CN1263080C - 离子源 - Google Patents

离子源 Download PDF

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Publication number
CN1263080C
CN1263080C CNB031232329A CN03123232A CN1263080C CN 1263080 C CN1263080 C CN 1263080C CN B031232329 A CNB031232329 A CN B031232329A CN 03123232 A CN03123232 A CN 03123232A CN 1263080 C CN1263080 C CN 1263080C
Authority
CN
China
Prior art keywords
long filament
ion source
mentioned
coating member
unstripped gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB031232329A
Other languages
English (en)
Chinese (zh)
Other versions
CN1453818A (zh
Inventor
前野修一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Ion Equipment Co Ltd
Original Assignee
Nissin Ion Equipment Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Ion Equipment Co Ltd filed Critical Nissin Ion Equipment Co Ltd
Publication of CN1453818A publication Critical patent/CN1453818A/zh
Application granted granted Critical
Publication of CN1263080C publication Critical patent/CN1263080C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
CNB031232329A 2002-04-23 2003-04-22 离子源 Expired - Fee Related CN1263080C (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP120072/02 2002-04-23
JP120072/2002 2002-04-23
JP2002120072A JP3575472B2 (ja) 2002-04-23 2002-04-23 イオン源

Publications (2)

Publication Number Publication Date
CN1453818A CN1453818A (zh) 2003-11-05
CN1263080C true CN1263080C (zh) 2006-07-05

Family

ID=29267353

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB031232329A Expired - Fee Related CN1263080C (zh) 2002-04-23 2003-04-22 离子源

Country Status (4)

Country Link
JP (1) JP3575472B2 (ja)
KR (1) KR100548930B1 (ja)
CN (1) CN1263080C (ja)
TW (1) TWI225658B (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8110814B2 (en) 2003-10-16 2012-02-07 Alis Corporation Ion sources, systems and methods
WO2007067296A2 (en) * 2005-12-02 2007-06-14 Alis Corporation Ion sources, systems and methods
US8028653B2 (en) 2007-12-06 2011-10-04 Hitachi Global Storage Technologies Netherlands, B.V. System, method and apparatus for filament and support used in plasma-enhanced chemical vapor deposition for reducing carbon voids on media disks in disk drives
US7999479B2 (en) * 2009-04-16 2011-08-16 Varian Semiconductor Equipment Associates, Inc. Conjugated ICP and ECR plasma sources for wide ribbon ion beam generation and control
JP7197245B2 (ja) * 2017-01-12 2022-12-27 キヤノン電子管デバイス株式会社 Ｘ線管及びｘ線管の製造方法
JP7197927B2 (ja) * 2020-02-20 2022-12-28 株式会社 プラズマテック 電子ビーム発生装置及びアタッチメント部材

Also Published As

Publication number Publication date
TW200402749A (en) 2004-02-16
KR20030084630A (ko) 2003-11-01
CN1453818A (zh) 2003-11-05
TWI225658B (en) 2004-12-21
KR100548930B1 (ko) 2006-02-02
JP3575472B2 (ja) 2004-10-13
JP2003317640A (ja) 2003-11-07

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Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20060705

Termination date: 20140422