TWI256524B - Positive photoresist composition for producing LCD and process for forming resist pattern - Google Patents

Positive photoresist composition for producing LCD and process for forming resist pattern

Info

Publication number
TWI256524B
TWI256524B TW092128445A TW92128445A TWI256524B TW I256524 B TWI256524 B TW I256524B TW 092128445 A TW092128445 A TW 092128445A TW 92128445 A TW92128445 A TW 92128445A TW I256524 B TWI256524 B TW I256524B
Authority
TW
Taiwan
Prior art keywords
resist pattern
photoresist composition
positive photoresist
forming resist
lcd
Prior art date
Application number
TW092128445A
Other languages
English (en)
Other versions
TW200416484A (en
Inventor
Akira Katano
Toshiaki Tachi
Ken Miyagi
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Publication of TW200416484A publication Critical patent/TW200416484A/zh
Application granted granted Critical
Publication of TWI256524B publication Critical patent/TWI256524B/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/0226—Quinonediazides characterised by the non-macromolecular additives
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
    • G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
    • G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
    • G03F7/0236—Condensation products of carbonyl compounds and phenolic compounds, e.g. novolak resins
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
    • G03F7/0397—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition the macromolecular compound having an alicyclic moiety in a side chain

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Materials For Photolithography (AREA)
  • Liquid Crystal (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
TW092128445A 2002-10-23 2003-10-14 Positive photoresist composition for producing LCD and process for forming resist pattern TWI256524B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002308477A JP4053402B2 (ja) 2002-10-23 2002-10-23 Ｌｃｄ製造用ポジ型ホトレジスト組成物およびレジストパターンの形成方法

Publications (2)

Publication Number Publication Date
TW200416484A TW200416484A (en) 2004-09-01
TWI256524B true TWI256524B (en) 2006-06-11

Family

ID=32454607

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092128445A TWI256524B (en) 2002-10-23 2003-10-14 Positive photoresist composition for producing LCD and process for forming resist pattern

Country Status (4)

Country Link
JP (1) JP4053402B2 (zh)
KR (1) KR100602818B1 (zh)
CN (1) CN1311296C (zh)
TW (1) TWI256524B (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4131864B2 (ja) * 2003-11-25 2008-08-13 東京応化工業株式会社 化学増幅型ポジ型感光性熱硬化性樹脂組成物、硬化物の形成方法、及び機能素子の製造方法
JP4476680B2 (ja) * 2004-04-20 2010-06-09 東京応化工業株式会社 インプランテーション工程用化学増幅型ポジ型ホトレジスト組成物
JP4707987B2 (ja) * 2004-09-16 2011-06-22 東京応化工業株式会社 化学増幅型ポジ型ホトレジスト組成物
JP5083566B2 (ja) * 2006-09-20 2012-11-28 日産化学工業株式会社 ハーフ露光用ポジ型感光性樹脂層を用いる透明性硬化膜の製造方法
JP2019078812A (ja) * 2017-10-20 2019-05-23 メルク、パテント、ゲゼルシャフト、ミット、ベシュレンクテル、ハフツングＭｅｒｃｋ Ｐａｔｅｎｔ ＧｍｂＨ 高精細パターンの製造方法およびそれを用いた表示素子の製造方法
TWI837424B (zh) 2019-10-02 2024-04-01 日商丸善石油化學股份有限公司 阻劑用交聯型聚合物

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1028433C (zh) * 1989-02-01 1995-05-17 北京大学 光固化组合物及其制备方法和用途
US5374500A (en) * 1993-04-02 1994-12-20 International Business Machines Corporation Positive photoresist composition containing photoacid generator and use thereof
JP3046225B2 (ja) * 1995-06-15 2000-05-29 東京応化工業株式会社 ポジ型レジスト膜形成用塗布液
EP0874281B1 (de) * 1997-04-23 2002-12-04 Infineon Technologies AG Chemisch verstärkter Resist
KR100455652B1 (ko) * 1999-09-06 2004-11-06 삼성전자주식회사 포지티브형 포토레지스트 막의 제조방법
EP1143298A1 (en) * 1999-10-07 2001-10-10 Clariant International Ltd. Photosensitive composition
JP2001215709A (ja) * 2000-02-07 2001-08-10 Fuji Photo Film Co Ltd ポジ型レジスト組成物
CN1347929A (zh) * 2000-10-10 2002-05-08 麦克德米德有限公司 用于制造印刷板的光敏树脂组合物
TW554250B (en) * 2000-12-14 2003-09-21 Clariant Int Ltd Resist with high resolution to i ray and process for forming pattern

Also Published As

Publication number Publication date
CN1311296C (zh) 2007-04-18
JP2004144905A (ja) 2004-05-20
JP4053402B2 (ja) 2008-02-27
CN1497347A (zh) 2004-05-19
TW200416484A (en) 2004-09-01
KR20040036560A (ko) 2004-04-30
KR100602818B1 (ko) 2006-07-19

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees