KR20010049594A - 일함수 균일성을 가진 결합 제품 및 그 제조 방법 - Google Patents

일함수 균일성을 가진 결합 제품 및 그 제조 방법 Download PDF

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Publication number
KR20010049594A
KR20010049594A KR1020000034430A KR20000034430A KR20010049594A KR 20010049594 A KR20010049594 A KR 20010049594A KR 1020000034430 A KR1020000034430 A KR 1020000034430A KR 20000034430 A KR20000034430 A KR 20000034430A KR 20010049594 A KR20010049594 A KR 20010049594A
Authority
KR
South Korea
Prior art keywords
single crystal
cathode
crystal cathode
tantalum
tungsten
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020000034430A
Other languages
English (en)
Korean (ko)
Inventor
케셉빅터
바스키에비츠바렌케이
Original Assignee
루센트 테크놀러지스 인크
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 루센트 테크놀러지스 인크 filed Critical 루센트 테크놀러지스 인크
Publication of KR20010049594A publication Critical patent/KR20010049594A/ko
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/15—Cathodes heated directly by an electric current
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/04—Manufacture of electrodes or electrode systems of thermionic cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3175—Lithography

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Solid Thermionic Cathode (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
KR1020000034430A 1999-06-22 2000-06-22 일함수 균일성을 가진 결합 제품 및 그 제조 방법 Ceased KR20010049594A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US9/337741 1999-06-22
US09/337,741 US6448569B1 (en) 1999-06-22 1999-06-22 Bonded article having improved crystalline structure and work function uniformity and method for making the same

Publications (1)

Publication Number Publication Date
KR20010049594A true KR20010049594A (ko) 2001-06-15

Family

ID=23321794

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020000034430A Ceased KR20010049594A (ko) 1999-06-22 2000-06-22 일함수 균일성을 가진 결합 제품 및 그 제조 방법

Country Status (6)

Country Link
US (1) US6448569B1 (https=)
EP (1) EP1063670B1 (https=)
JP (2) JP2001052594A (https=)
KR (1) KR20010049594A (https=)
DE (1) DE60043373D1 (https=)
TW (1) TW432396B (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9138913B2 (en) * 2005-09-08 2015-09-22 Imra America, Inc. Transparent material processing with an ultrashort pulse laser
WO2011121565A1 (en) * 2010-04-02 2011-10-06 Koninklijke Philips Electronics N.V. Ceramic metal halide lamp with feedthrough comprising an iridium wire
SG11201703125WA (en) * 2014-10-23 2017-05-30 Agency Science Tech & Res Method of bonding a first substrate and a second substrate
GB2583359A (en) * 2019-04-25 2020-10-28 Aquasium Tech Limited Electron beam emitting assembly

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB395439A (en) * 1932-02-17 1933-07-20 Mullard Radio Valve Co Ltd Improvements relating to thermionic valves
US2410822A (en) * 1942-01-03 1946-11-12 Sperry Gyroscope Co Inc High frequency electron discharge apparatus
US2892740A (en) * 1957-01-08 1959-06-30 Univ Notre Dame Du Lac Thermionic emitter and method of making same
US3284657A (en) * 1963-06-03 1966-11-08 Varian Associates Grain-oriented thermionic emitter for electron discharge devices
NL7003279A (https=) * 1970-03-07 1971-09-09
US4055780A (en) * 1975-04-10 1977-10-25 National Institute For Researches In Inorganic Materials Thermionic emission cathode having a tip of a single crystal of lanthanum hexaboride
JPS5679828A (en) * 1979-12-05 1981-06-30 Toshiba Corp Electron gun
CH672860A5 (https=) * 1986-09-29 1989-12-29 Balzers Hochvakuum
US5042058A (en) 1989-03-22 1991-08-20 University Of California Ultrashort time-resolved x-ray source
JP3397570B2 (ja) * 1996-04-02 2003-04-14 電気化学工業株式会社 熱電界放射陰極
WO1997044803A1 (fr) * 1996-05-21 1997-11-27 Kabushiki Kaisha Toshiba Structure de cathode, structure de canon a electron, grille pour canon a electron, tube electronique, element chauffant et procede de fabrication de la structure de cathode
JPH1131469A (ja) * 1997-07-08 1999-02-02 Nikon Corp 電子銃

Also Published As

Publication number Publication date
US6448569B1 (en) 2002-09-10
JP2001052594A (ja) 2001-02-23
JP2007250554A (ja) 2007-09-27
TW432396B (en) 2001-05-01
JP5392995B2 (ja) 2014-01-22
EP1063670A2 (en) 2000-12-27
DE60043373D1 (de) 2010-01-07
EP1063670A3 (en) 2006-05-10
EP1063670B1 (en) 2009-11-25

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