JP1745874S - Susceptor cover - Google Patents
Susceptor coverInfo
- Publication number
- JP1745874S JP1745874S JP2022022680F JP2022022680F JP1745874S JP 1745874 S JP1745874 S JP 1745874S JP 2022022680 F JP2022022680 F JP 2022022680F JP 2022022680 F JP2022022680 F JP 2022022680F JP 1745874 S JP1745874 S JP 1745874S
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- cover
- susceptor cover
- constitutes
- serves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 abstract 1
Abstract
本物品は、半導体製造装置等においてウェハを保持するために用いるサセプタユニットを構成するカバー部品であり、基台となるサセプタ部品上に、その一部がカバーベース部品を介して載置される部品である。This product is a cover part that constitutes a susceptor unit used to hold wafers in semiconductor manufacturing equipment, etc., and is partly placed on the susceptor part that serves as a base via a cover base part. is.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022022680F JP1745874S (en) | 2022-10-20 | 2022-10-20 | Susceptor cover |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022022680F JP1745874S (en) | 2022-10-20 | 2022-10-20 | Susceptor cover |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP1745874S true JP1745874S (en) | 2023-06-08 |
Family
ID=86610957
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022022680F Active JP1745874S (en) | 2022-10-20 | 2022-10-20 | Susceptor cover |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP1745874S (en) |
-
2022
- 2022-10-20 JP JP2022022680F patent/JP1745874S/en active Active
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