TW581897B - Optical switch and optical switch array - Google Patents

Abstract

For the invented optical switch 70, optical waveguide 71 is formed on the substrate 72, and the front-end portion of the reflection mirror 79 of the single frame structured movable member 77 of the cut portion disposed inside the optical waveguide 71 is extended. The electrode 80 parallel to the movable member 77 is extended at the cut portion 74. After that, a voltage is added between the electrode 80 and the movable member 77 so as to change the position of the reflection mirror for conducting the on/off operation.

Description

581897 玖 发明, description of the invention (the description of the invention should state: the technical field to which the invention belongs, the prior art, the content, the embodiments and the simple description of the drawings) Technical Field of the Invention The present invention relates to an optical switch for optical communication and the like, and Optical switch array. 2. Description of the Related Art A light switch known as Vertical Mirrors Fabricated by Deep Reactive Ion Etching for Fiber-Optic Switching Applications, J. Microelectromechanical System Vol. 6 1997, ρ.277-ρ.285 is well known. The optical switch disclosed in this document is a mirror provided at the front end of a support arm, and an electrostatic regulator is used to switch the mirror in and out of the optical path. According to the disclosure of the invention, in the above-mentioned conventional technologies, in order to switch in and out of the reflecting mirror linearly in the direction of the extension of the support arm with respect to the optical axes crossing orthogonally to each other to perform switching, the driving stroke of the electrostatic regulator must be enlarged. . In this way, the area occupied by the regulator is enlarged, resulting in an increase in the overall size of the optical switch, which makes it difficult to increase the integration of the optical switch. The present invention aims to provide an optical switch and an optical switch array. :: Mingzhiguangkai relationship has the following components: a base member, a Z-plane waveguide formed on the base structure, a single frame supporting the base member, and can be changed by deformation; a movable member in the plane direction position of the two-sided waveguide of the movable structure, The driving means is formed by a variable mirror reflecting at the Γ: part, and a driving means for deforming the movable member and changing the position of the mirror relative to the aforementioned planar waveguide to change the traveling direction of the light in the planar waveguide (2). In the optical switch of 2, the mirror for changing the optical path is arranged in the movable. ΓI can change the position of the mirror by deforming the movable member. Since the position of the mirror in the plane wave pavement direction can be changed through deformation without moving the movable member, the size of the optical switch can be reduced. From now on, 30% of optical switches are miniaturized and highly integrated. As a result, the nine-switch array can be easily realized. Taken well, the driving means includes a means for generating an electrostatic force between the pole and the movable member. At this time, based on the electrostatic force generated between the movable members of J ΓΓ, the base of the movable member is used as a support: The movable member is close to the main electrode, and then the mirror is moved vertically with respect to the movable member ::::: . This simple structure can be used to achieve: two distance =: most: to reduce the distance from the front end to the base end and the movable member structure: =: the distance between the movable member will be all shortened, and the main electrode and the movable drive Μ, electric: Will increase. As a result, the number of movable members can be reduced, and the length of the movable member can be reduced. Preferably, the movable member is provided with a portion opposite to the -tooth comb portion of the first main electrode having a plurality of tooth combs, and the second tooth comb portion having a plurality of tooth combs between the tooth combs may be provided: . In this way, the second force will increase: ΐ: product: two: static electricity generated between the main electrode and the movable member. The length of the movable structure can reduce the _ electrical migration of the movable member and shorten the length of the movable member. -7- (3) (3) 581897

