TW349897B - Operational robot - Google Patents

Operational robot

Info

Publication number
TW349897B
TW349897B TW086100930A TW86100930A TW349897B TW 349897 B TW349897 B TW 349897B TW 086100930 A TW086100930 A TW 086100930A TW 86100930 A TW86100930 A TW 86100930A TW 349897 B TW349897 B TW 349897B
Authority
TW
Taiwan
Prior art keywords
hubs
axial
arm
carrier
connection rod
Prior art date
Application number
TW086100930A
Other languages
English (en)
Chinese (zh)
Inventor
Tatsunori Suwa
Kazuhiro Hatake
Original Assignee
Komatsu Mfg Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP8606296A external-priority patent/JPH09267280A/ja
Priority claimed from JP7603896A external-priority patent/JPH09262783A/ja
Application filed by Komatsu Mfg Co Ltd filed Critical Komatsu Mfg Co Ltd
Application granted granted Critical
Publication of TW349897B publication Critical patent/TW349897B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/06—Programme-controlled manipulators characterised by multi-articulated arms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • B25J9/107—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms of the froglegs type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm
    • Y10T74/20317—Robotic arm including electric motor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm
    • Y10T74/20329—Joint between elements

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW086100930A 1996-02-02 1997-01-28 Operational robot TW349897B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP3913696 1996-02-02
JP8606296A JPH09267280A (ja) 1996-02-02 1996-03-15 ハンドリング用ロボット
JP7603896A JPH09262783A (ja) 1996-03-29 1996-03-29 ハンドリング用ロボット

Publications (1)

Publication Number Publication Date
TW349897B true TW349897B (en) 1999-01-11

Family

ID=27290049

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086100930A TW349897B (en) 1996-02-02 1997-01-28 Operational robot

Country Status (5)

Country Link
US (2) US6062099A (fr)
EP (1) EP0913237A1 (fr)
KR (1) KR19990071986A (fr)
TW (1) TW349897B (fr)
WO (1) WO1997027977A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108858275A (zh) * 2018-07-05 2018-11-23 哈尔滨工业大学（深圳） 一种基于凸轮机构的变刚度关节

