TW432396B - Bonded article with improved work function uniformity and method for making the same - Google Patents

Bonded article with improved work function uniformity and method for making the same Download PDF

Info

Publication number
TW432396B
TW432396B TW089112268A TW89112268A TW432396B TW 432396 B TW432396 B TW 432396B TW 089112268 A TW089112268 A TW 089112268A TW 89112268 A TW89112268 A TW 89112268A TW 432396 B TW432396 B TW 432396B
Authority
TW
Taiwan
Prior art keywords
single crystal
cathode
patent application
item
crystal cathode
Prior art date
Application number
TW089112268A
Other languages
English (en)
Chinese (zh)
Inventor
Victor Katsap
Warren K Waskiewicz
Original Assignee
Lucent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lucent Technologies Inc filed Critical Lucent Technologies Inc
Application granted granted Critical
Publication of TW432396B publication Critical patent/TW432396B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/15—Cathodes heated directly by an electric current
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/04—Manufacture of electrodes or electrode systems of thermionic cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3175—Lithography

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Solid Thermionic Cathode (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
TW089112268A 1999-06-22 2000-06-22 Bonded article with improved work function uniformity and method for making the same TW432396B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/337,741 US6448569B1 (en) 1999-06-22 1999-06-22 Bonded article having improved crystalline structure and work function uniformity and method for making the same

Publications (1)

Publication Number Publication Date
TW432396B true TW432396B (en) 2001-05-01

Family

ID=23321794

Family Applications (1)

Application Number Title Priority Date Filing Date
TW089112268A TW432396B (en) 1999-06-22 2000-06-22 Bonded article with improved work function uniformity and method for making the same

Country Status (6)

Country Link
US (1) US6448569B1 (https=)
EP (1) EP1063670B1 (https=)
JP (2) JP2001052594A (https=)
KR (1) KR20010049594A (https=)
DE (1) DE60043373D1 (https=)
TW (1) TW432396B (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9138913B2 (en) * 2005-09-08 2015-09-22 Imra America, Inc. Transparent material processing with an ultrashort pulse laser
WO2011121565A1 (en) * 2010-04-02 2011-10-06 Koninklijke Philips Electronics N.V. Ceramic metal halide lamp with feedthrough comprising an iridium wire
SG11201703125WA (en) * 2014-10-23 2017-05-30 Agency Science Tech & Res Method of bonding a first substrate and a second substrate
GB2583359A (en) * 2019-04-25 2020-10-28 Aquasium Tech Limited Electron beam emitting assembly

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB395439A (en) * 1932-02-17 1933-07-20 Mullard Radio Valve Co Ltd Improvements relating to thermionic valves
US2410822A (en) * 1942-01-03 1946-11-12 Sperry Gyroscope Co Inc High frequency electron discharge apparatus
US2892740A (en) * 1957-01-08 1959-06-30 Univ Notre Dame Du Lac Thermionic emitter and method of making same
US3284657A (en) * 1963-06-03 1966-11-08 Varian Associates Grain-oriented thermionic emitter for electron discharge devices
NL7003279A (https=) * 1970-03-07 1971-09-09
US4055780A (en) * 1975-04-10 1977-10-25 National Institute For Researches In Inorganic Materials Thermionic emission cathode having a tip of a single crystal of lanthanum hexaboride
JPS5679828A (en) * 1979-12-05 1981-06-30 Toshiba Corp Electron gun
CH672860A5 (https=) * 1986-09-29 1989-12-29 Balzers Hochvakuum
US5042058A (en) 1989-03-22 1991-08-20 University Of California Ultrashort time-resolved x-ray source
JP3397570B2 (ja) * 1996-04-02 2003-04-14 電気化学工業株式会社 熱電界放射陰極
WO1997044803A1 (fr) * 1996-05-21 1997-11-27 Kabushiki Kaisha Toshiba Structure de cathode, structure de canon a electron, grille pour canon a electron, tube electronique, element chauffant et procede de fabrication de la structure de cathode
JPH1131469A (ja) * 1997-07-08 1999-02-02 Nikon Corp 電子銃

Also Published As

Publication number Publication date
US6448569B1 (en) 2002-09-10
JP2001052594A (ja) 2001-02-23
JP2007250554A (ja) 2007-09-27
JP5392995B2 (ja) 2014-01-22
EP1063670A2 (en) 2000-12-27
KR20010049594A (ko) 2001-06-15
DE60043373D1 (de) 2010-01-07
EP1063670A3 (en) 2006-05-10
EP1063670B1 (en) 2009-11-25

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GD4A Issue of patent certificate for granted invention patent
MM4A Annulment or lapse of patent due to non-payment of fees