TWI324028B - Method for manufacturing rigid-flex printed wiring board - Google Patents

Method for manufacturing rigid-flex printed wiring board Download PDF

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Publication number
TWI324028B
TWI324028B TW094124501A TW94124501A TWI324028B TW I324028 B TWI324028 B TW I324028B TW 094124501 A TW094124501 A TW 094124501A TW 94124501 A TW94124501 A TW 94124501A TW I324028 B TWI324028 B TW I324028B
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TW
Taiwan
Prior art keywords
wiring board
printed wiring
treatment
rigid
flexible
Prior art date
Application number
TW094124501A
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Chinese (zh)
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TW200618687A (en
Inventor
Fumitaka Aizawa
Katsuhiko Takahashi
Koji Tsurusaki
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Fujikura Ltd
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Publication of TW200618687A publication Critical patent/TW200618687A/en
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Publication of TWI324028B publication Critical patent/TWI324028B/en

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Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4688Composite multilayer circuits, i.e. comprising insulating layers having different properties
    • H05K3/4691Rigid-flexible multilayer circuits comprising rigid and flexible layers, e.g. having in the bending regions only flexible layers
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • H05K3/281Applying non-metallic protective coatings by means of a preformed insulating foil
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/381Improvement of the adhesion between the insulating substrate and the metal by special treatment of the substrate
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4644Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
    • H05K3/4652Adding a circuit layer by laminating a metal foil or a preformed metal foil pattern
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4688Composite multilayer circuits, i.e. comprising insulating layers having different properties
    • H05K3/4694Partitioned multilayer circuits having adjacent regions with different properties, e.g. by adding or inserting locally circuit layers having a higher circuit density
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0779Treatments involving liquids, e.g. plating, rinsing characterised by the specific liquids involved
    • H05K2203/0786Using an aqueous solution, e.g. for cleaning or during drilling of holes
    • H05K2203/0793Aqueous alkaline solution, e.g. for cleaning or etching

