TWI225658B - Ion source - Google Patents

Ion source Download PDF

Info

Publication number
TWI225658B
TWI225658B TW092109457A TW92109457A TWI225658B TW I225658 B TWI225658 B TW I225658B TW 092109457 A TW092109457 A TW 092109457A TW 92109457 A TW92109457 A TW 92109457A TW I225658 B TWI225658 B TW I225658B
Authority
TW
Taiwan
Prior art keywords
filament
ion source
mentioned
raw material
material gas
Prior art date
Application number
TW092109457A
Other languages
English (en)
Chinese (zh)
Other versions
TW200402749A (en
Inventor
Shuichi Maeno
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Publication of TW200402749A publication Critical patent/TW200402749A/zh
Application granted granted Critical
Publication of TWI225658B publication Critical patent/TWI225658B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
TW092109457A 2002-04-23 2003-04-23 Ion source TWI225658B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002120072A JP3575472B2 (ja) 2002-04-23 2002-04-23 イオン源

Publications (2)

Publication Number Publication Date
TW200402749A TW200402749A (en) 2004-02-16
TWI225658B true TWI225658B (en) 2004-12-21

Family

ID=29267353

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092109457A TWI225658B (en) 2002-04-23 2003-04-23 Ion source

Country Status (4)

Country Link
JP (1) JP3575472B2 (ja)
KR (1) KR100548930B1 (ja)
CN (1) CN1263080C (ja)
TW (1) TWI225658B (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8748845B2 (en) 2003-10-16 2014-06-10 Carl Zeiss Microscopy, Llc Ion sources, systems and methods
TWI463525B (zh) * 2005-12-02 2014-12-01 Carl Zeiss Microscopy Llc 用於樣本分析的系統
TWI467615B (zh) * 2009-04-16 2015-01-01 Varian Semiconductor Equipment 離子源與調整離子束均一性的方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8028653B2 (en) 2007-12-06 2011-10-04 Hitachi Global Storage Technologies Netherlands, B.V. System, method and apparatus for filament and support used in plasma-enhanced chemical vapor deposition for reducing carbon voids on media disks in disk drives
JP7197245B2 (ja) * 2017-01-12 2022-12-27 キヤノン電子管デバイス株式会社 Ｘ線管及びｘ線管の製造方法
JP7197927B2 (ja) * 2020-02-20 2022-12-28 株式会社 プラズマテック 電子ビーム発生装置及びアタッチメント部材

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8748845B2 (en) 2003-10-16 2014-06-10 Carl Zeiss Microscopy, Llc Ion sources, systems and methods
TWI463525B (zh) * 2005-12-02 2014-12-01 Carl Zeiss Microscopy Llc 用於樣本分析的系統
TWI463515B (zh) * 2005-12-02 2014-12-01 Carl Zeiss Microscopy Llc 產生離子束的系統
TWI463524B (zh) * 2005-12-02 2014-12-01 Carl Zeiss Microscopy Llc 離子顯微鏡、離子源系統
TWI463514B (zh) * 2005-12-02 2014-12-01 Carl Zeiss Microscopy Llc 處理樣本之方法
TWI467615B (zh) * 2009-04-16 2015-01-01 Varian Semiconductor Equipment 離子源與調整離子束均一性的方法

Also Published As

Publication number Publication date
TW200402749A (en) 2004-02-16
KR20030084630A (ko) 2003-11-01
CN1453818A (zh) 2003-11-05
CN1263080C (zh) 2006-07-05
KR100548930B1 (ko) 2006-02-02
JP3575472B2 (ja) 2004-10-13
JP2003317640A (ja) 2003-11-07

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees