TWI250332B - Substrate for optoelectronic device, manufacturing method of substrate for optoelectronic device, optoelectronic device, manufacturing method of optoelectronic device, electronic machine and mask - Google Patents

Substrate for optoelectronic device, manufacturing method of substrate for optoelectronic device, optoelectronic device, manufacturing method of optoelectronic device, electronic machine and mask Download PDF

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Publication number
TWI250332B
TWI250332B TW092135044A TW92135044A TWI250332B TW I250332 B TWI250332 B TW I250332B TW 092135044 A TW092135044 A TW 092135044A TW 92135044 A TW92135044 A TW 92135044A TW I250332 B TWI250332 B TW I250332B
Authority
TW
Taiwan
Prior art keywords
optoelectronic device
substrate
manufacturing
dielectric substrate
edge
Prior art date
Application number
TW092135044A
Other languages
English (en)
Other versions
TW200424612A (en
Inventor
Toshihiro Otake
Makoto Mizuta
Mutsumi Matsuo
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2002360977A external-priority patent/JP3788423B2/ja
Priority claimed from JP2003064033A external-priority patent/JP3800189B2/ja
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of TW200424612A publication Critical patent/TW200424612A/zh
Application granted granted Critical
Publication of TWI250332B publication Critical patent/TWI250332B/zh

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Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133553Reflecting elements
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133553Reflecting elements
    • G02F1/133555Transflectors
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1339Gaskets; Spacers; Sealing of cells

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Description

(4) 1250332 ’其中’前述基底層之邊端,和包含於其內部前述複數之 凹部或是凸部之全部之包絡線之距離,位於先前決定之範 圍。 1 6.如申請專利範圍第1 5項所記載之光電裝置用基板 ,其中,前述先前決定之範圍爲4//m以上12//m以下。 17.—種光電裝置,其特徵具有如申請專利範圍第13 項所記載之光電裝置用基板,和對向於前述光電裝置用基 板之對向基板,和設置於前述光電裝置用基板和前述對向 基板之間之光電物質。 1 8 ·如申請專利範圍第1 7項所記載之光電裝置,其中 ,具有設置於前述光電裝置用基板上之第1電極,和設置 於前述對向基板上之第2電極; 前述光電物質乃爲液晶,該液晶設置於前述第1電極 和前述第2電極之間。 19· 一種電子機器,其特徵乃具有將如申請專利範圍 第1 7項所記載之光電裝置做爲顯示部。 20· —種光罩,乃於表面將具有凹部及凸部之基底層 爲了形成於基板上之光罩;其特徵乃具有對應於前述凸部 之凸部用圖案,和對應於前述凹部之凹部圖案;前述基底 層之邊緣係對應於前述凸部用圖案之邊緣,前述凹部用圖 案未交叉於該邊緣。 21. —種光罩,乃於表面將具有凹部及凸部之基底層 爲了形成於基板上之光罩;其特徵乃具有對應於前述凸部 之凸部用圖案,和對應於前述凹部之凹部圖案; -4- (5) 1250332 前述凸部用圖案,其邊緣端係形成於位於前述凹部用 圖案之外側。 22. —種光罩,乃於表面將具有凹部及凸部之基底層 爲了形成於基板上之光罩;其特徵乃具有對應於前述凸部 之凸部用圖案,和對應於前述凹部之凹部圖案; 前述凸部用圖案乃具有包圍前述凹部用圖案之框狀$ 領域。 2 3.如申請專利範圍第20項所記載之光罩,其中’前 述凸部用圖案之邊緣係距離位於前述凹部用圖案之最外側 之外週之4〜7μιη。 2 4.如申請專利範圍第21項所記載之光罩,其中’前 述凸部用圖案之邊緣係距離位於前述凹部用圖案之最外側 之外週之4〜7μιη。 2 5.如申請專利範圍第22項所記載之光罩,其中’前 述凸部用圖案之邊緣係距離位於前述凹部用圖案之最外側 之外週之4〜7μιη。
TW092135044A 2002-12-12 2003-12-11 Substrate for optoelectronic device, manufacturing method of substrate for optoelectronic device, optoelectronic device, manufacturing method of optoelectronic device, electronic machine and mask TWI250332B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002360977A JP3788423B2 (ja) 2002-12-12 2002-12-12 電気光学装置用基板、電気光学装置、電子機器及び電気光学装置用基板の製造方法
JP2003064033A JP3800189B2 (ja) 2003-03-10 2003-03-10 半透過反射基板、その製造方法、電気光学装置および電子機器

Publications (2)

Publication Number Publication Date
TW200424612A TW200424612A (en) 2004-11-16
TWI250332B true TWI250332B (en) 2006-03-01

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Country Status (4)

Country Link
US (1) US7088404B2 (zh)
KR (1) KR100589801B1 (zh)
CN (1) CN1331007C (zh)
TW (1) TWI250332B (zh)

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TWI410591B (zh) * 2011-03-18 2013-10-01 Young Lighting Technology Corp 光源裝置

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Also Published As

Publication number Publication date
US20040160553A1 (en) 2004-08-19
KR20040051544A (ko) 2004-06-18
TW200424612A (en) 2004-11-16
CN1331007C (zh) 2007-08-08
CN1506758A (zh) 2004-06-23
KR100589801B1 (ko) 2006-06-14
US7088404B2 (en) 2006-08-08

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