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本願に係る物品（以下、「本物品」という。）は、例えば、半導体の製造に用いられる半導体処理装置において処理ガスを放出するシャワーヘッドを構成するシャワーヘッドアセンブリである。An article according to the present application (hereinafter referred to as "the article") is, for example, a showerhead assembly that constitutes a showerhead that emits processing gas in a semiconductor processing apparatus used for manufacturing semiconductors.
JP2021021859F2021-04-072021-10-07
Shower head assembly for semiconductor processing equipment
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