In this case, it is preferable to provide a tooth comb support portion at the front end portion of the movable member, and to provide a first tooth comb portion at the comb removal support portion. As described above, since the electrostatic force generated between the main electrode and the condenser is concentrated on the front end portion of the movable member, the amount of displacement of the end portion of the movable structure is increased. Therefore, the driving voltage 'of the movable member can be further reduced, and the mirror can be efficiently moved. In addition, in order to increase the distance between the front end of each tooth comb of the first-tooth comb portion and the base end of each tooth comb of the second tooth comb portion from the main electrode base end side to the front end side, the length of each tooth comb of the second combing portion is best. different. In this way, as the movable member gradually approaches the main electrode, the distance between the front end of each tooth comb of the first tooth comb portion and the base end of each tooth comb portion of the second tooth comb portion will be shortened, so that the electrostatic force generated between the two will increase. . Therefore, the driving voltage of the movable member can be further reduced, and the length of the movable member can be further shortened. Further, it is preferable that the driving means includes a means for disposing on the main electrode of the movable member, a return electrode on the side, and a means for generating electric power between the return electrode and the movable member. At this time, in a state where the movable broadcasting member is gradually approaching the main electrode, the electrostatic force between the main electrode and the movable member is ⑽, and when a static lightning force is generated between the return electrode and the movable member ^ 力 # 'through this The electrostatic force causes the movable member to return to the electrode ′, thereby returning the mirror to its original position. Therefore, compared with the case where the mirror is returned to the original position only by the force of the movable member, the driving speed of the movable member when the mirror is returned is possible. Preferably, the first position to block the front line of the umbrella 2 through the optical path and the first position to pass the light passing through the optical path are provided with a holding mirror. In this way, when the mirror is located at the first position and the second position, since it is not necessary to supply the driving electrical signal to the movable member, the power consumption can be reduced. And power failure protection _ At this time, the positioning J LI holds the mirror in the first position and the second position. To hold the mirror = good to have: a first protrusion disposed on the front side of the mirror 'equipped with a second position for the second position and an extension for holding the mirror to a movable member; ::: a movable part for positioning, for positioning The movable part faces the front end of the part, and a positioning drive part that can be inserted into two and a movable concave lens are fixed at the first position: a protrusion and a retaining recess for the second protrusion. On the other side, the first office is placed on the mountain, and when the movable part for positioning is moved to the movable member, the dog is inserted into the holding recess; the mirror is held at the second position and the movable part for holding L is moved to the movable member side so that the first Two protrusions can be inserted into the MH. On the one hand, when the mirror is released from positioning, the positioning holding / moving member is positioned on the opposite side. In this way, the reflector can be surely placed in the first position and the second position. The hand slave at w may also have: a spring member that is arranged on the front side of the mirror and has abutment: w, a spring force on the member 'end and can be urged to the movable member side ★ The movable member is pressed against the spring member to make the mirror Hold in the first: place and second position. 3-In regards to the positioning of the reflector, the use of: hands & generates a driving force larger than the spring force of the spring member on the movable member to shrink the spring member. In this way, the mirror can be reliably held in the first position and the second position. And since no regulator is required, the structure of the positioning means can be simplified. It is preferable that the positioning means for positioning further includes a positioning electrode disposed on the front side of the reflecting mirror, and a positioning electrode disposed oppositely to the movable part for positioning 14 and the positioning electrode disposed on the end of the movable member so as to stop the positioning movement The first holding notch portion for holding the reflector in the (5) th position is fixed to the front end portion of the movable member, and the movable portion for the retaining position can be locked to hold the reflector at the IS position. Two HI: t incision for deafness. When the mirror is held in the first position, the gas s ~, 1 $ Move the positioning movable part to the opposite side of the positioning electrode to stop the sliding door α 4 and stop at the notch for holding the first one. When the mirror is held in the second position, the movable part for fixing the curse is moved to the position for positioning

The opposite side of the electrode is to be snapped to the second holding cut. On the other hand, when the positioning of the mirror is released, the positioning movable portion is moved to the positioning electrode. In this way, the reflector can be reliably held in the first position and the second position. Preferably, the movable member has a structure in which the reflector can block light passing through the optical path in a normal state. At this time, when the reflecting mirror is located at a position where the light is blocked, since the reflecting mirror is parallel to the width direction of the optical switch, the reflecting light can be reflected by the reflecting mirror without damaging the optical characteristics.

Here, the planar waveguide includes a cladding removal portion for removing the cladding from the periphery of the magnetic core, and a notch portion provided on the optical path for connecting the cladding removal portion to be placed in the reflector; and a movable member. In order to make the mirror and the magnetic core be in the same plane, a cladding removing portion may be provided. At this time, since the height of the optical switch is reduced, for example, when a 1 × 2 optical switch is configured, a small optical switch can be realized. The cladding removal section preferably removes the cladding by reactive ion etching. In this case, the cladding layer can be easily removed into an arbitrary shape. The movable member and the mirror are preferably formed of the same material at the same time. In this way, the manufacturing process of the movable member and the mirror can be simplified. In this case, the movable member and the reflecting mirror are preferably made of silicon. In this way, a mirror having an appropriate reflectance can be easily formed. Preferably, a mirror device including a movable member and a mirror, and a planar waveguide -10- (6)

581897 roads are connected. In this way, an optical switch can be easily manufactured. ^ It is better to provide a positioning convex P on either of the planar waveguide and the mirror device. A positioning P concave portion is provided on the other side of the planar waveguide or the mirror device. In this way, when the planar waveguide is connected with the reflector, the positioning of the planar waveguide and the mirror device can be performed accurately and easily. In addition, it is preferable that the planar waveguide is anodically bonded to the mirror device. In this way, it is not necessary to use an adhesive when bonding, so that deformation due to temperature can be avoided, and the planar waveguide and the mirror device can be stably bonded. In this case, the substrate of the 'planar waveguide' is preferably made of glass containing silicon or an alkali metal ion. This makes it easy to perform anodic bonding. In the optical switch array of the present invention, a plurality of the optical switches are fixed on the same base member. The distribution distance of the optical switch is preferably less than 500 // m. In this way, a more compact and highly integrated optical switch array is known. Brief Description of the Drawings Fig. 1 is a schematic view of a first embodiment of an optical switch according to the present invention; Fig. 2 is a cross-sectional view taken along the line ΜΙΙ. _ Figures 3A and 3B are schematic diagrams of a mirror device and a planar waveguide in the optical switch of FIG. 1. 4A to 4F are examples of manufacturing processes of the mirror device of FIG. 3. 5A to 5D are examples of manufacturing processes of the planar waveguide of FIG. 3. FIG. 6 is a schematic diagram of an optical switch array to which the optical switch shown in FIG. 1 is applied. Fig. 7 is a schematic diagram of a second embodiment of the optical switch according to the present invention. Figures 8A and 8B show the position of the third embodiment of the optical switch of the present invention.

