external air, start the exhaust fan at the outside air inlet 1 to extract the outside air, and the outside air passes through the external air inlet 1 〇 via the external air conditioner The box 30 is further introduced into the clean room process equipment area 40, and the switch 12 of the three-way pipe 11 in the clean room process equipment area 40 is first cut into the first adsorption material 23, and the second adsorption material 23 is closed. The gas in the clean room process equipment area 40 passes through an adsorbent material made of an inorganic material and has a bee-like structure. 2 3 ' Because the adsorbent material 23 is coated with an adsorbent (or a catalyst), it contains a micro-polluting substance. When the outside air passes through the adsorbing material 23 of the adsorption mechanism, the micro-polluting substances contained in the gas in the clean room process equipment area 40 are adsorbed by the adsorbent (or catalyst) on the adsorbing material 23, and are used. After a period of time, when the first adsorption material of the micro-polluting and purifying device 2 adsorbs the micro-contamination to a saturation degree, the switch i 2 is cut into the second adsorption material, and the third channel is unblocked, and the first-suction Saki 2 3 channels closed, making clean room process equipment area 4 〇 The gas enters the second absorption of the second suction, and through the adsorbent (or catalyst) of its internal rhyme 2 3, the micro-contaminants are adsorbed and intercepted, and the micro-pollution purification equipment 2 is the first - The adsorption material 2 3 S is saturated and can be sent to the factory. After the regeneration of the desorption and regeneration equipment is repeated, the cleaned air is removed through the micro-polluting purification equipment 21 and then enters the special process area 4 1 The process area 4 1 is additionally equipped with a fan over-feed element 4 2, which can accelerate the external «from the micro-pollution purification equipment 2 i into the special process area 4 i, and the gas discharged from the special process area 4 会 will be re-employed in the money When the recording process is set to the enchantment 4 Q towel, the micro-pollution purification device 2 1 is circulated, or when the process waste gas treatment device is instructed, the gas to be discharged into the atmosphere is subjected to exhaust gas treatment through the process exhaust gas treatment device 50. The exhaust gas meets the discharge standard and is discharged to the atmosphere via 324673; another application example of the second embodiment of the present invention (as shown in FIG. 7) may also be used when the adsorbent material is disposed only in a single channel, and Do the switching operation on the channel to achieve the same purpose In addition, another micro-pollution purification device 2 可 may be further disposed between the external air inlet 10 and the external air-conditioning box 3, and the micro-pollution purification device 2 is provided with a windmill 43 in front of the micro-pollution purification device 2, and the micro-pollution purification The apparatus 2 is provided with at least one adsorption mechanism, and the adsorption mechanism is coated with an adsorption layer for adsorbing the micro-contaminants contained in the external air to make the external air from the external air inlet i

After entering, the first micro-pollution purification device 2 Q is firstly subjected to the micro-polluting_quality removal treatment and then enters the external air-air 3 G, so that the micro-pollutants f of the external air can be better viewed to obtain a cleaner The gas enters the clean room process equipment area 4 〇. Implementation == Touch, the county is defeated and healthy, and when it is not stipulated, the invention can be applied in detail, and those who are familiar with the industry can obviously change and modify the essence of the invention. It should be regarded as not.! The ring air purification equipment of the invention described in the above-mentioned article is a practical value of "^, - a clean room indoor cycle is undoubted, and the invention patent application is filed according to law. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic diagram of a block flow of an embodiment of the present invention. Fig. 2 is a schematic diagram of a rotating tower of the adsorption mechanism of the micro-polluting purification device of the present invention. 4 is a block flow diagram of a second application example of the embodiment of the present invention. FIG. 5 is a block flow diagram of a second embodiment of the present invention.

Figure 6 is a perspective view showing the appearance of the micro-polluting purification apparatus of the second embodiment of the present invention. Figure 7 is a block flow diagram showing a second application example of the second embodiment of the present invention. [Main component symbol description] 10. External air inlet 11, three-way pipe 12, diverter switch

20, micro-polluting purification equipment 2 2, runner 2 p 1 c丄, adsorption zone 2 ρ π 6 ζ, regeneration desorption zone 2 p 〇ώ J, isolation cooling zone 2 3, adsorption material 30, external air conditioning Box 4 无, clean room process equipment area 41, special process area 12 1324673 4 2, fan filter unit 4 3, windmill 50, process exhaust gas treatment equipment

Claims (1)

