USD323332S - Handling arm for boats for thermal treatment of semiconductor wafers - Google Patents
Handling arm for boats for thermal treatment of semiconductor wafers Download PDFInfo
- Publication number
- USD323332S USD323332S US07/301,992 US30199289F USD323332S US D323332 S USD323332 S US D323332S US 30199289 F US30199289 F US 30199289F US D323332 S USD323332 S US D323332S
- Authority
- US
- United States
- Prior art keywords
- boats
- thermal treatment
- semiconductor wafers
- handling arm
- handling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Description
FIG. 1 is a top, front and right side perspective view of a handling arm for boats for thermal treatment of semiconductor wafers showing our new design;
FIG. 2 is a front elevational view;
FIG. 3 is a left side elevational view;
FIG. 4 is a top plan view;
FIG. 5 is a bottom plan view; and
FIG. 6 is a rear elevational view thereof.
Claims (1)
- The ornamental design for a handling arm for boats for thermal treatment of semiconductor wafers, as shown and described.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63-29834 | 1988-07-25 | ||
JP2983488 | 1988-07-25 |
Publications (1)
Publication Number | Publication Date |
---|---|
USD323332S true USD323332S (en) | 1992-01-21 |
Family
ID=70474134
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US07/301,992 Expired - Lifetime USD323332S (en) | 1988-07-25 | 1989-01-25 | Handling arm for boats for thermal treatment of semiconductor wafers |
Country Status (1)
Country | Link |
---|---|
US (1) | USD323332S (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD625748S1 (en) * | 2010-05-06 | 2010-10-19 | Ulvac, Inc. | Vacuum transfer robot |
USD639323S1 (en) * | 2010-05-06 | 2011-06-07 | Ulvac, Inc. | Vacuum transfer robot |
USRE43781E1 (en) * | 2009-11-17 | 2012-11-06 | Ulvac, Inc. | Vacuum transfer robot |
USRE44567E1 (en) * | 2009-11-17 | 2013-11-05 | Ulvac, Inc. | Vacuum transfer robot |
USD741144S1 (en) * | 2012-11-20 | 2015-10-20 | Peter M. McCullough | Swing arm |
-
1989
- 1989-01-25 US US07/301,992 patent/USD323332S/en not_active Expired - Lifetime
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USRE43781E1 (en) * | 2009-11-17 | 2012-11-06 | Ulvac, Inc. | Vacuum transfer robot |
USRE44567E1 (en) * | 2009-11-17 | 2013-11-05 | Ulvac, Inc. | Vacuum transfer robot |
USD625748S1 (en) * | 2010-05-06 | 2010-10-19 | Ulvac, Inc. | Vacuum transfer robot |
USD639323S1 (en) * | 2010-05-06 | 2011-06-07 | Ulvac, Inc. | Vacuum transfer robot |
USD741144S1 (en) * | 2012-11-20 | 2015-10-20 | Peter M. McCullough | Swing arm |
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