TWI304628B - Assisting apparatus for a wafer cassette - Google Patents

Assisting apparatus for a wafer cassette Download PDF

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Publication number
TWI304628B
TWI304628B TW095128608A TW95128608A TWI304628B TW I304628 B TWI304628 B TW I304628B TW 095128608 A TW095128608 A TW 095128608A TW 95128608 A TW95128608 A TW 95128608A TW I304628 B TWI304628 B TW I304628B
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Taiwan
Prior art keywords
boat
groove
rail
guide
base
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TW095128608A
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Chinese (zh)
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TW200810003A (en
Inventor
Chih Jen Lo
Johnny Dai
Chun Chieh Tsou
Hsiu Yi Chen
Wen Kuo Chiang
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King Yuan Electronics Co Ltd
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Application filed by King Yuan Electronics Co Ltd filed Critical King Yuan Electronics Co Ltd
Priority to TW095128608A priority Critical patent/TWI304628B/en
Priority to JP2006284691A priority patent/JP4496194B2/en
Priority to KR1020060103663A priority patent/KR100793722B1/en
Publication of TW200810003A publication Critical patent/TW200810003A/en
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Publication of TWI304628B publication Critical patent/TWI304628B/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Description

1304628 ι· 九、發明說明： ^ 【發明所屬之技術領域】 纟發祕有關於縣舟辅助裝置，特別是有關於一 種辅助裝置’使得晶圓框架於取出或置入晶舟時不會造成 晶圓的碰觸、摩擦或到傷。 麵 -* -..：. : .一- , 【先前技術】 馨&研磨後的晶圓，將其貼附於晶圓框架（w金fr謙) 、上，並置於晶舟（或稱為晶圓&盒，cassette)内運送， 以進行後續製程，如切割（dicing)及晶粒（die)取出 口( pick up)等。第一 a圖顯示晶圓框架】〇〇的正面圖，晶 圓藉由黏膠片（wafer sheet/tape) 102貼附於晶圓框 木1〇〇的表面。第一 B圖、第一 c圖分別顯示晶舟103 的俯視圖及立體圖。晶舟1 〇3兩侧之内侧壁彳具有多組 馨相對稱的晶舟溝槽(s|〇t)105，晶圓框架1〇〇即順著這些晶 舟溝槽105而-一滑置於晶舟1〇3内。當所有晶圓框架1〇〇 都置入曰曰舟1 〇3後，操作人員即將旋棒把手1〇6旋轉拉出 並藉以提起及運送晶舟1〇3。 又’在進行切割（dicing)作業前後，通常需要由操作 人員以手動方式將晶圓框架100取出作抽片檢查。然而， 由於晶舟溝槽1〇5的間距或溝槽寬度遠較晶圓框架1〇〇的 1304628 厚度來得大（通常約為三倍大），因此在取出或置入晶圓框 架100的過程中，容易與相鄰晶圓框架100碰觸、摩擦， 造成晶圓101的刮傷。鑑於此，在不進行重新設計、製造 晶舟的成本考量下，亟需提出一種裝置，用以輔助晶圓框 架於抽取及置入晶舟時’避免晶圓受到碰觸、摩擦及刮彳^。 【發明内容】 有鑑於上述傳統技術的諸多缺失，本發明的目的之一 在於提出一種晶舟辅助裝置，使得晶圓框架於取出或I入 晶舟時不會造成晶圓的碰觸、摩擦、或到傷。 根據上述之目的，本發明提供一種晶舟辅助裝置，其 主要構造係至少包括有一底座，用以定位一設有複數個晶 舟溝槽之晶舟；一侧壁設置於底座的侧邊；一導軌框；包 括一第一導軌槽板、一第二導執槽及至少一連接臂，藉由 各連接臂分別連接第一導軌槽板及第二導軌槽板之侧邊， 第一導軌槽板及第二導轨槽板在對應於各個晶舟溝槽之位 置分別設有-導轨槽，1各個I軌槽之一端的寬度係向導 轨槽中間呈現漸縮之態樣；以及一樞接器，—端連接於侧 壁，另一端連接於導轨框，使得該導轨框得以相對側壁旋 轉’而可將導轨框之各個導轨槽分別串接其所對應之晶舟 溝槽。藉由本發明之晶舟輔助褒置，由晶純放晶圓椎架 1304628 時’可藉由導軌槽的寬度來導引晶圓框架，使晶圓不至於 因晃動而碰觸、摩擦或刮傷。 丨 【實施方式】 本發明的一些實施例會詳細描述如下。然而，除了詳 、細描述外，本發明還可 以廣泛地在其他的實施例施行，〗且 • 本發明的範圍不受限定，其以之後的專利範圍為準。再者， 鲁 在本說明書中，各元件的不同部分並沒有依照尺寸繪圖。 ’ 某些尺度與其他相關尺度相比已經被誇張，以提供更清楚 的描述，利於本發明的理解。 第二A圖係本發明一實施例晶舟辅助裝置201之:iL體 示意圖，第二B圖係如第二A圖之實施例定位一晶舟之立 體示意圖；如圖所示，其主要構造係至少包括有：一底座 φ 2〇9用以定位一設有複數個晶舟溝槽105之晶舟1〇3 ; — 側壁206，設置於底座209之一侧邊；一導軌框207丨該 '導軌框207包括有一第一導軌檜板202、一第二導軌槽板 * 203及至少一連接臂205，藉由各連接臂205而分別連接 第一導軌槽板202及第二導軌槽板203之側邊，且第广導 r 軌槽板202及第二導執槽板203在對應於各個晶舟漢槽 105之位置分刿設有一導軌槽204 ;以及一樞接器（如第二 C圖所不之213) ’其一端連接侧壁206 ’而另一端連接導 1304628 軌框207，使得該導軌框2〇7得以相對側壁2〇6旋轉，而 可將導軌框207之各個導軌槽2〇4分別串接其所對應气晶 舟溝槽105。該樞接器213連接導執框207的位置可遠擇 連接第一導執槽板202、第二導軌槽板203及連接臂雾〇5 'I:丨 | 之其中之一者，均可達到同樣的效果，使得導軌框207得 以相對侧壁206旋轉。另外可包括有一支撐塊2〇8設鞏於 侧壁206之一面’用以限制導執框207之旋轉角度，例如 當導轨框207被旋轉掀起而成直立狀時（如第二a圖所 示），導執框207可受到支撐塊208的支撐，以免旋轉過 度。 本發明之晶舟辅助裝置，尚可包括有一斜度調整機 , · "ί 構’其係與底座209相互組配，而用以控制底座209與斜 度調整機構之相對角度。其中斜度調整機構係包括有至少 一調整壁210,各個調整壁210之一端係樞接於底座209 , 而可相對底座209旋轉。其中調整壁210之另一端設有一 調整槽212，且底座209設有一可樞穿調整槽212之調整 螺桿211，並藉由一調整螺絲與調整螺桿211相互組|己， » 而可加強固定底座209與斜度調整機構之相對角度。