TW369569B - Apparatus and method for making metal oxide sputtering targets (barrier powder envelope) - Google Patents

Apparatus and method for making metal oxide sputtering targets (barrier powder envelope)

Info

Publication number
TW369569B
TW369569B TW083111559A TW83111559A TW369569B TW 369569 B TW369569 B TW 369569B TW 083111559 A TW083111559 A TW 083111559A TW 83111559 A TW83111559 A TW 83111559A TW 369569 B TW369569 B TW 369569B
Authority
TW
Taiwan
Prior art keywords
metal oxide
sputtering targets
making metal
oxide sputtering
barrier powder
Prior art date
Application number
TW083111559A
Other languages
English (en)
Inventor
Chi-Fung Lo
John Turn
David P Strauss
Original Assignee
Materials Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Materials Research Corp filed Critical Materials Research Corp
Application granted granted Critical
Publication of TW369569B publication Critical patent/TW369569B/zh

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/453—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zinc, tin, or bismuth oxides or solid solutions thereof with other oxides, e.g. zincates, stannates or bismuthates
    • C04B35/457—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zinc, tin, or bismuth oxides or solid solutions thereof with other oxides, e.g. zincates, stannates or bismuthates based on tin oxides or stannates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64—Burning or sintering processes
    • C04B35/645—Pressure sintering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S264/00—Plastic and nonmetallic article shaping or treating: processes
    • Y10S264/36—Processes of making metal-ceramics

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Compositions Of Oxide Ceramics (AREA)
TW083111559A 1994-08-25 1994-12-12 Apparatus and method for making metal oxide sputtering targets (barrier powder envelope) TW369569B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/295,594 US5656216A (en) 1994-08-25 1994-08-25 Method for making metal oxide sputtering targets (barrier powder envelope)

Publications (1)

Publication Number Publication Date
TW369569B true TW369569B (en) 1999-09-11

Family

ID=23138385

Family Applications (1)

Application Number Title Priority Date Filing Date
TW083111559A TW369569B (en) 1994-08-25 1994-12-12 Apparatus and method for making metal oxide sputtering targets (barrier powder envelope)

Country Status (4)

Country Link
US (1) US5656216A (zh)
AU (1) AU1187195A (zh)
TW (1) TW369569B (zh)
WO (1) WO1996006202A1 (zh)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6183686B1 (en) * 1998-08-04 2001-02-06 Tosoh Smd, Inc. Sputter target assembly having a metal-matrix-composite backing plate and methods of making same
US6348113B1 (en) 1998-11-25 2002-02-19 Cabot Corporation High purity tantalum, products containing the same, and methods of making the same
AT4240U1 (de) * 2000-11-20 2001-04-25 Plansee Ag Verfahren zur herstellung einer verdampfungsquelle
CN106467960B (zh) * 2016-09-30 2019-02-01 东北大学 一种强磁场热压制备金属靶材的装置及方法
CN111151763A (zh) * 2018-11-07 2020-05-15 宁波江丰电子材料股份有限公司 钨钛合金靶材的制备方法

Family Cites Families (29)

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US716343A (en) * 1901-05-08 1902-12-16 Fred M Locke Machine for forming the interior of plastic materials.
US2886849A (en) * 1957-07-03 1959-05-19 Brierley Kenneth Powder-compressing machines
GB1220592A (en) * 1967-06-08 1971-01-27 Atomic Energy Authority Uk Improvements in or relating to powder-compacting dies
GB1415522A (en) * 1972-04-06 1975-11-26 Lucas Industries Ltd Method of manufacturing hot pressed cermaic material based on silicon nitride
GB1415482A (en) * 1973-03-12 1975-11-26 Carborundum Co Hot pressing method for graphite reactive repressing method for graphite reactive refractories
DE2527184C3 (de) * 1975-06-18 1981-07-02 Philips Patentverwaltung Gmbh, 2000 Hamburg Vorrichtung zur Herstellung von Targets für Kathodenzerstäubung
GB1497990A (en) * 1975-11-10 1978-01-12 Tokyo Shibaura Electric Co Composite ceramic articles and a method of manufacturing the same
US4094672A (en) * 1975-12-22 1978-06-13 Crucible Inc. Method and container for hot isostatic compacting
JPS5849166B2 (ja) * 1979-09-14 1983-11-02 株式会社東芝 窒化珪素焼結体のホツトプレス成形方法
SU857075A1 (ru) * 1979-11-06 1981-08-23 Ростовский Ордена Трудового Красного Знамени Государственный Университет Состав засыпки дл спекани сегнетопьезо-электрической керамики
JPS5729407A (en) * 1980-07-29 1982-02-17 Ibigawa Electric Ind Co Ltd Graphitic hot press mold
US4382053A (en) * 1980-08-01 1983-05-03 United Kingdom Atomic Energy Authority Hot pressing of ceramic materials
JPS5879872A (ja) * 1981-11-07 1983-05-13 住友電気工業株式会社 非酸化物セラミツクスのホツトプレス方法
WO1984001369A1 (en) * 1982-09-30 1984-04-12 Ford Werke Ag Method of hot pressing reactive materials
DE3300525A1 (de) * 1983-01-10 1984-07-12 Merck Patent Gmbh, 6100 Darmstadt Targets fuer die kathodenzerstaeubung
US4539175A (en) * 1983-09-26 1985-09-03 Metal Alloys Inc. Method of object consolidation employing graphite particulate
DE68924095T2 (de) * 1988-05-16 1996-04-04 Tosoh Corp Verfahren zur Herstellung eines Sputtertargets zur Erzeugung einer elektrisch leitenden, durchsichtigen Schicht.
DE3912711A1 (de) * 1988-05-31 1989-12-14 Norton Co Verfahren und vorrichtung zum verringern schaedlicher einfluesse auf bauteile in heisser umgebung
JPH0243356A (ja) * 1988-08-04 1990-02-13 Tosoh Corp 透明導電膜用スパッタリングターゲットの製造方法
JPH03199373A (ja) * 1989-12-28 1991-08-30 Nippon Mining Co Ltd Ｉｔｏ透明導電膜形成用スパッタリングターゲツト
JPH03207858A (ja) * 1990-01-08 1991-09-11 Nippon Mining Co Ltd Ｉｔｏスパッタリングターゲットの製造方法
JP3184977B2 (ja) * 1990-07-12 2001-07-09 同和鉱業株式会社 Ｉｔｏスパッタリングターゲット材の製造方法
JPH04154654A (ja) * 1990-10-19 1992-05-27 Sumitomo Metal Mining Co Ltd Ｉｔｏ焼結体の製造方法
JPH04293769A (ja) * 1991-03-20 1992-10-19 Tosoh Corp 低温成膜用ｉｔｏスパッタリングタ−ゲット
JPH04341504A (ja) * 1991-05-20 1992-11-27 Seiko Epson Corp 焼結体
US5145811A (en) * 1991-07-10 1992-09-08 The Carborundum Company Inorganic ceramic papers
DE4124471C1 (en) * 1991-07-24 1992-06-11 Degussa Ag, 6000 Frankfurt, De Target for cathodic sputtering - produced from partially reduced mixtures of indium oxide and tin oxide by hot pressing in inert protective gas
US5433901A (en) * 1993-02-11 1995-07-18 Vesuvius Crucible Company Method of manufacturing an ITO sintered body
US5382405A (en) * 1993-09-03 1995-01-17 Inland Steel Company Method of manufacturing a shaped article from a powdered precursor

Also Published As

Publication number Publication date
US5656216A (en) 1997-08-12
AU1187195A (en) 1996-03-14
WO1996006202A1 (en) 1996-02-29

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