Description

九、發明說明: 【發日月所屬之技術領威】 發明領域 本心明係有關於—種具剛性撓性印刷配線板之製造 、、 更°羊而5之’其係有關於一種具有藉由黏合劑,以 外層RPC夾住内層Fpc之結構,且黏合劑可發揮優異之密合 強度之具剛性·撓性印刷配線板之製造方法。 發明背景 首先,舉於第7A〜第7D圖及第8A、第8B圖顯示概示戴 面圖之具剛性-撓性(R_f)3層印刷配線板為例,就一般之密 封形成程序作說明。惟,以下所示之(1)~(8)之程序為通用 者’縱使此程序有些前後顛倒亦無妨,並不對其内容構成 任何限定。 (1) 於電絕緣性之撓性基材lu之一面設置導電構件112 的内層CCL110(第7A圖)將導電構件112加工,而形成電路i 12’。藉此,獲得設有電路112,之内層CCL110,(第7B圖)。在 此,CCL係指敷銅層板(Copper-Clad Laminate)。 (2) 於内層CCL110’設有電路112,之面上黏合覆蓋膜(以 下亦稱為CL)(以熱壓將CL貼合於形成電路之CCL),而獲得 内層FPC(以下亦稱為内層基板)(第7C圖)。在此,覆蓋膜12 0係於電絕緣性之撓性基材121之一面設有黏合劑層122 者。在此,FPC係指撓性配線板(Flexible Printed Circuit)。 (3) 於外層RPC(以下亦稱為外層基板)150之剛性基材1 51上貼合接合構件140(第8B圖)。在此,外層基板150係於 電絕緣性剛性基材151之一面設有導電構件152者(第8A 圖)。另 ’ RPC係指剛性配線板(Rigid Printed Circuit)。 (4) 於内層基板130之上下面藉由點合構件、i4〇B 層疊外層基板150A、150B(以下亦稱積層硬化p藉此,獲 得藉由黏合構件140以2片含RPC之外層基板15〇夾住含Fpc 之内層基板130的結構體(第7D圖)。 (5) 於基板進行開孔(以下亦稱為NC鑽孔處理,圖中未 示)。對以外層基板150A、150B夾住内層基板13〇之結構 體,施行開設用於層間導通之孔的機械加工處理。 (6) 形成電鍍通孔(圖中未示)。於用以層間導通之孔之 内側面施行電鐘處理,而形成通孔。藉此,可謀长内層其^ 板130與外層基板150A、150B之導通。 (7) 形成最外層電路(圖中未示)。舉例言之,於構&夕卜 層基板150A之袁外層之導電構件152A施行餘刻處理,而开3 成電路。 (8) 於外層基板150A、150B形成抗蝕劑(圖中未示)。為 保護藉上述(7)形成之最外層電路,設置由抗蝕劑構成之絕 緣層,以覆蓋外層基板150A、150B之最外面,亦即設有最 外層電路之面。 在藉上述步驟而製成之一般印刷配線板(第9圖)中,採 用使用多種由不同材質構成之構件’將該等組合或層具配 置之結構。是故,當特定構件間之密合力低時,有因熱循 環等之環境試驗或時間變化等,最後在該等特定之構件間 1324028 產生剝離之虞。舉例言之,在銅羯與聚醯亞胺(ρι間)剝離 時,便造成絕緣不良,而不易作為印刷配線板使用。因而, 在多層印刷配線板中,乃要求以適當之密合力使各構件間 貼合。 5 在習知之製法中,有諸如將内層基板130與外層基板1 50B貼合後’在相當於此貼合部之黏合構件14〇B之密合強 度弱之情形。此時’如第10圖所示,易於内層基板130與外 層基板150B間產生剝離。而在此貼合步驟之後之步驟中, 有蚀刻或顯像時藥劑滲入而使成品率大幅降低之虞。結 1〇果,有導致出貨之印刷配線板(以下亦稱為完成基板)之信賴 性降低之虞。 用以解決上述課題之製法有(a)將聚醯亞胺進行放電處 理後,藉驗性處理’以將表面改質之方法(日本專利公開公 報特開平5-279497號),(b)於低溫電漿處理後,以鹼性藥劑 15將聚醯亞胺表面改質之方法(日本專利公開公報特開平6-32 926號),(c)以鹼性溶液將聚醯亞胺膜處理後,以酸性溶液 處理之方法(日本專利公開公報特開平7-03055號),(d)於聚 醯亞胺膜之表面,進行在惰性氣體環境中之電漿處理後, 於同一面施行電漿處理之方法(日本專利公開公報特開平8_ 20 3338號)’(e)在第1氧化劑之存在下,以紫外線照射聚醯亞 胺樹脂表面後,以第2氧化劑將之蝕刻,而將表面改質之方 法(日本專利公開公報特開平9_157417號)。此外,各文獻之 聚醯亞胺相當於構成上述内層基板130之電絕緣性撓性基 材11卜 7 1324028 上述(a)~(e)之習知文獻僅記載為提高密合力,進行所 謂鹼性處理或電漿處理之表面處理,並未明確揭示「藥劑 濃度」、「處理溫度」、「處理時間」等詳細之處理條件。即, 有關將各種處理條件最適當化之表面處理並未有任何記 5載。 ⑴記載適合可耐熱撞擊之覆晶封裝之多層配線板及其 製造方法,就黏合劑層之彈性率或線膨脹係數、黏合劑之 材料調配揭示適當之範圍等(日本專利公開公報特開平9-29 8369 號) 10 (g)記載通孔不易從下層之導體電路剝離之多層印刷配 線板,就作為接合劑層之環氧樹脂之粒子徑或重量調配等 揭示適當之範圍等(日本專利公開公報特開平11-46066號) (h)記載導體層與絕緣層間具優異接合強度之多層印刷 配線板,僅揭示施行粗面化處理之方法(日本專利公開公報 15 特開平10-70367號) ⑴記載撓性印刷配線板用黏合劑,揭示黏合劑之材料 調配(日本專利公開公報特開2001-164226號)。 上述(f)~(i)之習知文獻確實在習知技術之印刷配線板 中使用之黏合劑方面,記載了黏合劑之種類或調配,施行 20 表面處理,但未發現提及最適當條件之密合性提高者。 近年來,在印刷配線板之技術領域中,逐漸朝多層化 發明,而進行超過諸如50層之多層基板之開發。特別是隨 著電子機器之輕薄短小化,而要求藉由撓性印刷配線板連 接剛性配線板或於撓性配線板之一部份或全部重疊剛性配 8 線板而形成之剛性-撓性印刷配線板。是故,在多層化之印 刷配線板方面’對設置點合劑之構件表面之處理方法,期 待明確之處理條件之確立。 【發明内容】 發明概要 本發明即是鑑於上述情況而發明者,其目的在於提供 —種具有藉由黏合構件’將内層基板及外層基板層疊之結 構’且可抑制在黏合構件與内層基板間產生之剝離之具剛 性-撓性印刷配線板之製造方法。 本發明第1態樣之具剛性-撓性印刷配線板之製造方法 為該具剛性-撓性印刷配線板係具有於内層敷銅層板層疊 覆蓋膜,且兩外面由撓性構件構成之内層撓性配線板、一 面由非撓性構件構成之外層剛性配線板及黏合構件者’該 具剛性-撓性印刷配線板之製造方法具有步驟α及步驟 厶,該步驟〇:係將前述内層撓性配線板之前述兩外面進行 驗性處理者;該步驟/3係於經前述驗性處理之前述内層繞 性配線板之前述兩外面藉由前述黏合構件分別層疊前述外 層剛性配線板者。 本發明第2態樣之具剛性-橈性印刷配線板之製造方法 為在上述紅態樣中,於前述步踢α及步驟Θ間更具有步& 丫,該步驟/係使妙財,將經前述祕處理之前述内 層撓性配線板之前述兩外面進行水洗處理者。 本發明第3態樣之具剛性—橈性印刷配線板之製造方法t 為在上述第1態樣中,前述步踢α之驗性處理'辰度在0 1324028 %以上且低於lO.Owt%。 本發明第4態樣之具剛性-撓性印刷配線板之製造方法 為在上述第1態樣中,前述步驟α之鹼性處理時間為30秒以 上,120秒以下。 5Nine, the invention description: [Technical leadership of the sun and the moon] The field of invention is related to the manufacture of rigid flexible printed wiring boards, and the more A method for producing a rigid and flexible printed wiring board in which the adhesive layer is sandwiched between the outer layer FPC and the adhesive layer exhibits excellent adhesion strength. BACKGROUND OF THE INVENTION First, a rigid-flexible (R_f) 3-layer printed wiring board having a rough surface view is shown in FIGS. 7A to 7D and 8A and 8B, and a general sealing forming procedure is described. . However, the procedures (1) to (8) shown below are general-purposes. Even if the program is somewhat reversed, it does not limit the content. (1) The inner layer CCL110 (Fig. 7A) of the conductive member 112 is provided on one surface of the electrically insulating flexible substrate lu to process the conductive member 112 to form the circuit i12'. Thereby, the inner layer CCL 110 provided with the circuit 112 is obtained (Fig. 7B). Here, CCL refers to a copper-clad laminate (Copper-Clad Laminate). (2) A circuit 112 is provided on the inner layer CCL110', and a cover film (hereinafter also referred to as CL) is bonded on the surface (the CL is bonded to the CCL forming the circuit by hot pressing) to obtain an inner layer FPC (hereinafter also referred to as an inner layer). Substrate) (Fig. 7C). Here, the cover film 120 is one in which the adhesive layer 122 is provided on one surface of the electrically insulating flexible substrate 121. Here, FPC refers to a flexible printed circuit (Flexible Printed Circuit). (3) The joint member 140 is bonded to the rigid base material 1 51 of the outer layer RPC (hereinafter also referred to as the outer layer substrate) 150 (Fig. 8B). Here, the outer substrate 150 is provided with a conductive member 152 on one surface of the electrically insulating rigid substrate 151 (Fig. 8A). The other 'RPC' refers to a rigid wiring board (Rigid Printed Circuit). (4) The outer layer substrates 150A and 150B are laminated on the lower surface of the inner substrate 130 by the bonding members and i4〇B (hereinafter also referred to as laminate hardening p), thereby obtaining two RPC-containing outer substrate 15 by the bonding member 140.结构The structure of the inner substrate 130 including the Fpc is sandwiched (Fig. 7D). (5) Opening the substrate (hereinafter also referred to as NC drilling process, not shown). The outer substrate 150A, 150B is sandwiched. The structure of the inner substrate 13A is subjected to a mechanical processing for opening the holes for interlayer conduction. (6) A plated through hole (not shown) is formed, and an electric clock is applied to the inner side of the hole for conducting the interlayer. A through hole is formed, whereby the inner layer of the inner plate 130 and the outer substrate 150A, 150B can be turned on. (7) The outermost circuit (not shown) is formed. For example, in the structure & The conductive member 152A of the outer layer of the layer substrate 150A is subjected to a remnant process to open a circuit. (8) A resist (not shown) is formed on the outer substrate 150A, 150B. The protection is formed by the above (7). The outermost layer circuit is provided with an insulating layer made of a resist to cover the outer substrate 150A, The outermost surface of 150B, that is, the surface of the outermost circuit. In the general printed wiring board (Fig. 9) made by the above steps, a plurality of members made of different materials are used to make the combinations or layers. Therefore, when the adhesion between the specific members is low, there is an environmental test or a time change due to thermal cycling, etc., and finally a peeling occurs between the specific members 1324028. For example, When the copper ruthenium and the polyimine (peg) are peeled off, the insulation is poor, and it is not easy to use as a printed wiring board. Therefore, in the multilayer printed wiring board, it is required to bond the members with an appropriate adhesive force. 