TW431893B - Absorbent article for absorption of bodily fluids deposited by a wearer and for helping maintain said wearer's skin pH at an acidic level - Google Patents

Absorbent article for absorption of bodily fluids deposited by a wearer and for helping maintain said wearer's skin pH at an acidic level Download PDF

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TW431893B
TW431893B TW088103865A TW88103865A TW431893B TW 431893 B TW431893 B TW 431893B TW 088103865 A TW088103865 A TW 088103865A TW 88103865 A TW88103865 A TW 88103865A TW 431893 B TW431893 B TW 431893B
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deposition
ring
patent application
ring body
item
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TW088103865A
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Jocelyn Elaine Mcosker
Donald Carroll Roe
James Joseph Franxman
Thomas James Klofta
Ronald Wayne Berg
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Procter & Gamble
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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L15/00—Chemical aspects of, or use of materials for, bandages, dressings or absorbent pads
    • A61L15/16—Bandages, dressings or absorbent pads for physiological fluids such as urine or blood, e.g. sanitary towels, tampons
    • A61L15/42—Use of materials characterised by their function or physical properties
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L15/00—Chemical aspects of, or use of materials for, bandages, dressings or absorbent pads
    • A61L15/16—Bandages, dressings or absorbent pads for physiological fluids such as urine or blood, e.g. sanitary towels, tampons
    • A61L15/42—Use of materials characterised by their function or physical properties
    • A61L15/46—Deodorants or malodour counteractants, e.g. to inhibit the formation of ammonia or bacteria
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61P—SPECIFIC THERAPEUTIC ACTIVITY OF CHEMICAL COMPOUNDS OR MEDICINAL PREPARATIONS
    • A61P17/00—Drugs for dermatological disorders
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2300/00—Biologically active materials used in bandages, wound dressings, absorbent pads or medical devices
    • A61L2300/20—Biologically active materials used in bandages, wound dressings, absorbent pads or medical devices containing or releasing organic materials
    • A61L2300/21—Acids
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2300/00—Biologically active materials used in bandages, wound dressings, absorbent pads or medical devices
    • A61L2300/40—Biologically active materials used in bandages, wound dressings, absorbent pads or medical devices characterised by a specific therapeutic activity or mode of action
    • A61L2300/412—Tissue-regenerating or healing or proliferative agents

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Veterinary Medicine (AREA)
  • Chemical & Material Sciences (AREA)
  • Public Health (AREA)
  • General Health & Medical Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • Epidemiology (AREA)
  • Hematology (AREA)
  • Materials Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Dermatology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Pharmacology & Pharmacy (AREA)
  • Medicinal Chemistry (AREA)
  • Orthopedics, Nursing, And Contraception (AREA)
  • Absorbent Articles And Supports Therefor (AREA)
  • Medicinal Preparation (AREA)
  • Cosmetics (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Physical Vapour Deposition (AREA)

