TW488084B - High brightness LED - Google Patents

High brightness LED Download PDF

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TW488084B
TW488084B TW88101946A02A TW488084B TW 488084 B TW488084 B TW 488084B TW 88101946A02 A TW88101946A02 A TW 88101946A02A TW 488084 B TW488084 B TW 488084B
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Taiwan
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layer
electrode
contact
central region
area
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Chinese (zh)
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Shu-Wen Sung
Ming-Shiun Shie
Shr-Nan Yan
Jr-Chiang Liu
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Epistar Corp
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Abstract

A high brightness LED is disclosed, which comprises a first electrode; a semiconductor substrate associated with the first electrode; a first binding layer having the first conductivity formed on the semiconductor substrate; an active layer formed on the first binding layer; a second binding layer having the second conductivity formed on the active layer, whose upper surface comprises a central region and an exterior region located outside the central region; a contact layer formed on the exterior region of the second binding layer; a transparent conductive layer covering the contact layer and the central region, forming an Ohmic contact with the contact layer, and forming a Shottky barrier with the central region; a second electrode formed on the transparent conductive layer substantially on the central region.

Description

488084 五、發明說明(1) 發明之領域 本發明係關於一種發光二極體,尤其關於一種高亮度 發光二極體。 相關技藝之說明 ^在本案申請人於1999年2月9日提出申請,發明名稱為 南免度發光二極體」之第088 1 0 1 946號發明專利申請案 ’揭露依其第一較佳實施例之高亮度周緣發光二極體, 中488084 V. Description of the invention (1) Field of the invention The present invention relates to a light-emitting diode, and more particularly to a high-brightness light-emitting diode. Explanation of related skills ^ The applicant of this case filed an application on February 9, 1999, and the invention name was “Nanjidu Light-Emitting Diode” No. 088 1 0 1 946 for the invention patent application 'Revelation according to its first preference Example of a high-brightness peripheral light-emitting diode, medium

^主要技術内容係控制電流之分佈,使電流實質上不流至 前電極之正下方區域,因而使得實質上自前電極送出之所 有電流’於活性層中,皆在離開前電極正下方適當距離處 產生發光作用,故所發出之光線可避開前電極之阻擋,而 增進二極體之發光效果,如圖!所示,其型以^構成 之半導體基層12形成於n型後電極10上,半導體基層12上 形成多層之布拉格反射層30,此多層布拉格反射層3〇宜由 AlGalnP或AlGaAs等系列材料構成。積層結構丨4形成於反 射層30上,此積層結構14中包含由A1GaInP構成之n型底部 束缚層140、AlGaInP構成之活性層142、及由AlGalnP構^ The main technical content is to control the distribution of the current so that the current does not flow substantially to the area directly below the front electrode, so that substantially all the current sent from the front electrode is in the active layer at an appropriate distance from directly below the front electrode. It has a luminous effect, so the light emitted can avoid the blocking of the front electrode, and enhance the luminous effect of the diode, as shown in the figure! As shown in the figure, a semiconductor base layer 12 composed of ^ is formed on the n-type rear electrode 10, and a multilayer Bragg reflection layer 30 is formed on the semiconductor base layer 12. The multilayer Bragg reflection layer 30 is preferably composed of a series of materials such as AlGalnP or AlGaAs. The multilayer structure 4 is formed on the reflective layer 30. The multilayer structure 14 includes an n-type bottom binding layer 140 composed of A1GaInP, an active layer 142 composed of AlGaInP, and an AlGalnP structure.

成之P型頂部束缚層1 44。一層p型窗戶層丨6形成於頂部束 縛層144上,此窗戶層16宜由GaP、GaASP、GalnP、成 至 P-shaped top binding layer 1 44. A p-type window layer 6 is formed on the top restraint layer 144. This window layer 16 is preferably made of GaP, GaASP, GalnP,

AlGalnP、或AlGaAs等透明材料構成,窗戶層16中離開前 電極20正下方適當距離處’以乾蝕刻或濕蝕刻形成預定深 度之圓環狀溝槽。一層P型接觸層17在離開前電極2〇正下 方適當距離處,形成於窗戶廣16上,此接觸層I?宜由A transparent material such as AlGalnP or AlGaAs is formed, and the window layer 16 is formed into a ring-shaped groove of a predetermined depth by dry etching or wet etching at an appropriate distance from the front electrode 20 directly below. A P-type contact layer 17 is formed on the window 16 at an appropriate distance directly below the front electrode 20. This contact layer I?

GaP、GaAsP、GalnP、或GaAs等透明材料構成。一層透明It is made of a transparent material such as GaP, GaAsP, GalnP, or GaAs. A layer of transparency

五、 發明說明(2) 層17上,並與接觸層17間 與窗戶層16接觸,並與窗 層19宜由氧化銦錫、氧化 荨透明材料構成。一 p型 形成歐姆接觸,且與窗戶 環狀溝槽之設置,故自前 散佈開後,僅通過該歐姆 ,因而通過該歐姆接觸部 下方擴散之機會被減至相 出之所有電流,於活性層 方適當距離處產生發光作 而增進二極體之發光效果 ¥電層19之外圍部分形成於接觸 形成歐姆接觸,其他部分則直接 戶層1 6間形成蕭基障礙,此導電 銦、氧化錫、氧化鋅、或氧化= 前電極20形成於導電層19上。 由於導電層19與接觸層17間 層16間形成蕭基障礙,加上該圓 電極20送出之電流在導電層19中 接觸部分,但不通過該蕭基障礙 分向下流動之電流向前電極2〇正 當小,使得實質上自前電極20送 142中,皆在離開前電極2〇正下 用,故可避開前電極20之阻擋, -描骑追Ϊ案之發明人於思考如何降低該先前高亮度發光 了ςΜη之#產成本時,靈感一閃,想到對於表面安裝裝置 π,# ϋ之發^光二極體而言,由於其侧向亮度無關緊 _ j % &之窗戶層16應可完全省除,如此不但能夠省掉 成長窗戶層16之成本,亦可省掉蝕刻窗戶層16 之成本。 發明概要 路氺因:雜本發明之目的在於提供一種無窗戶層之高亮度 發先一極體,以獲致低製造成本與材料成本。 為達成以上各目的,依本發明第一較佳實施例之一種 488084V. Description of the invention (2) The layer 17 and the contact layer 17 are in contact with the window layer 16 and the window layer 19 should be composed of indium tin oxide and oxide transparent material. A p-type forms an ohmic contact and is arranged with the ring groove of the window, so after the front spreads, only the ohm is passed, so the chance of diffusion through the ohmic contact portion is reduced to all currents that are phased out in the active layer The light emitting effect is generated at an appropriate distance to improve the light emitting effect of the diode. The outer part of the electrical layer 19 is formed on the contact to form an ohmic contact, and the other parts directly form a Schottky barrier between the 16 layers. This conductive indium, tin oxide, Zinc oxide, or oxidation = front electrode 20 is formed on the conductive layer 19. The Schottky barrier is formed between the conductive layer 19 and the contact layer 17 and the layer 16 and the current sent by the circular electrode 20 contacts the conductive layer 19, but the current flowing downward through the Schottky barrier does not forward the electrode. 20 is just small, so that 142 out of the front electrode 20 are actually used directly below the front electrode 20, so the obstacle of the front electrode 20 can be avoided.-The inventor of the chase and chase case is thinking about how to reduce the When the previous high-brightness light was emitted, the inspiration for the # production cost was flashed. I thought that for the surface-mount device π, # ϋ 之 ^ light diode, because its lateral brightness is irrelevant_ j% & window layer 16 should It can be completely eliminated, so that not only the cost of growing the window layer 16 but also the cost of etching the window layer 16 can be saved. Summary of the invention: Lu Ying: The purpose of the present invention is to provide a high-brightness light emitting diode without a window layer, so as to achieve low manufacturing cost and material cost. To achieve the above objects, according to a first preferred embodiment of the present invention, 488084

