TW420724B - Improved diamond-like nanocomposite compositions - Google Patents

Improved diamond-like nanocomposite compositions Download PDF

Info

Publication number
TW420724B
TW420724B TW086105584A TW86105584A TW420724B TW 420724 B TW420724 B TW 420724B TW 086105584 A TW086105584 A TW 086105584A TW 86105584 A TW86105584 A TW 86105584A TW 420724 B TW420724 B TW 420724B
Authority
TW
Taiwan
Prior art keywords
item
patent application
composition
scope
atomic percent
Prior art date
Application number
TW086105584A
Other languages
English (en)
Chinese (zh)
Inventor
Dominique Neerinck
Arvind Goel
Original Assignee
Bekaert Sa Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bekaert Sa Nv filed Critical Bekaert Sa Nv
Application granted granted Critical
Publication of TW420724B publication Critical patent/TW420724B/zh

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/503—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using DC or AC discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2206/00—Materials with ceramics, cermets, hard carbon or similar non-metallic hard materials as main constituents
    • F16C2206/02—Carbon based material
    • F16C2206/04—Diamond like carbon [DLC]
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2240/00—Specified values or numerical ranges of parameters; Relations between them
    • F16C2240/40—Linear dimensions, e.g. length, radius, thickness, gap
    • F16C2240/60—Thickness, e.g. thickness of coatings
    • F16C2240/64—Thickness, e.g. thickness of coatings in the nanometer range
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)
TW086105584A 1996-04-22 1997-04-26 Improved diamond-like nanocomposite compositions TW420724B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP96201070 1996-04-22

Publications (1)

Publication Number Publication Date
TW420724B true TW420724B (en) 2001-02-01

Family

ID=8223897

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086105584A TW420724B (en) 1996-04-22 1997-04-26 Improved diamond-like nanocomposite compositions

Country Status (7)

Country Link
US (1) US6200675B1 (show.php)
EP (1) EP0896640B1 (show.php)
JP (1) JP4439594B2 (show.php)
AU (1) AU2697797A (show.php)
DE (1) DE69710324T2 (show.php)
TW (1) TW420724B (show.php)
WO (1) WO1997040207A1 (show.php)

