TWD215215S - 基板處理裝置用氣體供給噴嘴 - Google Patents

基板處理裝置用氣體供給噴嘴 Download PDF

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Publication number
TWD215215S
TWD215215S TW110300058F TW110300058F TWD215215S TW D215215 S TWD215215 S TW D215215S TW 110300058 F TW110300058 F TW 110300058F TW 110300058 F TW110300058 F TW 110300058F TW D215215 S TWD215215 S TW D215215S
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TW
Taiwan
Prior art keywords
substrate processing
reaction chamber
gas
gas supply
supply nozzle
Prior art date
Application number
TW110300058F
Other languages
English (en)
Chinese (zh)
Inventor
三部誠
藤井悟史
Original Assignee
日商國際電氣股份有限公司
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Application filed by 日商國際電氣股份有限公司 filed Critical 日商國際電氣股份有限公司
Publication of TWD215215S publication Critical patent/TWD215215S/zh

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TW110300058F 2020-07-27 2021-01-06 基板處理裝置用氣體供給噴嘴 TWD215215S (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPD2020-15472F JP1684258S (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 2020-07-27 2020-07-27
JP2020-015472 2020-07-27

Publications (1)

Publication Number Publication Date
TWD215215S true TWD215215S (zh) 2021-11-11

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Application Number Title Priority Date Filing Date
TW110300058F TWD215215S (zh) 2020-07-27 2021-01-06 基板處理裝置用氣體供給噴嘴

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US (1) USD965740S1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JP1684258S (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
TW (1) TWD215215S (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD223989S (zh) 2022-03-03 2023-03-01 家登精密工業股份有限公司 擴散管
TWD225053S (zh) 2022-03-03 2023-05-01 家登精密工業股份有限公司 擴散管

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Publication number Priority date Publication date Assignee Title
USD983151S1 (en) * 2020-09-09 2023-04-11 Kokusai Electric Corporation Exhaust liner for reaction tube
JP1731676S (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 2022-05-30 2022-12-08
USD987037S1 (en) * 2023-02-19 2023-05-23 Shenzhen Senluoyi Technology Co., Ltd Nozzle adapter

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD203444S (zh) 2019-01-28 2020-03-21 日商國際電氣股份有限公司 基板處理裝置用氣體導入管

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USD258309S (en) * 1978-08-14 1981-02-17 Leighton Joseph T Gas fuel burner for fireplaces
USD322470S (en) * 1988-06-28 1991-12-17 Garlich John D Wine siphon
US20090205631A1 (en) * 2008-02-20 2009-08-20 Kao Hsung Tsung Gas burner head
CA2647915C (en) * 2008-12-24 2015-11-24 Onward Multi-Corp Inc. Tube burner with adjustable length
USD613116S1 (en) * 2009-08-10 2010-04-06 W.C. Bradley Co. Universal fit bar burner
USD645118S1 (en) * 2010-05-25 2011-09-13 Caldwell Tanks, Inc. Nozzle tubing having offset nozzles
USD643091S1 (en) * 2010-06-30 2011-08-09 Smc Corporation Ionizer
USD695883S1 (en) * 2012-12-11 2013-12-17 Michael Vest Gas burner
JP1521275S (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 2014-09-10 2015-04-13
JP1534651S (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 2015-01-28 2015-10-05
JP1547057S (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 2015-05-28 2016-04-04
JP1563647S (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 2016-01-29 2016-11-21
USD851763S1 (en) * 2016-12-29 2019-06-18 Mathews Outdoor Products LLC Fire starter lance
JP1589673S (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 2017-04-14 2017-10-30
JP1605945S (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 2017-12-27 2018-06-04
USD888196S1 (en) * 2018-07-05 2020-06-23 Kokusai Electric Corporation Gas nozzle for substrate processing apparatus
JP1624354S (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 2018-07-19 2019-02-12
USD886947S1 (en) * 2019-03-17 2020-06-09 Runjian Mo Handheld shower

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD203444S (zh) 2019-01-28 2020-03-21 日商國際電氣股份有限公司 基板處理裝置用氣體導入管

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD223989S (zh) 2022-03-03 2023-03-01 家登精密工業股份有限公司 擴散管
TWD225053S (zh) 2022-03-03 2023-05-01 家登精密工業股份有限公司 擴散管

Also Published As

Publication number Publication date
JP1684258S (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 2021-04-26
USD965740S1 (en) 2022-10-04

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