斜度 調整機構主要是讓該晶舟103上之晶圓框架1〇〇能同時靠 抵該晶舟構槽105之同一邊，使各晶圓框架1〇〇之相互間 1304628 ' 距可以保持最大間距，有效防止各晶圓框架100互相碰 .... I : • 觸、摩擦而導致晶圓101刮傷之狀況。 第二C圖顯示第二B圖之導執框207旋轉至晶舟103 上方的立體圖，此時〃晶圓框架100即可經由導轨框207 ^ 的導執槽204上方插入.；接著滑入晶舟103的晶舟溝槽 * 105。相反的，當晶圓框架100欲從晶舟103内取出時， • 則可藉由導執槽204的導引，由導軌槽204上方取出。 曹 第二D圖顯示導執框207旋轉至晶舟103上方時， * 導軌框207的導執槽204與晶舟溝槽105的放大示意圖。 ' . . V’ 設置於導軌框207之各導軌槽204大致呈平行排列，各個 導軌槽204朝向晶舟溝槽105之一端的寬度係與晶舟溝槽 :义丨 "r; ! 105之寬度柑同，可使晶圓框架100順利滑入晶舟溝槽105 ，：”： ⑩ 中，且導軌槽204的寬度係向導軌槽204中間呈現漸縮之 _ 態樣，而使導執槽204中間之寬度小於晶舟溝槽105之寬 _ 度，另外導執槽204另一端的寬度也可以是向導軌槽204 中間呈現漸縮之態樣，導執槽204兩端的寬度較大，具有 導引晶圓框架100進入導軌槽204的作用，而導軌槽204 中間之寬度較小，可有效辅助一般操作人員在抽取或置入 晶圓框架100之過程中，能保持與相鄰之晶圓平行之態 1304628 樣，進而避免各晶圓框架1〇〇摩擦晶圓1〇1，而致使晶圓 101刮傷之狀況9 以上所述僅為本發明之較佳實施例而已，並非用以限 定本發明之申請專利範圍；凡其他未脫離發明所揭示之精 神下所完成之等效改變或修飾，均應包含在下述之申請專 利範圍内。例如，直接將導軌框207套設於晶舟103 i方 進行操作’而非如前述實施例之可旋轉方式。另外，蟲舟 輔助裴置201也可以不設有侧壁2〇6，甚至不具有底座 2〇9，而是藉由其他現有的升降機構來升高導軌框2〇叉並 對齊於晶舟103上之晶舟溝槽1〇5即可。再者，晶舟1〇3 的傾斜角度也可以經由其他方法來獲得，例如藉由調|工 作台的傾斜角度使得晶舟具有斜度。1304628 ι· Nine, invention description: ^ [Technical field of invention] 纟发秘 has about the county boat auxiliary device, especially regarding an auxiliary device' so that the wafer frame does not cause crystal when it is taken out or placed in the boat. Round touch, friction or injury. Face-*-..:.: .--, [Prior Art] The scented & polished wafer is attached to the wafer frame (w gold) and placed on the wafer boat (or It is transported in a wafer & cassette for subsequent processes such as dicing and die pick up. The first a-graph shows the front view of the wafer frame 〇〇, and the wafer is attached to the surface of the wafer frame by a wafer sheet/tape 102. The first B diagram and the first c diagram respectively show a top view and a perspective view of the boat 103. The inner side wall 两侧 on both sides of the boat 1 〇 3 has a plurality of symmetrical boat grooves (s|〇t) 105, and the wafer frame 1 顺 follows these boat grooves 105 - a sliding Yu Jingzhou is within 1〇3. When all the wafer frames 1〇〇 are placed in the boat 1 〇 3, the operator rotates the knob handles 1〇6 and lifts and transports the boat 1〇3. Further, before and after the dicing operation, it is usually necessary for the operator to manually take out the wafer frame 100 for the wafer inspection. However, since the pitch or groove width of the boat groove 1〇5 is much larger than the thickness of the 1304628 of the wafer frame 1 (usually about three times larger), the process of taking out or placing the wafer frame 100 is performed. In the middle, it is easy to touch and rub against the adjacent wafer frame 100, causing scratches on the wafer 101. In view of this, without the cost of redesigning and manufacturing the wafer boat, it is urgent to propose a device to assist the wafer frame in the process of drawing and placing the wafer boat to avoid the wafer being touched, rubbed and scraped. . SUMMARY OF THE INVENTION In view of the above-mentioned many deficiencies of the conventional technology, one of the objects of the present invention is to provide a wafer assisting device that does not cause wafer touch, friction, or wafer contact when the wafer frame is taken out or I enters the boat. Or to the injury. According to the above objective, the present invention provides a boat assisting device, the main structure of which includes at least a base for positioning a crystal boat having a plurality of boat grooves; a side wall is disposed at a side of the base; The guide rail frame includes a first guide rail slot, a second guide slot and at least one connecting arm, and the connecting rails respectively connect the first rail slot plate and