TW510822B - Integrated heated getter purifier system - Google Patents
Integrated heated getter purifier system Download PDFInfo
- Publication number
- TW510822B TW510822B TW089111195A TW89111195A TW510822B TW 510822 B TW510822 B TW 510822B TW 089111195 A TW089111195 A TW 089111195A TW 89111195 A TW89111195 A TW 89111195A TW 510822 B TW510822 B TW 510822B
- Authority
- TW
- Taiwan
- Prior art keywords
- gas
- scope
- item
- patent application
- gas purifier
- Prior art date
Links
- 238000000034 method Methods 0.000 claims abstract description 57
- 239000012535 impurity Substances 0.000 claims abstract description 49
- 239000002245 particle Substances 0.000 claims abstract description 22
- 239000000758 substrate Substances 0.000 claims abstract description 9
- 230000002745 absorbent Effects 0.000 claims description 88
- 239000002250 absorbent Substances 0.000 claims description 88
- 239000000463 material Substances 0.000 claims description 79
- 238000000746 purification Methods 0.000 claims description 69
- 238000010438 heat treatment Methods 0.000 claims description 38
- 239000012528 membrane Substances 0.000 claims description 24
- 238000011049 filling Methods 0.000 claims description 22
- 238000012546 transfer Methods 0.000 claims description 21
- 238000005253 cladding Methods 0.000 claims description 13
- 239000010935 stainless steel Substances 0.000 claims description 12
- 229910001220 stainless steel Inorganic materials 0.000 claims description 12
- 230000002079 cooperative effect Effects 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- 229910000831 Steel Inorganic materials 0.000 claims description 6
- 238000001816 cooling Methods 0.000 claims description 6
- 239000010955 niobium Substances 0.000 claims description 6
- 239000010959 steel Substances 0.000 claims description 6
- 239000010936 titanium Substances 0.000 claims description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- 229910052758 niobium Inorganic materials 0.000 claims description 3
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 claims description 3
- -1 and button (Ta) Chemical compound 0.000 claims description 2
- 238000001914 filtration Methods 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 229910010293 ceramic material Inorganic materials 0.000 claims 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims 1
- 238000009434 installation Methods 0.000 claims 1
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 claims 1
- 229910052726 zirconium Inorganic materials 0.000 claims 1
- 239000007789 gas Substances 0.000 abstract description 131
- 238000013461 design Methods 0.000 abstract description 10
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 230000008569 process Effects 0.000 abstract description 6
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 230000001172 regenerating effect Effects 0.000 abstract description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 14
- 238000003466 welding Methods 0.000 description 9
- 238000005498 polishing Methods 0.000 description 8
- 230000008901 benefit Effects 0.000 description 7
- 229910052759 nickel Inorganic materials 0.000 description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 230000006835 compression Effects 0.000 description 4
- 238000007906 compression Methods 0.000 description 4
- 230000001276 controlling effect Effects 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 239000003921 oil Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000033228 biological regulation Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
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- 239000012530 fluid Substances 0.000 description 2
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- 230000009257 reactivity Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 244000025254 Cannabis sativa Species 0.000 description 1
- WMFYOYKPJLRMJI-UHFFFAOYSA-N Lercanidipine hydrochloride Chemical compound Cl.COC(=O)C1=C(C)NC(C)=C(C(=O)OC(C)(C)CN(C)CCC(C=2C=CC=CC=2)C=2C=CC=CC=2)C1C1=CC=CC([N+]([O-])=O)=C1 WMFYOYKPJLRMJI-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000007596 consolidation process Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000000112 cooling gas Substances 0.000 description 1
- 238000005034 decoration Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000005242 forging Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000011796 hollow space material Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002808 molecular sieve Substances 0.000 description 1
- 150000002815 nickel Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000002952 polymeric resin Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 229910052704 radon Inorganic materials 0.000 description 1
