TWD219069S

TWD219069S - Part of wafer boat for substrate processing equipment

Info

Publication number: TWD219069S
Application number: TW109306221F
Authority: TW
Inventors: 嶋田寛哲; 上村大義; 堀井明
Original assignee: 日商國際電氣股份有限公司
Priority date: 2020-06-23
Filing date: 2020-11-10
Publication date: 2022-06-01

Abstract

【物品用途】;本設計的物品是基板處理裝置用晶舟，為一種用以將複數基板呈水平地保持在用來處理晶圓之基板處理裝置的縱型反應室內的晶舟。;【設計說明】;基板是被載置於形成在左右及後方之柱體的插梢形狀的突起上。並且，在左右的柱體上形成有相對於柱體而傾斜的插梢。;圖式中所揭露之虛線部分，為本案不主張設計之部分；圖式中一點鏈線所圍繞者，係界定本案所欲主張之範圍，該一點鏈線本身為本案不主張設計之部分。[Use of article] The article of this design is a wafer boat for a substrate processing device. It is a wafer boat used to hold multiple substrates horizontally in a vertical reaction chamber of a substrate processing device for processing wafers. ;[Design Description];The base plate is placed on the protrusions in the shape of plugs formed on the left, right and rear columns. Furthermore, the left and right pillars are formed with insertion tips that are inclined relative to the pillars. ; The dotted line portion disclosed in the drawing is a part of the case that does not claim design; the one-point chain line in the drawing is surrounded by a dotted line that defines the scope of the claim, and the one-point chain line itself is a part of the case that does not claim design.

Description

Part of wafer boat for substrate processing equipment

本設計的物品是基板處理裝置用晶舟，為一種用以將複數基板呈水平地保持在用來處理晶圓之基板處理裝置的縱型反應室內的晶舟。The article of this design is a wafer boat for a substrate processing apparatus, which is a wafer boat for holding a plurality of substrates horizontally in a vertical reaction chamber of a substrate processing apparatus for processing wafers.

基板是被載置於形成在左右及後方之柱體的插梢形狀的突起上。並且，在左右的柱體上形成有相對於柱體而傾斜的插梢。The substrate is placed on projections in the shape of pins formed on the left and right and rear columns. In addition, pins inclined with respect to the cylinder are formed on the left and right cylinders.

圖式中所揭露之虛線部分，為本案不主張設計之部分；圖式中一點鏈線所圍繞者，係界定本案所欲主張之範圍，該一點鏈線本身為本案不主張設計之部分。The part of the dotted line disclosed in the drawing is the part where the design is not claimed in this case; the dotted line in the drawing is the part that defines the scope of the claim in this case, and the one-point chain itself is the part where the design is not claimed in the case.