the side of the second rail slot plate, the first rail slot plate And the second rail slot plate is respectively provided with a rail groove at a position corresponding to each of the boat grooves, wherein a width of one end of each of the I rail slots is tapered toward the middle of the rail slot; and a pivotal connection The end is connected to the side wall, and the other end is connected to the rail frame so that the rail frame can be rotated relative to the side wall. The respective rail slots of the rail frame can be respectively connected to the corresponding boat groove. With the boat-assisted device of the present invention, the wafer frame can be guided by the width of the rail groove when the wafer is mounted on the wafer shelf 1304628, so that the wafer does not touch, rub or scratch due to shaking. .实施 [Embodiment] Some embodiments of the present invention will be described in detail below. However, the present invention may be widely practiced in other embodiments, and the scope of the present invention is not limited by the scope of the following patents. Furthermore, in this specification, different parts of each component are not drawn according to the dimensions. Certain scales have been exaggerated in comparison to other relevant scales to provide a clearer description for the understanding of the present invention. 2A is a schematic view of the iL body of the wafer assisting device 201 according to an embodiment of the present invention, and the second B is a schematic view of positioning a boat according to the embodiment of the second A; as shown in the figure, the main structure thereof The system includes at least a base φ 2〇9 for positioning a boat 1设有3 having a plurality of boat grooves 105; a side wall 206 disposed on one side of the base 209; and a guide frame 207 The rail frame 207 includes a first rail bracket 202, a second rail slot plate 203, and at least one connecting arm 205. The first rail slot plate 202 and the second rail slot plate 203 are respectively connected by the connecting arms 205. The side of the guide rail, and the second guide groove plate 202 and the second guide groove plate 203 are respectively provided with a guide groove 204 at a position corresponding to each of the wafer boat grooves 105; and a pivotal connector (such as the second C) Figure 213) 'The one end is connected to the side wall 206' and the other end is connected to the guide 1304628 rail frame 207, so that the rail frame 2〇7 can be rotated relative to the side wall 2〇6, and the rail groove 2 of the rail frame 207 can be 〇4 is connected in series with the corresponding crystal boat groove 105. The position of the pivoting frame 213 connecting the guiding frame 207 can be selected to connect one of the first guiding slot plate 202, the second guiding slot plate 203 and the connecting arm smog 5 'I: 丨 | The same effect is achieved by the rail frame 207 being rotated relative to the side wall 206. In addition, a support block 2〇8 can be disposed on one side of the side wall 206 to limit the rotation angle of the guide frame 207, for example, when the rail frame 207 is rotated and erected into an upright shape (as shown in the second figure a Shown, the guide frame 207 can be supported by the support block 208 to avoid over-rotation. The boat assisting device of the present invention may further include a pitch adjusting machine, which is coupled with the base 209 to control the relative angle of the base 209 and the tilt adjusting mechanism. The tilt adjustment mechanism includes