TW366518B - Carrier system of semiconductor manufacturing line and method for determining carrier paths thereby - Google Patents
Carrier system of semiconductor manufacturing line and method for determining carrier paths therebyInfo
- Publication number
- TW366518B TW366518B TW086104498A TW86104498A TW366518B TW 366518 B TW366518 B TW 366518B TW 086104498 A TW086104498 A TW 086104498A TW 86104498 A TW86104498 A TW 86104498A TW 366518 B TW366518 B TW 366518B
- Authority
- TW
- Taiwan
- Prior art keywords
- carrier
- path
- layer
- paths
- semiconductor manufacturing
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 4
- 239000004065 semiconductor Substances 0.000 title abstract 4
- 238000000034 method Methods 0.000 title abstract 2
- 239000010410 layer Substances 0.000 abstract 7
- 239000011229 interlayer Substances 0.000 abstract 4
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/4189—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by the transport system
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Quality & Reliability (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960040443A KR100252208B1 (ko) | 1996-09-17 | 1996-09-17 | 반도체 제조라인의 반송시스템 및 반송경로 설정 방법 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW366518B true TW366518B (en) | 1999-08-11 |
Family
ID=19474112
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW086104498A TW366518B (en) | 1996-09-17 | 1997-04-09 | Carrier system of semiconductor manufacturing line and method for determining carrier paths thereby |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2828436B2 (zh) |
KR (1) | KR100252208B1 (zh) |
TW (1) | TW366518B (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5458633B2 (ja) * | 2008-06-20 | 2014-04-02 | 株式会社Ihi | 処理設備及び搬送制御方法 |
CN113023357B (zh) * | 2021-04-14 | 2022-06-07 | 湖南三安半导体有限责任公司 | 黏贴装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5337622B2 (zh) * | 1973-12-05 | 1978-10-11 | ||
JPS6084819A (ja) * | 1983-10-14 | 1985-05-14 | Mitsubishi Electric Corp | 半導体製造装置 |
JPS6362345A (ja) * | 1986-09-03 | 1988-03-18 | Fujitsu Ltd | ウエ−ハ振り分け搬送機構 |
JPH01257345A (ja) * | 1988-04-07 | 1989-10-13 | Oki Electric Ind Co Ltd | 半導体ウエハの自動搬送装置 |
JP3332967B2 (ja) * | 1992-10-29 | 2002-10-07 | 沖電気工業株式会社 | 自動搬送システム及び自動搬送方法 |
-
1996
- 1996-09-17 KR KR1019960040443A patent/KR100252208B1/ko not_active IP Right Cessation
-
1997
- 1997-04-04 JP JP9086696A patent/JP2828436B2/ja not_active Expired - Fee Related
- 1997-04-09 TW TW086104498A patent/TW366518B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR100252208B1 (ko) | 2000-04-15 |
JPH10107123A (ja) | 1998-04-24 |
KR19980021564A (ko) | 1998-06-25 |
JP2828436B2 (ja) | 1998-11-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |