TWD169067S - 半導體加工機用基板移載機之清淨組件之部分 - Google Patents

半導體加工機用基板移載機之清淨組件之部分

Info

Publication number
TWD169067S
TWD169067S TW103306893F TW103306893F TWD169067S TW D169067 S TWD169067 S TW D169067S TW 103306893 F TW103306893 F TW 103306893F TW 103306893 F TW103306893 F TW 103306893F TW D169067 S TWD169067 S TW D169067S
Authority
TW
Taiwan
Prior art keywords
transfer machine
cleaning component
semiconductor processing
substrate transfer
processing machines
Prior art date
Application number
TW103306893F
Other languages
English (en)
Inventor
Makoto Hirano
Original Assignee
日立國際電氣股份有限公司
Hitachi Int Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立國際電氣股份有限公司, Hitachi Int Electric Inc filed Critical 日立國際電氣股份有限公司
Publication of TWD169067S publication Critical patent/TWD169067S/zh

Links

Abstract

【物品用途】;本設計的物品是半導體加工機用基板移載機之清淨組件，為一種安裝於用來移載設在基板處理裝置等的半導體基板(晶片)的移載機來使用的清淨組件。在本體設有風扇和集塵部，利用內裝的風扇來收集在移載機之可動部位周邊產生的污染物質，透過設在本體下部的集塵部來供應清淨的空氣。;【設計說明】;圖中以實線所示為「主張設計」之部分，虛線所示為「不主張設計」之部分。
TW103306893F 2014-05-30 2014-11-25 半導體加工機用基板移載機之清淨組件之部分 TWD169067S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2014-11607F JP1520824S (zh) 2014-05-30 2014-05-30

Publications (1)

Publication Number Publication Date
TWD169067S true TWD169067S (zh) 2015-07-11

Family

ID=53507610

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103306893F TWD169067S (zh) 2014-05-30 2014-11-25 半導體加工機用基板移載機之清淨組件之部分

Country Status (3)

Country Link
US (1) USD785776S1 (zh)
JP (1) JP1520824S (zh)
TW (1) TWD169067S (zh)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD815722S1 (en) * 2015-03-05 2018-04-17 EBM-PAPST MULFINGERN GmbH & Co. KG Ventilator
CA171067S (en) * 2015-10-20 2017-01-09 Kimura Kohki Co Air-conditioning outlet
CA171066S (en) * 2015-10-20 2017-01-09 Kimura Kohki Co Air-conditioning outlet
CA168044S (en) * 2015-10-20 2017-01-09 Kimura Kohki Co Air-conditioning outlet
JP1560175S (zh) * 2015-10-20 2016-10-03
JP1560177S (zh) * 2015-10-20 2016-10-03
JP1583781S (zh) 2016-11-17 2017-08-14
USD857878S1 (en) * 2017-07-14 2019-08-27 Arthur Blacketer Fan protection screen
USD997333S1 (en) * 2022-11-09 2023-08-29 Shenzhen Deweili Technology Co., Ltd Ventilator

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US2102681A (en) * 1935-11-29 1937-12-21 Henry Furnace & Foundry Compan Outlet for air circulating systems
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USD376842S (en) * 1995-04-12 1996-12-24 Nutech Energy Systems Inc. Heat recovery ventilator
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Also Published As

Publication number Publication date
USD785776S1 (en) 2017-05-02
JP1520824S (zh) 2015-04-06

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