JP2007250554A - 接合品 - Google Patents
接合品 Download PDFInfo
- Publication number
- JP2007250554A JP2007250554A JP2007130041A JP2007130041A JP2007250554A JP 2007250554 A JP2007250554 A JP 2007250554A JP 2007130041 A JP2007130041 A JP 2007130041A JP 2007130041 A JP2007130041 A JP 2007130041A JP 2007250554 A JP2007250554 A JP 2007250554A
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- single crystal
- bonded
- scalpel
- tantalum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/13—Solid thermionic cathodes
- H01J1/15—Cathodes heated directly by an electric current
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/04—Manufacture of electrodes or electrode systems of thermionic cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/317—Processing objects on a microscale
- H01J2237/3175—Lithography
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electron Beam Exposure (AREA)
- Electron Sources, Ion Sources (AREA)
- Solid Thermionic Cathode (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
【解決手段】単結晶カソードと、単結晶カソードに接合される部材を有する接合品において、単結晶カソードの単結晶構造は、接合後も保持されている。
【選択図】なし
Description
タンタル製の単結晶カソードの円盤の寸法は、1mmの直径で、0.2mmの厚さで、その重量は2.6×10-3gmsである。タンタルAの単位熱量は、0.15J/gmである。レーザ溶接スポットは、200μmの直径で、50μmの深さの場合には、溶けるタンタルの量は、2.7×10-5gであり、そして必要な室温から3000℃の融点までへの必要な熱温度上昇を仮定すると、吸収された熱量は、12mJである。この熱が、タンタル製カソード全体に分散した場合には、タンタル製カソードディスクの全体はわずか62℃だけ温まるだけである。これに対し、従来のスポット溶接の電流パルスは、タンタル製カソードのディスク全体の温度を、約500℃上げるが、その理由は、信頼できる溶接を出すための最低のパルスエネルギーは、約4Jだからである。図7は、レーザ溶接したタンタル製の単結晶カソード放射画像を示す。図7に示すように、粒子も境界も検出されていない。レーザ溶接は、カソードの感受性結晶構造に対し、悪影響を及ぼすことはない。
10 電子
11 薄膜
12 高密度散乱素子
14 ビーム
15 電磁レンズ
16 バック焦点面フィルタ
16' 開口
17 ワークピース
18 散乱素子
20 露光ツール
22 ソース
24 マスク段
26 画像光学装置
28 ウェハ段
30 計測プレート
42 カソード
43 アノード
44 グリッド電極
45 焦点プレート
46 フィラメント
49 接合品
50 焦点
110 カソード
200 単結晶カソードを用意する
210 フィラメントを用意する
220 局部接合技術を用いてフィラメントとカソードを接合する。
Claims (9)
- 単結晶構造を有する単結晶カソードと、
前記単結晶構造を有する前記単結晶カソードに接合される部材とを含む
ことを特徴とする接合品。 - 前記単結晶カソードは、構造的および放射的に非均一性が少ない
ことを特徴とする請求項1記載の接合品。 - 前記単結晶カソードは、タンタル製である
ことを特徴とする請求項1記載の接合品。 - 前記単結晶カソードの放射面の仕事関数は低い
ことを特徴とする請求項3記載の接合品。 - 前記放射面は、(111)面である
ことを特徴とする請求項4記載の接合品。 - 前記放射面は、(100)面である
ことを特徴とする請求項4記載の接合品。 - 前記単結晶カソードは、仕事関数の低い耐火性の結晶材料、あるいはその合金である
ことを特徴とする請求項1記載の接合品。 - 前記単結晶カソードは、投影電子リソグラフシステムの一部である
ことを特徴とする請求項1記載の接合品。 - 前記単結晶カソードは、±1°以下の方向性変動を有する
ことを特徴とする請求項1記載の接合品。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/337741 | 1999-06-22 | ||
US09/337,741 US6448569B1 (en) | 1999-06-22 | 1999-06-22 | Bonded article having improved crystalline structure and work function uniformity and method for making the same |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000186628A Division JP2001052594A (ja) | 1999-06-22 | 2000-06-21 | 接合品 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2007250554A true JP2007250554A (ja) | 2007-09-27 |
JP2007250554A5 JP2007250554A5 (ja) | 2009-02-12 |
JP5392995B2 JP5392995B2 (ja) | 2014-01-22 |
Family
ID=23321794
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000186628A Pending JP2001052594A (ja) | 1999-06-22 | 2000-06-21 | 接合品 |
JP2007130041A Expired - Fee Related JP5392995B2 (ja) | 1999-06-22 | 2007-05-16 | 接合品 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000186628A Pending JP2001052594A (ja) | 1999-06-22 | 2000-06-21 | 接合品 |
