TW388980B - Semiconductor chip carrier with partially buried conductive pattern and semiconductor device - Google Patents

Semiconductor chip carrier with partially buried conductive pattern and semiconductor device Download PDF

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TW388980B
TW388980B TW087105931A TW87105931A TW388980B TW 388980 B TW388980 B TW 388980B TW 087105931 A TW087105931 A TW 087105931A TW 87105931 A TW87105931 A TW 87105931A TW 388980 B TW388980 B TW 388980B
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semiconductor wafer
adjacent
area
pattern
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TW087105931A
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Naoharu Senba
Nobuaki Takahashi
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Nippon Electric Co
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    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
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    • H01L23/485Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body consisting of layered constructions comprising conductive layers and insulating layers, e.g. planar contacts
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Description

經濟部中央榡率局員工消费合作社印絮 本發明是有關於半導體晶片的封裝技術,且特別是有 關於種半導體晶片載具及使用該載具之半導艘裝置。 第1〜4圖係半導艘晶片載具1的典型例子。習知半導 艎晶片载具1包括一隔離層2a及在隔離層2上表面孔形 成之一導電圖案3。隔離層2a是以合成樹脂所形成,如聚 醯亞氨;而通孔22c則形成於隔離層2a ^上表面2b具有 一 I曰疋給半導體晶片4的設置區域,而其四周則是鄰近區 域。 導電圖案3是以銅形成,且包括導電墊3a、外片 3b(outer strips)、垂直連接3c及網狀(mesh)次圖案3d。導 電墊3a形成於設置區域、且連接半導體晶片4的泵4a , 外片3b自導電墊3a延伸過通孔2c、且與垂直連接3c合 併。垂直連接3c則穿透通孔2c、且露於隔離層2a的低表 面2d。網狀次圖案3d形成於設置區域。而大部分導電圏 案3則以防焊接或玻璃之保護層5覆蓋。 合成樹脂係射入半導體晶片4及保護樹脂5間的空 隙,用以形成合成樹脂層6。導電圖案33係1〇〜15um厚, 而保護層5則5〜15um厚。導電圖案3上的保護層5自隔離 樹脂頂面算起最高30um ’而保護層5及半導體晶片4低表 面的間隙GP1只〇〜15um。為此’當製造商將熔化的合成 樹脂射入半導體晶片載具1及半導體晶片4低表面的間隙 時,溶化的合成樹脂6及填料7幾乎無法流過窄間隙GP1, 而合成樹脂中也就出現如第3、4圖之空間8。