Description

M431893 五、新型說明： 【新型所屬之技術 [0001] 本新型為有關〆種半導體設備零件，尤指一種沉積環。 【先前技術】 [0002] 在半導體產業蓬勃發展的現今，薄膜沉積技術是半導體 產業大量使用的一種製程技術。薄臈沉積技術主要可分 為利用物理現象的物理氣相沉積及利用化學反應的化學 氣相沉積兩種，且該薄膜沉積技術主要於一薄膜沉積設 備中進行一沉積過程。 [0003] 該薄臈沉積設備大部分會使用一靜電式的承載座來承載 欲進行薄膜沉積的晶圓，且在靜電式承載座的一環壁周 圍’會設卜沉積環’該沉積環的作用在於防止進行沉 積的複數粒子附著於該承載座的表面，進而節省清理的 時間與成本，提高薄膜沉積的產能。 [0004] [0005] 弟…湖號所述，询露一種防止黏結 沉積環，其紐在於該沉積環靠近-靜電式承載座的内 緣部分，具有-與該靜電式承載座連接的連接面以及一 =電=載座相隔一間距的切除部，藉由該連接面 :積數沉積粒子於進行沉積作業時，黏結該 =電式承載座，進而對該靜電式承載座造成 熱脹冷縮或是外界應力的作:二:使用棱，因為 各易產生變形或是斷 巾有使用週期縮短的問題，故有改善的必要
單編號 AG1(H ^ 3 I / # 19 I 1012007558-0 M431893 ο 【新型内容】 [0006] 本新型的主要目的，在於改善習知沉積環，在熱脹冷縮 或是外界應力的作用下，容易產生變形或是斷裂的情況 ，而有使用週期縮短的問題。 [0007] 為達上述目的，本新型提供一種沉積環，應用於一薄膜 沉積設備，該薄膜沉積設備具有一承載一晶圓的承載座 ，該沉積環配置於該承載座的一環壁周圍，該沉積環包
含有一内環體以及一保護件，該内環體與該環壁相鄰， 該保護件凸設於該内環體，並包含一環面、一阻擋面以 及一尖緣，該環面與該環壁相對，該阻擋面與該環面相 夾於一銳角，而該尖緣形成於該環面與該阻擋面之間。 [0008] 如此一來，本新型藉由該保護件的設置，不僅由該尖緣 大幅減少複數沉積粒子落於該保護件後，間接附著於該 晶圓背面的機會，且該阻擋面與該環壁相夾該銳角，形 成一由上而下漸寬的結構，而具有較高的應力抵抗能力 ，改善容易斷裂的問題。 【實施方式】 [0009] 有關本新型的詳細說明及技術内容，現就配合圖式說明 如下： 請搭配參閱『圖1Α』、『圖1Β』及『圖2』所示，為本新 型的第一實施例，本新型提供一種沉積環10，應用於一 薄膜沉積設備，該薄膜沉積設備具有一承載座20，該承 載座20包含一承載部21及一與該承載部21連接的延伸部 22，該承載部21高於該延伸部22而具有一高於該延伸部 101202451^ 單編號删1 第 4 頁 / 共 19 頁 1012007558-0 M431893 22的％壁211 ’ s玄承載部21承載一晶圓3〇，該延伸部22 供裝設該沉積環10。該沉積環環繞於該環壁211之周圍 ，並包含有一内環體11、一外環體13以及一保護件丨2， 該内環體11與該環壁211相鄰，該外環體13則與該内環體 11連接，而位於該内環體11遠離該環壁211的一側，該保 護件12凸設於該内環體11上，並包含一環面丨21、一阻擋 面122以及一尖緣123，該環面121與該環壁211相對，該 阻標面122與該環面121相夾於一銳角a，而該尖緣123形 成於該環面121與該阻擋面122之間，在此實施例中，該 環面121形成一與該環壁211平行的垂直面，該阻擋面 12 2則為一傾斜面’但不以此為限，還可為一曲面，該尖 緣123具有一低於該晶圓30的高度，使該晶圓3〇覆蓋於該 尖緣123之上。 進一步的，該内環體11還具有一與該保護件12相鄰的上 表面111，該上表面111與該阻擋面122相連接，而與該 阻擋面122相夾一鈍角b。該外環體13還包含一凸設的擋 止塊131及一凹設的隔離溝槽133，該擋止塊131與該内 環體11相連接，而具有一與該上表面111連接的擋止面 1 32，在此，該標止面132垂直於該上表面111，具有一 直立的高度’該隔離溝槽133相鄰於該擋止塊131，而位 於該擋止塊131遠離該内環體11的一側。另外，在此實施 例中，如『圖2』所示，該沉積環1〇與一覆蓋環4〇搭配設 置’該外環體13遠離該内環體11的一側還具有一接合處 134，該覆蓋環40接合於該接合處134，且由該擋止塊 131與該覆蓋環4 0之間形成一路徑間隙5 〇，該路徑間隙 50連通至該隔離溝槽133。 1012007558-0 1012〇245产"單編號A0101 第5頁/共I9頁 M431893 據此’當該薄膜沉積設備進行一沉積作業時，複數沉積 粒子落於該保護件12上，會由該阻擋面122提供該沉積粒 子一遠離該晶圓30的反射路徑，減少該沉積粒子附著於 s亥晶圓3 0背面的機率，而當該沉積粒子往該外環體13移 動時，該擋止面132會擋下大部分的該沉積粒子，而少部 分的該沉積粒子會進入該路徑間隙5〇，該沉積粒子會於 該路徑間隙50中產生多次的碰撞，因此造成動能的損耗 ，最後會落於該隔離溝槽133中，使該沉積粒子無法到達 該沉積環10與該覆蓋環40的該接合處134或是無法落入該 接合處134的縫隙令，如此，由該路徑間隙5〇消耗該沉積 粒子的動能，而該隔離溝槽133提供該沉積粒子一容置空 間’使得於沉積的過程中’該沉積粒子於該沉積環1 〇以 及該覆蓋環40表面所形成一沉積物60(如圖4B)，於該路 徑間隙50處中斷，同時避免沉積粒子於該接合處134形成 連續結構，進而阻止導通效應的發生。 