TWD230200S - reaction tube - Google Patents

reaction tube Download PDF

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Publication number
TWD230200S
TWD230200S TW111300908F TW111300908F TWD230200S TW D230200 S TWD230200 S TW D230200S TW 111300908 F TW111300908 F TW 111300908F TW 111300908 F TW111300908 F TW 111300908F TW D230200 S TWD230200 S TW D230200S
Authority
TW
Taiwan
Prior art keywords
reaction tube
design
express
views
processing device
Prior art date
Application number
TW111300908F
Other languages
Chinese (zh)
Inventor
岡嶋優作
Original Assignee
日商國際電氣股份有限公司 (日本)
日商國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商國際電氣股份有限公司 (日本), 日商國際電氣股份有限公司 filed Critical 日商國際電氣股份有限公司 (日本)
Publication of TWD230200S publication Critical patent/TWD230200S/en

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Abstract

【物品用途】;本設計之物品是反應管，係在基板處理裝置中，將複數層排列的基板收容在內部，且在預定的氣體氛圍下進行處理的反應管。;【設計說明】;立體圖中，未呈現在其他六視圖中的細線，皆為用表現立體表面之形狀的線條。[Object Purpose];The object of this design is a reaction tube, which is a reaction tube in a substrate processing device that accommodates multiple layers of substrates and processes them under a predetermined gas atmosphere.;[Design Description];In the three-dimensional diagram, the fine lines that are not shown in the other six views are all lines used to express the shape of the three-dimensional surface.

Description

反應管reaction tube

本設計之物品是反應管，係在基板處理裝置中，將複數層排列的基板收容在內部，且在預定的氣體氛圍下進行處理的反應管。The object of this design is a reaction tube, which is used in a substrate processing device to house multiple layers of substrates inside and process them in a predetermined gas atmosphere.

立體圖中，未呈現在其他六視圖中的細線，皆為用表現立體表面之形狀的線條。In the three-dimensional view, the thin lines that are not shown in the other six views are all lines used to express the shape of the three-dimensional surface.

TW111300908F 2021-09-15 2022-02-24 reaction tube TWD230200S (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021-019930 2021-09-15
JP2021019930F JP1713188S (en) 2021-09-15 2021-09-15

Publications (1)

Publication Number Publication Date
TWD230200S true TWD230200S (en) 2024-03-01

Family

ID=81209955

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111300908F TWD230200S (en) 2021-09-15 2022-02-24 reaction tube

Country Status (3)

Country Link
US (1) USD1022904S1 (en)
JP (1) JP1713188S (en)
TW (1) TWD230200S (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD166710S (en) 2013-07-08 2015-03-21 日立國際電氣股份有限公司 reaction tube

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD405429S (en) * 1997-01-31 1999-02-09 Tokyo Electron Limited Processing tube for use in a semiconductor wafer heat processing apparatus
USD424024S (en) * 1997-01-31 2000-05-02 Tokyo Electron Limited Quartz process tube
USD405431S (en) * 1997-08-20 1999-02-09 Tokyo Electron Ltd. Tube for use in a semiconductor wafer heat processing apparatus
JP3985899B2 (en) * 2002-03-28 2007-10-03 株式会社日立国際電気 Substrate processing equipment
USD590359S1 (en) * 2006-02-20 2009-04-14 Tokyo Electron Limited Process tube for manufacturing semiconductor wafers or the like
USD600659S1 (en) * 2006-09-12 2009-09-22 Tokyo Electron Limited Process tube for manufacturing semiconductor wafers
USD594488S1 (en) * 2007-04-20 2009-06-16 Tokyo Electron Limited Process tube for manufacturing semiconductor wafers
USD619630S1 (en) * 2007-05-08 2010-07-13 Tokyo Electron Limited Process tube for manufacturing semiconductor wafers
USD618638S1 (en) 2008-05-09 2010-06-29 Hitachi Kokusai Electric, Inc. Reaction tube
USD742339S1 (en) 2014-03-12 2015-11-03 Hitachi Kokusai Electric Inc. Reaction tube
JP1534828S (en) * 2015-02-23 2015-10-13
JP1535455S (en) * 2015-02-25 2015-10-19
JP1546345S (en) * 2015-09-04 2016-03-22
JP1546512S (en) * 2015-09-04 2016-03-22

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD166710S (en) 2013-07-08 2015-03-21 日立國際電氣股份有限公司 reaction tube

Also Published As

Publication number Publication date
USD1022904S1 (en) 2024-04-16
JP1713188S (en) 2022-04-21

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