TW419528B - Ceramic flash TV evaporator - Google Patents

Ceramic flash TV evaporator Download PDF

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Publication number
TW419528B
TW419528B TW087113470A TW87113470A TW419528B TW 419528 B TW419528 B TW 419528B TW 087113470 A TW087113470 A TW 087113470A TW 87113470 A TW87113470 A TW 87113470A TW 419528 B TW419528 B TW 419528B
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TW
Taiwan
Prior art keywords
evaporator
groove
patent application
flash
aluminum
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Application number
TW087113470A
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English (en)
Inventor
Martin Seifert
Original Assignee
Kempten Elektroschmelz Gmbh
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Publication of TW419528B publication Critical patent/TW419528B/zh

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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/243Crucibles for source material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/26Vacuum evaporation by resistance or inductive heating of the source

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)

Description

經漓部中次摞枣局只工消贽合作社印掣 A7 B7 五、發明説明(1 ) 本發明相關於陶瓷型「急驟電視機蒸發器」,以下簡 稱為「急驟器」。 急&器係用以將鋁蒸發塗被在單色或彩色陰極射線管 上,使該等陰極射線管内產生一厚達數百毫微米之導電層 。該靥乃陰極射線管製成後促使電子加速之電極。 該等急驟器之尺寸通常為4x6x110公厘。急驟器1有 一凹權2,在急驟器橫剖面圖中凹槽呈矩形(請參閲圖1C)。 凹槽之尺寸通常為2x4x40或60公厘。在該蒸發塗被系統中 ,急驟器係用兩個螺釕5夾持在兩瑰鋼板6之間。經由飼 爝7該等銅板接至電源8。為改善接觸效果,每個鋼板&與 急驟器1之間有一石墨片9 (請參閱圖U)。各端側面夾持 之寬度約為15公厘。正常情況下待加熱之急驟器之長度為 80公厘。 陰極射線管實施蒸發塗被之步驟如下: 將一粒鋁(<100毫公克,通常為一鋁質圓柱體或小丸) 放入急驟器凹槽内。將待實施蒸發塗被之陰極射線管蓋置 於急驟器上方。隨後將陰極射線管蓋下方之空間抽真空, 使附有夾持系統之急驟器包含在此真空環境中(10-5毫巴) 直接通以電流,急驟器獲得加熱且其凹槽内之鋁得以 蒸發。此方法所需時間為40秒至2分鐘。在該短暫時程內 電流密度高達1〇3安培/平方公分。 此一重大電負荷及熱負荷係決定急驟器壽命亦即加熱 循環次數之主因。 通常經加熱500至900次之後急驟器之凹槽部分開始有 -3 - 1^---------^01·裝---7----訂------一.