at least one adjustment wall 210, and one end of each adjustment wall 210 is pivotally connected to the base 209 to be rotatable relative to the base 209. The other end of the adjusting wall 210 is provided with an adjusting slot 212, and the base 209 is provided with an adjusting screw 211 pivoting through the adjusting slot 212, and the fixing base is strengthened by an adjusting screw and the adjusting screw 211. The relative angle of 209 to the tilt adjustment mechanism. The tilt adjustment mechanism mainly allows the wafer frame 1 on the wafer boat 103 to simultaneously abut the same side of the wafer boat groove 105, so that the wafer frames can be kept at a maximum distance of 1304628'. The spacing effectively prevents the wafer frames 100 from colliding with each other. I : • A scratching or rubbing condition that causes the wafer 101 to be scratched. The second C diagram shows a perspective view of the guide frame 207 of the second B diagram rotated above the boat 103. At this time, the wafer frame 100 can be inserted through the guide groove 204 of the rail frame 207 ^; then slide in Boat boat groove * 105 of the boat 103. Conversely, when the wafer frame 100 is to be removed from the wafer boat 103, it can be removed from above the rail groove 204 by the guiding of the guiding groove 204. Cao The second D diagram shows an enlarged schematic view of the guide groove 204 and the boat groove 105 of the guide frame 207 when the guide frame 207 is rotated above the boat 103. V. The guide rails 204 of the guide rail frame 207 are arranged substantially in parallel, and the width of each of the guide rails 204 toward one end of the boat groove 105 is a groove of the boat: 丨 丨 r; The width of the citrus, the wafer frame 100 can smoothly slide into the boat groove 105, ":: 10, and the width of the rail groove 204 is tapered toward the middle of the rail groove 204, and the guide groove is made. The width of the middle of the 204 is smaller than the width _ degree of the boat groove 105, and the width of the other end of the guiding groove 204 may also be a state of being tapered toward the middle of the rail groove 204, and the width of both ends of the guiding groove 204 is large, The guiding wafer frame 100 enters the function of the rail groove 204, and the width of the middle of the rail groove 204 is small, which can effectively assist the general operator to maintain the adjacent wafer during the process of drawing or inserting the wafer frame 100. Parallel state 1304628, thereby avoiding the situation in which each wafer frame 1 rubs the wafer 1〇1 and causes the wafer 101 to be scratched. 9 The above description is only a preferred embodiment of the present invention, and is not intended to be limiting. The scope of the patent application of the present invention; Equivalent changes or modifications made in the spirit of the present invention are included in the scope of the following patent application. For example, the guide frame 207 is directly placed on the wafer boat 103 to operate 'instead of being rotatable as in the foregoing embodiment. In addition, the insect boat auxiliary device 201 may not be provided with the side wall 2〇6, or even the base 2〇9, but the other rail lifting mechanism is used to raise the rail frame 2 fork and align with the crystal. The boat groove on the boat 103 may be 1〇5. Furthermore, the angle of inclination of the boat 1〇3 can also be obtained by other methods, for example, by tilting the tilt angle of the table to make the boat have a slope.

