TWD202287S - 半導體製造裝置用離子遮蔽板保持具 - Google Patents

半導體製造裝置用離子遮蔽板保持具 Download PDF

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Publication number
TWD202287S
TWD202287S TW108300476F TW108300476F TWD202287S TW D202287 S TWD202287 S TW D202287S TW 108300476 F TW108300476 F TW 108300476F TW 108300476 F TW108300476 F TW 108300476F TW D202287 S TWD202287 S TW D202287S
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Taiwan
Prior art keywords
shielding plate
semiconductor manufacturing
ion shielding
manufacturing equipment
plate holder
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TW108300476F
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English (en)
Inventor
高妻豊
廣實一幸
小林知明
小川芳文
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日商日立全球先端科技股份有限公司
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Publication of TWD202287S publication Critical patent/TWD202287S/zh

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Abstract

【物品用途】;本設計的物品是半導體製造裝置用離子遮蔽板保持具，為一種應用於半導體製造裝置上，在真空室內用來保持被設置在氣體流路中的離子遮蔽板(Punch plate)的保持具。如「使用狀態及標示各部名稱之參考圖」所示，本物品通常是在設置於本物品的下端附近之朝向中心方向的伸出部上載置著離子遮蔽板來使用。;【設計說明】;繪製在「立體圖2」的細線，皆為用來呈現立體表面的形狀。

Description

半導體製造裝置用離子遮蔽板保持具
本設計的物品是半導體製造裝置用離子遮蔽板保持具，為一種應用於半導體製造裝置上，在真空室內用來保持被設置在氣體流路中的離子遮蔽板(Punch plate)的保持具。如「使用狀態及標示各部名稱之參考圖」所示，本物品通常是在設置於本物品的下端附近之朝向中心方向的伸出部上載置著離子遮蔽板來使用。
繪製在「立體圖2」的細線，皆為用來呈現立體表面的形狀。
TW108300476F 2018-07-24 2019-01-24 半導體製造裝置用離子遮蔽板保持具 TWD202287S (zh)

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JP2018-016189 2018-07-24
JPD2018-16189F JP1624793S (zh) 2018-07-24 2018-07-24

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TWD202287S true TWD202287S (zh) 2020-01-21

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Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD952453S1 (en) * 2020-03-16 2022-05-24 Dongguan Shichang Metals Factory Ltd. Connecting sleeve for height adjustable table
JP1678330S (zh) * 2020-05-27 2021-02-01
JP1676786S (zh) * 2020-06-23 2021-01-18
JP1704964S (ja) * 2021-04-19 2022-01-14 プラズマ処理装置用サセプタリング
JP1700629S (zh) * 2021-04-26 2021-11-29
USD1008967S1 (en) * 2022-05-16 2023-12-26 Japan Aviation Electronics Industry, Limited Collar for connector
USD1038874S1 (en) * 2023-02-06 2024-08-13 Schill GmbH & Co. KG Power supply unit

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD189097S (zh) 2016-11-29 2018-03-11 日本華爾卡工業股份有限公司 密封材

