TW573211B - Phenolic/alicyclic copolymers and photoresists - Google Patents

Phenolic/alicyclic copolymers and photoresists Download PDF

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Publication number
TW573211B
TW573211B TW89120983A TW89120983A TW573211B TW 573211 B TW573211 B TW 573211B TW 89120983 A TW89120983 A TW 89120983A TW 89120983 A TW89120983 A TW 89120983A TW 573211 B TW573211 B TW 573211B
Authority
TW
Taiwan
Prior art keywords
photoresists
phenolic
alicyclic copolymers
alicyclic
copolymers
Prior art date
Application number
TW89120983A
Other languages
English (en)
Inventor
George G Barclay
Ashish Pandya
Yueh Wang
Anthony Zampini
Gary Ganghui Teng
Original Assignee
Shipley Co Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shipley Co Llc filed Critical Shipley Co Llc
Application granted granted Critical
Publication of TW573211B publication Critical patent/TW573211B/zh

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/106—Binder containing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/106—Binder containing
    • Y10S430/111—Polymer of unsaturated acid or ester

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials For Photolithography (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
TW89120983A 1999-10-08 2000-10-07 Phenolic/alicyclic copolymers and photoresists TW573211B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/414,738 US6492086B1 (en) 1999-10-08 1999-10-08 Phenolic/alicyclic copolymers and photoresists

Publications (1)

Publication Number Publication Date
TW573211B true TW573211B (en) 2004-01-21

Family

ID=23642742

Family Applications (1)

Application Number Title Priority Date Filing Date
TW89120983A TW573211B (en) 1999-10-08 2000-10-07 Phenolic/alicyclic copolymers and photoresists

Country Status (7)

Country Link
US (2) US6492086B1 (zh)
EP (1) EP1091250A1 (zh)
JP (2) JP2001194792A (zh)
KR (1) KR20010040033A (zh)
CN (1) CN1170207C (zh)
SG (1) SG93273A1 (zh)
TW (1) TW573211B (zh)

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US7776505B2 (en) * 2001-11-05 2010-08-17 The University Of North Carolina At Charlotte High resolution resists for next generation lithographies
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EP1835342A3 (en) 2006-03-14 2008-06-04 FUJIFILM Corporation Positive resist composition and pattern forming method using the same
US7914968B2 (en) * 2006-07-24 2011-03-29 Tokyo Ohka Kogyo Co., Ltd. Positive resist composition and method of forming resist pattern
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JP5039622B2 (ja) 2007-03-30 2012-10-03 富士フイルム株式会社 ポジ型レジスト組成物及びこれを用いたパターン形成方法
JP5141106B2 (ja) * 2007-06-22 2013-02-13 住友化学株式会社 化学増幅型ポジ型レジスト組成物及びヒドロキシスチレン誘導体
JP4961324B2 (ja) 2007-10-26 2012-06-27 富士フイルム株式会社 電子線、ｘ線又はｅｕｖ用ポジ型レジスト組成物及びそれを用いたパターン形成方法
JP4951464B2 (ja) 2007-10-26 2012-06-13 富士フイルム株式会社 ポジ型レジスト組成物及びこれを用いたパターン形成方法。
JP5150296B2 (ja) 2008-02-13 2013-02-20 富士フイルム株式会社 電子線、ｘ線またはｅｕｖ用ポジ型レジスト組成物及びこれを用いたパターン形成方法
KR20100131996A (ko) * 2008-03-04 2010-12-16 제이에스알 가부시끼가이샤 감방사선성 조성물, 중합체 및 단량체
WO2009152276A2 (en) 2008-06-10 2009-12-17 University Of North Carolina At Charlotte Photoacid generators and lithographic resists comprising the same
JP5092986B2 (ja) * 2008-08-20 2012-12-05 Ｊｓｒ株式会社 重合体及び感放射線性組成物並びに単量体
TWI503334B (zh) * 2009-02-19 2015-10-11 Jsr Corp 聚合物及敏輻射線性組成物、及單體
JP5609881B2 (ja) 2009-09-30 2014-10-22 Jsr株式会社 重合体及び感放射線性組成物並びに単量体
WO2011070947A1 (ja) 2009-12-08 2011-06-16 Jsr株式会社 感放射線性樹脂組成物、重合体、単量体及び感放射線性樹脂組成物の製造方法
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JP2015028576A (ja) * 2013-07-01 2015-02-12 富士フイルム株式会社 パターン形成方法

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Also Published As

Publication number Publication date
JP2011215647A (ja) 2011-10-27
JP2001194792A (ja) 2001-07-19
US6492086B1 (en) 2002-12-10
US7700256B2 (en) 2010-04-20
EP1091250A1 (en) 2001-04-11
CN1170207C (zh) 2004-10-06
US20030207200A1 (en) 2003-11-06
KR20010040033A (ko) 2001-05-15
CN1297167A (zh) 2001-05-30
SG93273A1 (en) 2002-12-17

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