TWD218087S - reaction tube - Google Patents

reaction tube Download PDF

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Publication number
TWD218087S
TWD218087S TW109304843F TW109304843F TWD218087S TW D218087 S TWD218087 S TW D218087S TW 109304843 F TW109304843 F TW 109304843F TW 109304843 F TW109304843 F TW 109304843F TW D218087 S TWD218087 S TW D218087S
Authority
TW
Taiwan
Prior art keywords
reaction tube
item
design
attached
buffer chamber
Prior art date
Application number
TW109304843F
Other languages
Chinese (zh)
Inventor
村田慧
Original Assignee
日商國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商國際電氣股份有限公司 filed Critical 日商國際電氣股份有限公司
Publication of TWD218087S publication Critical patent/TWD218087S/en

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Abstract

【物品用途】;本設計之物品是應用在基板處理裝置的反應管。;【設計說明】;本物品係在本體上部的突出的部分，形成用以均勻的供給處理氣體的緩衝室。;本物品的整體是透明體。【Use of item】;The item of this design is a reaction tube used in a substrate processing device. ;[Design Description];This product is attached to the protruding part on the upper part of the body to form a buffer chamber for uniform supply of processing gas. ;This item is entirely transparent.

Description

反應管reaction tube

本設計之物品是應用在基板處理裝置的反應管。The object of this design is the reaction tube used in the substrate processing device.

本物品係在本體上部的突出的部分，形成用以均勻的供給處理氣體的緩衝室。This article is attached to the protruding part of the upper part of the main body to form a buffer chamber for uniform supply of process gas.

本物品的整體是透明體。The whole of this article is a transparent body.

TW109304843F 2020-03-10 2020-08-27 reaction tube TWD218087S (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020-004705 2020-01-15
JP2020004705F JP1678273S (en) 2020-03-10 2020-03-10 reaction tube

Publications (1)

Publication Number Publication Date
TWD218087S true TWD218087S (en) 2022-04-11

Family

ID=74312489

Family Applications (1)

Application Number Title Priority Date Filing Date
TW109304843F TWD218087S (en) 2020-03-10 2020-08-27 reaction tube

Country Status (3)

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US (1) USD986826S1 (en)
JP (1) JP1678273S (en)
TW (1) TWD218087S (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1731673S (en) * 2022-05-30 2022-12-08
JP1731674S (en) * 2022-05-30 2022-12-08
JP1731675S (en) * 2022-05-30 2022-12-08

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD424024S (en) * 1997-01-31 2000-05-02 Tokyo Electron Limited Quartz process tube
USD423463S (en) * 1997-01-31 2000-04-25 Tokyo Electron Limited Quartz process tube
USD405431S (en) * 1997-08-20 1999-02-09 Tokyo Electron Ltd. Tube for use in a semiconductor wafer heat processing apparatus
USD405062S (en) * 1997-08-20 1999-02-02 Tokyo Electron Ltd. Processing tube for use in a semiconductor wafer heat processing apparatus
USD600659S1 (en) * 2006-09-12 2009-09-22 Tokyo Electron Limited Process tube for manufacturing semiconductor wafers
USD594488S1 (en) * 2007-04-20 2009-06-16 Tokyo Electron Limited Process tube for manufacturing semiconductor wafers
USD629915S1 (en) * 2009-09-10 2010-12-28 Becton, Dickinson And Company Transparent tube holder assembly with internal and external ribs
KR20160070359A (en) * 2014-12-10 2016-06-20 삼성전자주식회사 Gas injector and wafer processing apparatus havin the same
JP1534828S (en) * 2015-02-23 2015-10-13
JP1534829S (en) * 2015-02-23 2015-10-13
JP1535455S (en) * 2015-02-25 2015-10-19
JP1605460S (en) * 2017-08-09 2021-05-31
JP1605461S (en) * 2017-08-10 2021-05-31
JP1605982S (en) * 2017-12-27 2021-05-31
USD931823S1 (en) * 2020-01-29 2021-09-28 Kokusai Electric Corporation Reaction tube
JP1667375S (en) * 2020-03-24 2020-08-31
JP1667336S (en) * 2020-03-24 2020-08-31
JP1667378S (en) * 2020-03-24 2020-08-31

Also Published As

Publication number Publication date
JP1678273S (en) 2021-02-01
USD986826S1 (en) 2023-05-23

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