空間8係 習知半導體元件破裂損壞的原因。 4 ^紙張尺度適用中國國家標準(〇阳)八4規格(210><297公釐)— _ -- (請先閲讀背面之注$項再填寫本頁) -訂 經濟部中央榡率局貝工消費合作社印掣 A7 B7 五、發明説明(2 ) 若導電圖案3形成於内部,半導體晶片載具丨及半導 體晶片4間可避免換入障礙(obstacle)。不過,半導體晶片 載具卻喪失在積體電路中任意失能某元件的功能。導電圖 案3通常具有一選擇次圖案,製造商可利用雷射光照射或 刮沙(sand blustering)以選擇性的打斷選擇次圖案。若導電 圖案3形成於隔離層2a内部,則到透過選擇性地打斷選 擇次圖案以失能某電路元件便不再容易。 有鑑於此’本發明的主要目的就是提供一種半導體晶 片載具’其可使密封物(sealant)順利地流進半導艘晶片下 的空隙。 本發明的另一個目的就是提供一種半導體裝置,其搭 配於半導艘晶片載具。 為達上述及其他目的,本發明的做法是將導電圖案自 設置區域撤出’除了連接半導體晶片的部分之外。 本發明之一例,半導體晶片載具係用以設置一半導體 晶片’其包括:一隔離層’具有:一指定給該半導體晶片 的設置區域’及’一相鄰該設置區域的鄰近區域;以及, 一導電圖案’具有:導電墊,露於該設置區域以連接該半 導體晶片的導電片,及,一電路次圖案,連接該些導電墊、 並指定給該設置區域中與該些導電墊合併的部分以外。其 特徵在於:另一電路次圖案係形成於該鄰近區域且自該設 置區域撤出。 根據本發明的另一例,半導馥裝置係包括:一半導艘 晶片,其上以複數電路元件形成一電路;以及,一半導雄 5 本紙張尺度適用中國國家標準(CNS > A4規格(210X297公釐) (請先閲讀背面之注意事項再填寫本頁)
經濟部中央標率局員工消費合作社印聚 圖 圖 A7 B7 五、發明説明(3 ) 晶片載具’其包括:一隔離層,具有一指定給該半導體晶 片之設置區域及一相鄰該設置區域之鄰近區域,以及,一 導電圖案,具有導電墊,露於該設置區域以連接該半導體 晶片之導電片’及,一電路次圖案’連接該些導電墊且指 定給該設置區域。其特徵在於:另一次圖案係形成於該鄰 近區域且自該設置區域撤出。 為讓本發明之上述和其他目的、特徵、和優點能更明 顯易僅,下文特舉一較佳實施例,並配合所附圖式,作詳 細說明如下: 圖式說明 第1圖係習知半導體晶片載具以及半導體晶片之平面 佈局圖; 〆 第2圓係第i圖習知半導體晶片載具中,A A連線的 剖面示意圖; 第3圏係習知半導體晶片載具上網狀圖案之平面圖; 第4圓係習知半導體晶片及半導趙晶片載具間的邊界 剖面圖; 第5囷係本發明半導體裝置的平面佈局囷; 第6圖係第5囷半導體裝置中D_D連線的剖面示意 .第7A至7C囷係製造半導體裝置之剖面示意圓; 第8圓係本發明另一半導體裝置的平面佈局囷; 第9圖係第8圓半導體裝置中B B連線的剖面示意 本紙張尺度顧巾®财料(CNS) A4祕(21()><297公# {诗先閲讀背面之注項再填寫本頁}
B7 B7 Λ'發明説明(4 ) 第10圖係本發明又一半導體裝置的平面佈局囷 圖; 圖; 圖; 及 圖 經濟部中央梯率局貝工消費合作社印掣 第11圖係第10 ®半導體裝置中F_F連線的剖面示意 第12圖係本發明再一半導體裝置的平面佈局圖, 第13圖係第12圖半導體裝置中G_G連線的剖面示意 第14圖係本發明更一半導體裝置的平面佈局圖; 第15圖係第14圖半導體裝置中S_H連線的剖面示意 第16圖係本發明更另一半導體裝置的平面佈局囷;以 第17-係第16圖半導體裝置中 差一實施例 請參考& 5及6圖,本發明之半導▲裝置大致上包括 半導逋晶片載具10,設置於該半導體晶片載具上之一半 導體晶片11,及,該半導體晶片載具1〇及該半導體晶片 11間的合成樹脂12。 複數電路元件11a係製造於該半導體晶片〗〗以形成一 電路。 半導體晶片載具11具有一隔離層1〇a(如合成樹脂)及 導電圖案10b。隔離樹脂層l〇a具有一主要表面1〇c,其 畫分為一設置區域l〇d ’ 一内鄰近區域1〇e,及,一外鄰 近區域10f。設置區域I0d指定給半導體晶片u,而半導 私紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) (請先聞讀背面之注項再填寫本頁)
連線的剖面示意 L-. 經濟部中央#隼局貝工消费合作社印« A7 B7 五、發明説明(5 ) 體晶片11則設置於設置區域10d。外鄰近區域i〇f指定給 通孔10g,其開放於主要表面i〇c及一反向表面101ι β長 方形的窗口 10j則形成於内鄰近區域i〇e,而一内表面l〇k 則露於長方形窗口 10j。 導電圖案10b具有導電墊i〇m,垂直内連接1 〇p,及, 兩者間的電路次圖案10q。導電墊1 〇m排列於設置區域 10d,且連接於半導體晶片π下方的泵13。泵13連接半 導體晶片11的電路。積體電路則製造於半導體晶片U上, 經由泵13連接導電塾l〇m。導電墊i〇m垂直地自設置區 域l〇d撤至隔離樹脂層1〇,且到達内表面i〇k位準。另一 導電圖案則不露於設置區域l〇d。 垂直内連接10p經過通孔l〇g,使高低表面露於主要 表面及反向表面10c/10h。電路次圖案l〇q則連接於垂直 連接1 〇p及導電墊10m間,部分露於長方形窗口 1 〇j。合 成樹脂層10d尚未到達長方形窗口 i〇j,而長方形窗口 10j 則不以合成樹脂1 〇d填入。在這個例子中,垂直連接1 〇p 大致做為另一次圖案。 半導體裝置則透過第7 A~7C圖之過程製造。首先,杲 13係對齊導電墊l〇m並以fHp Chip連接技術連接於泵13 上。隨後,將熔化之合成樹脂注入隔離樹脂層l〇a及半導 體晶片11低表面之間隙。因為只有泵13及導電墊i〇d位 於間隙内’因此熔化的合成樹脂可順利流進間隙β而空間 (void)也不會形成於合成樹脂層12。 隨後,製造商依需要選擇性失能積體電路中的電路元 8 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) (請先閲讀背面之注意事項再填寫本頁) 訂 線 A7 ------B7^___ 五、發明説明(6 ) 件。如前述,電路次圖案l〇q部分露於長方形窗口 1〇j, 而長方形窗口 10j則不被合成樹脂填入。製造商選定電路 次囷案之一特定導電部l〇r,其連接電路元件以選擇性地 失能及與垂直連接1 Op關聯❶雷射光14由一適當之雷射光 源(圖中未示)射出至選定的導電部1〇Γ(如第7A圖所示), 並將導電部1 Or打斷成兩個次部1 〇ra、丨〇rb(如第7Β圖所 示)。次部10ra、l〇rb並不彼此連接,藉以使選定電路元 件失能。 隨後’熔化的合成樹脂施於長方形窗口 l〇j,電路次 圖案l〇q的曝露部則密封於合成樹脂片10s,如第7C圖所 示。合成樹脂片10s係避免電路次圖案i〇q因金屬遷移效 應而破壞。 經漓部中央標準局貝工消费合作社印掣 (請先閲讀背面之注^^項再填寫本頁) 由上可知,導電圖案10b係埋入主要表面10c,除導 電塾10m之部分外。熔化的合成樹脂則順利地注入隔離樹 脂層10a及半導體晶片11低表面間的間隙。因此,空間(v〇id) 不會形成於合成樹脂層12内,且合成樹脂層12及半導艘 晶片11不會破壞《電路次圖案l〇q部分露於窗口 ,且 不以合成樹脂層12覆蓋。因此’製造商可透過窗口輕易達 成選定的功能。 第二實施例 請參考第8及9圏,半導體晶片21係設置於半導艘晶 片載具22上’而合成樹脂23則填入半導體晶片21及半導 體晶片載具22的間隙。 半導體晶片載具22包括一隔離樹脂層22a及一導電围 9 ^紙張尺度適用中國國家標準(CNS ) A4^格(2丨0X297公釐) —-
經濟部中央標率局貝工消費合作社印5SI A7 B7 五、發明説明(7 ) 案22b。隔離樹脂層22a具有一主要表面22c及一反向表 面22d,主要表面22c分成設置區域22e,内鄰近區域22f 及外鄰近區域22g。通孔22h則形成於外鄰近區域22g上, 且開於主要表面22c及反相表面22d。 導電圖案22b具有導電墊22j,垂直内連接22k及一電 路次圖案22m。導電墊22j部分埋入隔離樹脂層22a,且 露於設置區域22e。泵21 a則排列於半導體晶片21的低表 面,且分別連接導電墊22j。在設置區域22e中沒有任何 導電圖案片22b。垂直内連接22k則分別通過通孔22h, 且露於主要表面22c及反相表面22d。 電路次圏案22m連接導電塾22j之低部一端及垂直内 連接22k之高部另一端。