TW595674U - Vibration suppression device using a magnetic levitation device - Google Patents

Vibration suppression device using a magnetic levitation device

Info

Publication number
TW595674U
TW595674U TW093203782U TW93203782U TW595674U TW 595674 U TW595674 U TW 595674U TW 093203782 U TW093203782 U TW 093203782U TW 93203782 U TW93203782 U TW 93203782U TW 595674 U TW595674 U TW 595674U
Authority
TW
Taiwan
Prior art keywords
vibration suppression
magnetic levitation
suppression device
levitation device
magnetic
Prior art date
Application number
TW093203782U
Other languages
English (en)
Inventor
Katsuhide Watanabe
Takahide Haga
Yoichi Kanemitsu
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of TW595674U publication Critical patent/TW595674U/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/709—Vibration, e.g. vibration detection, compensation, suppression or isolation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/03—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using magnetic or electromagnetic means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D19/00—Control of mechanical oscillations, e.g. of amplitude, of frequency, of phase
    • G05D19/02—Control of mechanical oscillations, e.g. of amplitude, of frequency, of phase characterised by the use of electric means

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Electromagnetism (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Toxicology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Atmospheric Sciences (AREA)
  • Automation & Control Theory (AREA)
  • Vibration Prevention Devices (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
TW093203782U 2000-07-13 2001-07-13 Vibration suppression device using a magnetic levitation device TW595674U (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000212406A JP2002031187A (ja) 2000-07-13 2000-07-13 磁気浮上装置を用いた除振装置

Publications (1)

Publication Number Publication Date
TW595674U true TW595674U (en) 2004-06-21

Family

ID=18708334

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093203782U TW595674U (en) 2000-07-13 2001-07-13 Vibration suppression device using a magnetic levitation device

Country Status (6)

Country Link
US (1) US20030168574A1 (zh)
EP (1) EP1304499A4 (zh)
JP (1) JP2002031187A (zh)
KR (1) KR20030022856A (zh)
TW (1) TW595674U (zh)
WO (1) WO2002006700A1 (zh)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5280597B2 (ja) 2001-03-30 2013-09-04 サンスター技研株式会社 一液加熱硬化型エポキシ樹脂組成物および半導体実装用アンダーフィル材
US20070103432A1 (en) * 2005-11-04 2007-05-10 Microsoft Corporation Optical sub-frame for interactive display system
JP2007295379A (ja) * 2006-04-26 2007-11-08 Funai Electric Co Ltd 薄型テレビ
EP1865220B1 (de) 2006-06-10 2014-03-19 Integrated Dynamics Engineering GmbH Aktives Schwingungsisolationssystem mit verbesserter Wirkung gegen seismische Schwingungen
US8170225B2 (en) * 2007-02-14 2012-05-01 Integrated Dynamics Engineering Gmbh Method for adapting a vibration isolation system
KR100877117B1 (ko) * 2007-06-27 2009-01-07 한국전기연구원 자기부상 리프트의 안내제어 시스템
EP2119938A1 (en) * 2008-05-15 2009-11-18 Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO A vibration sensor and a system to isolate vibrations.
US20110175266A1 (en) * 2010-01-20 2011-07-21 Baron James A Vibration isolator with electromagnetic control system
WO2012015032A1 (ja) 2010-07-30 2012-02-02 特許機器株式会社 オーディオ用インシュレータ及びその評価方法
JP5832778B2 (ja) * 2011-04-25 2015-12-16 特許機器株式会社 オーディオ用インシュレータ及びその評価方法
JP2012129575A (ja) * 2010-12-10 2012-07-05 Tokkyokiki Corp オーディオ用インシュレータ及びオーディオ・システム
CN102141110B (zh) * 2011-01-24 2012-10-03 北京航空航天大学 一种液压振动主动隔离平台
CN102705431B (zh) * 2012-05-31 2014-12-24 中国科学院长春光学精密机械与物理研究所 无角位移主被动复合式减振系统及其方法
CN102691747A (zh) * 2012-06-11 2012-09-26 哈尔滨工业大学 磁悬浮隔振平台
CN102710179B (zh) * 2012-06-11 2014-10-15 哈尔滨工业大学 主动控制型磁悬浮隔振平台
CN102710180B (zh) * 2012-06-11 2015-01-07 哈尔滨工业大学 低功耗主动式磁悬浮隔振平台
JP6152001B2 (ja) * 2012-08-03 2017-06-21 キヤノン株式会社 アクティブ除振装置、除振方法、加工装置、検査装置、露光装置及びワークの製造方法
EP2917785B1 (en) * 2012-11-06 2020-09-30 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method
CN103047513B (zh) * 2012-12-19 2014-01-22 哈尔滨工业大学 基于磁浮零位基准和激光自准直测量的气磁隔振平台
JP6307101B2 (ja) * 2016-02-19 2018-04-04 キヤノン株式会社 リソグラフィ装置、および物品の製造方法
JP6864447B2 (ja) * 2016-09-06 2021-04-28 キヤノン株式会社 リソグラフィ装置、および物品の製造方法
US10549659B2 (en) 2017-07-21 2020-02-04 Toyota Motor Engineering & Manufacturing North America, Inc. Seating arrangements in a vehicle
CN108412942A (zh) * 2018-01-26 2018-08-17 山东超越数控电子股份有限公司 一种计算机减振平台
US10808374B2 (en) * 2018-05-03 2020-10-20 University Of Massachusetts Foundation and deflection monitoring device
DE102019202709A1 (de) * 2019-02-28 2020-09-03 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren und Vorrichtung zur Schwingungsisolierung einer Positioniereinrichtung
CN110566629B (zh) * 2019-09-20 2020-06-26 乐清市芮易经济信息咨询有限公司 基于振动补偿的大型机器用共振消除装置
CN112855488B (zh) * 2019-11-12 2022-04-19 宁波方太厨具有限公司 一种增压泵
CN112432634B (zh) * 2020-11-30 2023-03-14 北京航空航天大学 一种基于多同步旋转坐标变换的谐波振动力抑制方法
CN113465859B (zh) * 2021-06-30 2022-05-27 大连海事大学 一种六自由度电液振动台的干扰力补偿方法
CN113653734B (zh) * 2021-08-11 2022-12-06 江苏明磁动力科技有限公司 一种磁悬浮轴承转子及基座振动抑制试验系统
CN116292622B (zh) * 2023-05-11 2023-08-18 长江三峡集团实业发展(北京)有限公司 一种磁悬浮柔性转子全转速振动控制方法及装置