Replacement action diagram of holding mechanism and mirror device. 9A and 9B are diagrams showing a modification of the optical switch according to the third embodiment. Fig. 10 is a diagram of a position holding mechanism in a fourth embodiment of the optical switch of the present invention; and Figs. 11A to 11C are operation diagrams for replacing the position of a mirror of the position holding mechanism. 12 to 16 are diagrams of a movable member and an electrode in another embodiment of the optical switch of the present invention, respectively. Fig. 17A and Fig. 17B are diagrams showing operation states of a movable member and an electrode in another embodiment of the optical switch according to the present invention. FIG. 18 is a diagram showing another embodiment of the optical switch of the present invention. Best Mode for Carrying Out the Invention Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the drawings. For easy understanding of the explanation, the same constituent elements in each drawing are denoted by the same reference symbols, and repeated descriptions are omitted.

Fig. 1 is a schematic view of a first embodiment of an optical switch according to the present invention; Fig. 2 is a sectional view taken along the line II-II. In these figures, the optical switch 70 of this embodiment is a 1 > < 2 switch. The optical switch 70 includes a planar waveguide 71 having a base plate 72 made of glass or the like containing silicon, or alkali metal ions such as quartz glass or alkali glass. The substrate 72 is provided with an optical waveguide 76, which is composed of a magnetic core 91 forming optical paths a to C and a cladding layer 92 provided around the magnetic core 91 (see Figs. 3A and 3B). In addition, the substrate 72 has a cladding removal portion 73 formed by removing the cladding 92 from the periphery of the magnetic core 91. On the upper surface of the center portion of the substrate 72, a cutout portion 74 connected to the cladding removal portion 73 is provided. In the cutout portion 74, the optical path length is eight to eight. Department cross. The distance from the optical path A -12- 581897 to B is 25 ° / zm. The width of the cutout portion 74 is different. As shown in FIG. 3 and FIG. 3B, a positioning convex portion 90 is provided on the substrate 72. A reflector 75 is mounted on the substrate 72. The mirror device µ has a silicon substrate 83, and an insulating layer 80 made of silicon oxide (SiO2) and an electrode 80 are formed on the silicon substrate 83 (the lower portion of the silicon substrate 83). The movable member 77 and the electrical system are formed by Shi Xi et al. To be 50 # m. The material of the movable member 77 and the electrode 80, that is, Shi Xi, is doped with impurities such as boron to maintain conductivity. The insulating layer 84 on the upper portion of the movable member 77 is removed so that the movable member has a single-frame structure. The movable member 77 extends vertically to the cutout portion 74 with respect to the width direction of the optical switch 70. A tooth comb portion 78 composed of a plurality of tooth combs 78a is formed at the front end portion of the movable member 77. Further, at the front end portion of the movable member 77, a reflector 79 is formed to block the light passing through the optical path 3. Since the reflecting mirror 79 is formed of Shi Xi as well as the movable member 77, it has a high degree of reflectivity. The reflecting mirror 79 has a thickness of 10 mm, a height of 50 β 111, and a width of 100 #rn. As shown in FIG. 2, the movable member 77 and the electrode 80 are fixed to a silicon substrate 83 via an insulating layer 84, and the silicon substrate 83 is fixed to a substrate 72 forming a planar waveguide 71. Therefore, the movable member 77 and the electrode 80 are supported on the substrate 72 via a silicon substrate 83 or the like. The electrode 80 extends to the cutout portion 74 in parallel with the movable member 77. A part wk composed of a plurality of tooth combs ... is formed at a portion of the electric tooth with respect to the tooth comb portion 78.卩 8 1. The tooth comb 8a is configured to be placed between the tooth combs 78a of the tooth comb portion 78. In addition, the movable member 77 and the electrode 80 are connected via a voltage source u, -13-