Country Status (6)
Country | Link |
---|---|
US (1) | US6448569B1 (ja) |
EP (1) | EP1063670B1 (ja) |
JP (2) | JP2001052594A (ja) |
KR (1) | KR20010049594A (ja) |
DE (1) | DE60043373D1 (ja) |
TW (1) | TW432396B (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9138913B2 (en) * | 2005-09-08 | 2015-09-22 | Imra America, Inc. | Transparent material processing with an ultrashort pulse laser |
WO2011121565A1 (en) * | 2010-04-02 | 2011-10-06 | Koninklijke Philips Electronics N.V. | Ceramic metal halide lamp with feedthrough comprising an iridium wire |
WO2016064350A1 (en) * | 2014-10-23 | 2016-04-28 | Agency For Science, Technology And Research | Method of bonding a first substrate and a second substrate |
GB2583359A (en) * | 2019-04-25 | 2020-10-28 | Aquasium Tech Limited | Electron beam emitting assembly |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB395439A (en) * | 1932-02-17 | 1933-07-20 | Mullard Radio Valve Co Ltd | Improvements relating to thermionic valves |
US2410822A (en) * | 1942-01-03 | 1946-11-12 | Sperry Gyroscope Co Inc | High frequency electron discharge apparatus |
US2892740A (en) * | 1957-01-08 | 1959-06-30 | Univ Notre Dame Du Lac | Thermionic emitter and method of making same |
US3284657A (en) * | 1963-06-03 | 1966-11-08 | Varian Associates | Grain-oriented thermionic emitter for electron discharge devices |
NL7003279A (ja) * | 1970-03-07 | 1971-09-09 | ||
US4055780A (en) * | 1975-04-10 | 1977-10-25 | National Institute For Researches In Inorganic Materials | Thermionic emission cathode having a tip of a single crystal of lanthanum hexaboride |
JPS5679828A (en) * | 1979-12-05 | 1981-06-30 | Toshiba Corp | Electron gun |
CH672860A5 (ja) * | 1986-09-29 | 1989-12-29 | Balzers Hochvakuum | |
US5042058A (en) | 1989-03-22 | 1991-08-20 | University Of California | Ultrashort time-resolved x-ray source |
JP3397570B2 (ja) * | 1996-04-02 | 2003-04-14 | 電気化学工業株式会社 | 熱電界放射陰極 |
KR100281722B1 (ko) * | 1996-05-21 | 2001-03-02 | 니시무로 타이죠 | 전자관 |
JPH1131469A (ja) * | 1997-07-08 | 1999-02-02 | Nikon Corp | 電子銃 |
-
1999
- 1999-06-22 US US09/337,741 patent/US6448569B1/en not_active Expired - Lifetime
-
2000
- 2000-06-13 DE DE60043373T patent/DE60043373D1/de not_active Expired - Lifetime
- 2000-06-13 EP EP00305016A patent/EP1063670B1/en not_active Expired - Lifetime
- 2000-06-21 JP JP2000186628A patent/JP2001052594A/ja active Pending
- 2000-06-22 KR KR1020000034430A patent/KR20010049594A/ko active Search and Examination
- 2000-06-22 TW TW089112268A patent/TW432396B/zh not_active IP Right Cessation
-
2007
- 2007-05-16 JP JP2007130041A patent/JP5392995B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR20010049594A (ko) | 2001-06-15 |
JP5392995B2 (ja) | 2014-01-22 |
EP1063670A3 (en) | 2006-05-10 |
EP1063670A2 (en) | 2000-12-27 |
JP2001052594A (ja) | 2001-02-23 |
US6448569B1 (en) | 2002-09-10 |
TW432396B (en) | 2001-05-01 |
DE60043373D1 (de) | 2010-01-07 |
EP1063670B1 (en) | 2009-11-25 |
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