5 In the conventional method, for example, when the inner substrate 130 and the outer substrate 150B are bonded together, the adhesion strength of the bonding member 14B corresponding to the bonding portion is weak. At this time, as shown in FIG. As shown, it is easy to cause peeling between the inner substrate 130 and the outer substrate 150B. In the step after the bonding step, there is a possibility that the drug is infiltrated during etching or development, and the yield is greatly lowered. Out The reliability of the printed wiring board (hereinafter also referred to as the completed substrate) is reduced. The method for solving the above problems is (a) after the polyimine is subjected to discharge treatment, and the treatment is performed to improve the surface. (Japanese Patent Laid-Open Publication No. Hei 5-279497), (b) a method of modifying a polyimine surface with an alkaline agent 15 after low-temperature plasma treatment (Japanese Patent Laid-Open Publication No. Hei 6-32) No. 926), (c) a method of treating a polyimine film with an alkaline solution, and treating it with an acidic solution (Japanese Patent Laid-Open Publication No. Hei 7-03055), (d) on the surface of the polyimide film After the plasma treatment in an inert gas atmosphere, the plasma treatment is performed on the same side (Japanese Patent Laid-Open Publication No. Hei 8-20 3338)' (e) in the presence of the first oxidant, irradiated with ultraviolet rays. After the surface of the yttrium imide resin is etched by the second oxidizing agent, the surface is modified (Japanese Patent Laid-Open Publication No. Hei 9-157417). Further, the polyimine of each document corresponds to the electrically insulating flexible substrate 11 constituting the inner substrate 130. 7 1324028 The above-mentioned conventional documents (a) to (e) are only described as improving the adhesion, and the so-called alkali is performed. The surface treatment of the treatment or the plasma treatment does not clearly disclose the detailed treatment conditions such as "agent concentration", "treatment temperature", and "treatment time". That is, there is no record of the surface treatment for most appropriate processing conditions. (1) A multilayer wiring board suitable for a flip chip package which is resistant to thermal shock and a method for producing the same, and an appropriate range of the elastic modulus or coefficient of linear expansion of the adhesive layer and the material of the adhesive are disclosed (Japanese Patent Laid-Open Publication No. 9-- (No. 29, 8369) 10 (g) A multilayer printed wiring board in which the through-hole is not easily peeled off from the conductor circuit of the lower layer, and the appropriate range is disclosed for the particle diameter or weight distribution of the epoxy resin as the adhesive layer (Japanese Patent Laid-Open Publication) (1) A multilayer printed wiring board having excellent bonding strength between a conductor layer and an insulating layer, and only a method of performing a roughening treatment is disclosed (Japanese Patent Laid-Open Publication No. Hei 10-70367) (1) A binder for a flexible printed wiring board is disclosed as a material for a binder (Japanese Patent Laid-Open Publication No. 2001-164226). The above-mentioned conventional documents (f) to (i) do not describe the type or formulation of the adhesive in the adhesive used in the printed wiring board of the prior art, and perform the surface treatment of 20, but have not found the most appropriate condition. The improvement of the adhesion. In recent years, in the field of the technical field of printed wiring boards, the invention has been gradually progressed to a multilayer, and development of a multilayer substrate exceeding 50 layers has been carried out. In particular, with the lightness and thinness of electronic equipment, it is required to connect a rigid wiring board by a flexible printed wiring board or a rigid-flexible printing formed by partially or completely overlapping one of the flexible wiring boards with a rigid 8-wire board. Wiring board. Therefore, in the case of a multi-layered printed wiring board, the treatment of the surface of the component to which the dispensing agent is disposed is expected to be established. SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and an object thereof is to provide a structure having a structure in which an inner layer substrate and an outer layer substrate are laminated by an adhesive member, and it is possible to suppress generation between an adhesive member and an inner layer substrate. A method of manufacturing a rigid-flexible printed wiring board. A method of manufacturing a rigid-flexible printed wiring board according to a first aspect of the present invention is characterized in that the rigid-flexible printed wiring board has an inner layer of a copper-clad laminate laminated film and an outer layer of a flexible member. The flexible wiring board and the outer layer rigid wiring board and the bonding member which are formed of a non-flexible member, the manufacturing method of the rigid-flexible printed wiring board has a step α and a step 厶: the inner layer is scratched The above-mentioned two outer surfaces of the flexible wiring board are subjected to an inspective treatment; and the step/3 is performed by laminating the outer layer rigid wiring boards by the bonding members, respectively, on the outer surfaces of the inner layer winding wiring sheets subjected to the above-mentioned inspective treatment. According to a second aspect of the present invention, in a method of manufacturing a rigid-twisted printed wiring board, in the above-described red state, there is a step & 于 between the step kicking α and the step, and the step/system makes the money, The two outer surfaces of the inner flexible wiring board subjected to the aforementioned secret treatment are subjected to water washing treatment. A method for manufacturing a rigid-twisted printed wiring board according to a third aspect of the present invention is characterized in that, in the first aspect, the inspection process of the step kick α is 0 13240 28 % or more and less than 10 wt. %. According to a fourth aspect of the present invention, in the first aspect, the alkaline treatment time of the step α is 30 seconds or more and 120 seconds or shorter. 5

