TWI227287B - Crucible supporting device, and method and device for filling material - Google Patents

Crucible supporting device, and method and device for filling material Download PDF

Info

Publication number
TWI227287B
TWI227287B TW90115794A TW90115794A TWI227287B TW I227287 B TWI227287 B TW I227287B TW 90115794 A TW90115794 A TW 90115794A TW 90115794 A TW90115794 A TW 90115794A TW I227287 B TWI227287 B TW I227287B
Authority
TW
Taiwan
Prior art keywords
crucible
patent application
raw material
scope
raw materials
Prior art date
Application number
TW90115794A
Other languages
English (en)
Chinese (zh)
Inventor
Koji Mizuishi
Wataru Yajima
Tetsuya Ishidaira
Original Assignee
Shinetsu Handotai Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinetsu Handotai Kk filed Critical Shinetsu Handotai Kk
Application granted granted Critical
Publication of TWI227287B publication Critical patent/TWI227287B/zh

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/30—Mechanisms for rotating or moving either the melt or the crystal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
TW90115794A 2000-06-29 2001-06-28 Crucible supporting device, and method and device for filling material TWI227287B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000196948A JP3823694B2 (ja) 2000-06-29 2000-06-29 ルツボ支持装置および原料充填装置並びに充填方法

Publications (1)

Publication Number Publication Date
TWI227287B true TWI227287B (en) 2005-02-01

Family

ID=18695359

Family Applications (1)

Application Number Title Priority Date Filing Date
TW90115794A TWI227287B (en) 2000-06-29 2001-06-28 Crucible supporting device, and method and device for filling material

Country Status (3)

Country Link
JP (1) JP3823694B2 (ja)
TW (1) TWI227287B (ja)
WO (1) WO2002000967A1 (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101434196B1 (ko) * 2011-12-13 2014-08-28 (주) 다애테크 사파이어 잉곳 제조장치
KR20160123536A (ko) * 2015-04-16 2016-10-26 포토멕 주식회사 사파이어 잉곳 제조장치
CN108368637B (zh) * 2015-08-20 2023-03-03 环球晶圆股份有限公司 用于在晶体生长室中选择性进给块状多晶硅或粒状多晶硅的系统
JP6500787B2 (ja) * 2016-01-05 2019-04-17 信越半導体株式会社 リチャージ管ストッカー
CN109811408B (zh) * 2019-03-26 2021-03-09 无锡坤硅新能源科技有限公司 硅粉在多晶硅铸锭制备中的应用
CN112831830B (zh) * 2020-12-31 2022-05-10 徐州晶睿半导体装备科技有限公司 用于晶体生长设备的坩埚升降机构和晶体生长设备
CN218671273U (zh) * 2022-10-25 2023-03-21 上海征世科技股份有限公司 一种单晶金刚石生长升降台

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3435498B2 (ja) * 1993-12-29 2003-08-11 東芝セラミックス株式会社 ルツボ組立体の引上装置への装着方法及びその装置
JPH1025188A (ja) * 1996-07-12 1998-01-27 Super Silicon Kenkyusho:Kk ルツボ搬送台車

Also Published As

Publication number Publication date
WO2002000967A1 (fr) 2002-01-03
JP3823694B2 (ja) 2006-09-20
JP2002020194A (ja) 2002-01-23

Similar Documents

Publication Publication Date Title
JP3555309B2 (ja) 粒状物の自動計量供給装置
JP4345624B2 (ja) チョクラルスキー法による原料供給装置および原料供給方法
JP6097276B2 (ja) シリコンインゴットのチョクラルスキー成長用の側方供給装置
TWI227287B (en) Crucible supporting device, and method and device for filling material
CN210555657U (zh) 一种中药配方颗粒瓶装机
TW202235706A (zh) 添加劑進料系統、拉錠器設備及使用添加劑進料系統形成單晶矽錠之方法
JP6503933B2 (ja) シリコン融液供給装置及び方法並びにシリコン単結晶製造装置
CN110525704A (zh) 一种双计量头高精度灌装机
US20040211358A1 (en) Source material feeder apparatus for industrial crystal growth systems
JP2617197B2 (ja) 粉粒体供給装置
CN102325927A (zh) 氧化硅玻璃坩埚
KR20120122563A (ko) 원료 투입기
CN219272942U (zh) 一种石英砂配料装置
CN210338480U (zh) 一种自动包装一体机
US2851341A (en) Method and equipment for growing crystals
CN206126374U (zh) 一种带计量装置的均匀布料装窑装置
CN220537467U (zh) 一种易于取件的称重灌装装置
JPH0432979B2 (ja)
US20180030614A1 (en) Feed system for crystal growing systems
WO2019126413A1 (en) Czochralski growth apparatus conversion assembly
JPH03290392A (ja) 単結晶製造装置
CN216737550U (zh) 一种日化产品生产用的原料称量设备
CN216234347U (zh) 一种机械工程建筑施工用带有定量机构的上料装置
CN217403124U (zh) 一种金属材料制造用的真空熔炼装置
CN206511205U (zh) 一种多晶硅自动包装防破袋下料装置

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees