TW370505B - Optical pellicle, frame, package and method for fabricating same - Google Patents

Optical pellicle, frame, package and method for fabricating same

Info

Publication number
TW370505B
TW370505B TW086116148A TW86116148A TW370505B TW 370505 B TW370505 B TW 370505B TW 086116148 A TW086116148 A TW 086116148A TW 86116148 A TW86116148 A TW 86116148A TW 370505 B TW370505 B TW 370505B
Authority
TW
Taiwan
Prior art keywords
pellicle
package
membrane
piece
optical
Prior art date
Application number
TW086116148A
Other languages
English (en)
Inventor
Ching-Bore Wang
Original Assignee
Micro Lithography Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micro Lithography Inc filed Critical Micro Lithography Inc
Application granted granted Critical
Publication of TW370505B publication Critical patent/TW370505B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H57/00—General details of gearing
    • F16H57/04—Features relating to lubrication or cooling or heating
    • F16H57/0412—Cooling or heating; Control of temperature
    • F16H57/0413—Controlled cooling or heating of lubricant; Temperature control therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H59/00—Control inputs to control units of change-speed-, or reversing-gearings for conveying rotary motion
    • F16H59/68—Inputs being a function of gearing status
    • F16H59/72—Inputs being a function of gearing status dependent on oil characteristics, e.g. temperature, viscosity
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H57/00—General details of gearing
    • F16H57/02—Gearboxes; Mounting gearing therein
    • F16H2057/02039—Gearboxes for particular applications
    • F16H2057/02043—Gearboxes for particular applications for vehicle transmissions
    • F16H2057/02047—Automatic transmissions
TW086116148A 1996-10-30 1997-10-30 Optical pellicle, frame, package and method for fabricating same TW370505B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/741,864 US5820950A (en) 1996-10-30 1996-10-30 Optical pellicle and package

Publications (1)

Publication Number Publication Date
TW370505B true TW370505B (en) 1999-09-21

Family

ID=24982523

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086116148A TW370505B (en) 1996-10-30 1997-10-30 Optical pellicle, frame, package and method for fabricating same

Country Status (7)

Country Link
US (1) US5820950A (zh)
EP (1) EP0840169A1 (zh)
JP (1) JPH10133360A (zh)
KR (2) KR19980068650A (zh)
CA (1) CA2219562A1 (zh)
SG (1) SG53117A1 (zh)
TW (1) TW370505B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI392961B (zh) * 2007-09-05 2013-04-11 Shinetsu Chemical Co 防護薄膜框架

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5938860A (en) 1997-08-28 1999-08-17 Micron Technology, Inc. Reticle cleaning without damaging pellicle
JP2000122266A (ja) * 1998-10-13 2000-04-28 Oki Electric Ind Co Ltd ペリクル
US6394109B1 (en) 1999-04-13 2002-05-28 Applied Materials, Inc. Method and apparatus for removing carbon contamination in a sub-atmospheric charged particle beam lithography system
ATE283503T1 (de) * 1999-09-13 2004-12-15 Asahi Glass Co Ltd Membranabdeckung
US20020144230A1 (en) * 1999-09-22 2002-10-03 Dupont Photomasks, Inc. System and method for correcting design rule violations in a mask layout file
US6782524B2 (en) * 1999-09-22 2004-08-24 Dupont Photomasks, Inc. Photomask and integrated circuit manufactured by automatically correcting design rule violations in a mask layout file
US6736386B1 (en) * 2001-04-10 2004-05-18 Dupont Photomasks, Inc. Covered photomask holder and method of using the same
US20050005256A1 (en) * 2002-06-03 2005-01-06 Dupont Photomasks, Inc. Photomask and integrated circuit manufactured by automatically correcting design rule violations in a mask layout file
US20070037067A1 (en) * 2005-08-15 2007-02-15 Ching-Bore Wang Optical pellicle with a filter and a vent
WO2007093194A1 (en) * 2006-02-17 2007-08-23 Freescale Semiconductor, Inc. Method of patterning a layer using a pellicle
JP5169206B2 (ja) * 2007-12-21 2013-03-27 日本電気株式会社 フォトマスク受納器並びにこれを用いるレジスト検査方法及びその装置
JP5199217B2 (ja) * 2009-11-02 2013-05-15 信越化学工業株式会社 ペリクル
JP6274079B2 (ja) * 2014-11-04 2018-02-07 日本軽金属株式会社 ペリクル用支持枠および製造方法
JP6308676B2 (ja) * 2014-12-18 2018-04-11 信越化学工業株式会社 リソグラフィ用ペリクル容器。
JP7442291B2 (ja) * 2019-10-09 2024-03-04 信越化学工業株式会社 ペリクルとその専用ペリクルケースからなるアセンブリ

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4131363A (en) * 1977-12-05 1978-12-26 International Business Machines Corporation Pellicle cover for projection printing system
US4470508A (en) * 1983-08-19 1984-09-11 Micro Lithography, Inc. Dustfree packaging container and method
US4511038A (en) * 1984-01-30 1985-04-16 Ekc Technology, Inc. Container for masks and pellicles
US4697701A (en) * 1986-05-30 1987-10-06 Inko Industrial Corporation Dust free storage container for a membrane assembly such as a pellicle and its method of use
US4828640A (en) * 1987-05-28 1989-05-09 Mitsui Petrochemical Industries, Ltd. Method of producing films using a peeling jig
JPS63305359A (ja) * 1987-06-05 1988-12-13 Nec Yamagata Ltd 半導体用ペリクル膜保管ケ−ス
US5254375A (en) * 1991-08-26 1993-10-19 Yen Yung Tsai Apparatus for controllably separating framed working area from remainder of the membrane
US5203961A (en) * 1991-09-20 1993-04-20 Yen Yung Tsai Wet die cutter assembly and method
US5422704A (en) * 1992-07-13 1995-06-06 Intel Corporation Pellicle frame
US5305878A (en) * 1993-04-01 1994-04-26 Yen Yung Tsai Packaged optical pellicle
JP3347224B2 (ja) * 1994-09-09 2002-11-20 三菱電機株式会社 ペリクル
JPH08114910A (ja) * 1994-10-17 1996-05-07 Mitsui Petrochem Ind Ltd マスク保護装置の製造法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI392961B (zh) * 2007-09-05 2013-04-11 Shinetsu Chemical Co 防護薄膜框架

Also Published As

Publication number Publication date
CA2219562A1 (en) 1998-04-30
JPH10133360A (ja) 1998-05-22
SG53117A1 (en) 1998-09-28
EP0840169A1 (en) 1998-05-06
US5820950A (en) 1998-10-13
KR19980068650A (ko) 1998-10-26
KR19980033319A (ko) 1998-07-25

Similar Documents

Publication Publication Date Title
TW370505B (en) Optical pellicle, frame, package and method for fabricating same
EP0252673A3 (en) Removable pellicle and method
AU3435595A (en) Syntax parser for a video decompression processor
CA2285441A1 (en) Microplate with transparent base
KR960032698A (ko) 반도체 센서
HRP970406B1 (en) Vented seal with rocking vent cover
AU2366795A (en) Semiconductor fabrication with contact processing for wrap-around flange interface
DE69520091T2 (de) Gettergehäuse für eine optoelektronische Packung
CA2292227A1 (en) Appliance package and method therefor
AU4293497A (en) Watch frame comprising a case and a supporting device
MX9603884A (es) Metodo de preparacion de un paquete que tiene una tapa de peliculas multiples.
PL320992A1 (en) Basket for mounting a loudspeaker with self-aligning elements and auxiliary transformation ring for mounting a loudspeaker
ITRM940747A0 (it) Procedimento e dispositivo per la fabbricazione di un complesso formato da un vetro di sicurezza dotato di una guarnizione poliuretanica
CA2165734A1 (fr) Systeme et procede de fixation de lignes
EP0441552A3 (en) Tyre and rim assembly for motorcycles
GB9414402D0 (en) Cover and frame assembly
GB2298883B (en) Cover and frame assembly
EP0744276A3 (de) Verfahren zur Herstellung eines integriert optischen Deckelbauteils, integriert optisches Deckelbauteil, Verfahren zur Herstellung eines integriert optischen Bauteils mit einem integriert optischen Deckelbauteil und integriert optisches Bauteil mit einem integriert optischen Deckelbauteil
KR19980016019U (ko) 사무자동화기기의 투명창 장착구조
ES1018619U (es) Bocina electromagnetica para senales acusticas, en especial para automoviles.
CA2236505A1 (en) Lamp fabrication
CA2236549A1 (en) Lamp fabricating mechanism
JPH07245794A (ja) 防水マイク
DE29516061U1 (de) Tisch/Tischgestell
KR960029714U (ko) 반도체 펠리클 프레임