Families Citing this family (57)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69803365T2 (de) 1997-02-04 2002-10-31 N.V. Bekaert S.A., Zwevegem Beschichtung enthaltend filme aus diamantartigem kohlenstoff und diamantartigem nanokomposit
EP0885983A1 (en) 1997-06-19 1998-12-23 N.V. Bekaert S.A. Method for coating a substrate with a diamond like nanocomposite composition
ES2212558T3 (es) * 1998-06-03 2004-07-16 Blue Medical Devices B.V. Dilatadores con un recubrimiento semejante a diamante.
EP1123991A3 (en) 2000-02-08 2002-11-13 Asm Japan K.K. Low dielectric constant materials and processes
US6749813B1 (en) * 2000-03-05 2004-06-15 3M Innovative Properties Company Fluid handling devices with diamond-like films
US6696157B1 (en) * 2000-03-05 2004-02-24 3M Innovative Properties Company Diamond-like glass thin films
US6795636B1 (en) 2000-03-05 2004-09-21 3M Innovative Properties Company Radiation-transmissive films on glass articles
US6669996B2 (en) * 2000-07-06 2003-12-30 University Of Louisville Method of synthesizing metal doped diamond-like carbon films
EP1305063B1 (en) * 2000-07-28 2010-02-17 Blue Medical Devices B.V. Intravascular stent with expandable coating
US6905981B1 (en) 2000-11-24 2005-06-14 Asm Japan K.K. Low-k dielectric materials and processes
US7106939B2 (en) 2001-09-19 2006-09-12 3M Innovative Properties Company Optical and optoelectronic articles
US6895855B2 (en) 2001-10-01 2005-05-24 The Timken Company Hydraulic motors and pumps with engineered surfaces
WO2004090361A2 (en) * 2003-04-03 2004-10-21 The Timken Company Corrosion tolerant rolling element bearing
EP1666573B1 (en) * 2003-08-06 2019-05-15 Nissan Motor Company Limited Low-friction sliding mechanism and method of friction reduction
AU2003298338A1 (en) * 2003-12-02 2005-06-24 N.V. Bekaert S.A. A layered structure
US7824498B2 (en) * 2004-02-24 2010-11-02 Applied Materials, Inc. Coating for reducing contamination of substrates during processing
JP2005314454A (ja) * 2004-04-27 2005-11-10 Toyota Central Res & Dev Lab Inc 低摩擦摺動部材
US7296965B2 (en) 2004-08-23 2007-11-20 United Technologies Corporation Cryogenic bearings
JP2006138404A (ja) * 2004-11-12 2006-06-01 Kobe Steel Ltd 水系環境下での耐摩耗性に優れた摺動部材
EP1726682A1 (en) * 2005-05-26 2006-11-29 NV Bekaert SA Coating comprising layered structures of diamond like nanocomposite layers and diamond like carbon layers.
WO2006134066A1 (en) * 2005-06-13 2006-12-21 Nv Bekaert Sa Coated spinning ring
US20070020451A1 (en) * 2005-07-20 2007-01-25 3M Innovative Properties Company Moisture barrier coatings
CA2885593C (en) 2006-05-17 2018-03-06 G & H Technologies Llc Wear resistant coating
US20080006819A1 (en) * 2006-06-19 2008-01-10 3M Innovative Properties Company Moisture barrier coatings for organic light emitting diode devices
US8047653B2 (en) 2006-11-10 2011-11-01 Sumitomo Electric Industries, Ltd. Si-O containing hydrogenated carbon film, optical device including the same, and method for manufacturing the Si-O containing hydrogenated carbon film and the optical device
MY159601A (en) * 2007-08-23 2017-01-13 Saint Gobain Abrasifs Sa Optimized cmp conditioner design for next generation oxide/metal cmp
JP5090389B2 (ja) * 2009-02-26 2012-12-05 オーエスジー株式会社 Ｄｌｃコーティングルアー
EP2411181A1 (en) 2009-03-24 2012-02-01 Saint-Gobain Abrasives, Inc. Abrasive tool for use as a chemical mechanical planarization pad conditioner
US7985188B2 (en) 2009-05-13 2011-07-26 Cv Holdings Llc Vessel, coating, inspection and processing apparatus
MX345403B (es) * 2009-05-13 2017-01-30 Sio2 Medical Products Inc Revestimiento por pecvd utilizando un precursor organosilícico.
CN102459693B (zh) * 2009-05-13 2015-11-25 Sio2医药产品公司 使用有机硅前体的pecvd涂层
WO2010132585A2 (en) * 2009-05-13 2010-11-18 Cv Holdings, Llc Vessel processing
WO2010141464A2 (en) * 2009-06-02 2010-12-09 Saint-Gobain Abrasives, Inc. Corrosion-resistant cmp conditioning tools and methods for making and using same
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
SG178605A1 (en) 2009-09-01 2012-04-27 Saint Gobain Abrasives Inc Chemical mechanical polishing conditioner
JP5628893B2 (ja) * 2010-03-03 2014-11-19 太陽化学工業株式会社 非晶質炭素膜からなる層への固定化方法及び積層体
US11624115B2 (en) 2010-05-12 2023-04-11 Sio2 Medical Products, Inc. Syringe with PECVD lubrication
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
US11116695B2 (en) 2011-11-11 2021-09-14 Sio2 Medical Products, Inc. Blood sample collection tube
AU2012318242A1 (en) 2011-11-11 2013-05-30 Sio2 Medical Products, Inc. Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus
EP2846755A1 (en) 2012-05-09 2015-03-18 SiO2 Medical Products, Inc. Saccharide protective coating for pharmaceutical package
US20150297800A1 (en) 2012-07-03 2015-10-22 Sio2 Medical Products, Inc. SiOx BARRIER FOR PHARMACEUTICAL PACKAGE AND COATING PROCESS
KR101439131B1 (ko) * 2012-09-21 2014-09-11 현대자동차주식회사 흡배기 밸브용 코팅재 및 이의 제조방법
CA2890066C (en) 2012-11-01 2021-11-09 Sio2 Medical Products, Inc. Coating inspection method
EP2920567B1 (en) 2012-11-16 2020-08-19 SiO2 Medical Products, Inc. Method and apparatus for detecting rapid barrier coating integrity characteristics
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
AU2013352436B2 (en) 2012-11-30 2018-10-25 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition on medical syringes, cartridges, and the like
WO2014134577A1 (en) 2013-03-01 2014-09-04 Sio2 Medical Products, Inc. Plasma or cvd pre-treatment for lubricated pharmaceutical package, coating process and apparatus
WO2014164928A1 (en) 2013-03-11 2014-10-09 Sio2 Medical Products, Inc. Coated packaging
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
WO2014144926A1 (en) 2013-03-15 2014-09-18 Sio2 Medical Products, Inc. Coating method
WO2014148479A1 (ja) * 2013-03-19 2014-09-25 太陽化学工業株式会社 防汚用の非晶質炭素膜を備える構造体及び防汚用の非晶質炭素膜の形成方法
JP6043233B2 (ja) * 2013-04-15 2016-12-14 株式会社神戸製鋼所 非晶質炭素系皮膜およびその製造方法
US11066745B2 (en) 2014-03-28 2021-07-20 Sio2 Medical Products, Inc. Antistatic coatings for plastic vessels
CN108138316A (zh) 2015-08-18 2018-06-08 Sio2医药产品公司 具有低氧气传输速率的药物和其他包装
US11639543B2 (en) 2019-05-22 2023-05-02 Thin Film Service, Inc. Tetrahedral amorphous hydrogenated carbon and amorphous siloxane diamond-like nanocomposite