581897 applies a specific voltage between the movable member 77 and the electrode 80 through the voltage source 82, generates an electrostatic force between the movable member 77 and the electrode 80, and performs switching. As shown in Figs. 3A and 3B, the mirror device 75 has a protrusion 93 which forms a positioning recess 94 which fits into the positioning convex portion 90 of the planar waveguide 71. In a state where the positioning convex portion 90 is fitted into the positioning concave portion 94, the mirror device 75 is joined to the planar waveguide 71. At this time, the movable member 77 and the electrode 80 of the mirror device 75 are arranged in the coating removing portion 73 of the planar waveguide 71, and the mirror 79 and the magnetic core 91 are located on the same plane. In this way, the directional size of the light switch 70 can be shortened. In the optical switch 70 described above, the movable member 77 in the initial state (OFF state) extends linearly (see Fig. 1). In this state, light passing through the optical path A passes through the notch 74 and is guided to the optical path C. On the other hand, a specific voltage is applied between the movable member 77 and the electrode 80 by the voltage source 82, and the front end portion of the movable member 77 is brought closer to the electrode 80 by the electrostatic force generated between the movable member 77 and the electrode 80. , So that the reflecting mirror 79 is placed in the notch portion 74. In this state (on state), the light passing through the optical path A is guided to the optical path B through the reflection of the mirror 79. Next, a manufacturing example of the mirror device 75 is shown in FIGS. 4A to 4D. First, the SOI wafer is prepared. On this wafer, a SiO 2 layer 101 having a thickness of 2 / zm is formed on a stone substrate 100 having a thickness of 500 // m, and a silicon layer having a thickness of 50 // m is formed on the SiO 2 layer 101. 102, and an SiO2 layer 103 is formed thereon (see FIG. 4A). Next, a photoresist pattern 104 for forming a movable member 77, an electrode 80, and the like is formed on the SiO2 layer 103 via a photomicrograph '(see FIG. 4B). The photoresist pattern 104 is used as a mask, and the silicon layer 102 is etched from the Si02 layer 101 to a thickness of -14-581897 by reactive ion etching.

(ίο) The degree is only 5 / zm (refer to FIG. 4C). Then, the photoresist pattern ι04 is removed, the SiO2 layer 103 is used as a mask, and the silicon layer 102 is etched to the M% layer 101 (see FIG. 4D). Next, the Si02 layer 10 is removed, and Au or the like is applied to the portions constituting the movable member, the mirror, and the electrode (see FIG. 4E). The SiO2 layer (sacrificial layer) was removed by wet etching using hydrofluoric acid. In this way, the Si02 layer 1 (H) under the smaller part of the pattern width can be completely removed to form a single frame (refer to the figure). At this time, due to the thickness and silicon layer of the portion constituting the movable member, the mirror, and the electrode 102 thickness can differ by 5 # m, so when the mirror device is connected to the planar waveguide 71, the movable member 77 and the electrode 80 will be connected to the planar waveguide 71. In addition, since the movable member 77, the mirror 79, and the electrode 8 〇 is formed of the same material at the same time, so the manufacturing process of the mirror device 75 can be simplified. Figure 5 A to Figure 5D are process drawings of the planar waveguide 7 in this embodiment. First, prepare silicon, quartz glass, and alkali glass. A substrate with a structure such as a substrate is formed. A quartz glass film m is formed on the substrate 11, and a magnetic core is formed on the quartz glass film iu through photo-epitaxial and reactive ion etching (see FIG. 5A). The quartz glass film U1 and the magnetic core 112 form a cladding layer 113 made of quartz glass (see FIG. 5B). Then, the cladding layer 113 other than the periphery of the magnetic core 112 is removed by reactive ion etching (see FIG. 50). Sexual ion etching The cladding layer 113 is removed, so it is easy to form a cladding removal portion 73 that avoids the periphery of the magnetic core 112. By repeating the anodic bonding, the above-mentioned mirror device 75 is fixed to the planar waveguide 71 manufactured above, and the optical switch can be obtained. 70 (refer to FIG. 5). Here, since the positioning convex portion 90 is provided in the planar waveguide 7 and the positioning recess portion 94 is provided in the mirror device 75, the planar waveguide is connected to the mirror -15- 581897 75 The 75-phase interface with 3 guards can be positioned correctly and easily. Moreover, since the planar waveguide 71 and the mirror device 75 are anodically bonded, there is no need to use an adhesive when connecting people. In this way, you can The planar waveguide mirror device 75 is stably joined without being deformed by the influence of temperature. "The optical switch 70 according to the embodiment of the present invention configured as described above is fixed to the mirror 79 at the front end of the movable member 77, and "Drive the movable member" so that the reflector 79 moves in the vertical direction (approximately the width direction of the optical switch) along the extending direction of the notch portion 74, that is, with respect to the extending direction of the movable member 77. The amount of displacement of the mirror 79. In addition, since the movable member 77 has a single frame structure, compared with the case where the double frame structure is adopted, the driving voltage of the mirror can be reduced by a special 疋 s displacement. When the mirror 79 and the electrode 80 are integrally formed, the scale of the electrode 80 can be made smaller. In this way, the movable member 77 can be slender and the electrode 80 can be elongated and the width of the optical switch 70 can be shortened. Thus, light can be realized. The switch is miniaturized and highly integrated, and it is easy to achieve an optical switch array. FIG. 6 is an example of an optical switch array to which the optical switch 70 is applied. In this figure, the planar waveguide 3 ′ of the optical switch array 30, Corresponding mirror devices 33 are respectively arranged at the intersections of the optical paths a of the plurality of channels to the optical paths a to c of the channels of the planar waveguide 31. The mirror device 33 has the same structure as the mirror device 75 of the optical switch 70 described above. The distribution distance P (corresponding to the width of one channel in the optical switch array 30) of each mirror device 33 is preferably less than 500 // m. As described above, by using the optical switch 70 to construct the optical switch array 30, the optical switch array can be miniaturized and highly integrated. Fig. 7 is a schematic diagram of a second embodiment of the optical switch according to the present invention. This embodiment -16- 581897