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69030289T2 (de) * 1989-08-11 1997-09-04 Bridgestone Corp Aktives Schwingungssteuergerät
JPH0599271A (ja) * 1991-10-01 1993-04-20 Tokkyo Kiki Kk 除振台のアクテイブ制御方法
JPH05263868A (ja) * 1992-03-18 1993-10-12 Tokkyo Kiki Kk 除振台の地動外乱制御方法
JP2598497Y2 (ja) * 1992-06-17 1999-08-09 日立金属株式会社 制振アクチュエータおよびこの制振アクチュエータを用いた制振装置
JP2816513B2 (ja) * 1992-08-26 1998-10-27 鹿島建設株式会社 電磁式浮き床構造
JP3798033B2 (ja) * 1992-12-16 2006-07-19 株式会社ブリヂストン 振動制御方法および装置
JPH06294445A (ja) * 1993-04-07 1994-10-21 Ebara Corp 除振装置
CA2104179A1 (en) * 1993-08-16 1995-02-17 Canagrav Research Ltd. Isolation of environmental accelerations and tilts on moving platform
JPH07332431A (ja) * 1994-06-13 1995-12-22 Bridgestone Corp アクティブ制御除振床
JP3696928B2 (ja) * 1995-05-30 2005-09-21 キヤノン株式会社 能動除振装置および半導体露光装置
DE69630509T2 (de) * 1995-08-11 2004-08-12 Ebara Corp. Magnetschwebe-Dämpfungsgerät
JP3296973B2 (ja) * 1995-08-11 2002-07-02 株式会社荏原製作所 磁気浮上除振装置
JPH09250592A (ja) * 1996-03-18 1997-09-22 Canon Inc アクティブ除振装置
KR980006398A (ko) * 1996-06-21 1998-03-30 마에다 시게루 진동 감쇄장치
JP3541586B2 (ja) * 1996-10-24 2004-07-14 三菱電機株式会社 指向制御装置用振動制御機構
JP3825869B2 (ja) * 1997-03-19 2006-09-27 キヤノン株式会社 能動除振装置
JPH11193847A (ja) * 1998-01-05 1999-07-21 Canon Inc 除振制御方法および装置
US6590639B1 (en) * 2000-09-15 2003-07-08 Nikon Corporation Active vibration isolation system having pressure control
ATE330144T1 (de) * 2001-04-24 2006-07-15 Peter Heiland Vorrichtung zur schwingungsisolierenden aufnahme von lasten

Also Published As

Publication number Publication date
JP2002031187A (ja) 2002-01-31
KR20030022856A (ko) 2003-03-17
US20030168574A1 (en) 2003-09-11
EP1304499A4 (en) 2005-02-02
EP1304499A1 (en) 2003-04-23
WO2002006700A1 (fr) 2002-01-24

Similar Documents

Publication Publication Date Title
TW595674U (en) Vibration suppression device using a magnetic levitation device
GB2373927B (en) Deformation-resistant mounting structure for a portable device
HK1044990A1 (en) Magnet mounting device
GB2368741B (en) Following device
GB0111488D0 (en) A device
GB2354328B (en) Device for homogenizng a magnetic field
GB0020622D0 (en) A device
EP1295069A4 (en) SUPPORT DEVICE
GB2359607B (en) Vibration damping arrangements
SG87138A1 (en) A magnet design for active damping
EP1201960A4 (en) DAMPING DEVICE
GB0119767D0 (en) A fragmentising device
GB0022733D0 (en) A vibration isolation mount
GB2364847B (en) Compound loudspeaker having a magnet system
GB0018998D0 (en) A device
SG99870A1 (en) A vibration reducing assembly
GB2357555B (en) Vibration actuator
GB2397440B (en) Deformation-resistant mounting structure for a portable device
GB2361426B (en) A device
GB0423966D0 (en) Deformation-resistant mounting structure for a portable device
GB0007172D0 (en) Resilient mounting device
TW465893U (en) Improved vibration microphone
AU142998S (en) A mounting member
TW491389U (en) Balancing device for vibration
AU6570901A (en) A mounting