請搭配參閱『圖3A』及『圖3B』所示，為本新型的第二 實施例’在此實施例中，與第一實施例相較之下，其特 徵在於該内環體11還具有一凹陷部112，該凹陷部112連 接於該阻擋面122與該上表面111之間，並包含一内凹面 1012007558- 113 ’在此實施例中，該内凹面113為呈一弧面，但不以 此為限’重點在於該内凹面113於該凹陷部112形成一底 側114，該底側114與該上表面111相距一深度d，如此， 使該底側114與該晶圓3 0背面之間，具有一較大的高度差 ’當該沉積粒子落於該保護件12附近時，有一部分的該 沉積粒子會填入該凹陷部112之中，因此延長該沉積粒子 逐漸堆積而接觸該晶圓3 0背面的時間，進一步延長該沉 10120245!^單编號A0101 第6頁/共19頁 M431893 積環ι〇的使用周期，再者，由此可知，該深度(1關聯於該 沉積粒子堆積而接觸該晶圓30背面的時間，故可由該深 度d來設計該沉積環1〇的使用周期長短。 請參閱『圖4A』及『圖4B』所示，『圖4A』為習知沉積 環的使用示意圖，r圖4B』為本新型第二實施例的使用 示意圖，在『圖4A』及『圖4B』之中，該沉積環（1、 10)分別為經過相同次數的沉積後，再各放入另一待沉積 的晶圓（5、30) »由『圖4A』可知’習知沉積環丨的保護 件2呈現一突起的平台狀，在沉積後於該保護件2上形成 一沉積物3，要說明的是，由於該保護件2呈現平台狀， 該沉積粒子於沉積的過程中直接堆積於該保護件2上形成 該沉積物3，使該沉積物3的高度很容易超出該承載座4， 而與承載座4上的晶圓5發生接觸或是黏著的情形，然而 ，在『圖4B』之中，第二實施例的該沉積環1〇，由於該 阻擋面122、該尖緣123以及該凹陷部112的設置，在沉 積的過程中，藉由該尖緣123減少該沉積粒子的附著，該 阻擋面122反射該沉積粒子遠離該晶圓3〇 ,以及該凹陷部 112增加該沉積粒子的容置空間，沉積粒子雖然於該保護 件12上形成沉積物60，但該沉積物6〇的高度則不容易超 出該承載座20，使該承載座2〇上的該晶圓3〇不會與該沉 積物60產生接觸，而延長該沉積環1〇的使用壽命。 綜上所述，由於本新型藉由該保護件的設置，使落於該 保護件的該沉積粒子，大部分會由該阻擋面提供的該反 射路徑而遠離該晶圓，進一步減少該沉積粒子附著於該 晶圓背面的機率，再者，該阻擋面與該環壁相夾該銳角 ，形成一由上而下漸寬的結構，而具有較高的應力抵抗 1012007558-0 1012〇245产單編號A0101 第7頁/共19頁 M431893 能力，改善容易斷裂的問題，另外，本新型還可藉由設 計該凹陷部的該深度，來調整該沉積環的使用周期長短 ，因此本新型極具進步性及符合申請新型專利的要件， 爰依法提出申請，祈鈞局早曰賜准專利，實感德便。 以上已將本新型做一詳細說明，惟以上所述者，僅爲本 新型的一較佳實施例而已，當不能限定本新型實施的範 圍。即凡依本新型申請範圍所作的均等變化與修飾等， 皆應仍屬本新型的專利涵蓋範圍内。 【圖式簡單說明】 [0010] 圖1A，為本新型第一實施例的上視示意圖。 [0011] 圖1B，為本新型第一實施例的剖視示意圖。 [0012] 圖2，為本新型第一實施例於薄膜沉積設備中的配置示意 圖。 [0013] 圖3A，為本新型第二實施例的剖視示意圖。 [0014] 圖3B，為圖3A的局部放大示意圖。 [0015] 圖4A，為習知沉積環的使用示意圖。 [0016] 圖4B，為本新型第二實施例的使用示意圖。 【主要元件符號說明】 [0017] 習知 [0018] 1 :沉積環 [0019] 2 :保護件 [0020] 3 :沉積物 10120245#單编號 A〇101 第8頁/共19頁 1012007558-0 M431893 [0021] 4 :承載座 [0022] 5 .晶圓 [0023] 6 :覆蓋環 [0024] 本新型 [0025] 10 :沉積環 [0026] 11 :内環體 [0027] 111 :上表面 ^ [0028] 112 :凹陷部 [0029] 11 3 :内凹面 [0030] 114 :底侧 [0031] 12 :保護件 [0032] 121 :環面 [0033] 122 :阻擋面 • [0034] 123 :尖緣 [0035] 13 :外環體 [0036] 131 :擋止塊 [0037] 132 :擋止面 [0038] 133 :隔離溝槽 [0039] 134 :接合處 [0040] 20 :承載座 101202451^單編號删1 第 9 頁 / 共 19 頁 1012007558-0 M431893 [0041] 21 :承載部 [0042] 211 :環壁 [0043] 22 :延伸部 [0044] 3 0 :晶圓 [0045] 40 :覆蓋環 [0046] 50:路徑間隙 [0047] 60 :沉積物
[0048] a ··銳角 [0049] b :鈍角 [0050] d :深度
10120245^單编號 AQ1Q1 ^ 10 I / ^ 19 I 1012007558-0

