USRE43781E1 - Vacuum transfer robot - Google Patents

Vacuum transfer robot Download PDF

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Publication number
USRE43781E1
USRE43781E1 US29/409,392 US201129409392F USRE43781E US RE43781 E1 USRE43781 E1 US RE43781E1 US 201129409392 F US201129409392 F US 201129409392F US RE43781 E USRE43781 E US RE43781E
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US
United States
Prior art keywords
transfer robot
vacuum transfer
vacuum
elevational
robot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/409,392
Inventor
Takahiro Yoshino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2009026910 priority Critical
Priority to JP2009-026910 priority
Priority to US29/361,139 priority patent/USD639323S1/en
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to US29/409,392 priority patent/USRE43781E1/en
Application granted granted Critical
Publication of USRE43781E1 publication Critical patent/USRE43781E1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Description

FIG. 1 is a front, top and right side perspective view of a vacuum transfer robot showing our new design with all arms in a folded state;
FIG. 2 is a front elevational view thereof shown in FIG. 1;
FIG. 3 is a rear elevational view thereof shown in FIG. 1;
FIG. 4 is a top plan view thereof shown in FIG. 1;
FIG. 5 is a bottom plan view thereof shown in FIG. 1;
FIG. 6 is a right side elevational view thereof shown in FIG. 1;
FIG. 7 is a left side elevational view thereof shown in FIG. 1;
FIG. 8 is a front, top and right side perspective view of the vacuum transfer robot with the upper arms in an extended state;
FIG. 9 is a front elevational view thereof shown in FIG. 8;
FIG. 10 is a rear elevational view thereof shown in FIG. 8;
FIG. 11 is a top plan view thereof shown in FIG. 8;
FIG. 12 is a bottom plan view thereof shown in FIG. 8;
FIG. 13 is a right side elevational view thereof shown in FIG. 8; and,
FIG. 14 is a left side elevational view thereof shown in FIG. 8.

Claims (1)

  1. The ornamental design for a vacuum transfer robot, as shown and described.
US29/409,392 2009-11-17 2011-12-22 Vacuum transfer robot Active USRE43781E1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2009026910 2009-11-17
JP2009-026910 2009-11-17
US29/361,139 USD639323S1 (en) 2010-05-06 2010-05-06 Vacuum transfer robot
US29/409,392 USRE43781E1 (en) 2009-11-17 2011-12-22 Vacuum transfer robot

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/409,392 USRE43781E1 (en) 2009-11-17 2011-12-22 Vacuum transfer robot

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US29/361,139 Reissue USD639323S1 (en) 2010-05-06 2010-05-06 Vacuum transfer robot

Publications (1)

Publication Number Publication Date
USRE43781E1 true USRE43781E1 (en) 2012-11-06

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ID=47080030

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/409,392 Active USRE43781E1 (en) 2009-11-17 2011-12-22 Vacuum transfer robot

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US (1) USRE43781E1 (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD892884S1 (en) * 2018-03-29 2020-08-11 Daihen Corporation Power receiving unit of an industrial robot arm
USD892882S1 (en) * 2018-03-29 2020-08-11 Daihen Corporation Power transmission unit of an industrial robot arm
USD892881S1 (en) * 2018-03-29 2020-08-11 Daihen Corporation Power transmission unit and power receiving unit of an industrial robot arm
USD892880S1 (en) * 2018-03-29 2020-08-11 Daihen Corporation Power transmission unit and power receiving unit of an industrial robot arm
USD892883S1 (en) * 2018-03-29 2020-08-11 Daihen Corporation Power transmission unit of an industrial robot arm
USD902275S1 (en) * 2019-03-27 2020-11-17 Daihen Corporation Industrial robot
USD902273S1 (en) * 2019-03-27 2020-11-17 Daihen Corporation Industrial robot
USD902276S1 (en) * 2019-03-27 2020-11-17 Daihen Corporation Industrial robot
USD902274S1 (en) * 2019-03-27 2020-11-17 Daihen Corporation Industrial robot

Citations (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD323332S (en) * 1988-07-25 1992-01-21 Tel Sagami Limited Handling arm for boats for thermal treatment of semiconductor wafers
US6102649A (en) * 1997-12-26 2000-08-15 Daihen Corporation Two-armed transfer robot
US6109860A (en) * 1997-12-26 2000-08-29 Daihen Corporation Two-armed transfer robot
US6155131A (en) * 1996-02-02 2000-12-05 Komatsu Ltd. Handling robot
US6190114B1 (en) * 1998-05-29 2001-02-20 Daihen Corporation Transfer robot
US6364599B1 (en) * 1996-03-22 2002-04-02 Komatsu Ltd. Robot for handling
USRE37731E1 (en) * 1997-07-16 2002-06-11 Daihen Corporation Two-armed transfer robot
US20020114690A1 (en) * 2001-02-17 2002-08-22 Tooru Ishigame Transfer system
US20030012631A1 (en) * 2001-07-12 2003-01-16 Pencis Christopher H. High temperature substrate transfer robot
US20030014155A1 (en) * 2001-07-12 2003-01-16 Applied Material, Inc. High temperature substrate transfer robot
US20050079043A1 (en) * 2003-07-11 2005-04-14 Daihen Corporation Two-arm transfer robot
US20050118010A1 (en) * 2003-11-28 2005-06-02 Daihen Corporation Transfer robot
US20050217053A1 (en) * 2003-12-19 2005-10-06 Samsung Electronics Co., Ltd. Robot arm mechanism
US20070004058A1 (en) * 2005-07-04 2007-01-04 Heok-Jae Lee Semiconductor manufacturing device with transfer robot
US20070183868A1 (en) * 2006-02-06 2007-08-09 Son Suck-Woon Wafer transfer robot and semiconductor device manufacturing equipment comprising the same
USD552138S1 (en) * 2005-06-29 2007-10-02 Tokyo Electron Limited Arm transferring substrate to be processed
US7306423B2 (en) * 2003-04-16 2007-12-11 Daihen Corporation Linear moving mechanism and transfer robot using the same
US20080023293A1 (en) * 2006-07-28 2008-01-31 Daihen Corporation Linear transfer mechanism and transfer robot using the same
US20080118338A1 (en) * 2006-11-22 2008-05-22 Foxsemicon Integrated Technology, Inc. Transfer robot
US20090093906A1 (en) * 2007-10-04 2009-04-09 Asm Japan K.K. Position sensor system for substrate transfer robot
US20090142163A1 (en) * 2007-11-30 2009-06-04 Novellus System, Inc. Wafer position correction with a dual, side-by-side wafer transfer robot
US20100101357A1 (en) * 2007-03-19 2010-04-29 Sota Aoki Transfer robot
US20100161124A1 (en) * 2008-12-18 2010-06-24 Kabushiki Kaisha Yaskawa Denki Substrate transfer robot, substrate transfer apparatus including the same, and semiconductor manufacturing apparatus including the same
USD625748S1 (en) * 2010-05-06 2010-10-19 Ulvac, Inc. Vacuum transfer robot

Patent Citations (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD323332S (en) * 1988-07-25 1992-01-21 Tel Sagami Limited Handling arm for boats for thermal treatment of semiconductor wafers
US6155131A (en) * 1996-02-02 2000-12-05 Komatsu Ltd. Handling robot
US6364599B1 (en) * 1996-03-22 2002-04-02 Komatsu Ltd. Robot for handling
USRE37731E1 (en) * 1997-07-16 2002-06-11 Daihen Corporation Two-armed transfer robot
US6102649A (en) * 1997-12-26 2000-08-15 Daihen Corporation Two-armed transfer robot
US6109860A (en) * 1997-12-26 2000-08-29 Daihen Corporation Two-armed transfer robot
US6190114B1 (en) * 1998-05-29 2001-02-20 Daihen Corporation Transfer robot
US20020114690A1 (en) * 2001-02-17 2002-08-22 Tooru Ishigame Transfer system
US20030012631A1 (en) * 2001-07-12 2003-01-16 Pencis Christopher H. High temperature substrate transfer robot
US20030014155A1 (en) * 2001-07-12 2003-01-16 Applied Material, Inc. High temperature substrate transfer robot
US7306423B2 (en) * 2003-04-16 2007-12-11 Daihen Corporation Linear moving mechanism and transfer robot using the same
US20050079043A1 (en) * 2003-07-11 2005-04-14 Daihen Corporation Two-arm transfer robot
US7056080B2 (en) * 2003-07-11 2006-06-06 Daihen Corporation Two-arm transfer robot
US7114907B2 (en) * 2003-11-28 2006-10-03 Daihen Corporation Transfer robot
US20050118010A1 (en) * 2003-11-28 2005-06-02 Daihen Corporation Transfer robot
US20050217053A1 (en) * 2003-12-19 2005-10-06 Samsung Electronics Co., Ltd. Robot arm mechanism
USD552138S1 (en) * 2005-06-29 2007-10-02 Tokyo Electron Limited Arm transferring substrate to be processed
US20070004058A1 (en) * 2005-07-04 2007-01-04 Heok-Jae Lee Semiconductor manufacturing device with transfer robot
US20070183868A1 (en) * 2006-02-06 2007-08-09 Son Suck-Woon Wafer transfer robot and semiconductor device manufacturing equipment comprising the same
US20080023293A1 (en) * 2006-07-28 2008-01-31 Daihen Corporation Linear transfer mechanism and transfer robot using the same
US20080118338A1 (en) * 2006-11-22 2008-05-22 Foxsemicon Integrated Technology, Inc. Transfer robot
US20100101357A1 (en) * 2007-03-19 2010-04-29 Sota Aoki Transfer robot
US20090093906A1 (en) * 2007-10-04 2009-04-09 Asm Japan K.K. Position sensor system for substrate transfer robot
US20090142163A1 (en) * 2007-11-30 2009-06-04 Novellus System, Inc. Wafer position correction with a dual, side-by-side wafer transfer robot
US20100161124A1 (en) * 2008-12-18 2010-06-24 Kabushiki Kaisha Yaskawa Denki Substrate transfer robot, substrate transfer apparatus including the same, and semiconductor manufacturing apparatus including the same
USD625748S1 (en) * 2010-05-06 2010-10-19 Ulvac, Inc. Vacuum transfer robot

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD892884S1 (en) * 2018-03-29 2020-08-11 Daihen Corporation Power receiving unit of an industrial robot arm
USD892882S1 (en) * 2018-03-29 2020-08-11 Daihen Corporation Power transmission unit of an industrial robot arm
USD892881S1 (en) * 2018-03-29 2020-08-11 Daihen Corporation Power transmission unit and power receiving unit of an industrial robot arm
USD892880S1 (en) * 2018-03-29 2020-08-11 Daihen Corporation Power transmission unit and power receiving unit of an industrial robot arm
USD892883S1 (en) * 2018-03-29 2020-08-11 Daihen Corporation Power transmission unit of an industrial robot arm
USD902275S1 (en) * 2019-03-27 2020-11-17 Daihen Corporation Industrial robot
USD902273S1 (en) * 2019-03-27 2020-11-17 Daihen Corporation Industrial robot
USD902276S1 (en) * 2019-03-27 2020-11-17 Daihen Corporation Industrial robot
USD902274S1 (en) * 2019-03-27 2020-11-17 Daihen Corporation Industrial robot

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