阿壳度發光二極體,包含一第一電極; > 半導體基板,結 合於該第一電極上;一具有第一導電性之第一束缚層,形 成於該半導體基板上方;一活性層,形成於該第一束缚層 上;一具有第二導電性之第二束缚層,形成於該活性層 上’此第二束缚層之上表面包含一中央區域與位於該中央 區域外圍之一外圍區域;一接觸層,形成於該第二束缚層 之該外圍區域上;一透明導電層,覆蓋該接觸層與該中央 區域上’且與該接觸層間形成歐姆接觸,而與該中央區域 間形成蕭基障礙;以及一第二電極,實質上於該中央區域 上方,形成於該透明導電層上。 詳細說明 凊參閱圖2,在依本發明第一較佳實施例之一種高亮 度發光二極體中,一n型後電極1〇結合於一nSGaAs半導體 基板12之下表面,半導體基板12上形成多層之布拉格反射 層30 ’此多層布拉格反射層3〇宜由A1GaInP或A1GaAs等系 列材料構成。ρ-η結積層(p —n juncti〇n stack ) 14形成 於反射層30上’此p —n結積層η中包含由AlGalnP構成之η 型底部束缚層140、AlGa InP構成之活性層142、及由 AlGalnP構成之ρ型頂部束缚層144。一ρ型接觸層17形成於 P型頂部束缚層1 4 4上,然後經蝕刻形成一中央圓形貫穿 孔’暴露出P型頂部束缚層1 4 4表面位於該中央圓形貫穿孔 下方之部分’繼而使一層透明導電層丨9覆蓋於ρ型接觸層 17及暴露之ρ型頂部束缚層144上。一ρ型前電極2〇在該中 央圓形貫穿孔上方形成於透明導電層19上。接觸層1 了宜由A shell-shaped light-emitting diode including a first electrode; > a semiconductor substrate bonded to the first electrode; a first binding layer having a first conductivity formed on the semiconductor substrate; an active layer, Formed on the first tethering layer; a second tethering layer having second conductivity is formed on the active layer; the upper surface of the second tethering layer includes a central region and a peripheral region located on the periphery of the central region; A contact layer formed on the peripheral region of the second tie layer; a transparent conductive layer covering the contact layer and the central region, and forming an ohmic contact with the contact layer, and forming a Xiao with the central region; A base barrier; and a second electrode formed on the transparent conductive layer substantially above the central region. Detailed description. Referring to FIG. 2, in a high-brightness light emitting diode according to the first preferred embodiment of the present invention, an n-type rear electrode 10 is bonded to a lower surface of an nSGaAs semiconductor substrate 12, and the semiconductor substrate 12 is formed on the semiconductor substrate 12. Multi-layer Bragg reflection layer 30 'This multilayer Bragg reflection layer 30 should preferably be made of a series of materials such as A1GaInP or A1GaAs. A ρ-η junction layer (p —n junction stack) 14 is formed on the reflective layer 30. The p —n junction layer η includes an η-type bottom binding layer 140 composed of AlGalnP, an active layer 142 composed of AlGa InP, And a p-type top tie layer 144 made of AlGalnP. A p-type contact layer 17 is formed on the P-type top confinement layer 1 4 4 and then is etched to form a central circular through hole 'exposing the portion of the surface of the P-type top confinement layer 1 4 4 below the central circular through hole. 'Then a transparent conductive layer 9 is covered on the p-type contact layer 17 and the exposed p-type top tie layer 144. A p-type front electrode 20 is formed on the transparent conductive layer 19 above the central circular through hole. Contact layer 1

第6頁 488084 五、發明說明(4) 摻雜鬲濃度碳之GaP構成,其摻雜濃度可達1〇2G/cffl3。 由於透明導電層1 9與!)型接觸層17間形成歐姆接觸, 型頂部束缚層144間形成蕭基障礙,故自前電極2〇送 ίίί流僅通過該歐姆接觸部分,但不通過該蕭基障礙, 貝貝上自珂電極20送出之所有電流,於活性層142尹, 前電極20正下方以外之區域產生發光作用,故可避開 刖电極20之阻擋,而獲致良好的發光效果。 f 3顯示依本發明第二較佳實施例之一種 ;;體中’其與第-較佳.實施例高亮度發光二極體之差里 f於:以P型GaAs接觸層17取代第一較佳實施例令之二 度GaP接觸層17,且在該GaAs接觸層細型頂部束= 層“4間增加一薄層(厚度例如約編)透明 15 =為蝕刻GaAs接觸層17時之停止層ΐ5。停止層 如摻雜鎂,其摻雜濃度例如為lOiVcm3。 前述各較佳實施例之高亮度發光二 先前技藝中厚度通常達數十微米之窗戶層,故能夠; 發明降低製造成本與材料成本之目的。 有者應可瞭解’本發明之概念亦可應用於具 基障礙形成於發光面二在f情形,前述蕭 P-η結積層表面中央區域之\電方極之下方’但不必然形成於 μ ΡΠ Χ Ϊ所述者,僅為本發明之各較佳實施例,本發明之 更,皆屬本發明申請發明所做的任何變 τ月辱利之乾圍。例如,省除半導體基板 488084 五、發明說明(5) 12上之多層布拉格反射層30,顯然不脫離本發明之精神與 範圍。Page 6 488084 V. Description of the invention (4) GaP composed of erbium-doped carbon, whose doping concentration can reach 102G / cffl3. Since the ohmic contact is formed between the transparent conductive layer 19 and the!) Type contact layer 17 and the Schottky barrier is formed between the top binding layer 144, the flow from the front electrode 20 passes through the ohmic contact portion only, but does not pass through the Xiaoji Obstacles, all currents sent from the Ke electrode 20 on Bebe generate light emission in the active layer 142, and areas directly below the front electrode 20, so it can avoid the barrier of the thorium electrode 20 and obtain a good luminous effect. f 3 shows one of the second preferred embodiment of the present invention; the difference between the body and its first-best. embodiment of the high-brightness light-emitting diode f is: replacing the first with a P-type GaAs contact layer 17 In the preferred embodiment, the second-degree GaP contact layer 17 is formed, and a thin top beam of the GaAs contact layer = layer "4" is added to a thin layer (thickness, for example), transparent 15 = a stop layer when the GaAs contact layer 17 is etched ΐ5. The stop layer is doped with magnesium, and its doping concentration is, for example, lOiVcm3. The high-brightness light emission of each of the foregoing preferred embodiments. In the prior art, the window layer usually has a thickness of several tens of microns, so it can; Someone should understand that the concept of the present invention can also be applied to the case where the base barrier is formed on the light-emitting surface at f, the above-mentioned P-η buildup layer is located below the electric pole in the central area of the surface, but not The ones that are necessarily formed in the μ Π Π X are only the preferred embodiments of the present invention, and the modifications of the present invention are all subject to any changes in the application of the invention. For example, the semiconductor is eliminated. Substrate 488084 V. Description of the invention (5) Multi-layer cloth on 12 Grid reflective layer 30, obviously without departing from the spirit and scope of the invention.

UBI 第8頁 488084 圖式簡單說明 圖式之簡單說明: 圖1顯示一種先前技藝之高亮度發光二極體;以及 圖2以示意方式顯示依本發明第一較佳實施例之高亮 度發光二極體。 圖3以示意方式顯示依本發明第二較佳實施例之高亮 度發光二極體。 符號說明 10 後電極 12 半導體基板 14 積層結構 15 停止層 30 布拉格反射層 140 底部束缚層 142 活性層 144 頂部束缚層 17 接觸層 19 透明導電層 20 前電極UBI Page 8 488084 Brief description of the diagram Brief description of the diagram: Fig. 1 shows a high-brightness light-emitting diode of the prior art; and Fig. 2 schematically shows a high-brightness light-emitting diode 2 according to the first preferred embodiment of the present invention. Polar body. Fig. 3 schematically shows a high-brightness light emitting diode according to a second preferred embodiment of the present invention. DESCRIPTION OF SYMBOLS 10 Back electrode 12 Semiconductor substrate 14 Laminated structure 15 Stop layer 30 Bragg reflector 140 Bottom tie layer 142 Active layer 144 Top tie layer 17 Contact layer 19 Transparent conductive layer 20 Front electrode

第9頁Page 9

Claims (1)

488084 々、申請專利範圍 1. 一種高亮度發光二極體,包含: 一 P-η結積層,具有一第一主要表面與一第二主要表 面,該第二主要表面包含一中央區域與位於該中央區域外 圍之一外圍區域; 一接觸層,形成於該ρ-η結積層之該外圍區域上方;以 及 一透明導電層,覆蓋該接觸層與該中央區域上方,且與 該接觸層間形成歐姆接觸,並實質上在該中央區域上形成 蕭基障礙。 2. —種高亮度發光二極體,包含: 一電極; 一ρ-η結積層,形成於該電極下方,該ρ-η結積層具有一 第一主要表面與一第二主要表面,該第二主要表面由實質 上位於該電極正下方之一受遮區域與實質上非位於該電極 正下方之一非受遮區域組成,該非受遮區域位於該受遮區 域之外圍; 一接觸層,在該電極下方,形成於該ρ-η結積層之該非 受遮區域上方;以及 一透明導電層,在該電極下方,覆蓋該接觸層與該受遮 區域上方,且與該接觸層間形成歐姆接觸,並實質上在該 受遮區域上形成蕭基障礙。 3. —種高亮度發光二極體,包含:488084 々 、 Scope of patent application 1. A high-brightness light-emitting diode, comprising: a P-η build-up layer having a first major surface and a second major surface, the second major surface including a central region and located on the A peripheral region on the periphery of the central region; a contact layer formed over the peripheral region of the ρ-η junction layer; and a transparent conductive layer covering the contact layer and the central region and forming an ohmic contact with the contact layer , And essentially formed a Schottky barrier in this central area. 2. A high-brightness light-emitting diode, comprising: an electrode; a ρ-η junction layer formed below the electrode, the ρ-η junction layer having a first major surface and a second major surface, the first The two main surfaces are composed of a masked area that is substantially directly below the electrode and a non-masked area that is substantially not directly below the electrode, and the unmasked area is located on the periphery of the masked area; a contact layer on the Below the electrode is formed above the unshielded area of the ρ-η junction layer; and a transparent conductive layer covers the contact layer and the shielded area under the electrode, and forms an ohmic contact with the contact layer, A Schottky barrier is essentially formed on the covered area. 3. —A kind of high-brightness light-emitting diode, including: 第10頁 488084 六、申請專利範圍 一第一電極; 一半導體基板,結合於該第一電極上; 一具有第一導電性之第一束缚層,形成於該半導體基板 上方; 一活性層,形成於該第一束缚層上; 一具有第二導電性之第二束缚層,形成於該活性層上, 此第二束缚層之上表面包含一中央區域與位於該中央區域 外圍之一外圍區域; 一接觸層,形成於該第二東缚層之該外圍區域上; 一透明導電層,覆蓋該接觸層與該中央區域上,且與該 接觸層間形成歐姆接觸,而與該中央區域間形成蕭基障 礙;以及 一第二電極,實質上於該中央區域上方,形成於該透明 導電層上。 4. 依申請專利範圍第3項之高亮度發光二極體,其中在該 半導體基板與該第一束缚層之間更包含一多層布拉格反射 層。 5. —種高亮度發光二極體,包含: 一 P-η結積層,具有一第一主要表面與一第二主要表 面,該第二主要表面包含一中央區域與位於該中央區域外 圍之一外圍區域; 一停止層,形成於該ρ-η結積層之上方;Page 10 488084 VI. Application scope: a first electrode; a semiconductor substrate bonded to the first electrode; a first binding layer having a first conductivity formed over the semiconductor substrate; an active layer formed On the first tethering layer; a second tethering layer having a second conductivity is formed on the active layer, and the upper surface of the second tethering layer includes a central region and a peripheral region located on the periphery of the central region; A contact layer is formed on the peripheral region of the second east-bound layer. A transparent conductive layer covers the contact layer and the central region, forms an ohmic contact with the contact layer, and forms a contact with the central region. A base barrier; and a second electrode formed on the transparent conductive layer substantially above the central region. 4. The high-brightness light-emitting diode according to item 3 of the patent application scope, wherein a multilayer Bragg reflector is further included between the semiconductor substrate and the first restraint layer. 