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JP4178534B2 (ja) * 1997-12-24 2008-11-12 株式会社安川電機 基板搬送用ロボット
GB9805372D0 (en) * 1998-03-14 1998-05-06 Renishaw Plc Indexing mechanism
US6582175B2 (en) * 2000-04-14 2003-06-24 Applied Materials, Inc. Robot for handling semiconductor wafers
KR100730661B1 (ko) * 2000-07-10 2007-06-21 티에스 코포레이션 트랙션 구동 감속기, 트랙션 구동 감속기를 이용하는 운반장치, 및 운반 장치의 이축 출력 엔코더 기구
US6601468B2 (en) * 2000-10-24 2003-08-05 Innovative Robotic Solutions Drive system for multiple axis robot arm
US20040203623A1 (en) * 2002-05-03 2004-10-14 Wu Frank Chih-Hsiang Scheme to retransmit radio resource control messages during a radio link control reset in a wireless communication system
US7959395B2 (en) 2002-07-22 2011-06-14 Brooks Automation, Inc. Substrate processing apparatus
US8960099B2 (en) 2002-07-22 2015-02-24 Brooks Automation, Inc Substrate processing apparatus
US7988398B2 (en) 2002-07-22 2011-08-02 Brooks Automation, Inc. Linear substrate transport apparatus
US20070183871A1 (en) * 2002-07-22 2007-08-09 Christopher Hofmeister Substrate processing apparatus
EP1610927A2 (fr) * 2002-12-13 2006-01-04 Recif Dispositif permettant la prehension d'une plaque de semi-conducteur a travers une ouverture de transfert, utilisant l'obturateur de l'ouverture
US8109172B2 (en) * 2003-09-05 2012-02-07 Fabworx Solutions, Inc. Wrist assembly for robotic arm
US7458763B2 (en) 2003-11-10 2008-12-02 Blueshift Technologies, Inc. Mid-entry load lock for semiconductor handling system
US20070269297A1 (en) 2003-11-10 2007-11-22 Meulen Peter V D Semiconductor wafer handling and transport
EP1684951B1 (fr) * 2003-11-10 2014-05-07 Brooks Automation, Inc. Systeme de manipulation de pieces a usiner dans un systeme de manipulation semi-conducteur sous vide
US10086511B2 (en) 2003-11-10 2018-10-02 Brooks Automation, Inc. Semiconductor manufacturing systems
JP2006179613A (ja) * 2004-12-21 2006-07-06 Rigaku Corp 半導体ウエハ縦型熱処理装置用磁性流体シールユニット
US8398355B2 (en) 2006-05-26 2013-03-19 Brooks Automation, Inc. Linearly distributed semiconductor workpiece processing tool
US8602706B2 (en) * 2009-08-17 2013-12-10 Brooks Automation, Inc. Substrate processing apparatus
USD639323S1 (en) * 2010-05-06 2011-06-07 Ulvac, Inc. Vacuum transfer robot
USD625748S1 (en) * 2010-05-06 2010-10-19 Ulvac, Inc. Vacuum transfer robot
USRE44567E1 (en) * 2009-11-17 2013-11-05 Ulvac, Inc. Vacuum transfer robot
USRE43781E1 (en) * 2009-11-17 2012-11-06 Ulvac, Inc. Vacuum transfer robot
CN103237634B (zh) 2010-10-08 2016-12-14 布鲁克斯自动化公司 同轴驱动的真空机器人
US9221180B2 (en) 2011-12-23 2015-12-29 Fabworx Solutions, Inc. Extended wrist assembly for robotic arm
DE102014009892B4 (de) * 2014-07-04 2018-05-30 gomtec GmbH Antriebseinheit mit magnetischer Schnittstelle
JP6581831B2 (ja) * 2015-07-28 2019-09-25 東京エレクトロン株式会社 保持部の姿勢維持機構
US10453725B2 (en) 2017-09-19 2019-10-22 Applied Materials, Inc. Dual-blade robot including vertically offset horizontally overlapping frog-leg linkages and systems and methods including same
US10943805B2 (en) 2018-05-18 2021-03-09 Applied Materials, Inc. Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
CN109176595B (zh) * 2018-10-19 2023-11-24 杭州宇树科技有限公司 机器人双关节单元及应用其的足式机器人和协作机械臂

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57173487A (en) * 1981-04-13 1982-10-25 Yaskawa Denki Seisakusho Kk Link robot
JPS62277228A (ja) * 1986-05-21 1987-12-02 Hitachi Ltd 部品組付ロボツト
JPS6474081A (en) * 1987-09-11 1989-03-20 Hitachi Ltd Magnetic levitation rotary machine
JPH01120336A (ja) * 1987-11-04 1989-05-12 Daicel Huels Ltd 複合金属板
JPH0825151B2 (ja) * 1988-09-16 1996-03-13 東京応化工業株式会社 ハンドリングユニット
EP0858867A3 (fr) * 1989-10-20 1999-03-17 Applied Materials, Inc. Appareil robot
US5447409A (en) * 1989-10-20 1995-09-05 Applied Materials, Inc. Robot assembly
JP3013264B2 (ja) * 1991-02-26 2000-02-28 光洋精工株式会社 磁気浮上アクチュエータ
US5771748A (en) * 1996-01-26 1998-06-30 Genmark Automation Highly stable Z axis drive
US5765983A (en) * 1996-05-30 1998-06-16 Brooks Automation, Inc. Robot handling apparatus
US5894760A (en) * 1997-06-12 1999-04-20 Brooks Automation, Inc. Substrate transport drive system
JPH1138909A (ja) * 1997-07-18 1999-02-12 Toa Resin Kk 看 板

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108858275A (zh) * 2018-07-05 2018-11-23 哈尔滨工业大学（深圳） 一种基于凸轮机构的变刚度关节

Also Published As

Publication number Publication date
WO1997027977A1 (fr) 1997-08-07
US6155131A (en) 2000-12-05
US6062099A (en) 2000-05-16
EP0913237A1 (fr) 1999-05-06
KR19990071986A (ko) 1999-09-27

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