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20 本發明第5態樣之具剛性-撓性印刷配線板之製造方法 為在上述第1態樣中,前述步驟α之鹼性處理液溫為25°C以 上且低於55°C。 本發明第6態樣之具剛性-撓性印刷配線板之製造方法 為在上述第2態樣中,前述步驟7之鈣濃度為20ppm以上。 本發明之具剛性-撓性印刷配線板之製造方法首先在 步驟α中,藉將内層FPC(内層基板)之兩外面進行驗性處 理,而將構成内層FPC兩外面之撓性構件(例如聚醯亞胺) 之表層部改質。接著,在步驟中,於藉鹼性處理而已改 質之内層FPC之兩外面分別藉黏合構件層疊外層RPC,以接 合非撓性構件(例如環氧玻璃)。結果,黏合構件對已改質之 内層FPC(内層基板)之兩外面具有優異之密合力。 換言之,由於本發明之製造方法藉僅對具撓性之内層 FPC施行鹼性處理,黏合構件可使内層FPC與外層RPC間之 密合力大幅提高,故有助於提供信賴性優異且具有穩定之 密合力之具剛性-撓性印刷配線板之製造方法。 圖式簡單說明 第1A圖〜第1D圖顯示本發明具剛性-撓性印刷配線板 之製造方法一例之概示截面圖。 第2A圖、第2B圖係顯示用於第1八圖~第10圖之印刷配 10 1324028 線板之外層RPC之製造方法一例的概示截面圖。 第3圖係顯示試料A之剝離強度之圖表。 第4圖係顯示試料B之剝離強度之圖表。 第5圖係顯示試料C之剝離強度之圖表。 5 第6圖係顯示試料D之剝離強度之圖表。 第7A圖〜第7D圖係顯示習知具剛性-撓性印刷配線板 之製造方法一例之概示截面圖。 第8A圖、第8B圖係顯示用於第7八圖~第7D圖之外層RP C之製造方法一例之概示截面圖。 10 第9圖係顯示習知具剛性-撓性印刷配線板之製造方法 —例之概示截面圖。 第10圖係顯示在構成印刷配線板之内層FPC與黏合構 件間產生剝離之狀態之概示截面圖。 C實施方式3 15 較佳實施例之詳細說明 以下,依圖式,說明本發明具剛性-撓性印刷配線板之 一實施形態。 第1A圖〜第1D圖係顯示本發明具剛性-撓性印刷配線 板之製造方法一例之概示截面圖,為可輕易理解,而將構 20 成要件適當地強調而描繪。又,第2A圖、第2B圖係顯示用 於第1A圖~第1D圖之印刷配線板之外層RPC之製造方法一 例的概示截面圖。 如第1D圖所示,本發明之製造方法所適用之具剛性-撓性印刷配線板至少具有於内層CCL10’層疊覆蓋膜20,且 11 1324028 兩外面由聚醯亞胺構成之内層FPC30、一面由環氧玻璃構成 之外層RPC50A、50B及接合層40。此外,CCL、FPC、RP C分別為敷銅層板(Copper-Clad Laminate)、撓性配線板(F1 exible Printed Circuit)、剛性配線板(Rigid Printed Circuit) 5 之簡稱。 在此,具剛性-撓性印刷配線板係以3層印制配線板為 例’來詳述其製造方法,只要不損害本發明鹼性處理之作 用、效果,以下所示之(1)〜(8)之程序可顛倒是無須贅言的。 Φ ⑴於内層CCL10形成電路12’。使用於由聚醯亞胺構成 10 之撓性基材11之一面設有銅箔12者(第1A圖)作為内層(:(:^ 10,藉將銅箔12進行餘刻處理,形成電路12,,而獲得設有 電路之内層CCL10’(第1B圖)。 (2) 於内層CCL10設有電路12,之面上黏合覆蓋膜2〇(以 熱壓將CL貼合於形成電路之CCL)。在此,使用於由聚醯亞 15胺構成之撓性基材21之一面設有黏合劑層22者作為覆蓋膜 20,藉由黏合劑層22,將内層基板10’與覆蓋膜2〇重疊,藉 • 此,獲得内層FPC(以下亦稱為内層基板)3〇(第1(:圖)。 (3) 將内層基板30之兩外面進行驗性處理(以下稱為步 驟α)。在此’在管理線路速度之裝置中,將對内層Fpc3〇 2〇之兩外面濃度及溫度管理為一定之鹼性水溶液以雨淋式噴 灑至該基板,藉此,進行内層F P C 3 0兩外面之鹼性處理。藉 此,獲得業經鹼性處理之内層基板30。 (4) 與内層基板30分開而另外準備於外層Rpc(以下亦 稱為外層基板)50貼合由黏合片構成之黏合構件4〇。使用於 12 1324028 由環氧玻璃構成之剛性基材51之一面設有銅箔52者(第2A 圖)作為外層基板5〇 ’藉於外層基板50之剛性基材51上貼合 黏合構件4〇(第2B圖)而獲得。 (5)於在上述(3)中經鹼性處理之内層基板3〇之兩外面 5分別藉由由黏合片構成之黏合構件40層疊上述(4)之外層基 板(以下稱為步驟/3 (積層硬化))。準備如第2B圖所示,分別 貼合接合構件4〇A、40B之2個外層基板5〇A、50B。當層疊 時,層疊成於内層基板30之兩面接合設置於2個外層基板5〇 A、50B之各黏合構件40A、40B(第1D圖)。進行此層疊時, 10亦可適當地由外層基板5〇A、50B之外側往内側之方向加壓 或加熱。 藉上述步驟(1)〜(5),可製作第id圖所示之具剛性_撓性 之3層印刷配線板。此外,雖圖中未示,但可對第id圖之3 層印刷配線板適當地進行以下之步驟(6)〜(9)。 15 (6)於基板進行開孔(以下亦稱為NC鑽孔處理,圖中未 示)。對以外層基板50A、50B夾住内層基板30之結構體, 施行開设用於層間導通之孔之機械加工處理(圖中未示)。 (7) 形成電鍍通孔。於用以層間導通之孔之内側面施行 電鐘處理,而形成通孔。藉此,可使内層與外層導通(圖中 20 未示)。 (8) 形成最外層電路(圖中未示舉例言之,於構成外 層基板50A之表外層之銅箔52A施行钱刻處理,而形成電 路。 (9) 於外層基板50A、50B形成抗钱劑(圖中未示)。為保 13 丄以4028In the first aspect of the invention, in the first aspect, the alkaline treatment liquid temperature in the step (α) is 25 ° C or more and lower than 55 ° C. A method of producing a rigid-flexible printed wiring board according to a sixth aspect of the present invention is characterized in that in the second aspect, the calcium concentration in the step 7 is 20 ppm or more. The manufacturing method of the rigid-flexible printed wiring board of the present invention firstly performs the physical inspection of the outer surfaces of the inner layer FPC (for example, the poly layer) by the outer surface of the inner layer FPC (the inner layer substrate) in the step α. The surface layer of the quinone imine is modified. Next, in the step, the outer layers of the inner layer FPC which have been modified by the alkaline treatment are laminated with the outer layer RPC by the bonding members to join the non-flexible members (e.g., epoxy glass). As a result, the bonding member has an excellent adhesion to both outer surfaces of the modified inner layer FPC (inner substrate). In other words, since the manufacturing method of the present invention performs the alkaline treatment only on the flexible inner layer FPC, the bonding member can greatly improve the adhesion between the inner layer FPC and the outer layer RPC, thereby contributing to providing excellent reliability and stability. A method of manufacturing a rigid-flexible printed wiring board with an adhesive force. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1A to Fig. 1D are schematic cross-sectional views showing an example of a method of manufacturing a rigid-flexible printed wiring board of the present invention. Fig. 2A and Fig. 2B are schematic cross-sectional views showing an example of a manufacturing method for the outer layer RPC of the printed wiring 10 1324028 for the first to eighth drawings. Fig. 3 is a graph showing the peel strength of the sample A. Fig. 4 is a graph showing the peel strength of the sample B. Fig. 5 is a graph showing the peel strength of the sample C. 5 Fig. 6 is a graph showing the peel strength of the sample D. 7A to 7D are schematic cross-sectional views showing an example of a method of manufacturing a rigid-flexible printed wiring board. 8A and 8B are schematic cross-sectional views showing an example of a manufacturing method for the outer layer RP C of the 7th to 7th drawings. 10 Fig. 9 is a schematic cross-sectional view showing a conventional method of manufacturing a rigid-flexible printed wiring board. Fig. 10 is a schematic cross-sectional view showing a state in which peeling occurs between the inner layer FPC constituting the printed wiring board and the bonding member. C. Embodiment 3 15 DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an embodiment of a rigid-flexible printed wiring board according to the present invention will be described with reference to the drawings. 1A to 1D are schematic cross-sectional views showing an example of a method for producing a rigid-flexible printed wiring board according to the present invention, and the components are appropriately emphasized, and the components are appropriately emphasized. Further, Fig. 2A and Fig. 2B are schematic cross-sectional views showing an example of a method of manufacturing the outer layer RPC of the printed wiring board of Figs. 1A to 1D. As shown in Fig. 1D, the rigid-flexible printed wiring board to which the manufacturing method of the present invention is applied has at least the inner layer FCL30 and the outer layer CCL10' laminated cover film 20, and 11 1324028 The outer layers RPC 50A, 50B and the bonding layer 40 are composed of epoxy glass. Further, CCL, FPC, and RP C are abbreviations of a copper-clad laminate, a flexible printed wiring (F1 exible printed circuit), and a rigid printed wiring (Rigid Printed Circuit) 5, respectively. Here, the rigid-flexible printed wiring board is described by taking a three-layer printed wiring board as an example. The manufacturing method will be described in detail as long as the effects and effects of the alkaline treatment of the present invention are not impaired, and (1) below is shown. (8) The procedure can be reversed without rumors. Φ (1) The circuit 12' is formed in the inner layer CCL10. The copper foil 12 (FIG. 1A) provided on one surface of the flexible substrate 11 made of polyimide polyimide is used as an inner layer (: (:: 10), and the copper foil 12 is subjected to a process to form a circuit 12 The inner layer CCL10' (Fig. 1B) provided with the circuit is obtained. (2) The circuit 12 is provided on the inner layer CCL10, and the cover film 2 is adhered on the surface (the CL is bonded to the CCL forming the circuit by hot pressing) Here, as the cover film 20, the adhesive layer 22 is provided on one surface of the flexible substrate 21 made of polyfluorene 15 amine, and the inner substrate 10' and the cover film 2 are bonded by the adhesive layer 22. In this way, the inner layer FPC (hereinafter also referred to as the inner layer substrate) 3 is obtained (first (: figure). (3) The outer surfaces of the inner layer substrate 30 are subjected to an annulous treatment (hereinafter referred to as step α). In the device for managing the line speed, the two outer layers of the inner layer Fpc3〇2〇 are treated with a certain alkaline aqueous solution and sprayed onto the substrate by rain, thereby performing the inner layer FPC 30. The alkaline treatment is performed, whereby the inner layer substrate 30 which is subjected to the alkaline treatment is obtained. (4) Separate from the inner substrate 30 and additionally prepared Rpc (hereinafter also referred to as outer layer substrate) 50 is bonded to an adhesive member 4A made of an adhesive sheet. It is used in 12 1324028, which is provided with a copper foil 52 on one side of a rigid substrate 51 made of epoxy glass (Fig. 2A). The outer substrate 5' is obtained by bonding the adhesive member 4A (Fig. 2B) to the rigid substrate 51 of the outer substrate 50. (5) The inner substrate 3 which has been subjected to alkaline treatment in the above (3) The outer surfaces of the above-mentioned (4) outer layer substrates (hereinafter referred to as step /3 (layer hardening)) are laminated on the outer surfaces 5 by the adhesive members 40. The preparation is as shown in Fig. 2B, and the joint members 4 are respectively attached. Two outer layers 5A and 50B of A and 40B. When laminated, the adhesive members 40A and 40B which are laminated on the both surfaces of the inner layer substrate 30 and joined to the two outer substrates 5A and 50B are bonded to each other (Fig. 1D). When this lamination is performed, 10 may be appropriately pressed or heated from the outer side of the outer layer substrates 5A, 50B to the inner side. By the above steps (1) to (5), the article shown in the id chart can be produced. Rigid-flexible 3-layer printed wiring board. In addition, although not shown in the figure, it can be applied to the 3-layer printed wiring board of the id diagram. The following steps (6) to (9) are performed locally. 15 (6) Opening the substrate (hereinafter also referred to as NC drilling processing, not shown). The inner substrate 30 is sandwiched between the outer substrates 50A and 50B. The structure is provided with a mechanical processing (not shown) for opening the holes between the layers. (7) Forming a plated through hole, and performing an electric clock treatment on the inner side of the hole for conducting the layers to form a pass Therefore, the inner layer and the outer layer can be electrically connected (not shown in Fig. 20). (8) The outermost circuit is formed (not shown in the figure, the copper foil 52A constituting the outer layer of the outer substrate 50A is engraved. Processed to form a circuit. (9) An anti-money agent (not shown) is formed on the outer substrate 50A, 50B. To protect 13 丄 to 4028

