JP1745873S - Susceptor - Google Patents
SusceptorInfo
- Publication number
- JP1745873S JP1745873S JP2022022678F JP2022022678F JP1745873S JP 1745873 S JP1745873 S JP 1745873S JP 2022022678 F JP2022022678 F JP 2022022678F JP 2022022678 F JP2022022678 F JP 2022022678F JP 1745873 S JP1745873 S JP 1745873S
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- component
- wafer
- constitutes
- article
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Abstract
本物品は、半導体製造装置等においてウェハを保持するために用いるサセプタユニットの基台となるサセプタ部品の外周を構成する部品である。This article is a component that constitutes the outer periphery of a susceptor component that serves as a base of a susceptor unit used to hold a wafer in a semiconductor manufacturing apparatus or the like.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022022678F JP1745873S (en) | 2022-10-20 | 2022-10-20 | Susceptor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022022678F JP1745873S (en) | 2022-10-20 | 2022-10-20 | Susceptor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP1745873S true JP1745873S (en) | 2023-06-08 |
Family
ID=86610956
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022022678F Active JP1745873S (en) | 2022-10-20 | 2022-10-20 | Susceptor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP1745873S (en) |
-
2022
- 2022-10-20 JP JP2022022678F patent/JP1745873S/en active Active
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