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5352493A (en) * 1991-05-03 1994-10-04 Veniamin Dorfman Method for forming diamond-like nanocomposite or doped-diamond-like nanocomposite films

Also Published As

Publication number Publication date
EP0896640A1 (en) 1999-02-17
WO1997040207A1 (en) 1997-10-30
JP2000508713A (ja) 2000-07-11
AU2697797A (en) 1997-11-12
DE69710324T2 (de) 2002-08-29
DE69710324D1 (de) 2002-03-21
US6200675B1 (en) 2001-03-13
EP0896640B1 (en) 2002-02-06
JP4439594B2 (ja) 2010-03-24

Similar Documents

Publication Publication Date Title
TW420724B (en) Improved diamond-like nanocomposite compositions
Zhang et al. Amorphous carbon films doped with silver and chromium to achieve ultra-low interfacial electrical resistance and long-term durability in the application of proton exchange membrane fuel cells
Xu et al. Corrosion behavior of a ZrCN coated Ti alloy with potential application as a bipolar plate for proton exchange membrane fuel cell
Blanchard et al. Densification and hydration of HMDSO plasma polymers
Vlček et al. Reactive magnetron sputtering of hard Si–B–C–N films with a high-temperature oxidation resistance
Xu et al. A nanocrystalline zirconium carbide coating as a functional corrosion-resistant barrier for polymer electrolyte membrane fuel cell application
US20060147728A1 (en) Multi-layered superhard nanocomposite coatings
JP2001261318A (ja) ダイヤモンドライクカーボン硬質多層膜および耐摩耗性、耐摺動性に優れた部材
Shi et al. Thermal stability, wettability and corrosion resistance of sputtered ceria films on 316 stainless steel
Xu et al. The nature and role of passive films in controlling the corrosion resistance of MoSi 2-based nanocomposite coatings
Zeman et al. Physical and mechanical properties of sputtered Ta–Si–N films with a high (⩾ 40 at%) content of Si
Lin et al. Fabrication of High Transparency Diamond‐Like Carbon Film Coating on D263T Glass at Room Temperature as an Antireflection Layer
De et al. Synthesis and characterization of electroless Ni-Co-P coating
Petkov et al. Influence of bias voltage and CH4/N2 gas ratio on the structure and mechanical properties of TiCN coatings deposited by cathodic arc deposition method
US20140319432A1 (en) Wear-Resistant Nanocrystalline Hard Noble Metal Coating
US9478244B2 (en) Method and material for protecting magnetic information storage media
Balázsi et al. Application of sputtered ceramic TiC/a: C thin films with different structures by changing the deposition parameters
CN117448827B (zh) 用于人工关节摩擦表面的低粗糙度氮化钛涂层及制备方法
Wang et al. A comparative study on the hardness, stress and surface free energy of HfN films grown by HIPIMS and direct-current magnetron sputtering
Moretti et al. Sputtering: An eco‐friendly technique to obtain polymer‐metal hybrids
Broitman et al. Structural and mechanical properties of diamond-like carbon films deposited by direct current magnetron sputtering
Tillmann et al. Investigation of the tribo-mechanical properties of sputtered aC: Si films using design of experiments
Bazzanella et al. High temperature efficient deuterium permeation and oxidation (Al, Ti) N barriers deposited on stainless steel
JPS638548A (ja) ガスセンサ及びその製造方法
Kojima et al. The structural nature of multilayers on Si (100) formed by ion-beam sputter deposition

Legal Events

Date Code Title Description
GD4A Issue of patent certificate for granted invention patent
MM4A Annulment or lapse of patent due to non-payment of fees