(12) The optical switch 120 of the state has a movable member 12 and an electrode 122 disposed opposite to the movable member 121. A tooth comb is formed at a front end portion of the movable member 121

Portion 124; a portion of the electrode 122 opposite the comb portion 124 forms a comb portion 125. At the front end of the movable member 121, a reflecting mirror 123 for integrally blocking the light passing through the optical path A is integrally formed. The reflecting mirror 123 enters and exits the notch portion 74 in a normal state to block the light passing through the optical path a. As described above, in a state where the reflecting mirror 123 is in the blocking position, the mirror surface of the reflecting mirror 123 is parallel to the width direction of the optical switch 120. Therefore, the reflecting mirror 123 can be used to reflect light rays without reducing optical characteristics. A third embodiment of the optical switch according to the present invention will be described with reference to Figs. 8A and 8B. In the optical switch of the present invention, the configuration of the positioning mechanism is different from the above-mentioned embodiment. In Figs. 8A and 8B, the optical switch 40 of this embodiment has a spring member 41 as a positioning mechanism which is arranged on the front side of the mirror 9. As shown in Figs. The front end of the spring member 41 is in contact with the front end of the movable member 7. And the base end of the spring member 41 is fixed

It is fixed to the substrate 72 (refer to FIG. 2). The spring member 4 丨 has an elastic force that exerts a force to the side of the movable structure section #, in any state such as a state where the movable member 7 linearly extends (see FIG. 8) or a state where the movable member 7 is bent (see FIG. 8B) The elastic force of the cymbal member 41 can respectively hold the mirror 9 in an upright position. On the other hand, when changing the position of the mirror 9 ', using a voltage source (not shown), the movable / movable member 7 generates a spring member. The elastic force of 41 is still large enough to drive electricity. ^, The spring member 41 can be retracted, and the positioning of the mirror 9 is held. In this way, the ^ 5 flat yellow member 41 constitutes a positioning mechanism, without the need for self-holding adjustment. This implementation An example of the deformation of the optical switch is shown in Figs. 9A and 9B. In this figure, -17-581897 JI spirit surface ^ The optical switch 45 has a spring member 46 fixed at both ends to the base plate 72 (see Fig. 2) instead of the spring member 41 described above. The spring member 46 is connected to the L-shaped connection member 47, and the front end of the L-shaped connection member 47 abuts the front end of the movable member 7. Even with the above-mentioned structure, the movable member 7 is linearly extended (see FIG. 9A) or bent. The state of the movable member 7 (see FIG. 9B) In the state, the mirror 9 can be held at a specific position by the elastic force of the spring member 46. The fourth embodiment and the second state of the optical switch of the present invention will be described with reference to Figs. 10 and 11A to 11C. The optical switch of the present invention The configuration of the positioning mechanism is different from that described above. In FIG. 10, the optical switch 13 of this embodiment has a positioning mechanism 131. The positioning mechanism 131 has a positioning movable portion 133 disposed on the front side of the reflecting mirror 9, and The front-end side portion of the positioning movable portion 133 is provided with, for example, a bent portion 133a bent at a 45-degree angle. A tooth comb portion 137 composed of a plurality of tooth combs 137a is formed in the bent portion 133. A position opposite to the bent portion n3a A positioning electrode 134 is disposed. A tooth comb portion 138 composed of a plurality of tooth combs 138a is formed on the positioning electrode 134. Although not shown, the positioning movable portion 133 and the positioning electrode 134 are connected via a voltage source. In addition, a holding portion 4 132 to which the reflecting mirror 9 is fixed is provided at a front end portion of the movable member 7. A first holding notch portion 135 is provided to the holding portion 132 to stop the bending portion 13 "of the positioning movable portion 133, With The cut position holding mirror 9 and the second holding notch portion 136 are used to hold the curved portion 133 & to hold the reflecting mirror 9 in the passing position. In the optical switch 130, the reflecting mirror 9 is moved from the first position to The sequence of the second position is shown in Figures 11A ^ 11C. First, by applying a specific voltage between the positioning movable part 133 and the positioning electrode 134, as shown in Figure iia, -18-581897

(14) Move the bent portion 133a fastened to the first holding notch portion 135 to the positioning electrode 134 to release the locked portion of the bent portion 133a. Next, as described above, when the movable member 7 approaches the electrode side, the mirror 9 is moved to the second position (see FIG. 11B). Next, stop applying a specific voltage between the positioning movable portion 133 and the positioning electrode 134, and move the bent portion 133 & to the opposite side of the position holding private pole 134 to be locked to the second holding notch portion ι36 ( (See Figure 11C)