10 1510 15

20 護藉上述(7)形成之最外層電路,設置由抗蝕劑構成之絕緣 層,以覆蓋外層基板之最外面,亦即設有最外層電路之面。 本發明之具剛性-撓性印刷配線板之製造方法為在上 述步驟(1)~(9)中,至少具有步驟“及步驟卢者。藉具有步 驟α及步驟冷,黏合層對業經改質之内層FPC兩外面可具有 優異之密合力。是故,由於本發明之製造方法可使内層FP C與外層RPd密合力提高故可製造信賴性優異且具有 穩定之密合力之具剛性撓性印刷配線板β 藉步驟α之驗性處理所得之密合力的作用若規定鹼性 可進—步提高。舉例言之驗性處理漠度〜 t%)之知:佳範圍為0 25以上且低於ι〇 〇,更佳為〇 以上,4 0以下。又,驗性未加 、 〜理時間(秒)之較佳範圍為30以上,120 進乂驗性處理液溫(。〇之較佳範圍為25以上且低 於”,更佳為0.25以上,4〇以下。 - 又,除此之外 步驟r,該㈣/ 前述步驟α及步驟点間更具有 ^ y係使用加鈣水,將經前述鹼性處理之内 性處理之/面進财洗處理者。_加轉7,可擴大驗 : 條件之較絲®。這是可提高大量生產時之藥 的自由度或緩和程序控制性之故,進而可構築廉價 且穩疋之製造線。 =步驟7之加弼水而得之上述作用若規定其濃度可進 一步提高。鈣濃度(ppm)之較佳範圍為2〇以上,以25〇以上 為佳。此夕卜,步驟α (驗性處理)與步驟r(使用蝴水之水 洗)間或步^與步驟W積層硬化)間宜設置使用諸如r〇 14 水、離子錄水之水洗處理。 在驗险處理使用之藥劑在後述實施例中係舉20 The outermost circuit formed by the above (7) is provided with an insulating layer made of a resist to cover the outermost surface of the outer substrate, that is, the surface of the outermost circuit. The manufacturing method of the rigid-flexible printed wiring board of the present invention has at least the steps "and the steps" in the above steps (1) to (9). By the step α and the step cooling, the adhesive layer is modified. The outer layer of the inner layer FPC can have excellent adhesion. Therefore, since the manufacturing method of the present invention can improve the adhesion between the inner layer FP C and the outer layer RPd, it is possible to manufacture a rigid flexible printing which is excellent in reliability and has a stable adhesive force. The effect of the adhesion force obtained by the inspection process of the wiring board β by the step α can be improved if the alkalinity is specified. For example, the test treatment indifference ~ t%) is known: the good range is 0 25 or more and lower 〇〇 〇〇 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , It is 25 or more and less than ", more preferably 0.25 or more, and 4" or less. - In addition, in addition to the step r, the (4) / the above step α and the step point have more y-type use of calcium-added water, The above-mentioned alkaline treatment of the intrinsic treatment / face into the financial processing processor. _ plus 7, can be expanded Test: The condition of Silk®. This is to improve the degree of freedom of the drug in mass production or to ease the control of the program, and to build an inexpensive and stable manufacturing line. If the concentration is specified, the concentration can be further increased. The preferred range of the calcium concentration (ppm) is 2 Å or more, preferably 25 Å or more. In addition, step α (initial treatment) and step r (washing with water of butterfly water) It is preferable to use a water washing treatment such as r〇14 water or ion-recording water between the steps or steps and the step W hardening. The agent used in the inspection process is lifted in the embodiment to be described later.