- SYUHGPGVQRZVTB-UHFFFAOYSA-N radon atom Chemical compound [Rn] SYUHGPGVQRZVTB-UHFFFAOYSA-N 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000001275 scanning Auger electron spectroscopy Methods 0.000 description 1
- 230000001568 sexual effect Effects 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000010457 zeolite Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
- B01D53/0407—Constructional details of adsorbing systems
- B01D53/0423—Beds in columns
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/106—Silica or silicates
- B01D2253/108—Zeolites
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/112—Metals or metal compounds not provided for in B01D2253/104 or B01D2253/106
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/30—Physical properties of adsorbents
- B01D2253/302—Dimensions
- B01D2253/304—Linear dimensions, e.g. particle shape, diameter
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
- B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/40—Further details for adsorption processes and devices
- B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
- B01D2259/40088—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by heating
- B01D2259/40096—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by heating by using electrical resistance heating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/40—Further details for adsorption processes and devices
- B01D2259/402—Further details for adsorption processes and devices using two beds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/65—Employing advanced heat integration, e.g. Pinch technology
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
- B01D53/0407—Constructional details of adsorbing systems
- B01D53/0438—Cooling or heating systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
- B01D53/0407—Constructional details of adsorbing systems
- B01D53/0446—Means for feeding or distributing gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
- B01D53/0454—Controlling adsorption
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Separation Of Gases By Adsorption (AREA)
- Gas Separation By Absorption (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/330,316 US6299670B1 (en) | 1999-06-10 | 1999-06-10 | Integrated heated getter purifier system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW510822B true TW510822B (en) | 2002-11-21 |
Family
ID=23289221
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW089111195A TW510822B (en) | 1999-06-10 | 2000-08-24 | Integrated heated getter purifier system |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US6299670B1 (enExample) |
| EP (1) | EP1198281B1 (enExample) |
| JP (1) | JP5039262B2 (enExample) |
| KR (1) | KR100483039B1 (enExample) |
| CN (1) | CN1201849C (enExample) |
| DE (1) | DE60045921D1 (enExample) |
| MY (1) | MY125949A (enExample) |
| TW (1) | TW510822B (enExample) |
| WO (1) | WO2000076627A1 (enExample) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6383259B1 (en) * | 2000-08-30 | 2002-05-07 | C&M Incorporated | Two section gas purifier with Joule-Thompson cooling device |
| US6428612B1 (en) * | 2001-04-19 | 2002-08-06 | Hughes Electronics Corporation | Hydrogen getter package assembly |
| US6918430B2 (en) * | 2002-08-14 | 2005-07-19 | Texaco Ovonic Hydrogen Systems Llc | Onboard hydrogen storage unit with heat transfer system for use in a hydrogen powered vehicle |
| GB0227222D0 (en) * | 2002-11-21 | 2002-12-24 | Air Prod & Chem | Apparatus for use in regenerating adsorbent |
| JP2007508052A (ja) | 2003-10-07 | 2007-04-05 | アイノゲン、インコーポレイテッド | 携帯型ガス分離システム |
| US20050072423A1 (en) | 2003-10-07 | 2005-04-07 | Deane Geoffrey Frank | Portable gas fractionalization system |
| US7135059B2 (en) * | 2003-10-07 | 2006-11-14 | Inogen, Inc. | Portable gas fractionalization system |
| US7066985B2 (en) | 2003-10-07 | 2006-06-27 | Inogen, Inc. | Portable gas fractionalization system |
| US7686870B1 (en) | 2005-12-29 | 2010-03-30 | Inogen, Inc. | Expandable product rate portable gas fractionalization system |
| CN101376077B (zh) * | 2007-08-31 | 2011-02-09 | 先普半导体技术(上海)有限公司 | 一种小流量气体纯化方法和纯化装置 |
| CN105779846A (zh) * | 2014-12-26 | 2016-07-20 | 北京有色金属研究总院 | 一种高活性钛基合金纯化材料及其纯化反应器 |
| JP6440163B2 (ja) * | 2015-02-24 | 2018-12-19 | 株式会社上村工業 | 筒形ケミカルフィルターケース |
| CN105032117B (zh) * | 2015-07-09 | 2017-05-24 | 东南大学 | 一种重金属蒸汽与吸附剂气固反应的装置 |
| KR102660572B1 (ko) * | 2021-11-23 | 2024-04-26 | 주식회사 레이크머티리얼즈 | 필터 모듈 및 그를 포함하는 유기금속 화합물 공급 장치 |
Family Cites Families (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2790505A (en) * | 1954-08-02 | 1957-04-30 | United Gas Corp | Methods of and means for dehydrating and processing fluid streams |
| GB986792A (en) * | 1960-08-24 | 1965-03-24 | Ass Elect Ind | Improvements in or relating to adsorption apparatus |
| US3200569A (en) * | 1962-01-31 | 1965-08-17 | Varian Associates | Sorption gas and vapor trap apparatus |
| US3353339A (en) * | 1964-10-08 | 1967-11-21 | Selas Corp Of America | Gas cleaner |
| US3464186A (en) * | 1967-02-10 | 1969-09-02 | Hankison Corp | Dryer for compressed fluid systems |
| US3981699A (en) | 1974-10-25 | 1976-09-21 | Molitor Victor D | Purifier |
| US4029486A (en) * | 1976-02-25 | 1977-06-14 | Graham-White Sales Corporation | Pneumatic compactor for particulate desiccant |
| US4131442A (en) * | 1977-04-29 | 1978-12-26 | Graham-White Sales Corporation | Pneumatic compactor for particulate desiccant |
| US4113451A (en) * | 1977-06-08 | 1978-09-12 | Graham-White Sales Corp. | Compressed gas filter assembly |
| US4199331A (en) * | 1978-06-26 | 1980-04-22 | Graham-White Sales Corp. | Dual filter assembly for compressed gas |
| JPS57156314A (en) | 1981-03-18 | 1982-09-27 | Matsushita Electric Ind Co Ltd | Purification of rare gas |
| JPS6020323B2 (ja) | 1981-03-18 | 1985-05-21 | 松下電器産業株式会社 | 窒素ガスの精製方法 |
| DE3243656A1 (de) * | 1982-11-25 | 1984-05-30 | Linde Ag, 6200 Wiesbaden | Adsorbereinheit und verfahren zum betreiben derselben |
| JPS6049922U (ja) * | 1983-09-13 | 1985-04-08 | 株式会社ナブコ | 車両用エアドライヤ装置 |
| JPS623006A (ja) * | 1985-06-28 | 1987-01-09 | 大陽酸素株式会社 | 窒素の超精製装置、並びに精製方法 |
| DE3601651C1 (de) * | 1986-01-21 | 1986-10-09 | Cit-Alcatel GmbH, 97877 Wertheim | Regenerierbare Sorptionsfalle für Vakkumanlagen |
| JPS62212208A (ja) | 1986-03-11 | 1987-09-18 | Iwaya Gas Kaihatsu Kenkyusho:Kk | 原料メタンガスの精製方法 |
| JPH0688765B2 (ja) | 1986-09-04 | 1994-11-09 | 松下電器産業株式会社 | 希ガス精製装置 |
| JP2948263B2 (ja) * | 1990-04-18 | 1999-09-13 | サエス ゲッターズ エス・ピー・エイ | 気体精製装置 |
| JP2980425B2 (ja) | 1990-09-14 | 1999-11-22 | 日本パイオニクス株式会社 | 希ガスの精製方法 |
| JP2971116B2 (ja) | 1990-10-15 | 1999-11-02 | 日本パイオニクス株式会社 | 希ガスの精製方法 |
| JP2977606B2 (ja) | 1990-11-29 | 1999-11-15 | 日本パイオニクス株式会社 | 希ガスの精製方法 |
| US5238469A (en) | 1992-04-02 | 1993-08-24 | Saes Pure Gas, Inc. | Method and apparatus for removing residual hydrogen from a purified gas |
| CA2117319A1 (en) | 1993-07-12 | 1995-01-13 | John D. Baker | Method for the purification of noble gases, nitrogen and hydrogen |
| WO1995005885A1 (en) | 1993-08-26 | 1995-03-02 | Ceramatec, Inc. | Crude argon purification (system one) |
| KR0121801B1 (ko) * | 1993-09-17 | 1997-11-25 | 제럴드 켄트 화이트 | 차량 탑승자 구속 시스템을 팽창시키기 위한 장치, 에어백용 하이브리드형 팽창기 및 팽창 가스의 제조 방법 |
| DE4409871C2 (de) * | 1994-03-22 | 2001-08-30 | Knorr Bremse Systeme | Trocknungspatrone für Lufttrocknungsanlagen von Druckluftbremsanlagen von Fahrzeugen |
| US5810031A (en) * | 1996-02-21 | 1998-09-22 | Aeroquip Corporation | Ultra high purity gas distribution component with integral valved coupling and methods for its use |
| US5833738A (en) | 1996-03-01 | 1998-11-10 | D.D.I. Ltd. | Specialty gas purification system |
| US5689893A (en) * | 1996-09-13 | 1997-11-25 | Westinghouse Air Brake Company | Desiccant canister with positioning bore |
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| JPH10332478A (ja) * | 1997-05-27 | 1998-12-18 | Fujitsu Ltd | 赤外線検知器及びその製造方法 |
| DE29800319U1 (de) * | 1998-01-10 | 1998-04-09 | Leybold Vakuum GmbH, 50968 Köln | Filter für den Einsatz in gasführenden Leitungen oder Kreisläufen |
-
1999
- 1999-06-10 US US09/330,316 patent/US6299670B1/en not_active Expired - Lifetime
-
2000
- 2000-05-31 MY MYPI20002417A patent/MY125949A/en unknown
- 2000-06-08 CN CNB008087342A patent/CN1201849C/zh not_active Expired - Lifetime
- 2000-06-08 DE DE60045921T patent/DE60045921D1/de not_active Expired - Lifetime
- 2000-06-08 EP EP00960102A patent/EP1198281B1/en not_active Expired - Lifetime
- 2000-06-08 WO PCT/US2000/040189 patent/WO2000076627A1/en not_active Ceased
- 2000-06-08 JP JP2001502945A patent/JP5039262B2/ja not_active Expired - Lifetime
- 2000-06-08 KR KR10-2001-7015794A patent/KR100483039B1/ko not_active Expired - Fee Related
- 2000-08-24 TW TW089111195A patent/TW510822B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| EP1198281A1 (en) | 2002-04-24 |
| EP1198281B1 (en) | 2011-05-04 |
| US6299670B1 (en) | 2001-10-09 |
| KR100483039B1 (ko) | 2005-04-15 |
| JP5039262B2 (ja) | 2012-10-03 |
| JP2003521365A (ja) | 2003-07-15 |
| DE60045921D1 (enExample) | 2011-06-16 |
| CN1355720A (zh) | 2002-06-26 |
| CN1201849C (zh) | 2005-05-18 |
| WO2000076627A1 (en) | 2000-12-21 |
| KR20020026450A (ko) | 2002-04-10 |
| MY125949A (en) | 2006-09-29 |
| EP1198281A4 (en) | 2006-06-28 |
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