祕 (諳先閱讀背面之注意事項再填寫本頁) 本紙張尺度谪圯中國國家標續.(ΓΝ5 ) Λ4規柏(210X 297公漦) 4 ^95 2β Α7 Β7 五、發明説明(2 經濟部中夹摞卑局妇工消费合作社印製 裂痕。發生破裂時則需更換。 本_明之目的在提供一種急驟電視機蒸發器,用以將 鋁蒸發塗被在陰極射線管上,該蒸發器之壽命較長,對鋁 之蒸發更有效,潤濕性獲得改進而且可用在傳統蒸發糸統 中。 本發明相藺於一種可將鋁蒸發塗被在陰極射線管上之 急驟電視機蒸發器,該蒸發器有一凹槽,當電流流經急驟 電視機蒸發器時,鋁自該凹權蒸發出去,凹槽之寬度由蒸 發器上緣至蒸發器下緣逐漸變小。 舉例言之,本發明急驟器有一凹槽,該凹槽在急驟器 橫剖面内呈三角形,係由圖1傳統急驟器橫剖面A-A複製 而成。三角彤面對蒸發器方向之兩個面可能係平直狀(圖 2)或凹狀(圖3)或凸狀(画4)。凹槽之最低部位可能設 計為圓鈍狀(圖5)。 若側面圼凸狀,在一極端案例中,可導致凹槽呈半圓 形。 若側面呈凹狀,在一極端案例中,可導致凹槽沿急驟 器縱向呈一狹窄直線型缺口。 依照圖2所示,阿爾伐角最好是25°至60°。 在蒸發器上部面上,該凹槽之寬度最好是2公厘至6公 厘。 凹槽之最低位置最好是在蒸發器低绛上方至少1公厘 及虿多3公厘處。 凹槽之長度最好是30公厘至80公厘。 4 請 閲 ιδ 之 注
I 裝 訂 本紙張尺度適用中國國家標埤((>!S ) Λ4規格(210Χ 公漦) 經M-部中夾標芈局员工消费合作社印?木 五、發明説明(3 ) 於凹槽區急驟器橫剖面本發明之擴大部分之效果係減 低最大$流密度及容許較多次加熱循環。 同由於本發明凹槽彤狀特殊,柱狀鋁顆粒係經精 確地置於該等急驟器凹權縱軸方向,所以無論加熱循環次 數多寡,鋁蒸氣雲霧之傳布更加均勻。 再者,該橫剖面之低緣具有虹吸管作用,導致鋁改進 急驟器之潤濕作用。 本發明之急驟器可由含有TiB2、BN及隨意地A1N之陶 瓷粉末製成,該等陶瓷粉末通常係使用於此類蒸發器。 該等本發明之急驟器亦可在通常蒸發器系統内操作, 無需針對該等系統加Μ修改。 圃1所示係位於一夾持系統中之標準急驟電視機蒸發 器,其中包括俯視圃(Α)、側視圖(Β)及橫剖面圖(C)。 圖2所示係一本發明急驟器1及急驟電視機蒸發器橫 剖面肉具有直邊3三角彤之凹槽2。 圃3所示係一本發明急驟器1及急驟電視機蒸發器横 剖面内具有凹邊3三角彤之凹槽2。 圖4所示係一本發明急驟器1及急驟電視機蒸發器橫 剖面内具有凸邊3三角彤之凹槽2。 圖5所示係一本發明急驟器1,其凹槽之最低部位經 設計為圓鈍狀4。 藉下列實驗例對本發明作進一步之辦明: 將一燒結體製成一急驟器1,其凹槽2具有習知之橫剖 面(圖1C)及另一急驟器1 ,其凹槽2具有本發明之橫剖面 -5 - (請尤閱讀背面之注意事項再填寫本頁) -丨 ^---_-----ΟΊ---;---T-iT------^ 0---------^ 本紙張尺度適用屮國囤家標埤(CNS ) Λ4说栺(210X 297公釐) 4 1952 ΑΊ Β7 五、發明説明(4 (圖2)。為作比較,將該兩具急驟器固定在一夾持条統内 ,Μ便該兩具急驟器可並同操作。在每個案例中鋁之待蒸 發量均毫公克。附有習知凹槽之急驟器可附受820次 加熱循環;附有圖2所示凹權之急驟器可耐受ΙΟδΟ次加熱 循環。 利用更多對急驟器作重複量測所得結果相似。 圖式簡單說明: 圖1:位於一夾持条統中之標準急驟電視機蒸發器。 圖2:本發明急驟器及急驟電視機蒸發器橫剖面肉具有直 邊三角形之凹槽。 圔3:本發明急驟器及急驟電視機蒸發器橫剖面内具有凹 邊三角形之凹槽。 圖4:本發明急驟器及急驟電視機蒸發器橫剖面内具有凸 邊三角形之凹槽。 圔5:凹槽最低部位經設計為圓鈍狀之本發明急驟器。 (請尤閱讀背面之注意事項再填寫本頁) 線 經濟部中央標準局兵Η消费合作.社印?衣 各元件編號說明: 1急驟器(急驟電視機蒸發器) 2凹槽 3凹槽橫剖面三角形側邊 4凹槽最低部位 5螺釘 -6 - 6鋼板 7銅纜 8電源 9石墨片 本紙张尺度適用屮國國家標準(ΓΝ5 ) Λ4規格(2]0X297公釐)

Claims (1)

