TWD220665S - Nozzle holder for substrate processing equipment - Google Patents
Nozzle holder for substrate processing equipment Download PDFInfo
- Publication number
- TWD220665S TWD220665S TW110305055F TW110305055F TWD220665S TW D220665 S TWD220665 S TW D220665S TW 110305055 F TW110305055 F TW 110305055F TW 110305055 F TW110305055 F TW 110305055F TW D220665 S TWD220665 S TW D220665S
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate processing
- nozzle holder
- processing equipment
- nozzle
- article
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title abstract description 5
- 235000012431 wafers Nutrition 0.000 abstract description 2
- 238000000034 method Methods 0.000 abstract 1
Images
Abstract
【物品用途】;本設計的物品是基板處理裝置用噴嘴保持器，為一種配置在處理晶圓的基板處理裝置的處理室內連接於氣體供給噴嘴使用，並且是直立地支承該氣體供給噴嘴的噴嘴保持器。此外，本體的中央部是供氣體通過的噴嘴結構。;【設計說明】;(無)[Use of article]; The article of this design is a nozzle holder for a substrate processing device. It is placed in the processing chamber of a substrate processing device that processes wafers and is connected to a gas supply nozzle. It supports the gas supply nozzle upright. Nozzle holder. In addition, the central part of the body is a nozzle structure for gas to pass through. ;[Design description];(none)
Description
本設計的物品是基板處理裝置用噴嘴保持器，為一種配置在處理晶圓的基板處理裝置的處理室內連接於氣體供給噴嘴使用，並且是直立地支承該氣體供給噴嘴的噴嘴保持器。此外，本體的中央部是供氣體通過的噴嘴結構。The article of the present design is a nozzle holder for a substrate processing apparatus, which is arranged in a processing chamber of a substrate processing apparatus for processing wafers and used in connection with a gas supply nozzle, and is a nozzle holder that supports the gas supply nozzle upright. In addition, the central part of the main body is a nozzle structure through which gas passes.
(無)(none)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPD2021-5832F JP1700780S (en) | 2021-03-22 | 2021-03-22 | |
| JP2021-005832 | 2021-03-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWD220665S true TWD220665S (en) | 2022-08-21 |
Family
ID=78766351
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW110305055F TWD220665S (en) | 2021-03-22 | 2021-09-17 | Nozzle holder for substrate processing equipment |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | USD1017561S1 (en) |
| JP (1) | JP1700780S (en) |
| TW (1) | TWD220665S (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWD228839S (en) | 2022-10-12 | 2023-12-01 | 日商東京威力科創股份有限公司 | Part of the base of the semiconductor substrate holder |
| TWD228840S (en) | 2022-10-12 | 2023-12-01 | 日商東京威力科創股份有限公司 | Semiconductor substrate holder part |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD288954S (en) * | 1984-09-20 | 1987-03-24 | Economics Laboratory, Inc. | Dispensing nozzle |
| USD341418S (en) * | 1991-02-22 | 1993-11-16 | Tokyo Electron Limited | Supply nozzle for applying liquid resist to a semiconductor wafer |
| USD439636S1 (en) * | 2000-01-26 | 2001-03-27 | Spraying Systems Co. | Quick disconnect nozzle assembly |
| USD583224S1 (en) * | 2007-11-29 | 2008-12-23 | Barsplice Products, Inc. | Coupler body for connecting concrete reinforcing bars |
| USD826702S1 (en) * | 2017-03-14 | 2018-08-28 | Sean A. Barnes | Pile guide for docks for internal application |
| JP1624352S (en) | 2018-07-19 | 2019-02-12 | ||
| JP1648531S (en) | 2019-01-28 | 2019-12-23 | ||
| USD899901S1 (en) * | 2019-07-24 | 2020-10-27 | Sean A. Barnes | Pile guide having an external stabilizer |
| KR20210048408A (en) * | 2019-10-22 | 2021-05-03 | 에이에스엠 아이피 홀딩 비.브이. | Semiconductor deposition reactor manifolds |
| JP1685215S (en) * | 2020-08-18 | 2024-05-10 | Gas introduction pipe for substrate processing equipment |
-
2021
- 2021-03-22 JP JPD2021-5832F patent/JP1700780S/ja active Active
- 2021-09-17 TW TW110305055F patent/TWD220665S/en unknown
- 2021-09-21 US US29/808,585 patent/USD1017561S1/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWD228839S (en) | 2022-10-12 | 2023-12-01 | 日商東京威力科創股份有限公司 | Part of the base of the semiconductor substrate holder |
| TWD228840S (en) | 2022-10-12 | 2023-12-01 | 日商東京威力科創股份有限公司 | Semiconductor substrate holder part |
Also Published As
| Publication number | Publication date |
|---|---|
| USD1017561S1 (en) | 2024-03-12 |
| JP1700780S (en) | 2021-11-29 |
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