【圖式簡單說明】 A圖顯示一晶圓框架的正視圖。 曰圖顯示一晶舟的俯視圖。 C圖顯示一晶舟的立體圖。[Simple diagram of the diagram] A diagram shows a front view of a wafer frame. The map shows a top view of a boat. Figure C shows a perspective view of a boat.

A圖顯示本發明一實施例晶舟輔助裝置之立體示意 第二R 圖顯不弟^一 A圖之實施例定位一晶舟之立體未竜 圖。 ^ 1304628 第二C圖顯示第二B圖之導軌框旋轉至晶舟上方的立體示 意圖。 第二D圖顯示導軌框旋轉至晶舟上方時，導軌框的導軌槽 與晶舟溝槽的放大示意圖。 【主要元件符號說明】Figure A shows a perspective view of a crystal boat assisting device according to an embodiment of the present invention. The second R figure shows a stereoscopic view of a wafer boat. ^ 1304628 The second C diagram shows a perspective view of the guide frame of the second B diagram rotated above the boat. The second D diagram shows an enlarged schematic view of the guide rail groove and the boat groove of the guide rail frame when the guide rail frame is rotated above the boat. [Main component symbol description]

100 晶圓框架 101 晶圓 102 黏膠片 103 晶舟 104 内侧壁 105 晶舟溝槽 106 旋轉把手 201 晶舟輔助裝置 202 第一導執槽板 203 第二導軌槽板 204 導執槽 205 連接臂 206 侧壁 207 導執框 208 支撐塊 209 底座100 wafer frame 101 wafer 102 adhesive film 103 wafer boat inner side 105 boat boat groove 106 rotary handle 201 boat assist device 202 first guide slot plate 203 second rail slot plate 204 guide slot 205 connecting arm 206 Side wall 207 guide frame 208 support block 209 base

12 1304628 210 調整壁 211 調整螺桿 212 調整槽 213 樞接器12 1304628 210 Adjusting the wall 211 Adjusting the screw 212 Adjusting the groove 213 Ball jointer

Claims (1)

