TW581897B - Optical switch and optical switch array - Google Patents

Optical switch and optical switch array Download PDF

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Publication number
TW581897B
TW581897B TW91121615A TW91121615A TW581897B TW 581897 B TW581897 B TW 581897B TW 91121615 A TW91121615 A TW 91121615A TW 91121615 A TW91121615 A TW 91121615A TW 581897 B TW581897 B TW 581897B
Authority
TW
Taiwan
Prior art keywords
movable member
aforementioned
optical switch
positioning
electrode
Prior art date
Application number
TW91121615A
Other languages
English (en)
Chinese (zh)
Inventor
Tomohiko Kanie
Makoto Katayama
Masayuki Nishimura
Original Assignee
Sumitomo Electric Industries
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries filed Critical Sumitomo Electric Industries
Application granted granted Critical
Publication of TW581897B publication Critical patent/TW581897B/zh

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TW91121615A 2001-06-07 2002-09-20 Optical switch and optical switch array TW581897B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001172879 2001-06-07
JP2001289611A JP2003057569A (ja) 2001-06-07 2001-09-21 光スイッチ及び光スイッチアレイ

Publications (1)

Publication Number Publication Date
TW581897B true TW581897B (en) 2004-04-01

Family

ID=26616533

Family Applications (1)

Application Number Title Priority Date Filing Date
TW91121615A TW581897B (en) 2001-06-07 2002-09-20 Optical switch and optical switch array

Country Status (2)

Country Link
JP (1) JP2003057569A (ja)
TW (1) TW581897B (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4559250B2 (ja) * 2005-02-16 2010-10-06 シチズンファインテックミヨタ株式会社 アクチュエータ、及びその製造方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5226099A (en) * 1991-04-26 1993-07-06 Texas Instruments Incorporated Digital micromirror shutter device
JPH06160736A (ja) * 1992-11-16 1994-06-07 Sumitomo Electric Ind Ltd 光ブレーカ
JP2001525972A (ja) * 1996-08-27 2001-12-11 クインタ・コーポレイション 微細加工を使用した光学ヘッド
US5923798A (en) * 1997-05-15 1999-07-13 Lucent Technologies, Inc. Micro machined optical switch
CA2318060A1 (en) * 1998-01-13 1999-07-22 Seagate Technology, Inc. Optical microswitch having electrostatic microactuator and method for use thereof
US6195478B1 (en) * 1998-02-04 2001-02-27 Agilent Technologies, Inc. Planar lightwave circuit-based optical switches using micromirrors in trenches
US5995688A (en) * 1998-06-01 1999-11-30 Lucent Technologies, Inc. Micro-opto-electromechanical devices and method therefor
US6108466A (en) * 1998-09-17 2000-08-22 Lucent Technologies Micro-machined optical switch with tapered ends
US6229640B1 (en) * 1999-08-11 2001-05-08 Adc Telecommunications, Inc. Microelectromechanical optical switch and method of manufacture thereof
US6360036B1 (en) * 2000-01-14 2002-03-19 Corning Incorporated MEMS optical switch and method of manufacture
EP1128201A1 (en) * 2000-02-25 2001-08-29 C.S.E.M. Centre Suisse D'electronique Et De Microtechnique Sa Switching device, particularly for optical switching
JP2001305443A (ja) * 2000-04-21 2001-10-31 Tokimec Inc 光スイッチ装置
JP2002116388A (ja) * 2000-10-05 2002-04-19 Sumitomo Electric Ind Ltd 光スイッチ及びそれを含む光スイッチ・デバイス

Also Published As

Publication number Publication date
JP2003057569A (ja) 2003-02-26

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