5. A high-brightness light-emitting diode comprising: a P-η buildup layer having a first major surface and a second major surface, the second major surface including a central region and one of the periphery of the central region Peripheral region; a stop layer formed above the ρ-η accumulation layer; 第11頁 488084 六、申請專利範圍 一接觸層,形成於該停止層上, 該外圍區域上方;以及 位於η結積層之 一透明導電層,覆蓋該接觸層與該 該接觸層間形成歐姆接觸,並實斯^ 央區域上方,且與 蕭基障礙。 @貝在該中央區域上形成 6· —種高亮度發光二極體,包含: 一電極; 一 ρ-η結積層,形成於該電極下 , 第一主要表面與一第二主要表面,兮’該ρ —η結積層具有一 上位於該電極正下方之一受遮區域主要表面由實質 正下方之一非受遮區域組成,該非=二貝上非位於該電極 域之外圍; 又遮區域位於該受遮區 一停止層,形成於該ρ —η結積層之上方· 一接觸層,在該電極下方,形忐 ’ 該Ρ-η結積層之該非受遮區域上方;、:及停止層上,且位於 :透明導電層,在該電極下方,覆蓋該接觸層與該受遮 上方’且與該接觸層間形成歐姆接觸,並實質上在該 叉遮區域上形成蕭基障礙。 一種1¾¾度發光二極體,包含·· 一第一電極; 一半導體基板,結合於該第一電極上; 一具有第一導電性之第一束缚層,形成於該半導體基板Page 11 488084 VI. Patent application scope A contact layer is formed on the stop layer above the peripheral area; and a transparent conductive layer located on the η build-up layer covers the contact layer to form an ohmic contact with the contact layer, and It is above the central area and is in obstacle with Xiao Ji. @ 贝 forms 6 ·· high-brightness light-emitting diodes on the central region, including: an electrode; a ρ-η build-up layer formed under the electrode, a first major surface and a second major surface, The ρ-η buildup layer has a masked area whose main surface is directly below the electrode, and its main surface is composed of a non-blocked area directly below the electrode. A stop layer in the masked area is formed above the ρ-η buildup layer. A contact layer is formed below the electrode above the non-shielded area of the P-η buildup layer; and: on the stop layer And is located: a transparent conductive layer, under the electrode, covering the contact layer and the masked layer, and forming an ohmic contact with the contact layer, and substantially forming a Schottky barrier on the cross-shielded region. A 1¾¾ degree light-emitting diode includes a first electrode; a semiconductor substrate bonded to the first electrode; a first binding layer having a first conductivity formed on the semiconductor substrate 第12頁 488084 六、申請專利範圍 上方; 一活性層,形成於該第一束缚層上; 一具有第二導電性之第二束缚層,形成於該活性層上, 此第二束缚層之上表面包含一中央區域與位於該中央區域 外圍之一外圍區域; 一停止層,形成於該第二束缚層之上; 一接觸層,形成於該停止層上,且位於該第二束缚層之 該外圍區域上; 一透明導電層,覆蓋該接觸層與該中央區域上,且與該 接觸層間形成歐姆接觸,而與該中央區域間形成蕭基障 礙;以及 一第二電極,實質上於該中央區域上方,形成於該透明 導電層上。 8.依申請專利範圍第7項之高亮度發光二極體,其中在該 半導體基板與該第一束缚層之間更包含一多層布拉格反射 層 °Page 12 488084 6. Above the scope of the patent application; an active layer is formed on the first tethering layer; a second tethering layer having a second conductivity is formed on the active layer and above the second tethering layer The surface includes a central region and a peripheral region located on the periphery of the central region; a stop layer formed on the second tie layer; a contact layer formed on the stop layer and located on the second tie layer On the peripheral region; a transparent conductive layer covering the contact layer and the central region, forming an ohmic contact with the contact layer, and forming a Schottky barrier with the central region; and a second electrode substantially in the central region A region is formed on the transparent conductive layer. 8. The high-brightness light-emitting diode according to item 7 of the scope of patent application, wherein a multilayer Bragg reflection layer is further included between the semiconductor substrate and the first tie layer ° 第13頁Page 13
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI513038B (en) * 2011-01-12 2015-12-11 Epistar Corp Light-emitting device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI513038B (en) * 2011-01-12 2015-12-11 Epistar Corp Light-emitting device

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