TWD172247S - 半導體加工機用基板移載機之清淨組件之部分 - Google Patents

半導體加工機用基板移載機之清淨組件之部分

Info

Publication number
TWD172247S
TWD172247S TW104302323F TW104302323F TWD172247S TW D172247 S TWD172247 S TW D172247S TW 104302323 F TW104302323 F TW 104302323F TW 104302323 F TW104302323 F TW 104302323F TW D172247 S TWD172247 S TW D172247S
Authority
TW
Taiwan
Prior art keywords
transfer machine
cleaning component
semiconductor processing
substrate transfer
processing machines
Prior art date
Application number
TW104302323F
Other languages
English (en)
Inventor
Makoto Hirano
Original Assignee
日立國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立國際電氣股份有限公司 filed Critical 日立國際電氣股份有限公司
Publication of TWD172247S publication Critical patent/TWD172247S/zh

Links

Abstract

【物品用途】;本設計的物品是半導體加工機用基板移載機之清淨組件，為一種安裝於用來移載設在基板處理裝置等的半導體基板(晶片)的移載機來使用的清淨組件。在本體設有風扇和集塵部，利用內裝的風扇來收集在移載機之可動部位周邊產生的污染物質，透過設在本體下部的集塵部來供應清淨的空氣。;【設計說明】;圖中以實線所示為「主張設計」之部分，虛線所示為「不主張設計」之部分。
TW104302323F 2014-05-30 2014-11-25 半導體加工機用基板移載機之清淨組件之部分 TWD172247S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2014-11608F JP1521100S (zh) 2014-05-30 2014-05-30

Publications (1)

Publication Number Publication Date
TWD172247S true TWD172247S (zh) 2015-12-01

Family

ID=53507852

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104302323F TWD172247S (zh) 2014-05-30 2014-11-25 半導體加工機用基板移載機之清淨組件之部分

Country Status (3)

Country Link
US (1) USD786417S1 (zh)
JP (1) JP1521100S (zh)
TW (1) TWD172247S (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD815722S1 (en) * 2015-03-05 2018-04-17 EBM-PAPST MULFINGERN GmbH & Co. KG Ventilator
USD779650S1 (en) * 2015-08-07 2017-02-21 A. O. Smith Corporation Air inlet damper
USD997333S1 (en) * 2022-11-09 2023-08-29 Shenzhen Deweili Technology Co., Ltd Ventilator

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2102681A (en) * 1935-11-29 1937-12-21 Henry Furnace & Foundry Compan Outlet for air circulating systems
US2284912A (en) * 1939-04-06 1942-06-02 Maynard John Earle Air duct damper
US2300842A (en) * 1940-03-28 1942-11-03 Freeland H Leslie Louver for slant roofs
USD376842S (en) * 1995-04-12 1996-12-24 Nutech Energy Systems Inc. Heat recovery ventilator
USD558321S1 (en) * 2007-01-08 2007-12-25 Dell Products L.P. Fan module
USD587796S1 (en) * 2008-05-15 2009-03-03 Reese Timothy A Ventilation unit
US8522770B2 (en) * 2008-08-26 2013-09-03 Sa Vent, Llc Recirculating, self-contained ventilation system
USD674077S1 (en) * 2011-11-14 2013-01-08 Panasonic Corporation Ventilating fan hood
USD675719S1 (en) * 2011-12-08 2013-02-05 Paul Eicher Angled roof ventilation cap with a grill
USD716424S1 (en) * 2013-07-17 2014-10-28 Gardner Denver, Inc. Slim mobile hydraulic fluid cooling assembly
CA2870440C (en) * 2014-11-12 2021-07-13 Canplas Industries Ltd. Gooseneck style vent

Also Published As

Publication number Publication date
JP1521100S (zh) 2015-04-06
USD786417S1 (en) 2017-05-09

Similar Documents

Publication Publication Date Title
TWD169067S (zh) 半導體加工機用基板移載機之清淨組件之部分
TWD171073S (zh) 半導體加工機用基板移載機之清淨組件之部分
TWD192691S (zh) 真空吸塵器（五十二）
TWD183443S (zh) 可攜式抽真空裝置
ATE525007T1 (de) In der hand gehaltene reinigungsvorrichtung
TWD162133S (zh) 基板洗淨用輥子軸桿之部分
TWD192472S (zh) 真空吸塵器之部件（五）
TWD179672S (zh) 基板保持環之部分
TWD172247S (zh) 半導體加工機用基板移載機之清淨組件之部分
TWD162134S (zh) 基板洗淨用輥子軸桿之部分
TWD167109S (zh) 基板保持環
TW200743145A (en) Semiconductor apparatus and clean unit thereof
TWD165013S (zh) 靜電夾盤之部分
TWD192543S (zh) 真空吸塵器（二）
TWD170203S (zh) 基板洗淨用滾軸桿之部分
TWD164163S (zh) 半導體晶圓硏磨裝置用彈性膜之部分
TWD164162S (zh) 半導體晶圓硏磨裝置用彈性膜之部分
TWD177006S (zh) 半導體製造裝置用附設研磨部之清洗刷之部分
TWD168373S (zh) 半導體晶圓硏磨裝置用彈性膜之部分
TWD167113S (zh) 半導體晶圓硏磨裝置用彈性膜
TWD177222S (zh) 基板洗淨用滾軸桿之部分
TWD167111S (zh) 半導體晶圓硏磨裝置用彈性膜
JP1733724S (ja) 空気清浄機
TWD173084S (zh) 半導體製造裝置用附設研磨部之清洗刷之部分
TWD173082S (zh) 半導體製造裝置用附設研磨部之清洗刷之部分