Family Cites Families (72)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1009027A (en) 1911-01-14 1911-11-14 Percival Hammer Troutman Orchard-heater.
US1168374A (en) 1915-07-12 1916-01-18 George H Barker Game-counter.
US2094286A (en) 1936-06-17 1937-09-28 Edgar E Vogt Auxiliary strainer
US3778609A (en) 1972-07-19 1973-12-11 M Liberman Recessed lighting fixture
US3915757A (en) * 1972-08-09 1975-10-28 Niels N Engel Ion plating method and product therefrom
USD263776S (en) 1979-09-24 1982-04-13 The Vision Group Perforated drain cover
US4323433A (en) * 1980-09-22 1982-04-06 The Boeing Company Anodizing process employing adjustable shield for suspended cathode
USD299522S (en) 1985-03-06 1989-01-24 Chalberg Philip E Suction assembly for a whirlpool bath
US4655913A (en) 1985-04-22 1987-04-07 Boersma Donald J Adjustable drain cover
US4718975A (en) * 1986-10-06 1988-01-12 Texas Instruments Incorporated Particle shield
USD308419S (en) 1987-06-01 1990-06-05 Casablanca Fan Company, Inc. Cover plate for a ceiling fan
US4910811A (en) 1987-10-22 1990-03-27 Plastic Oddities, Inc. Plastic floor drain
US5202008A (en) * 1990-03-02 1993-04-13 Applied Materials, Inc. Method for preparing a shield to reduce particles in a physical vapor deposition chamber
US5895923A (en) * 1996-02-16 1999-04-20 Eaton Corporation Ion beam shield for implantation systems
US6099712A (en) * 1997-09-30 2000-08-08 Semitool, Inc. Semiconductor plating bowl and method using anode shield
USD402354S (en) * 1997-10-09 1998-12-08 Delta Engineering Holdings Limited Flange mask
DE60124424T2 (de) 2000-12-21 2007-10-04 Nippon Steel Corp. CMP-Konditionierer und Verfahren zur Anordnung von für den CMP-Konditionierer verwendeten harten Schleifkörnern
US7378670B2 (en) * 2001-06-22 2008-05-27 Toyo Tanso Co., Ltd. Shielding assembly for a semiconductor manufacturing apparatus and method of using the same
CN1314075C (zh) * 2001-08-28 2007-05-02 现代半导体美国公司 等离子腔室的腔室屏蔽
US6817043B2 (en) 2002-11-15 2004-11-16 Leif Alexander Zars Safety swimming pool replacement drain cover apparatus and method
USD488251S1 (en) * 2003-05-12 2004-04-06 Bazz Inc. Lamp fitting
USD577159S1 (en) 2004-06-08 2008-09-16 Nicholas Steven Hasapoglou Seed catcher for birdfeeders
US7201489B2 (en) 2005-06-15 2007-04-10 Shing-Jy Shyu Ceiling fan light LED assembly device
USD552308S1 (en) 2005-11-30 2007-10-02 Farr Scott B Feeder screen
USD560469S1 (en) * 2006-08-29 2008-01-29 Orion Energy Systems, Ltd Flange for a skylight
JP2008087082A (ja) 2006-09-29 2008-04-17 Three M Innovative Properties Co 吸塵用研磨具
USD563529S1 (en) 2006-10-26 2008-03-04 Labonte Top Quality Plumbing I Combination drain cover and strainer
US8424123B2 (en) * 2007-04-04 2013-04-23 Opella, Llc Decorative disposer flange and strainer assembly
TWM377542U (en) 2009-09-18 2010-04-01 I Chiun Precision Ind Co Ltd Structure of LED down-light with heat dissipation effects
USD670794S1 (en) 2009-10-16 2012-11-13 Frank Antoniello Drain
USD629875S1 (en) 2010-06-16 2010-12-28 Bill Sears Drain cover
USD665902S1 (en) * 2010-06-21 2012-08-21 Saint-Gobain Ceramics & Plastics, Inc. Kiln shoe
US8813272B2 (en) 2010-10-19 2014-08-26 Wcm Industries, Inc. Device and method for concealing a flange of a waste water strainer