電路次圖案22m係加倍彎曲以部 分延伸至内鄰近區域22f上。換句話說,電路次圖案22m 具有一延伸至主要表面22c下方的埋入部22η,,一延伸 至内鄰近區域22f上方的曝露部22〇 ’及,埋入部22η及 曝露部22〇之垂直連接22Ρ。在這個例子中,曝露部22〇 係選擇性地打斷以改變半導體晶片21的功能。 第三實施例 請參考第10及11圖,半導體晶片31係設置於半導體 晶片載具32上,而合成樹脂33則填入半導體晶片31及半 導體晶片載具32的間隙。 半導艘晶片載具32包括一隔離樹脂層32a及一導電圖 案32b ^隔離樹脂層32a具有一主要表面32c及一反向表 面32d,主要表面32c分成設置區域32e,内鄰近區域32f __ 10 本紙張尺度適用中賴家揉準(CNS ) A4^ ( 2獻297公羞) ' ---------〇------1T------線 C ·· (讀先閲讀背面之注意事項再填寫本I) 經濟部中央標準局貝工消费合作社印衆 A7 B7 五、發明説明(8 ) 及外鄰近區域32g。通孔32h則形成於外鄰近區域32g上, 且開於主要表面32c及反相表面32d。 導電圖案32b具有導電塾32j ’垂直内連接32k及一電 路次圓案32m。導電墊32j排列於設置區域32e之一窄鄰 近次區域,其定義於半導體晶片3 1 —側邊及與該側邊平行 延伸之一虛線31c ^泵31d則分別連接導電塾;3 2j。在設置 區域32e中沒有任何導電圖案片32b。垂直内連接321{:則 分別通過通孔32h,且露於主要表面32c及反相表面32d。 電路次圖案32m連接導電墊32j之一端及垂直内連接 32k之高部另一端。電路次圖案32m延伸於内鄰近區域22f 上》在這個例子中,電路次圖案32m係選擇性地打斷以改 變半導艘晶片31的功能。 第四實施例 請參考第12及13圖’半導體晶片41係設置於半導體 晶片載具42上’而合成樹脂43則填入半導體晶片41及半 導體晶片載具42的間隙。 半導體晶片載具42包括一隔離樹脂層42a及一導電圓 案42b。隔離樹脂層42a具有一主要表面42c及一反向表 面42d ’主要表面42c分成設置區域42e,内鄰近區域42f 及外鄰近區域42g。通孔42h則形成於外鄰近區域42g上, 且開於主要表面42c及反相表面42d。長方形窗口 421形 成於内鄰近區域42f,而内表面42j則露於長方形窗口 42i。 導電圖案42b具有導電墊42k,垂直内連接42m及一 11 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐〉 (請先閲讀背面之注意事項再填寫本頁)
A7 B7 五、發明説明(9 ) (諳先閲讀背面之注項再填寫本頁) 電路次圖案42η。導電墊42k形成於設置區域42e且集中 在窄次區域中,如導電墊32j。泵41a排列於半導體晶片 41之低表面,且分別連接導電墊42k。在設置區域42e中 沒有任何導電圖案42b的片(piece)。 垂直内連線42m分別透過通孔42h以露於主要表面 42c及反相表面42c。 電路次圖案42η連接導電塾42k之中間部一端及垂直 内連接42m之中間部另一端。電路次圖案42n係加倍弩曲 以部分延伸至内鄰近區域42f上。換句話說,電路次圖案 42n具有一延伸至主要表面42c下方的埋入部42〇,,一 延伸至内鄰近區域42f上方的曝露部42ρ,及,埋入部42p 及曝露部42〇之垂直連接42q ^在這個例子中,曝露部42p 部分露於長方形窗口 42i,且選擇性地打斷以改變半導體 晶片41的功能》 第五實施例 線C. 請參考第14及15圖,半導體晶片51係設置於半導體 晶片載具52上,而合成樹脂53則填入半導體晶片51及半 導體晶片載具52的間隙。 經濟部中央標準局員工消費合作社印裝 半導體晶片載具52包括一隔離樹脂層52a及一導電圖 案52b。隔離樹脂層52a具有一主要表面52c及一反向表 面52d ’主要表面52c分成設置區域52e,内鄰近區域52f 及外鄰近區域52g。通孔52h則形成於外鄰近區域52g上, 且開於主要表面52c及反相表面52d。 導電圖案52b具有導電墊52j,垂直内連接52k及一電 12 本紙張尺度適用中國國家揉準(CNS ) A4規格(210x297公釐) 經满部中央樣率局貝工消费合作社印^ A7 _____B7 五、發明説明(10) 〜 路次圖案52m。