TWI318933B - Manufacturing method for ink jet recording head chip, and manufacturing method for ink jet recording head - Google Patents

Manufacturing method for ink jet recording head chip, and manufacturing method for ink jet recording head

Info

Publication number
TWI318933B
TWI318933B TW096107684A TW96107684A TWI318933B TW I318933 B TWI318933 B TW I318933B TW 096107684 A TW096107684 A TW 096107684A TW 96107684 A TW96107684 A TW 96107684A TW I318933 B TWI318933 B TW I318933B
Authority
TW
Taiwan
Prior art keywords
manufacturing
ink jet
recording head
jet recording
head chip
Prior art date
Application number
TW096107684A
Other languages
English (en)
Other versions
TW200800622A (en
Inventor
Toshiyasu Sakai
Shuji Koyama
Kenji Ono
Jun Yamamuro
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Kk filed Critical Canon Kk
Publication of TW200800622A publication Critical patent/TW200800622A/zh
Application granted granted Critical
Publication of TWI318933B publication Critical patent/TWI318933B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76898—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics formed through a semiconductor substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
TW096107684A 2006-03-07 2007-03-06 Manufacturing method for ink jet recording head chip, and manufacturing method for ink jet recording head TWI318933B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006061166 2006-03-07

Publications (2)

Publication Number Publication Date
TW200800622A TW200800622A (en) 2008-01-01
TWI318933B true TWI318933B (en) 2010-01-01

Family

ID=38479498

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096107684A TWI318933B (en) 2006-03-07 2007-03-06 Manufacturing method for ink jet recording head chip, and manufacturing method for ink jet recording head

Country Status (4)

Country Link
US (3) US7824560B2 (zh)
KR (1) KR100944283B1 (zh)
CN (1) CN101032885B (zh)
TW (1) TWI318933B (zh)

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JP4854336B2 (ja) * 2006-03-07 2012-01-18 キヤノン株式会社 インクジェットヘッド用基板の製造方法
JP5495623B2 (ja) * 2008-06-18 2014-05-21 キヤノン株式会社 基板の加工方法、液体吐出ヘッド用基板の製造方法および液体吐出ヘッドの製造方法
JP5448581B2 (ja) * 2008-06-19 2014-03-19 キヤノン株式会社 液体吐出ヘッド用基板の製造方法及び基板の加工方法
US8173030B2 (en) * 2008-09-30 2012-05-08 Eastman Kodak Company Liquid drop ejector having self-aligned hole
JP5566130B2 (ja) * 2009-02-26 2014-08-06 キヤノン株式会社 液体吐出ヘッドの製造方法
JP2010240869A (ja) * 2009-04-01 2010-10-28 Canon Inc 液体吐出ヘッド用基板の製造方法
US20110020966A1 (en) * 2009-07-23 2011-01-27 Canon Kabushiki Kaisha Method for processing silicon substrate and method for producing substrate for liquid ejecting head
JP4659898B2 (ja) 2009-09-02 2011-03-30 キヤノン株式会社 液体吐出ヘッド用基板の製造方法
JP5574866B2 (ja) * 2010-07-26 2014-08-20 浜松ホトニクス株式会社 レーザ加工方法
WO2012014718A1 (ja) * 2010-07-26 2012-02-02 浜松ホトニクス株式会社 インターポーザの製造方法
JP2012121168A (ja) * 2010-12-06 2012-06-28 Canon Inc 液体吐出ヘッド及びその製造方法
WO2013095430A1 (en) * 2011-12-21 2013-06-27 Hewlett Packard Development Company, L.P. Fluid dispenser
US9340023B2 (en) * 2013-05-31 2016-05-17 Stmicroelectronics, Inc. Methods of making inkjet print heads using a sacrificial substrate layer
JP2015168143A (ja) * 2014-03-06 2015-09-28 セイコーエプソン株式会社 貫通孔の形成方法、部材、インクジェットヘッド、インクジェットヘッドユニットおよびインクジェット式記録装置
JP6504939B2 (ja) * 2015-06-26 2019-04-24 キヤノン株式会社 シリコン基板の加工方法及び液体吐出ヘッド用基板の製造方法
JP2018153978A (ja) * 2017-03-16 2018-10-04 キヤノン株式会社 シリコン基板の加工方法および液体吐出ヘッドの製造方法
JP6562963B2 (ja) * 2017-05-02 2019-08-21 キヤノン株式会社 液体吐出ヘッドの製造方法
JP7150569B2 (ja) * 2018-11-08 2022-10-11 キヤノン株式会社 基板と基板積層体と液体吐出ヘッドの製造方法

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JP4480182B2 (ja) * 2007-09-06 2010-06-16 キヤノン株式会社 インクジェット記録ヘッド用基板及びインクジェット記録ヘッドの製造方法
JP5031493B2 (ja) * 2007-09-06 2012-09-19 キヤノン株式会社 インクジェットヘッド用基板の製造方法
JP5566130B2 (ja) * 2009-02-26 2014-08-06 キヤノン株式会社 液体吐出ヘッドの製造方法
US20110020966A1 (en) * 2009-07-23 2011-01-27 Canon Kabushiki Kaisha Method for processing silicon substrate and method for producing substrate for liquid ejecting head
JP4659898B2 (ja) * 2009-09-02 2011-03-30 キヤノン株式会社 液体吐出ヘッド用基板の製造方法
EP2355138B1 (en) * 2010-01-28 2016-08-24 Canon Kabushiki Kaisha Liquid composition, method of producing silicon substrate, and method of producing liquid discharge head substrate
JP2013028155A (ja) * 2011-06-21 2013-02-07 Canon Inc 液体吐出ヘッド用基板の製造方法
JP6095320B2 (ja) * 2011-12-02 2017-03-15 キヤノン株式会社 液体吐出ヘッド用基板の製造方法

Also Published As

Publication number Publication date
US20110102511A1 (en) 2011-05-05
US7824560B2 (en) 2010-11-02
KR20070092145A (ko) 2007-09-12
US20070212890A1 (en) 2007-09-13
USRE44945E1 (en) 2014-06-17
CN101032885B (zh) 2012-01-25
US8057017B2 (en) 2011-11-15
KR100944283B1 (ko) 2010-02-24
CN101032885A (zh) 2007-09-12
TW200800622A (en) 2008-01-01

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