1304628 十、申請專利範圍： -1.一種晶舟辅助装置，其主要構造係至少包括有： 一底座，用以定位一設有複數個晶舟溝槽之晶舟； 一侧壁，其係設於該底座之一侧邊； 一導軌框，其包括有-第-導軌槽板、―第二導軌槽板 及至少一連接臂’藉由各該連接臂雷分別連接該第一導軌 .槽板及該第二導軌槽板之侧邊，且該第—導軌槽板及該第 • 二導軌槽板在對應於各個該晶舟溝槽之位置分別設有一導 ’軌槽’而各個該導執槽之一端的寬度係向該導軌槽中間呈 現漸縮之態樣；及 一柩接器’其一端連接該侧壁，而另一端連接該導軌 框’使得該導轨框得以相對該側壁旋轉，而可將該導執框 之各個該導軌槽分別串接其所對應之該晶舟溝槽。 _ 2 ·如申請專利範圍第1項所述之晶舟辅助裝置，其中該 樞接器之另一端係可選擇連接該第一導軌槽板、該第二導 軌槽板及該連接臂之其中之一者。 3 ·如申請專利範圍第2項所述之晶舟輔助裝置，其中各 個该導執槽之另一端的寬度係向該導軌槽中間呈現漸縮之 態樣。 14 1304628 ' 4 ·如申請專利範圍第3項所述之晶舟輔助裝置5尚包括 ^ 有一斜度調整機構，其係與該底座相互組配，而用以控制 該底座與該斜度調整機構之相對角度。 5 ·如申請專利範圍第4項所述之晶舟輔助裝置，其中該 :. ……，. ···· '一 ....... . · . vi'. · 7 .政· ·〆· · =·.：·：. - ，一- .V.-二'一 ^ 斜度調整機構係包括有至少一調整壁，各個該調整壁之一 _ 端係樞接該底座，而可相對該底座旋轉。 ’ 6 ·如申請專利範圍第5項所述之晶舟輔助裝置，其中該 調整壁之另一端設有一調整槽，且該底座設有一可樞穿該 調整槽之調整螺捍，並藉由一調整螺絲與該調整螺桿相互 組配，而可加強固定該底座與該斜度調整機構之相對角度。 / 7 ·如申請專利範圍第3項所述之晶舟輔助裝置，其f該 籲導軌槽一端之寬度係雷同該晶舟溝槽之寬度。 ^ 8 ·如申請專利範圍第3項所述之晶舟輔助裝置，其中該 導軌槽中間之寬度小於該晶舟溝槽之寬度。 15 1304628 ~ 9·如申請專利範圍第2項所述之晶舟辅助裝置，尚包括 '有一支撐塊，其係設於該侧壁之一面，用以限制該導軌框 之旋轉角度。 10 · —種晶舟辅助裝置，其主要構造係至少包括有： 、 一導軌框，其包括有一第一導軌槽板、一第二導軌槽板 及至少一連接臂，其係藉由各該連接臂而分別連接該第一 ⑩ 導執槽板及該第二導軌槽板之侧邊，且該第一導軌槽板及 ’ 該第二導軌槽板在對應於複數個設置於一晶舟之晶舟溝槽 之位置上分別設有一導軌槽，而各個該導軌槽之一端的寬 度係向該導執槽中間呈現漸縮之態樣，可將該導轨框串接 於該晶舟，藉以令該導軌槽串接其所對應之該晶舟溝槽。 11 ·如申請專利範圍第10項所述之晶舟輔助裝置，尚包括 • 有一底座、一侧壁及一樞接器；其中，該底座係用以定位 該晶舟，該侧壁係設於底座之侧邊，而該樞接器之一端係 連接該侧壁，其另一端連接該導軌框，使得該導轨框得以 相對該側壁旋轉，而可將該導轨框之各個該導軌槽分別串 接其所對應之該晶舟溝槽。 16 1304628 12 ·如申請專利範圍第11項所述之晶舟辅助裝置，其中誃 樞接器之另一端係可選擇連接該第一導軌槽板、該第二導 轨槽板及該連接臂之其中之一者。· ' Μ ! ' - ，:： 丨.： 13 ·如申請專利範圍第12項所述之晶舟輔_助裝置，卑中 •各個該導軌槽之另一端的寬度係向導轨槽中間呈現漸縮之 '態樣。 ' 14·如申請專利範圍第13項所述之晶舟辅助裝置，尚包 括有一斜度調整機構，其係與該底座相互組配，而用以調 整該底座與該斜度調整機構之相對角度。 5如申睛專利範圍第14項所述之晶舟辅助裝置，其中 _ _斜度調整機構係包括有至少一調整壁，各個該調整壁之 —蠕係樞接該底座，而可相對該底座旋轉。 6如申睛專利範圍第15項所述之晶舟輔助裝置，基中 該凋整壁之另一端設有一調整槽，且該底座設有一可樞穿 該調整槽之調整螺桿，並藉由一調整螺絲與該調整螺桿相 互組配，而可固定該底座與該斜度調整機構之相對角度。 17 1304628 ~ 17 ·如申請專利範圍第10項所述之晶舟輔助裝置，其中 ‘ 該導軌槽一端之寬度係雷同該晶舟溝槽之寬度。 18 ·如申請專利範圍第10項所述之晶舟辅助裝置，其中 該導轨槽中間之寬度小於該晶舟溝槽之寬度。 19·如申請專利範圍第11項所述之晶舟輔助裝置，尚包括 • 有一支撐塊，其係設於該侧壁之一面，用以限制該導執框 • 之旋轉角度。 181304628 X. Patent application scope: -1. A boat assisting device, the main structure of which includes at least: a base for positioning a crystal boat having a plurality of crystal boat grooves; and a side wall a rail frame, comprising: a first-track slot plate, a second rail slot plate and at least one connecting arm respectively connected to the first rail by each connecting arm and a slot plate And the side of the second rail slot plate, and the first rail slot plate and the second rail slot plate are respectively provided with a guide 'trackway' at positions corresponding to the respective groove of the boat, and each of the guides The width of one end of the slot is tapered toward the middle of the rail slot; and a splicer 'having one end connected to the side wall and the other end connected to the rail frame' allows the rail frame to rotate relative to the side wall, Each of the guide rails of the guide frame may be respectively connected to the corresponding boat groove. The boat assisting device of claim 1, wherein the other end of the pivoting device is selectively connectable to the first rail slot plate, the second rail slot plate and the connecting arm. One. 3. The wafer assist device of claim 2, wherein the width of the other end of each of the guide grooves is tapered toward the middle of the guide groove. 14 1304628 ' 4 · The boat assisting device 5 according to claim 3 of the patent application scope further includes a tilt adjusting mechanism which is combined with the base to control the base and the tilt adjusting mechanism The relative angle. 5 · As for the boat assist device described in item 4 of the patent application, wherein: . . . . . . . . . . . . . . . . . . . . . . . . . . . 〆·· =·.:·:: -, a - .V.-two'-one slope adjustment mechanism includes at least one adjustment wall, one of each of the adjustment walls is pivotally connected to the base, and Rotate relative to the base. 6. The wafer assisting device of claim 5, wherein the other end of the adjusting wall is provided with an adjusting groove, and the base is provided with an adjusting screw pivotable through the adjusting groove, and The adjusting screw and the adjusting screw are combined with each other, and the relative angle between the base and the inclination adjusting mechanism can be reinforced. / 7 · The boat assisting device according to claim 3, wherein the width of one end of the rail groove is the same as the width of the boat groove. The wafer assist device of claim 3, wherein the width of the middle of the guide groove is smaller than the width of the boat groove. 15 1304628 ~ 9 · The boat assist device of claim 2, further comprising 'a support block disposed on one side of the side wall for limiting the angle of rotation of the guide frame. The invention relates to a boat support device, the main structure of which comprises at least: a guide rail frame, comprising a first guide rail slot plate, a second guide rail slot plate and at least one connecting arm, wherein the connection is made by each The arms are respectively connected to the side edges of the first 10 guide slot plate and the second rail slot plate, and the first rail slot plate and the second guide slot plate correspond to a plurality of crystals disposed in a boat A guide groove is respectively disposed at a position of the groove of the boat, and a width of one end of each of the guide groove is tapered toward the middle of the guide groove, and the guide frame is connected to the boat in a row, so that The rail groove is connected in series with the boat groove corresponding thereto. 11. The wafer assisting device of claim 10, further comprising: a base, a side wall and a pivoting device; wherein the base is for positioning the boat, the side wall is a side of the base, and one end of the pivotal connection is connected to the side wall, and the other end is connected to the rail frame, so that the rail frame can be rotated relative to the side wall, and each of the guide rails of the guide frame can be respectively The row boat groove corresponding thereto is connected in series. The boat assisting device of claim 11, wherein the other end of the cymbal pivoting device is selectively connectable to the first rail slot plate, the second rail slot plate and the connecting arm One of them. · ' Μ ! ' - ,:: 丨.: 13 · As in the patent scope of item 12, the boat-assisted _ aid device, humble • the width of the other end of each of the rail grooves is gradually toward the middle of the guide groove Shrink the 'situation. The boat assisting device according to claim 13 further includes a tilt adjusting mechanism that is coupled with the base to adjust the relative angle between the base and the tilt adjusting mechanism. . 5. The boat assisting device of claim 14, wherein the __slope adjusting mechanism comprises at least one adjusting wall, wherein each of the adjusting walls pivotally connects the base to the base Rotate. [6] The crystal boat auxiliary device according to claim 15, wherein the other end of the whole wall is provided with an adjusting groove, and the base is provided with an adjusting screw pivotable through the adjusting groove, and The adjusting screw and the adjusting screw are combined with each other, and the relative angle between the base and the inclination adjusting mechanism can be fixed. 17 1304628 - 17 The wafer assist device of claim 10, wherein the width of one end of the guide groove is the same as the width of the boat groove. The wafer assist device according to claim 10, wherein a width of the middle of the guide groove is smaller than a width of the boat groove. 19. The boat assist device of claim 11, further comprising: a support block disposed on one side of the side wall for limiting the angle of rotation of the guide frame. 18
TW095128608A 2006-08-04 2006-08-04 Assisting apparatus for a wafer cassette TWI304628B (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
TW095128608A TWI304628B (en) 2006-08-04 2006-08-04 Assisting apparatus for a wafer cassette
JP2006284691A JP4496194B2 (en) 2006-08-04 2006-10-19 Wafer cassette auxiliary equipment
KR1020060103663A KR100793722B1 (en) 2006-08-04 2006-10-24 Assisting apparatus for a wafer cassette