As described above, by providing the positioning movable portion having a long single-frame structure, the width of the positioning mechanism 13 1 can be shortened to 500 # m or less, and it can be driven at a low voltage. Other embodiments of the optical switch according to the present invention will be described with reference to Figs. 12 to 16, 17A, and 17B. In the optical switches of these embodiments, the configuration of the movable member or electrode is different from that of the above-mentioned embodiment. The 7F optical switch 50 shown in FIG. 12 includes a movable member 51 and an electrode 52. The movable member 51 is different from the above-mentioned movable member " π only without a comb portion. The electrode w does not have a comb portion, and is the same as the electrode 1G described above.

The members 51 extend in parallel as a whole. In this case, the structures of the movable member n and the electrode 52 can be simplified. The light switch 53 'shown in Fig. 13 includes a movable member 51 and an electrode. In the electrode μ, the opposing surface 54a of the movable member 51 is curved so that the distance from the front end side of the electrode to the base end side is reduced from the distance from the movable frame. At this time, as the movable member 51 gradually approaches the electrode 54, the distance between the movable member $ ^ and the electrode μ will be shortened. 'Therefore, the electrostatic force generated between the movable member 51 and the electrode 54 will increase A ° and thus' same as above. 'Can the driving power of the movable member 51 be reduced? _ 19- (15) 581897

And the length of the movable member 51 is shortened. The shape of the opposite side 5 4 a is not reduced toward the base end side. In addition, the phase between the electrode 54 and the movable member 51 is limited to a curved shape. As long as the distance from the electrode 5 to the movable member 51 can be made, it can also be Straight

The optical switch 55 shown in (1) has a movable member 56 and the above-mentioned electrode 10. A τ-shaped comb support portion 57 is attached to the front end portion of the movable member 56, and the aforementioned cymbal portion 8 is provided on the comb support portion 57. At this time, the electrostatic force generated between the movable member% and the electric coil is concentrated on the front end portion of the movable member 56, and the displacement of the end portion of the movable member 56 is increased. Therefore, the driving voltage of the movable member ^ can be further reduced, and the length of the movable member "can be further shortened. The switch 58 shown in Fig. 15 includes the above-mentioned movable member 7 and the electrode μ. The electrode 59 and the comb portion of the movable member 7 8 is formed at a portion opposed to each other, and the above-mentioned tooth comb portion is provided in the notch portion 60. In addition, the surface 59 a of the electrode “that is opposite to the movable member 7 is linear with respect to the movable member 7 in an inclined direction. The shape is such that the distance from the front end side to the base end side of the electrode 59 is reduced from the distance from the movable structure. At this time, the surface area of the electrode 59 is enlarged by the tooth comb portion 11, and as the movable member 7 gradually approaches the electrode 59, the distance between the movable member 7 and the electrode 59 is shortened, so the static electricity generated between the movable member 7 and the electrode 59 is reduced. The force will increase. Accordingly, the driving voltage of the movable member 7 can be reduced, and the length of the movable member 7 can be shortened. The optical switch 61 shown in FIG. 16 includes the movable member 7 and the electrode 62 described above. The opposing surface 62a of the electrode 62 facing the movable member 7 is curved so as to reduce the distance from the movable member 7 from the front end side of the electrode α toward the base end side. Electrode 62 others -20- (16)

The structure of 581897 is the same as that of the electrode 59 shown in FIG. 15. In this way, the same effect as that of the optical switch 58 can be obtained as shown in FIG. The optical switch 140 shown in Figs. 17A and 17B includes a movable member 141 and an electrode 142. A tooth comb portion 143 having a plurality of tooth combs is provided on the front end side portion of the movable member 14. A notch 145 is provided in a portion of the electrode 142 opposite to the tooth comb portion 143 to form a tapered tapered surface 145a from the base end side to the front end side of the electrode 142. Next, the notch 145 is provided with a tooth comb portion 144 having a plurality of tooth combs 14A. Each tooth comb 144a of the tooth comb portion 144 is increased from the base end side toward the front end side of the electrode 142. In this way, when the movable member 141 is in the initial state of FIG. 17A, the gap between the front end of each tooth comb 143a of the tooth comb portion 143 and the base end (tapered surface 145a) of each tooth comb 144a of the tooth comb portion 144 is from the base end side of the electrode 142 It spreads toward the front side. In the initial state described above, when a specific voltage is applied between the movable member 141 and the electrode 142, as shown in FIG. 17B, the front end of each tooth comb 143a of the tooth comb portion 143 and the base end (taper) of each tooth comb 144a of the tooth comb portion 144 The gaps between faces 145 a) are all reduced. In this way, since the electrostatic force acting between the two is increased, the driving voltage of the movable member 141 can be further reduced, and the length of the movable member 14 J can be further shortened. Another embodiment of the optical switch of the present invention is shown in FIG. In the figure, an optical switch 150 according to this embodiment is provided with a movable member 151 having a reflector 58 at the front end. A tooth comb portion 1 5 4 having a plurality of tooth combs 1 5 4 a is provided on one front end side portion of the movable member 1 5 1. On the opposite side of the tooth comb portion 154, a tooth comb portion 155 having a plurality of tooth combs 155a is provided. A main electrode 152 is disposed on the tooth comb portion 154 side of the movable member 151, and a portion of the main electrode 152 opposite to the tooth comb portion 154 is provided with -21 between each tooth comb 1 54a that can be inserted into the tooth comb portion 154. -(17) (17) 581897

