TWI231952B - Substrate conveying apparatus of substrate processing system for flat display - Google Patents
Substrate conveying apparatus of substrate processing system for flat display Download PDFInfo
- Publication number
- TWI231952B TWI231952B TW093101310A TW93101310A TWI231952B TW I231952 B TWI231952 B TW I231952B TW 093101310 A TW093101310 A TW 093101310A TW 93101310 A TW93101310 A TW 93101310A TW I231952 B TWI231952 B TW I231952B
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- shaft
- transport
- fluid
- conveying
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 59
- 239000012530 fluid Substances 0.000 claims description 49
- 230000007246 mechanism Effects 0.000 claims description 31
- 239000000463 material Substances 0.000 claims description 15
- 239000007921 spray Substances 0.000 claims description 15
- 230000002265 prevention Effects 0.000 claims description 14
- 238000007665 sagging Methods 0.000 claims description 10
- 238000005096 rolling process Methods 0.000 claims description 8
- 238000005507 spraying Methods 0.000 claims description 8
- 230000002262 irrigation Effects 0.000 claims 2
- 238000003973 irrigation Methods 0.000 claims 2
- 206010011469 Crying Diseases 0.000 claims 1
- 239000011521 glass Substances 0.000 description 11
- 238000000034 method Methods 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- ONTQJDKFANPPKK-UHFFFAOYSA-L chembl3185981 Chemical compound [Na+].[Na+].CC1=CC(C)=C(S([O-])(=O)=O)C=C1N=NC1=CC(S([O-])(=O)=O)=C(C=CC=C2)C2=C1O ONTQJDKFANPPKK-UHFFFAOYSA-L 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 101150038956 cup-4 gene Proteins 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000008260 defense mechanism Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000035935 pregnancy Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Classifications
-
- E—FIXED CONSTRUCTIONS
- E04—BUILDING
- E04G—SCAFFOLDING; FORMS; SHUTTERING; BUILDING IMPLEMENTS OR AIDS, OR THEIR USE; HANDLING BUILDING MATERIALS ON THE SITE; REPAIRING, BREAKING-UP OR OTHER WORK ON EXISTING BUILDINGS
- E04G17/00—Connecting or other auxiliary members for forms, falsework structures, or shutterings
- E04G17/06—Tying means; Spacers ; Devices for extracting or inserting wall ties
- E04G17/065—Tying means, the tensional elements of which are threaded to enable their fastening or tensioning
- E04G17/0655—Tying means, the tensional elements of which are threaded to enable their fastening or tensioning the element consisting of several parts
-
- E—FIXED CONSTRUCTIONS
- E04—BUILDING
- E04G—SCAFFOLDING; FORMS; SHUTTERING; BUILDING IMPLEMENTS OR AIDS, OR THEIR USE; HANDLING BUILDING MATERIALS ON THE SITE; REPAIRING, BREAKING-UP OR OTHER WORK ON EXISTING BUILDINGS
- E04G17/00—Connecting or other auxiliary members for forms, falsework structures, or shutterings
- E04G17/06—Tying means; Spacers ; Devices for extracting or inserting wall ties
- E04G17/07—Tying means, the tensional elements of which are fastened or tensioned by means of wedge-shaped members
- E04G17/0728—Tying means, the tensional elements of which are fastened or tensioned by means of wedge-shaped members the element consisting of several parts
Landscapes
- Engineering & Computer Science (AREA)
- Architecture (AREA)
- Mechanical Engineering (AREA)
- Civil Engineering (AREA)
- Structural Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Liquid Crystal (AREA)
- Rollers For Roller Conveyors For Transfer (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020030005189A KR100547440B1 (ko) | 2003-01-27 | 2003-01-27 | 기판 이송용 축을 구비하는 기판 처리 장치 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200423200A TW200423200A (en) | 2004-11-01 |
| TWI231952B true TWI231952B (en) | 2005-05-01 |
Family
ID=36251095
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW093101310A TWI231952B (en) | 2003-01-27 | 2004-01-19 | Substrate conveying apparatus of substrate processing system for flat display |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4149935B2 (ja) |
| KR (1) | KR100547440B1 (ja) |
| CN (1) | CN1297838C (ja) |
| TW (1) | TWI231952B (ja) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4929915B2 (ja) * | 2006-08-14 | 2012-05-09 | オイレス工業株式会社 | 静圧気体軸受 |
| KR100828970B1 (ko) * | 2007-09-12 | 2008-05-13 | 주식회사 디엠에스 | 처짐 방지용 반송샤프트 |
| KR100904394B1 (ko) * | 2007-09-19 | 2009-06-26 | 세메스 주식회사 | 기판 이송 장치 |
| KR100841406B1 (ko) * | 2008-02-26 | 2008-06-25 | 범정우 | 유체 혼합용 2상 유체 분사 노즐 |
| KR100841410B1 (ko) * | 2008-02-26 | 2008-06-25 | 범정우 | 유체 혼합용 2상 유체 분사 노즐 |
| US20100163406A1 (en) * | 2008-12-30 | 2010-07-01 | Applied Materials, Inc. | Substrate support in a reactive sputter chamber |
| KR101629447B1 (ko) | 2015-12-03 | 2016-06-10 | 이은보 | 경량 스테인리스 스틸 파이프 롤러 |
| CN107555174A (zh) * | 2017-09-27 | 2018-01-09 | 浙江云峰莫干山家居用品有限公司 | 气浮平台 |
| CN108910536A (zh) * | 2018-09-19 | 2018-11-30 | 北京铂阳顶荣光伏科技有限公司 | 传送装置及玻璃清洗机 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09232268A (ja) * | 1996-02-19 | 1997-09-05 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
| JP3881098B2 (ja) * | 1997-10-28 | 2007-02-14 | 大日本スクリーン製造株式会社 | 基板搬送装置及び基板処理装置 |
| JP2002299403A (ja) * | 2001-03-29 | 2002-10-11 | Hitachi Electronics Eng Co Ltd | 薄板基板の搬送装置及び搬送方法 |
| JP3919464B2 (ja) * | 2001-04-27 | 2007-05-23 | 東京エレクトロン株式会社 | 搬送装置、洗浄装置及び現像装置 |
-
2003
- 2003-01-27 KR KR1020030005189A patent/KR100547440B1/ko active IP Right Grant
-
2004
- 2004-01-19 TW TW093101310A patent/TWI231952B/zh not_active IP Right Cessation
- 2004-01-20 CN CNB2004100390140A patent/CN1297838C/zh not_active Expired - Fee Related
- 2004-01-20 JP JP2004012389A patent/JP4149935B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN1517756A (zh) | 2004-08-04 |
| JP2004226983A (ja) | 2004-08-12 |
| KR100547440B1 (ko) | 2006-01-31 |
| JP4149935B2 (ja) | 2008-09-17 |
| KR20040068686A (ko) | 2004-08-02 |
| TW200423200A (en) | 2004-11-01 |
| CN1297838C (zh) | 2007-01-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |