TWD228269S - Substrate holder for substrate processing equipment - Google Patents
Substrate holder for substrate processing equipment Download PDFInfo
- Publication number
- TWD228269S TWD228269S TW111303487F TW111303487F TWD228269S TW D228269 S TWD228269 S TW D228269S TW 111303487 F TW111303487 F TW 111303487F TW 111303487 F TW111303487 F TW 111303487F TW D228269 S TWD228269 S TW D228269S
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- processing equipment
- substrate processing
- holder
- substrate holder
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title abstract description 10
Abstract
【物品用途】;本設計的物品是基板處理裝置用基板保持具，係在基板處理裝置的縱型反應室中，用以將複數個基板予以保持水平的保持具。;【設計說明】;(無)[Use of article]; The article designed in this design is a substrate holder for a substrate processing device. It is a holder used to maintain a plurality of substrates horizontally in the vertical reaction chamber of the substrate processing device. ;[Design description];(none)
Description
本設計的物品是基板處理裝置用基板保持具，係在基板處理裝置的縱型反應室中，用以將複數個基板予以保持水平的保持具。The article of this design is a substrate holder for a substrate processing apparatus. It is a holder used to maintain a plurality of substrates horizontally in a vertical reaction chamber of a substrate processing apparatus.
(無)(without)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022-004465 | 2022-03-04 | ||
| JP2022004465F JP1731670S (en) | 2022-03-04 | 2022-03-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWD228269S true TWD228269S (en) | 2023-11-01 |
Family
ID=84322250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW111303487F TWD228269S (en) | 2022-03-04 | 2022-07-14 | Substrate holder for substrate processing equipment |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP1731670S (en) |
| TW (1) | TWD228269S (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWD213081S (en) | 2020-06-15 | 2021-08-01 | 日商東京威力科創股份有限公司 | Reaction tube for semiconductor manufacturing equipment (1) |
-
2022
- 2022-03-04 JP JP2022004465F patent/JP1731670S/ja active Active
- 2022-07-14 TW TW111303487F patent/TWD228269S/en unknown
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWD213081S (en) | 2020-06-15 | 2021-08-01 | 日商東京威力科創股份有限公司 | Reaction tube for semiconductor manufacturing equipment (1) |
Also Published As
| Publication number | Publication date |
|---|---|
| JP1731670S (en) | 2022-12-08 |
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