JP1746404S - Susceptor cover base - Google Patents

Susceptor cover base

Info

Publication number
JP1746404S
JP1746404S JP2023000283F JP2023000283F JP1746404S JP 1746404 S JP1746404 S JP 1746404S JP 2023000283 F JP2023000283 F JP 2023000283F JP 2023000283 F JP2023000283 F JP 2023000283F JP 1746404 S JP1746404 S JP 1746404S
Authority
JP
Japan
Prior art keywords
cover base
susceptor cover
base
susceptor
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2023000283F
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2023000283F priority Critical patent/JP1746404S/en
Application granted granted Critical
Publication of JP1746404S publication Critical patent/JP1746404S/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Abstract

本物品は、半導体製造装置等においてウェハを保持するために用いるサセプタユニットを構成するカバーベース部品であり、基台となるサセプタ部品の外周に載置され、ウェハが載る土台となる部品である。This article is a cover base part that constitutes a susceptor unit used to hold a wafer in a semiconductor manufacturing apparatus or the like, and is placed on the outer periphery of the susceptor part that serves as a base and serves as a base on which the wafer is placed.

JP2023000283F 2023-01-11 2023-01-11 Susceptor cover base Active JP1746404S (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2023000283F JP1746404S (en) 2023-01-11 2023-01-11 Susceptor cover base

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2023000283F JP1746404S (en) 2023-01-11 2023-01-11 Susceptor cover base

Publications (1)

Publication Number Publication Date
JP1746404S true JP1746404S (en) 2023-06-15

Family

ID=86720896

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023000283F Active JP1746404S (en) 2023-01-11 2023-01-11 Susceptor cover base

Country Status (1)

Country Link
JP (1) JP1746404S (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1047884S1 (en) * 2021-10-22 2024-10-22 Nuflare Technology, Inc. Susceptor cover

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1047884S1 (en) * 2021-10-22 2024-10-22 Nuflare Technology, Inc. Susceptor cover

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