  1. 4 4 2& A8 B8 C8 DB 无 申請專利範圍 1· 一種用以將鋁蒸發塗被在陰極射線管上之陶瓷型急驟 電視機蒸發器,該蒸發器由含二硼化鈦、氮化硼或隨意地 氮化鋁之陶瓷粉末製成,具有一凹槽,當電流流經急驟電 視機蒸發器時,鋁自凹槽蒸發出去,凹槽之寬度由蒸發器 上緣至蒸發器下緣逐漸變小,於該急驟電視機蒸發器橫剖 面内,凹槽呈一直邊三角形、凸邊三角形或凹邊三角形。 2. 如申請專利範圍第1項之急驟電視機蒸發器,其中凹 槽之最低位置經設計為圓鈍形。 3. 如申請專利範圍第1或2項之急驟電視機蒸發器,其 中於蒸發器上緣處凹槽之寬度為2公厘至6公厘。 4. 如申請專利範圍第1或2項之急驟電視機蒸發器,其 中凹槽之最低位置係在蒸發器低緣上方至少1公厘及至多 3公厘處。 5·如申請專利範圍第1或2項之急驟電視機蒸發器,其 中凹槽之長度為30公厘至80公厘。 6·如申請專利範圍第1或2項之急驟電視機蒸發器,其 中如圖2所示之阿爾伐角為25°至60° 。 — ill·------3 裝--------t 訂---------線J- .C. (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐)
TW087113470A 1997-08-18 1998-08-15 Ceramic flash TV evaporator TW419528B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19735814A DE19735814A1 (de) 1997-08-18 1997-08-18 Keramische Flash-TV-Verdampfer

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TW419528B true TW419528B (en) 2001-01-21

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TW087113470A TW419528B (en) 1997-08-18 1998-08-15 Ceramic flash TV evaporator

Country Status (10)

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US (1) US6081652A (zh)
EP (1) EP0900858B1 (zh)
JP (1) JP3034848B2 (zh)
KR (1) KR100297574B1 (zh)
DE (2) DE19735814A1 (zh)
ID (1) ID20700A (zh)
MX (1) MXPA98006671A (zh)
MY (1) MY115761A (zh)
SG (1) SG70106A1 (zh)
TW (1) TW419528B (zh)

Cited By (1)

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Publication number Priority date Publication date Assignee Title
WO2020147273A1 (zh) * 2019-01-17 2020-07-23 云谷(固安)科技有限公司 一种点蒸发源以及蒸镀设备

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DE19956811A1 (de) * 1999-11-25 2001-06-13 Kempten Elektroschmelz Gmbh Keramischer Flash-TV-Verdampfer
DE10015847C2 (de) * 2000-03-30 2002-03-14 Wacker Chemie Gmbh Vorrichtung zum Bedampfen von Schwarzweiß- oder Farbbildröhren mit Aluminium
EP2019156A1 (en) * 2007-07-27 2009-01-28 Applied Materials, Inc. Shaped crucible and evaporation apparatus having same
US20160208373A1 (en) 2015-01-20 2016-07-21 Kennametal Inc. Imc evaporator boat assembly
US10184168B2 (en) 2015-01-20 2019-01-22 Kennametal Inc. IMC evaporator boat-thermal insulation cartridge assembly
DE102019110950A1 (de) 2019-04-29 2020-10-29 Kennametal Inc. Hartmetallzusammensetzungen und deren Anwendungen
CN110453182B (zh) * 2019-08-22 2024-01-05 南阳清水科技有限公司 一种旋转式多位阻蒸舟
KR102384758B1 (ko) 2020-07-21 2022-04-08 주식회사 엔엔티 염수분무시험기

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020147273A1 (zh) * 2019-01-17 2020-07-23 云谷(固安)科技有限公司 一种点蒸发源以及蒸镀设备

Also Published As

Publication number Publication date
SG70106A1 (en) 2000-01-25
DE19735814A1 (de) 1999-02-25
KR100297574B1 (ko) 2001-10-26
ID20700A (id) 1999-02-18
MXPA98006671A (es) 2005-01-10
DE59802883D1 (de) 2002-03-14
EP0900858B1 (de) 2002-01-23
JPH11131220A (ja) 1999-05-18
US6081652A (en) 2000-06-27
MY115761A (en) 2003-08-30
JP3034848B2 (ja) 2000-04-17
EP0900858A1 (de) 1999-03-10
KR19990023572A (ko) 1999-03-25

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