化納水♦液,但品種及組成並未特別限定。又欠Z 後述實施例中係舉使用氣化約水溶液之例,但品: 5並未特別限定。 及成 實施例 以下,就從藉於内層基板施行鹼性處理,而將内層基 板之表面改質’使其與黏合劑層之密合力提高的觀點對 驗11處理之各條件及加弼水之辦濃度評價之結果加以詳 10 述。 (第1實施例) 在本例中,在鹼性處理使用之藥劑係使用氫氧化鈉水 溶液(NaOH(aq)) ’將鹼性處理之濃度在〇丨~ 1〇 〇wt%之範圍 改變’藉上述步驟(1)〜(5),製成由第1£)圖所示之結構構成 15之具剛性-撓性3層印刷配線板。此時,除驗性處理之濃度 以外之其他製作條件皆相同。匯整製作條件而顯示於表1。 另,本例所製作之印刷配線板稱為試料A。 表1 ♦印刷配線板之構成材料 [内層CCL]兩面銅箔18ym,聚酿亞胺25ym,黏合劑1〇〆 [覆蓋膜(CL)]聚酿亞胺25 // m,黏合劑25 # m [外層RPC] —面銅箔18ym,環氧玻璃lOOym [黏合片〗25以 ‘試料A之藥劑處理條件 [絵性處理]濃度:0.1~10.0[wt%] ’液溫:35[°c],時間:6〇[秒] [RO水水洗]液溫··室溫,時間:3〇[秒] [力σ妈水水洗]濃度:5〇〇[ppm],液溫:室溫,時間:45[秒] [RO水水洗]液溫:室溫,時間:3〇丨秒1_ 15 1324028 對改變鹼性處理之濃度而製成之試料A進行以JIS c 6 471為標準之剝離強度試驗。此時’技伸速度為5〇mm/min, 溫度為常溫(室溫)。然後,以JIS C 5016 8.1.6為標準,算 出剝離強度(N/cm)。 5 第3圖係顯示改變驗性處理之濃度而製成之試料A之剝 離強度。惟,於第3圖亦一併揭示為進行比較而未施行鹼性 處理之試料的結果(明示為無處理)。此外,剝離強度未特 別設限’為以10個試料所得之數值的平均值。 9 由第3圖可明白以下之點。 10 (la)由於當驗性處理之濃度(wt%)低於0.1時,剝離強度 低,故視為驗性處理不夠。 (lb) 相反地,當鹼性處理之濃度(wt%)高於ι〇·〇時,同 樣地剝離強度仍低,故視為鹼性處理過度。 (lc) 暗示在鹼性處理之濃度(wt%)為0 25以上且低於1〇 15 0之範圍,施行鹼性處理,可獲得剝離強度之提高。特別是 當令驗性處理之濃度在〇 25以上,4 〇以下之範圍時,較無 ^ 處理可穩定獲得約3倍以上之剝離強度,故較佳。 因而’可知為使印刷配線板具有更穩定之剝離強度, 需使鹼性處理之濃度在適當之範圍。 2〇 (第2實施例) 在本例中’在鹼性處理使用之藥劑係使用氫氧化納水 溶液(NaOH(aq)) ’將鹼性處理之時間在1〇~6〇〇秒之範圍改 變’藉上述步驟(1)〜(5),製成由第1〇圖所示之結構構成之 具剛性-撓性3層印刷配線板。此時,除鹼性處理之濃度以 16 1324028 外之其他製作條件皆相同。匯整製作條件而顯示於表2。 另’本例所製作之印刷配線板稱為試料B。 __表2 ♦印刷配線板之構成材料-- [内層CCL]兩面銅箔18/zm,聚醯亞胺25//111,黏合,1〇#m [覆蓋膜(CL)]聚醯亞胺25//m,黏合劑25//m [外層RPC]—面銅箔18//m,環氧玻璃1〇〇 [黏合片]25# m _♦試料B之藥劑處理條件 ~ ^- [鹼性處理]濃度:1.0[wt%],液溫:31 2 3[〇c],時間:1〇~6〇〇[秒] [RO水水洗]液溫:室溫,時間:3〇[秒] ,[加妈水水洗]濃度:500[ppm],液溫:室溫,時間:45[秒] 17 1 [RO水水洗]液溫:室溫,時間:3〇丨耖1 2 對改變鹼性處理之時間而製成之試料B進行與第丨實施 3 例相同之剝離強度試驗,算出剝離強度(N/cm)。 第4圖係顯示改變鹼性處理之時間而製成之試料B之剩 離強度。惟,於第4圖亦一併揭示為進行比較而未施行鹼性 處理之試料的結果(明示為未處理)。此外,剝離強度未特別 設限,為以10個試料所得之數值的平均值。 • 10 由第4圖可明白以下之點。 (2a)由於當鹼性處理之時間(秒)低於3〇時,剝離强声 低,故視為驗性處理不夠。 (2b)相反地,當鹼性處理之時間(秒)高於12〇時,同樣 地剝離強度仍低,故視為鹼性處理過度。 15 (2c)當鹼性處理之時間(秒)為30以上,12〇以下+〜 卜之乾圍 時,較無處理可穩定獲得約8倍以上之剝離強度,故較_ 因而’可知為使印刷配線板具有更穩定之剝離強戶 需使鹼性處理之時間在適當之範圍。 1324028 (第3實施例) 在本例中’在驗性處理使用之藥劑係使用氫氧化納水 溶液(NaOH(aq)) ’將鹼性處理之溫度(液溫)在15〜55。〇之範 圍改變,藉上述步驟(1)〜(5),製成由第iD圖所示之結構構 5成之具剛性-撓性3層印刷配線板。此時,除驗性處理之溫 度(液溫)以外之其他製作條件皆相同。匯整製作條件而顯示 於表3。另’本例所製作之印刷配線板稱為試料^。 表3 , ♦印刷配線板之構成材料 [内層CCL]兩面銅箔18//m ’聚醯亞胺25#m,黏合劑10;im [覆蓋膜(CL)]聚醯亞胺25 m,黏合劑25 y m [外層RPC]—面銅箔18//m’環氧玻璃iQOym [黏合片]25m ♦試料C之藥劑處理條件 ' -- [鹼性處理]濃度:l.〇[wt%],液溫:15〜55[t],時間:60[秒] [RO水水洗]液溫:室溫’時間:30[秒] [加鈣水水洗]濃度:500[ppm],液溫··室溫,時間:45[秒] [RO水水洗]液溫:室溫,時間:30[秒] 對改變鹼性處理之溫度(液溫)而製成之試料c進行與 籲10第1實施例相同之剝離強度試驗,算出剝離強度(N/cm)。 第5圖係顯示改變鹼性處理之溫度(液溫)而製成之試料 C之強度。惟,於第5圖亦一併揭示為進行比較而未施行鹼 性處理之試料的結果(明示為無處理)。此外,剝離強度未特 別設限’為以10個樣品所得之數值的平均值。 15 由第5圖可明白以下之點。 (3a)由於當驗性處理之溫度(液溫)低於25它時,剝離強 度低,故視為鹼性處理不夠。 (3b)相反地,當鹼性處理之溫度(液溫)高於55。〇時,同 18 1324028 樣地剝離強度仍低,故視為驗性處理過度。 (3c)當令鹼性處理之溫度(液溫)它在25以上,55以下之 範圍時’較無處理可穩定獲得約8倍以上之剝離強度,故較 佳。 因而’可知為使印刷配線板具有更穩定之剝離強度, 需使驗性處理之溫度(液溫)在適當之範圍。 (第4實施例)The water is ♦ liquid, but the variety and composition are not particularly limited. Further, in the embodiment described later, an example in which a vaporized aqueous solution is used is used, but the product: 5 is not particularly limited. In the following, the conditions of the treatment of the test 11 and the addition of the water are carried out from the viewpoint of performing the alkaline treatment by the inner layer substrate and modifying the surface of the inner layer substrate to improve the adhesion between the inner layer substrate and the adhesive layer. The results of the concentration evaluation are described in detail. (First Embodiment) In this example, the amount of the alkaline treatment was changed in the range of 〇丨~1〇〇wt% using a sodium hydroxide aqueous solution (NaOH (aq)) in the chemical treatment used in the alkaline treatment. By the above steps (1) to (5), a rigid-flexible three-layer printed wiring board having the structure 15 shown in Fig. 1) is produced. At this time, the production conditions other than the concentration of the test treatment are the same. The production conditions are summarized in Table 1. In addition, the printed wiring board produced in this example is called sample A. Table 1 ♦ Composition of printed wiring board [Inner layer CCL] Two-sided copper foil 18ym, polynitrene 25ym, adhesive 1〇〆 [cover film (CL)] Polyimine 25 // m, adhesive 25 # m [Outer layer RPC] - Foil copper foil 18ym, Epoxy glass lOOym [Adhesive sheet] 25 'Processing conditions of sample A [絵性处理] Concentration: 0.1~10.0 [wt%] 'Liquid temperature: 35[°c] , time: 6 〇 [seconds] [RO water wash] liquid temperature · room temperature, time: 3 〇 [seconds] [force σ mom water wash] concentration: 5 〇〇 [ppm], liquid temperature: room temperature, time :45 [sec] [RO water washing] Liquid temperature: room temperature, time: 3 sec. 1_ 15 1324028 The sample A prepared by changing the concentration of the alkaline treatment was subjected to a peel strength test based on JIS c 6 471. . At this time, the technical stretching speed was 5 〇mm/min, and the temperature was normal temperature (room temperature). Then, the peel strength (N/cm) was calculated in accordance with JIS C 5016 8.1.6. 5 Fig. 3 shows the peeling strength of sample A prepared by changing the concentration of the anatizing treatment. However, the results of the samples which were not subjected to the alkaline treatment for comparison (expressed as no treatment) are also disclosed in Fig. 3. Further, the peel strength is not particularly limited to the average value of the values obtained by 10 samples. 9 The following points can be understood from Figure 3. 10 (la) Since the concentration (wt%) of the test treatment is less than 0.1, the peel strength is low, so it is considered that the test treatment is insufficient. (lb) Conversely, when the concentration (wt%) of the alkaline treatment is higher than that of ι〇·〇, the peel strength is still low, and it is considered to be excessively alkaline. (lc) It is suggested that when the concentration (wt%) of the alkaline treatment is in the range of 0 25 or more and less than 1 〇 15 0, the alkaline treatment is performed to obtain an improvement in the peel strength. In particular, when the concentration of the test treatment is in the range of 〇 25 or more and 4 〇 or less, it is preferable to obtain a peel strength of about 3 times or more stably without the treatment. Therefore, it is known that the printed wiring board has a more stable peel strength, and the concentration of the alkaline treatment needs to be in an appropriate range. 2〇 (Second Embodiment) In this example, 'the agent used in the alkaline treatment uses an aqueous solution of sodium hydroxide (NaOH (aq))' to change the time of alkaline treatment in the range of 1 〇 to 6 〇〇 seconds. By the above steps (1) to (5), a rigid-flexible three-layer printed wiring board having the structure shown in Fig. 1 is produced. At this time, the other conditions except the alkaline treatment were the same as those of 16 1324028. The production conditions are summarized in Table 2. The printed wiring board produced in this example is referred to as sample B. __Table 2 ♦Composition of printed wiring board -- [Inner layer CCL] Two-sided copper foil 18/zm, Polyimide 25//111, bonded, 1〇#m [Cover film (CL)] Polyimine 25 / / m, adhesive 25 / / m [outer RPC] - copper foil 18 / / m, epoxy glass 1 〇〇 [adhesive sheet] 25 # m _ ♦ sample B treatment conditions ~ ^- [alkali Sexual treatment] concentration: 1.0 [wt%], liquid temperature: 31 2 3 [〇c], time: 1 〇 ~ 6 〇〇 [seconds] [RO water wash] liquid temperature: room temperature, time: 3 〇 [seconds ], [加妈水洗洗] Concentration: 500 [ppm], liquid temperature: room temperature, time: 45 [seconds] 17 1 [RO water wash] liquid temperature: room temperature, time: 3〇丨耖1 2 change The sample B prepared by the alkaline treatment was subjected to the same peel strength test as in the third example, and the peel strength (N/cm) was calculated. Fig. 4 shows the residual strength of the sample B prepared by changing the time of the alkaline treatment. However, the results of the samples which were not subjected to the alkaline treatment (expressed as untreated) were also disclosed in Fig. 4. Further, the peel strength was not particularly limited and was an average value of the values obtained by 10 samples. • 10 The following points can be understood from Figure 4. (2a) Since the peeling is low when the time (seconds) of the alkaline treatment is less than 3 Å, it is considered that the testability is insufficient. (2b) Conversely, when the time (seconds) of the alkaline treatment is higher than 12 Å, the peel strength is still low, and it is considered to be excessively alkaline. 15 (2c) When the time (seconds) of alkaline treatment is 30 or more, and the dry circumference of 12 〇 or less + ~ 卜, the peel strength of about 8 times or more is stably obtained without treatment, so it is known that Printed wiring boards have a more stable peeling strength. The time required for alkaline treatment is within an appropriate range. 1324028 (Third embodiment) In this example, the temperature used for the alkaline treatment (liquid temperature) was 15 to 55 using a sodium hydroxide aqueous solution (NaOH (aq)). The range of 〇 varies, and by the above steps (1) to (5), a rigid-flexible three-layer printed wiring board having the structure shown in Fig. iD is formed. At this time, the production conditions other than the temperature (liquid temperature) of the qualitative treatment were the same. The production conditions are summarized and shown in Table 3. The printed wiring board produced in this example is called a sample ^. Table 3, ♦ Composition of printed wiring board [Inner layer CCL] Two-sided copper foil 18//m 'Polyimide 25#m, adhesive 10; im [Cover film (CL)] Polyimine 25 m, bonded Agent 25 ym [outer layer RPC] - copper foil 18 / / m 'epoxy glass iQOym [adhesive sheet] 25m ♦ sample C treatment conditions ' -- [alkaline treatment] concentration: l. 〇 [wt%], Liquid temperature: 15~55[t], time: 60[seconds] [RO water washing] liquid temperature: room temperature 'time: 30 [seconds] [calcium water washing] concentration: 500 [ppm], liquid temperature·· Room temperature, time: 45 [sec] [RO water washing] Liquid temperature: room temperature, time: 30 [sec] The sample c prepared by changing the temperature (liquid temperature) of the alkaline treatment was carried out with the first implementation of the call 10 In the same peel strength test, the peel strength (N/cm) was calculated. Fig. 5 shows the strength of the sample C prepared by changing the temperature (liquid temperature) of the alkaline treatment. However, the results of the samples which were not subjected to the alkali treatment (compared as no treatment) were also disclosed in Fig. 5. Further, the peel strength is not particularly limited to the average value of the values obtained by 10 samples. 15 The following points can be understood from Figure 5. (3a) Since the peeling strength is low when the temperature (liquid temperature) of the test treatment is lower than 25, it is considered that the alkaline treatment is insufficient. (3b) Conversely, when the temperature of the alkaline treatment (liquid temperature) is higher than 55. At the same time, the peel strength of the sample is still low as in the case of 18 1324028, so it is regarded as excessive treatment. (3c) When the temperature of the alkaline treatment (liquid temperature) is in the range of 25 or more and 55 or less, it is preferable that the peeling strength of about 8 times or more is stably obtained without treatment. Therefore, it can be seen that in order to provide a more stable peeling strength of the printed wiring board, it is necessary to set the temperature (liquid temperature) of the inspection process to an appropriate range. (Fourth embodiment)

10 1510 15

在本例中,將於鹼性處理(步驟α)之後進行,使用加鈣 水,將經鹼性處理之内層FPC兩外面進行水洗處理的步驟7 之鈣濃度在在〇〜lOOOppm之範圍改變,藉上述步驟(1)〜(5), 製成由第1D圖所示之結構構成之具剛性-撓性3層印刷配線 板。此時,在鹼性處理使用之藥劑係使用氫氧化鈉水溶液(N aOH(aq)),將鹼性處理之溫度(液溫丨在^^穴之範圍改 變。其他點並未改變,除鹼性處理之濃度及加鈣水之鈣濃 度以外的其他製作條件皆相同。匯整製作條件而顯示於表 4。另,本例所製作之印刷配線板稱為試料d。 表4 ♦印刷配線板之構成材料 ' '~~~' [内層CCL]兩面銅箔18;zm,聚醯亞胺25从m,黏合劑i〇ym [覆蓋膜(CL)]聚酿亞胺25 // m,黏合劑25 // m [外層RPC]—面銅箔18ym,環氧玻璃lOOyrn [黏合片]25//m ♦試料D之藥劑處理條件 [驗性處理]濃度:ο·ι〜i〇.〇[wt%],液溫:35pc],時間:6〇[秒] [RO水水洗]液溫:室溫,時間:30[秒] [力πί弓水水洗]濃度:〇〜l〇〇〇[ppm],液溫:室溫 [RO水水洗]液溫:室溫,時間:3〇丨秒1 時間:45[秒] 19 1324028 對改變鹼性處理之濃度及鈣濃度添加水之鈣濃度而製 成之S式料D進行與第1實施例相同之剝離強度試驗,算出^ 離強度(N/cm)。 第6圖係顯示改變鹼性處理之濃度及鈣濃度添加水之 5鈣濃度而製成之試料D之強度的圖表。惟’於第6圖亦—併 揭示為進行比較而未施行驗性處理之樣品的結果(明示為 無處理)。此外,剝離強度未特別設限,為以1〇個樣品所得 之數值的平均值。 ^ 由第6圖可明白以下之點。 ίο (4 a)田未〜仃使用加㉟水之水洗處理時(注意詞濃度為 〇PPm之條狀表),僅在驗性處理之濃度(Wt%)為L0以上且低 於4.0之狹小$&圍,顯示剝離強度有增大傾向,而獲得較無 處理約8倍以上之剝離強度。相對於此’ 0.5wt%以下之區域 或4.0wt%以上之區域之剝離強度與未進行驗性處理之結果 15 (記載為無處理)相較之下,幾乎無任何變化。 (4b)田知订使用加鈣水之水洗處理時(注意約濃度為2〇 lOOOppm之條狀表)時在驗性處理之濃度〜⑼為〇 μ〜1〇 0未滿之廣大範圍時,剝離強度增大。舉例言之獲得較無 處理約8倍以上之制離強度,驗性處理之濃度之範 圍大幅擴 20 大為 0.25~2.〇wt%。 (4C)由令驗性處理之濃度為4.0wt%之結果可知 ’當令鈣 /辰度為20ppm以上時,較無處理可穩定獲得約3倍 以上之剝 離強度’故較佳。 因而可知為使印刷配線板具有更穩定之剝離強度, 20 1324028 於施行鹼性處理後,施行使用加鈣水之水洗處理有效。 又,可知使用加鈣水之水洗處理可達到擴大鹼性處理 之最適合範圍之效果。此時,鈣濃度(ppm)較佳為20以上, 更佳為250ppm以上。 5 按,本發明,對構成印刷配線板之内層基板施行鹼性 處理(步驟α),將内層基板之表面改質後,藉由黏合劑層將 内層基板與外層基板層疊(步驟石),可製造信賴性優異且具 有穩定之密合力之印刷配線板。此製造方法對組合多種異 種材料而成之印刷配線板,亦即,由内層基板為撓性配線 10 板,外層基板為剛性配線板構成之具剛性-撓性印刷配線板 特別有效。而本發明之製造方法對印刷配線板為單面或雙 面之單層型或多層型等各種形狀之印刷配線板亦有效是無 須贅言的。 以上,說明了本發明之較佳實施例,本發明並不限於 15 該等實施例。在不脫離本發明主旨之範圍下,可進行結構 之附加、省略、置換及其他變更。本發明不以前述之說明 為限,而僅以所附之申請專利範圍予以限定。 I:圖式簡單說明 第1Α圖〜第1D圖顯示本發明具剛性-撓性印刷配線板 20 之製造方法一例之概示截面圖。 第2A圖、第2B圖係顯示用於第1八圖~第10圖之印刷配 線板之外層RPC之製造方法一例的概示截面圖。 第3圖係顯示試料A之剝離強度之圖表。 第4圖係顯示試料B之剝離強度之圖表。 21 1324028 第5圖係顯示試料c之剝離強度之圖表。 第6圖係顯示試料強度之圖表。 第7A圖〜第7D圖係 啤7^習知具剛性-撓性印刷配線板 之製造方法一例之概示戴面圖。 第8A圖、第8B圖係翱_In this example, after the alkaline treatment (step α), the calcium concentration of the step 7 in which the outer surface of the alkali-treated inner layer FPC is subjected to a water washing treatment is changed in the range of 〇~lOOppm using calcium-added water. By the above steps (1) to (5), a rigid-flexible three-layer printed wiring board having the structure shown in Fig. 1D is formed. At this time, the agent used in the alkaline treatment uses an aqueous sodium hydroxide solution (N aOH (aq)), and the temperature of the alkaline treatment is changed (the liquid temperature is changed in the range of the ^^ point. Other points are not changed, except for the alkali The production conditions other than the concentration of the treatment and the calcium concentration of the calcium-added water are the same. The production conditions are shown in Table 4. In addition, the printed wiring board produced in this example is referred to as sample d. Table 4 ♦ Printed wiring board The constituent material ' '~~~' [inner layer CCL] two-sided copper foil 18; zm, polyimine 25 from m, binder i〇ym [cover film (CL)] polyimine 25 / m, bonding Agent 25 // m [outer layer RPC] - copper foil 18ym, epoxy glass lOOyrn [bonding sheet] 25//m ♦ sample D treatment conditions [inspective treatment] concentration: ο·ι~i〇.〇[ Wt%], liquid temperature: 35pc], time: 6〇 [seconds] [RO water wash] liquid temperature: room temperature, time: 30 [seconds] [force πί bow water wash] concentration: 〇~l〇〇〇[ Ppm], liquid temperature: room temperature [RO water washing] liquid temperature: room temperature, time: 3 〇丨 seconds 1 time: 45 [seconds] 19 1324028 Adding water calcium concentration to change the concentration of alkaline treatment and calcium concentration The prepared S material D is carried out together with the first embodiment The same peel strength test was used to calculate the strength (N/cm). Fig. 6 is a graph showing the intensity of the sample D prepared by changing the concentration of the alkaline treatment and the calcium concentration of the calcium added to the calcium concentration. Figure 6 also shows the results of the samples that were not subjected to the experimental treatment (expressed as no treatment). In addition, the peel strength is not particularly limited, and is the average value of the values obtained from one sample. The following points can be understood from Fig. 6. ίο (4 a) Tian Wei ~ 仃 When using 35 water washing treatment (note the word concentration is 条PPm bar), only in the concentration of the test treatment (Wt% The narrowness of L0 or more and less than 4.0 shows that the peel strength tends to increase, and the peel strength of about 8 times or more less than the treatment is obtained. Relative to the area of '0.5 wt% or less or 4.0 wt% The peeling strength of the above area is almost the same as the result of the non-indicative treatment 15 (described as no treatment). (4b) When Tian Zhiji uses the washing treatment with calcium water (note that the concentration is about 2〇lOOppm bar chart) The concentration in the test treatment ~(9) is 〇μ~1〇 When the range is less than 0, the peel strength is increased. For example, the separation strength is about 8 times higher than that of no treatment, and the range of the concentration of the test treatment is greatly expanded to 0.25 to 2. 〇wt%. 4C) As a result of the concentration of the test treatment of 4.0% by weight, it can be seen that when the calcium/length is 20 ppm or more, the peel strength of about 3 times or more is stably obtained without treatment. Therefore, it is known that printing is performed. The wiring board has a more stable peel strength, and 20 1324028 is effective after the alkaline treatment, and the water washing treatment using the calcium-added water is performed. Further, it is understood that the water washing treatment using calcium-added water can achieve the effect of expanding the optimum range of the alkaline treatment. At this time, the calcium concentration (ppm) is preferably 20 or more, more preferably 250 ppm or more. According to the present invention, the inner layer substrate constituting the printed wiring board is subjected to alkaline treatment (step α), and the surface of the inner layer substrate is modified, and then the inner layer substrate and the outer layer substrate are laminated by the adhesive layer (step stone). A printed wiring board having excellent reliability and stable adhesion is produced. This manufacturing method is particularly effective for a printed wiring board in which a plurality of different materials are combined, that is, a rigid-flexible printed wiring board in which an inner layer substrate is a flexible wiring 10 board and an outer layer substrate is a rigid wiring board. Further, it is needless to say that the manufacturing method of the present invention is effective for a printed wiring board having various shapes such as a single-sided or double-sided single-layer type or a multi-layer type. The preferred embodiments of the present invention have been described above, and the present invention is not limited to the embodiments. Additions, omissions, substitutions, and other modifications can be made in the structure without departing from the scope of the invention. The invention is not limited by the foregoing description, but only by the scope of the appended claims. I. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 to Fig. 1D are schematic cross-sectional views showing an example of a method of manufacturing the rigid-flexible printed wiring board 20 of the present invention. Figs. 2A and 2B are schematic cross-sectional views showing an example of a manufacturing method of the printed wiring board outer layer RPC for the first to eighth drawings. Fig. 3 is a graph showing the peel strength of the sample A. Fig. 4 is a graph showing the peel strength of the sample B. 21 1324028 Figure 5 is a graph showing the peel strength of sample c. Figure 6 is a graph showing the strength of the sample. 7A to 7D are a schematic view of an example of a method for producing a rigid-flexible printed wiring board. Figure 8A, Figure 8B system 翱_