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW095128608A TWI304628B (en) 2006-08-04 2006-08-04 Assisting apparatus for a wafer cassette

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TW200810003A TW200810003A (en) 2008-02-16
TWI304628B true TWI304628B (en) 2008-12-21

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CN101639489B (en) * 2008-07-29 2011-06-15 京元电子股份有限公司 Material separating device
CN114023681B (en) * 2021-10-26 2022-06-10 江苏亚电科技有限公司 Wafer box alignment, overturning and transferring method
CN114023682B (en) * 2021-10-26 2022-06-10 江苏亚电科技有限公司 Wafer box alignment turnover mechanism

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JPS639136U (en) * 1986-07-02 1988-01-21
JPS6331536U (en) * 1986-08-18 1988-03-01
JPH01160839U (en) * 1988-04-12 1989-11-08
JPH0817905A (en) * 1994-07-04 1996-01-19 Komatsu Electron Metals Co Ltd Auxiliary jig for inserting and extracting wafers
JPH10144768A (en) * 1996-11-13 1998-05-29 Hitachi Ltd Wafer transfer jig and manufacture of semiconductor thereby
KR100714262B1 (en) * 2000-10-13 2007-05-02 삼성전자주식회사 wafer conduction equipment of semiconductor device manufacturing equipment and cassette there of
KR20020088482A (en) * 2001-05-17 2002-11-29 삼성전자 주식회사 Wafer cassette
KR20020094742A (en) * 2001-06-13 2002-12-18 삼성전자 주식회사 Assist apparatus for wafer inspection
KR20030060141A (en) * 2002-01-07 2003-07-16 삼성전자주식회사 Charger for carrying wafers

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JP2008042155A (en) 2008-02-21

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