US9380900B2 (en) 2011-03-02 2016-07-05 Michael Tehensky Reservoir coaster
USD687471S1 (en) 2011-05-25 2013-08-06 Saint-Gobain Abrasives, Inc. Abrasive disc with a distribution of holes
US20130056142A1 (en) 2011-09-02 2013-03-07 Joseph W. Fiore Decorative decal for recessed light trim
US9340988B2 (en) 2011-12-16 2016-05-17 Mick George LYRISTAKIS Pool or spa drain cover
USD706407S1 (en) * 2012-07-02 2014-06-03 Air Cool Industrial Co., Ltd. Ceiling fan motor housing
TWD156586S1 (zh) 2012-07-11 2013-10-21 漢斯葛洛公司 蓮蓬頭
USD701249S1 (en) 2012-07-20 2014-03-18 Robert Bosch Gmbh Disc for sanding machine
USD701181S1 (en) 2012-12-03 2014-03-18 Molex Incorporated LED holder
USD723153S1 (en) * 2013-03-08 2015-02-24 Olen Borkholder Recess ceiling fan bezel
USD726367S1 (en) 2013-06-07 2015-04-07 Dane Joseph Dukat Hookah cap
USD712443S1 (en) 2013-07-02 2014-09-02 3M Innovative Properties Company Abrasive article
USD732644S1 (en) 2014-02-04 2015-06-23 Asm Ip Holding B.V. Top plate
USD770025S1 (en) 2014-02-28 2016-10-25 Blucher Metal A/S Grating
US9573086B2 (en) 2014-11-03 2017-02-21 Micah Corder Drain cover
USD746955S1 (en) 2014-11-03 2016-01-05 Micah Corder Drain cover
USD799690S1 (en) * 2014-12-22 2017-10-10 Ebara Corporation Inner cylinder for exhaust gas treatment apparatus
USD754829S1 (en) 2015-01-09 2016-04-26 Todd Krombein Drain cover
USD808248S1 (en) * 2015-02-27 2018-01-23 Todd Krombein Mounting system components
USD764205S1 (en) 2015-03-07 2016-08-23 Clean Roots, Llc Platform for plants
USD816676S1 (en) * 2016-03-08 2018-05-01 Hunter Fan Company Canopy for a ceiling fan
USD809094S1 (en) 2016-03-31 2018-01-30 Husqvarna Ab Multi sprayhead
USD803453S1 (en) 2016-04-22 2017-11-21 Hubbell Incorporated Bay luminaire
US10101015B2 (en) * 2016-06-07 2018-10-16 Bazz Inc. Fire proof recessed light fixture
USD816132S1 (en) 2016-09-08 2018-04-24 Mirka Ltd Abrasive disc
USD851224S1 (en) 2017-02-27 2019-06-11 Todd Krombein Riser ring for drain covers
USD830981S1 (en) 2017-04-07 2018-10-16 Asm Ip Holding B.V. Susceptor for semiconductor substrate processing apparatus
USD851338S1 (en) 2017-05-16 2019-06-11 Joel Brown Adjustable receptacle for pet foods and beverages
US10692741B2 (en) * 2017-08-08 2020-06-23 Asm Ip Holdings B.V. Radiation shield
USD886957S1 (en) 2017-12-07 2020-06-09 As America, Inc. Drain cover
USD861447S1 (en) 2018-01-19 2019-10-01 Onfloor Technologies, L.L.C. Power floor grinding and sanding driver disc
USD874617S1 (en) 2018-02-12 2020-02-04 Chudun Chen Shower drain strainer
USD858192S1 (en) 2018-04-27 2019-09-03 Applied Materials, Inc. Gas distribution plate
USD884873S1 (en) 2018-05-09 2020-05-19 Benjamin D. Bortnick Inverted fan enclosure
USD861129S1 (en) 2018-05-11 2019-09-24 Waxman Consumer Products Group Inc. Showerhead face
JP1624795S (zh) * 2018-07-24 2019-02-18
JP1624794S (zh) * 2018-07-24 2019-02-18
USD874870S1 (en) 2018-10-17 2020-02-11 Larry Parker Trivet
USD868947S1 (en) 2018-10-24 2019-12-03 Ho Yeong Cherng Sink strainer
USD881338S1 (en) 2019-02-26 2020-04-14 Ziyong Chen Filter

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD189097S (zh) 2016-11-29 2018-03-11 日本華爾卡工業股份有限公司 密封材

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USD924824S1 (en) 2021-07-13

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