JP1741175S - Susceptor - Google Patents
SusceptorInfo
- Publication number
- JP1741175S JP1741175S JP2022022685F JP2022022685F JP1741175S JP 1741175 S JP1741175 S JP 1741175S JP 2022022685 F JP2022022685 F JP 2022022685F JP 2022022685 F JP2022022685 F JP 2022022685F JP 1741175 S JP1741175 S JP 1741175S
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- wafer
- constitutes
- article
- serves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Abstract
本物品は、半導体製造装置等においてウェハを保持するために用いるサセプタユニットの基台となるサセプタ部品の中央を構成する部品である。This article is a part that constitutes the center of a susceptor part that serves as a base of a susceptor unit used to hold a wafer in a semiconductor manufacturing apparatus or the like.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022022685F JP1741175S (en) | 2022-10-20 | 2022-10-20 | Susceptor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022022685F JP1741175S (en) | 2022-10-20 | 2022-10-20 | Susceptor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP1741175S true JP1741175S (en) | 2023-04-06 |
Family
ID=85777532
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022022685F Active JP1741175S (en) | 2022-10-20 | 2022-10-20 | Susceptor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP1741175S (en) |
-
2022
- 2022-10-20 JP JP2022022685F patent/JP1741175S/en active Active
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