稷 several teeth combing teeth comb portion 156. In addition, "the return electrode 153 is disposed on the side of the tooth comb portion 可 of the movable member ,, and the disc electrode comb portion ⑺ is located at the opposite portion of the return electrode 153." The tooth comb portion 157 of the number tooth comb 157a. The main electrode i52 of the movable member i5i is connected via a voltage source 159, and the movable member i5i and the return electrode 153 are connected via a voltage source 160. In the optical switch 150 described above, when the reflecting mirror 158 is in the initial position shown in FIG. 18, a specific voltage is applied between the movable member 151 and the main electrode 152 by the voltage source 159, and the movable member 151 and the main electrode 152 can be used. The electrostatic force generated between them brings the movable member 151 closer to the main electrode 152. In this state, when the voltage application of the voltage source 159 is turned off and a specific voltage is applied between the movable member 151 and the return electrode 153 by using the voltage source 160, the position between the movable member 151 and the return electrode 153 can be used. The generated electrostatic force brings the movable member 151 closer to the return electrode 153 to return the mirror 158 to the original state. Since the return electrode 153 is provided, the driving speed of the movable member 151 can be increased when the mirror 158 is returned to the original position by the force of the movable member 151 alone. In addition, in the above embodiment, although an electrostatic regulator that generates an electrostatic force between the movable member and the electrode and drives the movable member, that is, an electrostatic regulator, may be used as a means for driving the movable member, in addition to the above, an electromagnetic regulator or a thermal regulator may be used. Regulator. In addition, the light-on-relation 1 X 2 switch of the above embodiment is used, but the present invention may also use an ON / OFF switch or an optical switch of an ηχη matrix switch. -22- 581897 (18) Explanation of component symbols

7 Movable member 102 Si layer 8 Tooth comb section 103 Si02 layer 9 Reflector 104 Photoresist pattern 10 Electrode 110 Substrate 11 Tooth comb section 111 Quartz glass 30 Optical switch array 112 Magnetic core 31 Planar waveguide 113 Coating layer 33 Mirror device 120 Light Switch 40 Light switch 121 Movable member 41 Spring member 122 Electrode 45 Light switch 123 Mirror 46 Spring member 124 Tooth comb section 47 L-shaped connection member 125 Tooth comb section 50 Light switch 130 Light switch 51 Movable member 131 Positioning mechanism 52 Electrode 132 Hold Section 53 Optical switch 133 Positioning movable section 54 Electrode 133a Bent section 54a Opposite surface 134 Positioning electrode 55 Optical switch 135 First holding notch

23- 581897 (19)

56 Movable member 57 T-shaped comb support 58 Optical switch 59 Electrode 59a Opposite surface 60 Notch 61 Optical switch 62 Electrode 62a Opposite surface 70 Optical switch 71 Planar waveguide 72 Substrate 73 Coating removal section 74 Notch 75 Mirror device 76 Optical waveguide 77 Movable member 78 Tooth comb section 78a Tooth comb 79 Reflector 80 Electrode 2nd holding notch section Tooth comb section-Tooth comb comb section Tooth comb optical switch movable member _ Electrode tooth comb section ~ Tooth comb · Tooth Comb-tooth comb notch cone-shaped optical switch® Electrode for main electrode return of movable member Tooth-comb section Tooth-comb comb section 24-5811 (20) 81 Tooth comb 81a Tooth comb 82 Voltage source 83 Broken substrate 84 Insulating layer 90 Positioning Convexity 91 Magnetic core 92 Coating layer 93 Protrusion 94 Positioning recess 100 Si substrate 101 Si02 layer

155a tooth comb 156 tooth comb section 156a tooth comb 157 tooth comb 157a tooth comb 158 mirror 159 voltage source 160 voltage source A optical path B optical path C optical path

Claims (1)