+, the scope of application for patents: 1, ~ kind of clean room indoor circulating air purification equipment, mainly connected to the outside air inlet with an outside air air conditioning box (Make Up Air Unit, MAU), the outlet of the external air conditioning box is direct Introducing a clean room process equipment area, the micro-cleaning process equipment area is provided with a micro-pollution purification device and a special process area, and the micro-pollution purification equipment towel is provided with at least “and a structure”, and the adsorption mechanism is coated The cloth has an adsorption layer for adsorbing micro-pollutants contained in the circulating air in the clean room, and the micro-pollution purification device is connected with a special process area of the clean room process equipment area, and the clean room process equipment area is further The exhaust gas treatment equipment is used for processing the gas in the clean room process equipment area, and then discharged to the atmosphere after being treated; thereby purifying the circulating air in the clean room process equipment area . 2. The clean room indoor circulating air purification device according to the above-mentioned patent scope, wherein the adsorption mechanism of the micro-polluting purification device is a rotating wheel, the rotating wheel has an adsorption region and a regeneration desorption region. And - isolated cooling zone, the gas is adsorbed by the adsorption zone of the runner, and then passed through the regeneration zone to make the external gas shatter into pollution exhaust gas, and the runner desorbs the polluted exhaust gas, and then turns to isolate the cooling zone to cool down. The returning wheel is restored to have an adsorption function, and the δ meta-contaminated exhaust gas is decomposed into a gas of non-polluting matter. 3. The clean room indoor circulating air purification device according to the second aspect of the patent scope, wherein the adsorption mechanism is externally shaped as _ money_(R coffee y GyUnder_ sink this as Tower). 4. The clean room indoor circulating air purification device according to claim 2, wherein the outer structure of the rotating mechanism of the adsorption mechanism is a rotating turntable (R〇tary coffee). 5. The clean room indoor circulating air purification device according to item i of the patent application scope, wherein the adsorption mechanism of the 13246673 micro-pollution purification device is an adsorption material, and the adsorption material is a pumping type, and when the adsorption is saturated, The replacement of the adsorbent material is extracted, and the saturated adsorbent material can be sent out to the user for regenerative regeneration. 6, such as the scope of patent application! The clean room indoor circulating air purification device of the item 2, 3, 4 or 5 wherein the adsorption mechanism of the micro-pollution purification device is a honeycomb-like structure, which is made of an inorganic material. 7 4 The clean room indoor circulating air purification device described in the scope of claim 1, 2, 3, 4 or 5, wherein the adsorption mechanism of the micro-pollution purification device is a porous cavity structure, and is made of an inorganic material. . 8. The clean room _ ring air purification device according to the patent item η, wherein the adsorption layer is an adsorbent to adsorb micro-pollutants. 9. The clean room_ring air purification apparatus according to claim w, wherein the adsorption layer is a catalyst to adsorb micro-pollutants. 10. The clean room indoor circulating air purification device according to claim 2, wherein the desorption method of the regenerative desorption region is an electric heating method for desorbing the polluted exhaust gas. 1 1. The clean room chamber ring air purification device according to the second item of the patent, wherein the desorption method of the regenerative desorption region is to desorb the polluted exhaust gas by using combustion heat. 12 The clean room indoor circulating air purification device according to the second item of the patent scope of claim η, wherein the desorption method of the 〇 再生 regeneration desorption zone is to desorb the polluted exhaust gas by means of plasma (p lasma). 13. The clean room indoor circulating air purification device according to item 2 of the patent application scope, wherein the desorption method of the δ Xuan regenerative desorption region is to desorb the polluted waste gas by using waste heat recovery method. For example, if you apply for a patent, 1_2, (10), (10), the material is recycled, and the regenerative bribe _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ It is decomposed by electric heating to a gas without pollutant f. U. For example, the clean room indoor circulating air purification device described in item _2, wherein the polluted exhaust gas is decomposed into a non-polluting substance by a combination of electric heat and coal contact. The clean room indoor circulating air purification device according to the second aspect of the patent, wherein the polluted exhaust gas is decomposed into a non-polluting gas by combustion heat. [18] The clean room indoor circulating air purification device of claim 2, wherein the polluted exhaust gas is decomposed into a non-polluting substance by a combination of combustion heat and a catalyst. The clean room indoor circulating air purification device according to the item 2, wherein the 5 meta-polluted exhaust gas is decomposed into a non-polluting gas by introducing a strong oxidant. 20. The clean room indoor circulating air purification apparatus according to claim 2, wherein the polluted exhaust gas is decomposed into a non-polluting substance by introducing a strong oxidant and a catalyst. 21. The clean room indoor circulating air purification device according to claim 2, wherein the 3 hai/deficient exhaust gas is decomposed into a non-polluting gas by introducing plasma. 2 2. The clean room indoor circulating air purification equipment as described in claim 2, wherein 1324673 is a gas that is decomposed into a non-polluting substance by introducing a combination of plasma and a catalyst. 2 3. The clean room indoor circulating air purification device according to the first aspect of the patent application, wherein the external air inlet and the external air-conditioning box are further provided with another micro-pollution purification device, so that the external air is externally After entering the gas inlet, the first micro-polluting material removal treatment is first performed through the micro-polluting purification device, and the micro-polluting purification device is provided with at least one adsorption mechanism, and the adsorption mechanism is coated with an adsorption layer for adsorption. The micro-contaminants contained in the external air, and the micro-polluted substances are removed and then enter the external air-conditioning box. 2. The clean room indoor circulating air purification device according to claim 1, 2 or 2, wherein the micro-pollution purification device further comprises a windmill, the windmill and the micro/deficit:/ Suihua a is also ready to connect with e and 'to enter gas ※ micro-polluting purification equipment to absorb micro-pollutants. 2. The clean room indoor circulating air purification device according to claim 1, wherein the micro-pollution purification device is provided with a second adsorption mechanism, and the two adsorption mechanisms are connected by a three-way pipe and an external air inlet. The switch is provided with a switch to form a batch replacement device. 2. The clean room indoor circulating air purification device according to claim 1, wherein the micro-pollution purification device is provided with only one adsorption mechanism, and does not perform a switching operation. 2 7. The clean room indoor circulating air purification device as described in claim 1, wherein the special process area of the Shai clean room process equipment area is further provided with at least a fan overrun unit (Fan Filter) Unit, FFU), the fan filter unit is connected with the micro-pollution purification equipment of the clean room process equipment 17 1324673 area for the introduction of gas from the micro-pollution purification equipment into the special process area.