TWD243493S - 基板處理裝置用氣體供給噴嘴之部分 - Google Patents

基板處理裝置用氣體供給噴嘴之部分

Info

Publication number
TWD243493S
TWD243493S TW113304576F TW113304576F TWD243493S TW D243493 S TWD243493 S TW D243493S TW 113304576 F TW113304576 F TW 113304576F TW 113304576 F TW113304576 F TW 113304576F TW D243493 S TWD243493 S TW D243493S
Authority
TW
Taiwan
Prior art keywords
processing apparatus
substrate processing
design
gas supply
supply nozzle
Prior art date
Application number
TW113304576F
Other languages
English (en)
Chinese (zh)
Inventor
岡嶋優作
小島進太郎
Original Assignee
日商國際電氣股份有限公司 (日本)
日商國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商國際電氣股份有限公司 (日本), 日商國際電氣股份有限公司 filed Critical 日商國際電氣股份有限公司 (日本)
Publication of TWD243493S publication Critical patent/TWD243493S/zh

Links

TW113304576F 2024-03-08 2024-09-05 基板處理裝置用氣體供給噴嘴之部分 TWD243493S (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2024-004872 2024-03-08
JP2024004872F JP1774816S (online.php) 2024-03-08 2024-03-08

Publications (1)

Publication Number Publication Date
TWD243493S true TWD243493S (zh) 2026-03-21

Family

ID=91672194

Family Applications (1)

Application Number Title Priority Date Filing Date
TW113304576F TWD243493S (zh) 2024-03-08 2024-09-05 基板處理裝置用氣體供給噴嘴之部分

Country Status (3)

Country Link
US (1) USD1110978S1 (online.php)
JP (1) JP1774816S (online.php)
TW (1) TWD243493S (online.php)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD120457S1 (zh) 2006-10-06 2007-12-11 紐富來科技股份有限公司 氣相成長裝置用氣體噴嘴

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USD447921S1 (en) * 2001-01-09 2001-09-18 Gary Ray Beltz Plant water nozzle attachment
USD502985S1 (en) * 2003-03-11 2005-03-15 Johannes Petrus Coetzee Katzke Nozzle
US8148271B2 (en) * 2005-08-05 2012-04-03 Hitachi Kokusai Electric Inc. Substrate processing apparatus, coolant gas supply nozzle and semiconductor device manufacturing method
US7635096B2 (en) * 2005-08-19 2009-12-22 Stoneage, Inc. Self regulating fluid bearing high pressure rotary nozzle with balanced thrust force
JP5044931B2 (ja) * 2005-10-31 2012-10-10 東京エレクトロン株式会社 ガス供給装置及び基板処理装置
US20090205631A1 (en) * 2008-02-20 2009-08-20 Kao Hsung Tsung Gas burner head
JP2009239082A (ja) * 2008-03-27 2009-10-15 Tokyo Electron Ltd ガス供給装置、処理装置及び処理方法
USD613116S1 (en) * 2009-08-10 2010-04-06 W.C. Bradley Co. Universal fit bar burner
USD645118S1 (en) * 2010-05-25 2011-09-13 Caldwell Tanks, Inc. Nozzle tubing having offset nozzles
US10683571B2 (en) * 2014-02-25 2020-06-16 Asm Ip Holding B.V. Gas supply manifold and method of supplying gases to chamber using same
JP6320824B2 (ja) * 2014-03-31 2018-05-09 株式会社東芝 ガス供給管、およびガス処理装置
JP1520999S (online.php) * 2014-09-02 2015-04-06
JP1534651S (online.php) * 2015-01-28 2015-10-05
JP1547057S (online.php) * 2015-05-28 2016-04-04
JP6578243B2 (ja) * 2015-07-17 2019-09-18 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ ガス供給ノズル、基板処理装置、半導体装置の製造方法およびプログラム
JP1563647S (online.php) * 2016-01-29 2016-11-21
JP6538582B2 (ja) * 2016-02-15 2019-07-03 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 基板処理装置、半導体装置の製造方法およびプログラム
JP6710134B2 (ja) * 2016-09-27 2020-06-17 東京エレクトロン株式会社 ガス導入機構及び処理装置
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JP1684258S (online.php) * 2020-07-27 2021-04-26
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JP1706319S (online.php) * 2021-06-16 2022-01-31
JP1731676S (ja) * 2022-05-30 2025-12-15 基板処理装置用ガス供給ノズル
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Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD120457S1 (zh) 2006-10-06 2007-12-11 紐富來科技股份有限公司 氣相成長裝置用氣體噴嘴

Also Published As

Publication number Publication date
USD1110978S1 (en) 2026-02-03
JP1774816S (online.php) 2024-07-05

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