TWI267188B - Ferroelectric film, ferroelectric memory, and piezoelectric element - Google Patents

Ferroelectric film, ferroelectric memory, and piezoelectric element

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Publication number
TWI267188B
TWI267188B TW094101569A TW94101569A TWI267188B TW I267188 B TWI267188 B TW I267188B TW 094101569 A TW094101569 A TW 094101569A TW 94101569 A TW94101569 A TW 94101569A TW I267188 B TWI267188 B TW I267188B
Authority
TW
Taiwan
Prior art keywords
ferroelectric
piezoelectric element
ferroelectric film
film
memory
Prior art date
Application number
TW094101569A
Other languages
English (en)
Chinese (zh)
Other versions
TW200531261A (en
Inventor
Takeshi Kijima
Hiromu Miyazawa
Yasuaki Hamada
Original Assignee
Seiko Epson Corp
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Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of TW200531261A publication Critical patent/TW200531261A/zh
Application granted granted Critical
Publication of TWI267188B publication Critical patent/TWI267188B/zh

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TW094101569A 2004-01-20 2005-01-19 Ferroelectric film, ferroelectric memory, and piezoelectric element TWI267188B (en)

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CN1645617A (zh) 2005-07-27
KR100598747B1 (ko) 2006-07-13
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CN100463180C (zh) 2009-02-18
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