Claims (1)

  1. M431893 六、申請專利範圍： 一種沉積環，應用於一薄膜沉積設備，該薄膜沉積設備具 有一承载一晶圓的承載座，該沉積環配置於該承載座的一 環壁周圍，該沉積環包含有： 一與該環壁相鄰的内環體；以及 一凸設於該内環體的保護件，該保護件包含一與該環壁相 對的環面、一與該環面相夾於一銳角的阻擋面以及一形成 於該環面與該阻擋面之間的尖緣β .如申請專利範圍第1項所述的沉積環，其中該内環體具有 一與該保護件相鄰的上表面。 .如申請專利範圍第2項所述的沉積環，其中該阻撞面包含 —與該上表面相接的曲面》 .如申請專利範圍第2項所述的沉積環，其中該阻播面包含 一與該上表面之間相炎一純角的傾斜面。 .如申請專利範圍第2項所述的沉積環，其中該内環體具有 一凹陷部，該凹陷部連接於該阻擋面及該上表面之間' •如申請專利範圍第5項所述的沉積環，其中該凹陷部包含 —兩側分別與該阻擋面及該上表面相接的内凹面。 •如申請專利範圍第5項所述的沉積環，其中該凹陷部包含 —與該上表面相距一深度的底側。 .如申請專利範圍第2項所述的沉積環，其中更包含一與該 内環體相連的外環體，且該外環體位於該内環體遠離該環 壁的一側。 ’如申請專利範圍第8項所述的沉積環，其中該外環體凸 有一擋止塊，該擋止塊與該内環體相連接，並具有一襄 1ηι ^ 上表面連接的擋止面。 _單填號_ 第η頁/共19頁 1012007558-0 M431893 10 .如申請專利範圍第9項所述的沉積環，其中該外環體凹設 有一與該擋止塊相鄰的隔離溝槽，該隔離溝槽位於該擋止 塊遠離該内環體的一側。 11 .如申請專利範圍第1項所述的沉積環，其中該晶圓覆蓋該 尖緣。 12 .如申請專利範圍第1項所述的沉積環，其中該尖緣的高度 低於該晶圓的高度。 101202451^單编號 A〇101 第12頁/共19頁 1012007558-0
TW088103865A 1998-03-12 1999-06-04 Absorbent article for absorption of bodily fluids deposited by a wearer and for helping maintain said wearer's skin pH at an acidic level TW431893B (en)

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ZA992005B (en) 1999-09-13
DE69923766D1 (de) 2005-03-24
ES2234246T3 (es) 2005-06-16
CA2322461A1 (en) 1999-09-16
JP2002505918A (ja) 2002-02-26
DE69923766T2 (de) 2006-03-16
AR012790A1 (es) 2000-11-08
DE69923766T3 (de) 2010-05-20
ATE289206T1 (de) 2005-03-15
KR20010041821A (ko) 2001-05-25
WO1999045976A1 (en) 1999-09-16
EP1061964A1 (en) 2000-12-27
CA2322461C (en) 2007-02-06
US20020147433A1 (en) 2002-10-10
EP1061964B2 (en) 2009-10-28
EP1061964B1 (en) 2005-02-16
PE20000522A1 (es) 2000-07-23
JP4439728B2 (ja) 2010-03-24
KR100375532B1 (ko) 2003-03-28
AU3082099A (en) 1999-09-27

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