導電墊52j部分埋入隔離樹脂層52a,且 露於設置區域52e。泵51a則排列於半導體晶片51的低表 面,且分別連接導電墊52j ^在設置區域52e中沒有任何 導電圖案片52b。垂直内連接52k則分別通過通孔52h, 且露於主要表面52c及反相表面52d。 電路次囷案52m延伸於主要表面52c下方,且連接導 電墊52j之中間部一端及垂直内連接52k之中間部另一 端。因此’電路次圖案52m係埋入主要表面52c,除導電 墊52j之接觸部外。而合成樹脂53則順利流入設置區域 52e及半導體晶片51低表面之間隙。 第六實施例 請參考第16及17圓,半導艘晶片61係設置於半導體 晶片載具62上,而合成樹脂63則填入半導艘晶片及半 導體晶片載具62的間隙。 半導體晶片載具62包括一隔離樹脂層62a及一導電圖 案62b。隔離樹脂層62a具有一主要表面62c及一反向表 面62d,主要表面62c分成設置區域62e ’内鄰近區域62f 及外鄰近區域62g。通孔62h則形成於外鄰近區域62g上, 且開於主要表面62c及反相表面62d。長方形窗口 621形 成於内鄰近區域62f,而内表面62j則露於長方形窗口 62i。 導電圓案62b具有導電墊62k,垂直内連接62m及一 電路次圖案62η。導電墊62k部分埋入隔離樹脂層62a, 且露於設置區域62e。泵61a則排列於半導體晶片61的低 13 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) (請先閲讀背面之注項再填寫本頁) 1 ·
五、發明説明(11) 表面,且分別連接導電塾62k。在設置區域62e中沒有任 何導電圓案片62b,合成樹脂63則順利流入設置區域似 及半導體晶片61低表面之間隙。 垂直内連接62m分別通過通孔62h,且露於主要表面 62c及反相表面62d。 Γ 電路次圖案62η連接導電墊62k之高接觸部一端及垂 直内連接62m之中間部中間端。電路次圖案62n係加倍彎 曲以部分延伸至内鄰近區域62f上,及,再加倍彎曲以延 伸至設置區域62e下方。在這個例子中,電路次圖案62n 露於長於形窗口 621,且選擇性地打斷以改變半導體晶片 61的功能。 訂 綜上所述,導電圖案係自設置區域撤出,除導電墊及 電路次圖案之連接部外。因此,合成樹脂可順利地流入半 導體晶片之間隙而不產生空間(void)。並且,合成樹脂層 中不會產生空間,故合成樹脂層及半導體晶片亦較不會破 壞。 M濟部中央標率局員工消費合作社印犁 雖然本發明已以較佳實施例揭露如上,然其並非用以 限定本發明,任何熟習此項技藝者,在不脫離本發明之精 神和範圍内,當可作些許之更動與潤飾,因此本發明之保 護範圍當視後附之申請專利範圍所界定者為準。 舉例來說’打斷的導電部可致能選定的電路元件,或, 自電路申選擇某元件。窗口可不見得是長方形。 隔離層可以隔離陶層或隔離玻璃層取代》 本紙張尺度適用中國國家標準(CNS ) A4規格(2i〇X297公釐)

Claims (1)

  1. A8 B8 C8 D8 申請專利範圍 1.一種半導體晶片載具(10,22,32,42,52, 62),用以設置一半導體晶片,包括: 一隔離層(10a,22a,32a,42a,52及,62a),具有: 一設置區域(lOd,22e,3$e,42e,52e,62e), 指定給該半導體晶片;以及 一鄰近區域(10e/10f , 22f/22g , 32f/32g , 42f/42g,52f/52g,62f/6^g),相鄰該設置區域; 以及 一導電圖案(l〇b,22b ’ 32b,42b,52b,62b),具 有: 導電墊(10m,22j,32j,42j,52j ’ 62j),露於 該設置區域以連接該半導體晶片的導電片(13、, ζ - 21a,31d,41d,51d,61d);以及 i 一電路次圖案(l〇q,22m,32m,42m,52m, 62n),連接該些導電墊、並指定給該設置區域中與 該些導電墊合併的部分以外; 其特徵在於: 另一電路次圖案(10p,22k,32k,42k,52k,62m) 係形成於該鄰近區域、且自該設置區域撤出。 