TWI292111B - Method and system for run-to-run control - Google Patents

Method and system for run-to-run control Download PDF

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Publication number
TWI292111B
TWI292111B TW094110015A TW94110015A TWI292111B TW I292111 B TWI292111 B TW I292111B TW 094110015 A TW094110015 A TW 094110015A TW 94110015 A TW94110015 A TW 94110015A TW I292111 B TWI292111 B TW I292111B
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TW
Taiwan
Prior art keywords
control
input
data
process control
output
Prior art date
Application number
TW094110015A
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English (en)
Chinese (zh)
Other versions
TW200606687A (en
Inventor
Hongyu Yue
Joseph Wiseman
Original Assignee
Tokyo Electron Ltd
Advanced Micro Devices Inc
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Publication of TW200606687A publication Critical patent/TW200606687A/zh
Application granted granted Critical
Publication of TWI292111B publication Critical patent/TWI292111B/zh

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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/04—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators
    • G05B13/048—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators using a predictor
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00—Administration; Management
    • G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/04—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators
    • G05B13/041—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators in which a variable is automatically adjusted to optimise the performance

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Evolutionary Computation (AREA)
  • Automation & Control Theory (AREA)
  • Health & Medical Sciences (AREA)
  • Software Systems (AREA)
  • Artificial Intelligence (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Medical Informatics (AREA)
  • Business, Economics & Management (AREA)
  • Strategic Management (AREA)
  • Human Resources & Organizations (AREA)
  • Entrepreneurship & Innovation (AREA)
  • Economics (AREA)
  • Game Theory and Decision Science (AREA)
  • Theoretical Computer Science (AREA)
  • General Business, Economics & Management (AREA)
  • Tourism & Hospitality (AREA)
  • Quality & Reliability (AREA)
  • Operations Research (AREA)
  • Marketing (AREA)
  • Educational Administration (AREA)
  • Development Economics (AREA)
  • Drying Of Semiconductors (AREA)
  • Feedback Control In General (AREA)
TW094110015A 2004-03-30 2005-03-30 Method and system for run-to-run control TWI292111B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/811,932 US7127358B2 (en) 2004-03-30 2004-03-30 Method and system for run-to-run control

Publications (2)

Publication Number Publication Date
TW200606687A TW200606687A (en) 2006-02-16
TWI292111B true TWI292111B (en) 2008-01-01

Family

ID=35055474

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094110015A TWI292111B (en) 2004-03-30 2005-03-30 Method and system for run-to-run control

Country Status (7)

Country Link
US (1) US7127358B2 (https=)
EP (1) EP1733325A4 (https=)
JP (1) JP4971132B2 (https=)
KR (1) KR101121809B1 (https=)
CN (1) CN100530206C (https=)
TW (1) TWI292111B (https=)
WO (1) WO2005103997A2 (https=)

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Also Published As

Publication number Publication date
EP1733325A2 (en) 2006-12-20
JP2007531305A (ja) 2007-11-01
CN100530206C (zh) 2009-08-19
WO2005103997A3 (en) 2005-12-29
TW200606687A (en) 2006-02-16
US20050222781A1 (en) 2005-10-06
KR101121809B1 (ko) 2012-03-20
EP1733325A4 (en) 2007-12-26
WO2005103997A2 (en) 2005-11-03
US7127358B2 (en) 2006-10-24
KR20070012340A (ko) 2007-01-25
JP4971132B2 (ja) 2012-07-11
CN1914618A (zh) 2007-02-14

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