2 · Still life 3. 4 / L δ and 4. Scope of application and patent application 1 · An optical switch with: a bottom member and a planar waveguide formed on the aforementioned bottom movable member, and its single frame supports changing the front end H, f 1 呔 the bottom member, and can be deformed by: shot :: "plane direction position of the planar waveguide, brother eight formed at the front end of other movable members, and driving means, which makes the aforementioned movable member 4J. 4 ^ άθ # 4- -fcAv t. You owe $ and change the direction of light travel in the aforementioned / mirror relative to the front waveguide / anti-guide by changing the direction of the plane. The plane wave is described as the first patent application. Xiang Zhiguang Right · Coins & 4 Nine switches, in which the aforementioned driving means and • ## of the aforementioned movable members are oppositely arranged; and means of generating and / or electric power, which are generated by the aforementioned main electrostatic force. 11 Main electrode The optical switch of item 2 in the range m between the movable members is described, wherein the two of the aforementioned main electrodes are narrowed from the front end to the base end side. For example, the optical switch of item 3 of the patent scope of Shenjing, Let ^ have plural teeth The first part of the comb—the part of the moving member opposite to the first tooth comb part in the other main electrode, can insert the first tooth # Λ and set the second tooth comb 邙. Each tooth of 抡 σ 卩The combs with a plurality of tooth combs in the comb are as follows: the light switch of item 4 of the patent scope, wherein a tooth comb support part is provided in the aforementioned movable member ::: section, and a tooth comb is provided in the tooth comb support part. Ministry. 5. 581897 6. 7 .: The optical switch according to item 4 of the scope of patent application, wherein in order to make the distance between the front end of each tooth comb of the first 2 part and the base end of each tooth comb of the second tooth comb part from the side of the base end of the main electrode The front end side is enlarged so that the lengths of the combs of the first comb section are different. 8. The optical switch of any of items 2 to 6 of the scope of interest, wherein the cavity section has: a return electrode, which is disposed on the opposite side of the aforementioned movable phase = the main electrode; and a means for generating electrostatic force, which is A person who generates electrostatic force between the electrode and the movable member. For example, the optical switch in the seventh scope of the patent application, which further has a positioning means that can record the first disc which is cut by the optical material on the silk = the second position where the light on the aforementioned optical path passes. position. < 9. 10. As claimed: The optical switch of item 8 of the patent scope, wherein the positioning means has a movable part for positioning, which is arranged on the front side of the reflector, with borrowing = holding the reflector in the first position A first protrusion that holds the reflector in the second position, a second protrusion, a positioning driving portion that causes the positioning movable portion to face the movable member, and a retaining recess portion that is provided on the movable member, may The aforementioned first protrusion and the aforementioned second protrusion are inserted. The optical switch of the female claim item 8 of the patent, wherein the aforementioned positioning is provided with a spring member, which is arranged on the front side of the reflecting mirror, and has an elastic force that abuts the front end of the movable member and can apply force to the movable member side. The optical switch in item 8 of the patent application 2 wherein the aforementioned positioning means has a movable part for positioning, which is arranged on the front side of the aforementioned mirror, • 2-11. 581897 12. 13. 14. 15. 16. 17. 18. The electrode is opposite to the movable part for positioning described above. "㈡ 野 和 配 罟 • 结" The cutout part is provided at the front end of the movable member, and it is used for holding. The movable portion is used to hold the reflector at 0 and the positioning and holding notch portion is provided at the front end of the movable member: the second movable portion for positioning is accessible to lock the reflection σ °. Standing, # m & u stay in the aforementioned second position. For example, any of the items 8 to U in the patent scope of the eye position. The position of the aforementioned movable member is in the general shape: off, which is blocked by the light on the aforementioned optical path. #Reflective mirror can apply: The optical switch in the 12th area of the patent application, in which the aforementioned planar waveguide has a "coating removal portion", which is used to avoid the formation of the coating from the surrounding of the magnetic core, and the notch portion, It is provided along with the aforementioned coating removal section ^ The aforementioned optical path is used for placing the reflector; the movable member is provided in the aforementioned coating removal section. For example, the optical switch of item 13 of the scope of patent application, The aforementioned coating removing section is formed by removing the aforementioned coating by reactive ions. For example, the optical switch according to any one of claims 13 to 16 of the patent application scope, which includes the aforementioned movable member and the aforementioned reflection. The mirror mirror device is connected to the aforementioned planar waveguide. For example, the optical switch according to item 17 of the patent application scope, wherein a positioning projection is provided on one of the aforementioned planar waveguide and the aforementioned mirror device, and For example, the optical switch according to item 14 of the patent application, wherein the movable member and the reflector are integrally formed from the same material. For example, the optical switch according to item 15 of the patent application scope, wherein the movable member and the reflecting mirror system include Shi Xi. 581897 The other side of the planar waveguide and the above-mentioned mirror device is provided with a positioning recessed portion which is compatible with the positioning protruding portion. 19. The optical switch according to item 18 of the application, wherein the planar waveguide and the mirror device are anodically bonded. 20. The optical switch according to item 9 of the patent application range, wherein the substrate of the aforementioned planar waveguide ′ is a glass containing stone or susceptible metal ions. 2 1-An optical switch array, which is configured by arranging a plurality of optical switches in any one of the scope of claims 1 to 20 on the same base member. 2 2 _If the optical switch array of item 21 of the patent application scope, the distribution distance of each optical switch is less than 500 / zm.