、頌不用於第7A圖〜第7D圖之外層RP C之製造方法-例之概Μ面圖。 第9圖係顯示習知且 /、岡j性-撓性印刷配線板之製造方法 一例之概不截面圖。颂, 颂 is not used in the manufacturing method of the outer layer RP C of the 7A to 7D drawings - an overview of the example. Fig. 9 is a cross-sectional view showing an example of a conventional method for manufacturing a flexible printed wiring board.

第1 〇圖係顯不在構成印刷配線板之内層FPC與黏合構 10件間產生剝離之狀態之概示裁面圖。 【主要元件符號說日月】 10...内層 CCLThe first drawing shows a schematic plan view showing a state in which peeling is not caused between the inner layer FPC and the bonding member 10 constituting the printed wiring board. [Main component symbol says sun and moon] 10... inner layer CCL

10’·.·設有電路之CCL 11.. .撓性基材 12.. .銅箔 12’電路 20.. .覆蓋膜 21.撓性基板 22.. .黏合劑層 30.. .内層FPC(内層基板) 40.. .黏合構件 40A...黏合構件 40B...黏合構件 50·.·外層RPC(外層基板) 50A...外層 RPC 50B...外層 RPC 51…剛性基材 51A…剛性基材 51B…剛性基材 52.. .銅箔 52A...銅箔 52B··.銅箔 110··.内層 CCL 110’…設有電路之CCL 111.··撓性基材 112…導電構件 112’…電路 120.. .覆蓋膜 121···撓性基材 122.. .黏合劑層 130···内層FPC(内層基板) 140A...黏合構件 140B...黏合構件 150.. .外層RPC(外層基板) 150A...外層基板 150B...外層基板 151.. .剛性基材 152.. .導電構件 152A...導電構件 2210'···CCL with circuit 11.. Flexible substrate 12.. Copper foil 12' circuit 20.. Cover film 21. Flexible substrate 22.. Adhesive layer 30.. Inner layer FPC (inner substrate) 40..Adhesive member 40A...Adhesive member 40B...Adhesive member 50·.·Outer RPC (outer substrate) 50A...Outer RPC 50B...Outer RPC 51...Rigid substrate 51A...Rigid substrate 51B...Rigid substrate 52.. Copper foil 52A... Copper foil 52B··. Copper foil 110··. Inner layer CCL 110'...CCL with circuit 111.··Flexible substrate 112... Conductive member 112'... Circuit 120.. Cover film 121···Flexible substrate 122.. Adhesive layer 130···Inner layer FPC (inner substrate) 140A...Adhesive member 140B...Adhesive Member 150.. Outer layer RPC (outer substrate) 150A... Outer substrate 150B... Outer substrate 151.. Rigid substrate 152.. Conductive member 152A... Conductive member 22

Claims (1)

1324028 第94124501號申請案申請專利範圍修正本 98.10舞p: 十、申請專利範圍: 1. 一種具剛性-撓性印刷配線板之製造方法,該具剛性-撓 性印刷配線板具有於内層敷銅層板上層疊覆蓋膜,且兩 外面由撓性構件構成之内層換性配線板、一面由非撓性 構件構成之外層剛性配線板及黏合構件者,該具剛性-撓性印刷配線板之製造方法具有: 步驟α,係對前述内層撓性配線板之前述兩外面進 行鹼性處理者;及 10 151324028 Application No. 94124501 Application for Patent Scope Revision 98.10 Dance p: X. Patent Application Range: 1. A method for manufacturing a rigid-flexible printed wiring board having a copper layer on the inner layer Manufacture of a rigid-flexible printed wiring board in which a cover film is laminated on a laminate, and an inner layer of a flexible wiring member and an outer layer of a flexible wiring board and an adhesive member are formed of a non-flexible member. The method has the following steps: Step a, performing alkaline treatment on the two outer surfaces of the inner flexible wiring board; and 10 15 步驟β,係於經前述驗性處理之前述内層撓性配線 板之前述兩外面,藉由前述黏合構件分別層疊前述外層 剛性配線板者, 又,前述步驟α及步驟β之間更具有步驟γ,該步驟γ 係使用加鈣水,對經前述鹼性處理中之前述内層撓性配 線板之前述兩外面進行水洗處理者。 2. 如申請專利範圍第1項之具剛性-撓性印刷配線板之製 造方法,其中前述步驟α中之鹼性處理濃度在0.25wt%以 上且低於lO.Owt%。 3.如申請專利範圍第1項之具剛性-撓性印刷配線板之製 造方法,其中前述步驟α中之鹼性處理時間為30秒以 20 上、120秒以下。 4.如申請專利範圍第1項之具剛性-撓性印刷配線板之製 造方法,其中前述步驟α中之鹼性處理液溫為25°C以上 且低於55°C。 5.如申請專利範圍第1項之具剛性-撓性印刷配線板之製 23 1324028 造方法,其中前述步驟γ中之#5濃度為20ppm以上。The step β is performed on the outer surfaces of the inner flexible wiring boards subjected to the above-mentioned qualitative treatment, and the outer layer rigid wiring boards are respectively laminated by the bonding members, and the step γ and the step β are further step γ. In the step γ, the two outer surfaces of the inner flexible wiring board in the alkaline treatment are subjected to water washing treatment using calcium-added water. 2. The method of manufacturing a rigid-flexible printed wiring board according to the first aspect of the invention, wherein the alkali treatment concentration in the aforementioned step α is 0.25 wt% or more and less than 10 wt%. 3. The method of manufacturing a rigid-flexible printed wiring board according to the first aspect of the invention, wherein the alkaline treatment time in the aforementioned step α is 30 seconds to 20 seconds or less. 4. The method of producing a rigid-flexible printed wiring board according to the first aspect of the invention, wherein the alkaline treatment liquid temperature in the step (a) is 25 ° C or higher and lower than 55 ° C. 5. The method of manufacturing a rigid-flexible printed wiring board according to the first aspect of the invention, wherein the concentration of #5 in the aforementioned step γ is 20 ppm or more. 24twenty four
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