2:如申請專利範圍第1項所述的半導體晶片載具,其 中更包括一保護層(12,23,33,43,53,63),佔據 該設置區域及該半導體晶片間的空隙。 3.如申請專利範圍第2項所述的半導體晶片載具,其 申,該些導電墊(10m,22j,52j)係部分露於該設置區域 15 本紙張尺度適用中國國家橾準(CNS ) Λ4規格(2丨0 X 297公釐) (請先閲讀背面之注意事項再填寫本頁) Γ 經濟部中央標隼局負工消费合作社印裝 經濟部中央揉率局貝工消费合作社印«. A8 B8 C8 --------D8 ^_ _ 、申請專利範圍 及部分覆於該隔離層内,而該電路次圖案(1〇q,22m, 之m)則連接該些導電塾的低部且延伸於該鄰近區域下 方。 4一如申請專利範圍第3項所述的半導體晶片載具,其 中,該隔離層(10)具有一凹陷(10j)開於該鄰近區域,而該 電路次圏案(l〇q)則在橫跨該凹陷且用以定義譎凹陷底部 的表面上延伸。 5.如申請專利範圍第4項所述的半導體晶片載具其 中,露於該凹陷的該電路次圖案(1〇q)係選擇性地打斷以改 變該半導艘晶片的功能。 6·如申請專利範圍第3項所述的半導體晶片載具,其 中,&電路次圖案(22m)禺先τ埋入部(22η),連接該些導 電塾低部且延伸於該鄰近區域之第一鄰近次區域下方,一 曝露坪(22〇),延伸於該鄰近區域之第二鄰近次區域上方, 及’ 一垂直連接部(22ρ),將該埋入部連接該曝露部。 7.如申請專利範圍第6項所述的半導體晶片載具,其 中’該曝露部(22〇)係選擇性地打斷以改變該半導體晶片的 功能。 8·如申請專利範圍第3項所述的半導體晶片載具,其 中’該電路次圖案(52m)更延伸至該設置區域下方。 9.如申請專利範圍第2項所述的半導體晶片載具,其 中’該些導電墊(32j)係形成於該設置區域之一邊界次區 域,其相鄰該鄰近區域,而該電路次圖案(32m)則延伸至該 鄰近域以連接該些導電墊。 16 本紙張尺度適用中國國家樣率(CNS )八4規格(2丨〇><297公釐> (請先Μ讀背面之注$項再填寫本頁) 訂 绛 A8 B8 C8 D8 經濟部中央樑準局貝工消费合作社印*. 申請專利範圍 i〇.如申請專利範圍第9項所述的半導體晶片載具,其 中’該邊界次區域係以該半導趙晶片(31)之一側邊線(3ib) 及與該側邊線平行之另—虛線(31c)所定義。 11.如申請專利範圍第2項所述的半導體晶片載具其 中,該些導電墊(42k)係形成於該設置區域中一相鄰該鄰近 區域之邊界次區域,而該電路次囷案(42n)則部分埋入該半 鄰近區域之一第二鄰近次區心並料延伸至該鄰近=域 之一第二鄰近次區域上方,其介於該第一鄰近次區域及該 邊界次區域之間,用以連接該些導電墊42k。 1?.如申請專利範圍第Π項所述的半導體晶片載具, 其中,該隔離層(42a)在該第一鄰近次區域中具有一凹陷 (42i) ’且該電路次圖案(42η)延伸於該凹陪。 13. 如申請專利範圍第2項所述的半導體晶片載具其 中,該導電墊(62k)像部分露於該設置區域且部分埋入該隔 離層(62a)’而該電路圖案(62n)則具有一第一埋入部,延伸 於該鄰近區域之一第一鄰近次區域下方,一曝露部,延伸 於該鄭近區域之一第二鄰近次區域上方,其介於該第一鄰 近次區域及該設置區域間且連接該些導電墊上部,一連接 部 ’連接於該第一埋入部及讓曝露部間,及,一第二埋入 部’連接該導電墊低部且延伸於該設置區域下方。14. 一種半導體裝置,包括: 一半導體晶片,其上以複數電路元件形成一電路;以 及 一半導體晶片載具,包括: 請 先 閱 I 面 之 注· I 頁 訂 17 t紙張尺度逋用中國國家標牟(CNS > Λ4規格(210X297公缝 A8 B8 C8 D8 々、申請專利範圍 一隔離層,具有一指定給該半導體晶片之設置區域 及一相鄰該設置區域之鄰近區域;以及 一導電圖案,具有導電墊,露於該設置區域以連揍 該半導體晶片之導電片,及,一電路次圖案,連_接 該些導電墊且指定給該設置區域, 其特徵在於: 另一次圖案係形成於該鄰近區域且自該設置區域撤 出。 (請先閲讀背面之注意事項再填寫本頁) 訂 經濟部中央揉準局貝工消费合作社印製 本紙張尺度適用中國國家標準(CNS ) Λ4規格(210X 297公釐)
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